CN209110814U - Subject grinding device - Google Patents
Subject grinding device Download PDFInfo
- Publication number
- CN209110814U CN209110814U CN201821194832.1U CN201821194832U CN209110814U CN 209110814 U CN209110814 U CN 209110814U CN 201821194832 U CN201821194832 U CN 201821194832U CN 209110814 U CN209110814 U CN 209110814U
- Authority
- CN
- China
- Prior art keywords
- subject
- magnetic field
- permanent magnet
- magneto
- lapping liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model discloses a kind of subject grinding device.The subject grinding device includes: workbench, can move and can be used in configuring subject；Grinding unit, it is rotatably disposed on workbench, with shell, be set to the shell in and using at least one permanent magnet to the magneto-rheological fluid application magnetic field being supplied in subject to arrange the magnetic field generator of magneto-rheological fluid and magnetic field limiting unit that is adjacent with magnetic field generator and being limited in the magnetic field of permanent magnet using electromagnet inside shell；Magneto-rheological fluid supply department can supply magneto-rheological fluid in subject；And lapping liquid supply pipe portion, to supply grinding lapping liquid between magneto-rheological fluid and subject.It therefore, can be uniform by the subject integral grinding of large area.
Description
Technical field
The embodiments of the present invention are related to subject grinding device.More specifically, magnetic current can be utilized by being related to one kind
The edge of fluid grinding object body or the subject grinding device on surface.
Background technique
Magneto-rheological fluid is sensitive materials when being applied magnetic field with several milliseconds of reaction speed.The magneto-rheological fluid
Non magnetic transmitting fluid (carrier fluid) by carbonyl iron (carbonyl iron) and for dispersing carbonyl iron powder is mixed
It closes.
The magneto-rheological fluid is applied to multiple fields, particularly for damper (damper), grinding (polishing)
Equal fields.
For existing mechanical lapping equipment and grinding method, abrasive sheet is with relatively high pressure pressurization subject
The subject is ground while surface.Accordingly, it is possible to which there is scratch or subject in the surface for the subject occur
The case where being destroyed by residual stress.
In order to solve these problems, revolve the component for taking turns form at a predetermined rate using the grinding device of magneto-rheological fluid
Turn, and coating magneto-rheological fluid to rotate simultaneously above it.Here, being ground to supply between subject and magneto-rheological fluid
Grinding fluid (slurry).Therefore, shearing force occurs as the lapping liquid contacts the subject surface, grinding work is executed with this
Journey.
But the existing grinding method using magneto-rheological fluid may be subjected to the limitation of object shape, will have big face
Long-pending subject integral grinding uniformly needs a large amount of engineering time.Also, it in the case where forming magnetic field using electromagnet, is used for
The composition of drive electromagnet is complicated, has the problem of fever aspect.
Utility model content
Technical problem
The embodiments of the present invention provide one kind can be by the uniform object of subject integral grinding with large area
Body grinding device.
The embodiments of the present invention provide one kind can be by the uniform object of subject integral grinding with large area
Body grinding method.
Technical solution
Subject grinding device for reaching one embodiment of the utility model of above-mentioned purpose includes: workbench,
It can move and can be used in configuring subject；Grinding unit is rotatably disposed on the workbench, has shell
Portion is set in the shell and is applied using at least one permanent magnet to the magneto-rheological fluid being supplied in the subject
To arrange the magnetic field generator of the magneto-rheological fluid and with the magnetic field generator, adjacent and utilization electromagnet will be described in magnetic field
The magnetic field of permanent magnet is limited in the magnetic field limiting unit of the inside of the shell；Magneto-rheological fluid supply department, can be to described
The magneto-rheological fluid is supplied in subject；And lapping liquid supply pipe portion, to the magneto-rheological fluid and the subject it
Between supply grinding lapping liquid.
One embodiment according to the present utility model, the permanent magnet may include the multiple permanent magnetism arranged to horizontal direction
Iron.
One embodiment according to the present utility model, the grinding unit can also include: yoke portion, support the permanent magnetism
Iron and the electromagnet；And magnetic field channel portion, play the function of the magnetic field channel between the permanent magnet and the electromagnet
Energy.
Here, the permanent magnet has multiple, multiple permanent magnets are arranged in be had across to the extended yoke portion of vertical direction
There is identical polar.
Also, multiple permanent magnets are respectively provided with shapes of annular rings, can be arranged in concentric circles form.
One embodiment according to the present utility model, the permanent magnet are vertically aligned into the opposed polarity alternating of permanent magnet
Configuration.
One embodiment according to the present utility model, the grinding unit can also include: rotary shaft；Collector ring, packet
Enclose the rotary shaft；And power suppling part, power supply is supplied to the electromagnet.
One embodiment according to the present utility model, the lapping liquid supply pipe portion can include: lapping liquid reserve tank, storage
The lapping liquid；Pump, pumps out the lapping liquid supply pipe to the subject from the lapping liquid reserve tank；And blender,
It stirs the lapping liquid recycled from the subject in the lapping liquid reserve tank.
According to the subject grinding method of one embodiment of the utility model for reaching above-mentioned purpose, by subject
After configuration is on the workbench that can be moved, apply magnetic field to the magneto-rheological fluid being supplied in the subject using permanent magnet
To arrange the magneto-rheological fluid.Later, grinding is supplied between Xiang Suoshu magneto-rheological fluid and the subject to be ground with lapping liquid
The subject is ground, the power supply limitation permanent magnet of the electromagnet neighbouring with the permanent magnet is applied to by turning on/off
Magnetic field.Later, during the magnetic field for limiting the permanent magnet, the magneto-rheological fluid is released from the permanent magnet.
One embodiment according to the present utility model during grinding the subject, can be applied to institute by disconnecting
The power supply for stating electromagnet to form magnetic field around the permanent magnet.
One embodiment according to the present utility model, in order to limit the magnetic field of the permanent magnet, connection is applied to the electricity
The power supply of magnet.
Here, in order to limit the magnetic field of the permanent magnet, it can the permanent magnet according to the polar alignment of the electromagnet
Polarity with inside formed magnetic field ring.
Technical effect
It, can be in order to combine electromagnetism according to the subject grinding device and grinding method of above-mentioned the embodiments of the present invention
Iron is horizontally or vertically configured with permanent magnet, therefore can be uniform by the subject integral grinding of large area.
In particular, on the one hand applying magnetic field to magneto-rheological fluid using permanent magnet, it additionally is able to utilize electromagnet from the magnetic
Pheological fluid releases the magnetic field.Therefore, the composition of subject grinding device can be simplified and reduce power consumption.
Detailed description of the invention
Fig. 1 is the composition figure of the subject grinding device of the one embodiment for illustrating the utility model；
Fig. 2 is the sectional view for the grinding unit of explanatory diagram 1；
Fig. 3 a and Fig. 3 b are the sectional views in the magnetic field occurred for the grinding unit of explanatory diagram 1；
Fig. 4 is the composition figure of the subject grinding device of the one embodiment for illustrating the utility model；
Fig. 5 is the sectional view for the magnetic field generator of explanatory diagram 4；
Fig. 6 is the flow chart of the subject grinding method of the one embodiment for illustrating the utility model.
Description of symbols
100,200: subject grinding device 110,210: workbench
130,245: grinding unit 150: lapping liquid supply pipe portion
170: magneto-rheological fluid supply department
Specific embodiment
The embodiments of the present invention are specifically described referring to attached drawing below.But the utility model need not be confined to
Embodiment as described below is constituted, and can be embodied as the variform different from this.There is provided following embodiment be in order to
The those of ordinary skill of the utility model technical field fully transmits the scope of the utility model, and not just in order to enable
The utility model sufficiently can be implemented and provided.
It is described in the case that the embodiments of the present invention illustrate an element configuration or are connected in other element
Element directly can be configured or be connected in the other element, be also possible to other element between them.Alternatively, when mentioning
It, can not be there are also other element between them in the case that one element is directly configured or is connected in other element.In order to
Illustrate a variety of projects such as a variety of elements, composition, region, layer and/or part and the first, second, third, etc. term may be used,
But the project should not be limited by these terms.
Technical term used in the embodiments of the present invention is intended to illustrate specific embodiment, and and non-limiting it is practical
It is novel.In addition, unless otherwise defined, the term including technology and scientific term indicates and those of ordinary skill in the art
It is generally understood the identical meaning.The term that usually used dictionary definition is crossed, which should be interpreted that, illustrates article arteries and veins with the utility model
The consistent meaning of network shall not be construed as the meaning of strange or excessive formality unless explicitly defining in this application.
Illustrate the embodiments of the present invention referring to the synoptic diagram for showing the preferred embodiment in the utility model below.Here,
The various change from the shape shown in the drawings, such as the variation of manufacturing method and/or allowable tolerance can be sufficiently contemplated to.
Therefore, the embodiments of the present invention are not to be illustrated by the specific shape in the region of Detailed description of the invention, but including shape
Deviation, the element of Detailed description of the invention is only intended to schematically illustrate, and is not intended to illustrate precise shapes, and also not to this reality
It is limited with novel.
Fig. 1 is the composition figure of the subject grinding device of the one embodiment for illustrating the utility model, and Fig. 2 is for saying
The sectional view of the grinding unit of bright Fig. 1.
Referring to Fig. 1 and Fig. 2, the subject grinding device 100 of one embodiment of the utility model include workbench 110,
Grinding unit 130, lapping liquid supply pipe portion 150 and magneto-rheological fluid supply department 17 0.The subject grinding device 100 is available
Magneto-rheological fluid (the magneto rheological of the flow behaviors such as viscosity, mobility can be controlled by the magnetic field of application
Fluid) apply surface or the side etc. of stress and shearing force grinding object body 10 to subject 10.The subject 10 may include
Glass substrate, semiconductor substrate, printed circuit board etc. have the plate of plate shape.
The workbench 110 supports the subject 10.That is, can be configured in the one side of the workbench 110 it is described right
As body 10.In order to which the subject 10 is fixed on the workbench 110, using vacuum power or electrostatic force.Alternatively, can benefit
With the fixation member of clamp in the one side for being set to the workbench 110 etc.
The workbench 110 is arranged to move.For example, the workbench 110 can be to horizontal direction, i.e. X-direction
And Y-direction is mobile.For this purpose, workbench driving portion (not shown) can in addition be arranged for moving the workbench 110.Therefore institute
Stating workbench 110 can move horizontally relative to the grinding unit 130.
The grinding unit 130 is located on the workbench 110.The grinding unit 130 is arranged to rotate.It is described
Grinding unit 130 can utilize lapping liquid grinding object body during rotation.
The grinding unit 130 includes shell (not shown), magnetic field generator 131 and magnetic field limiting unit 136.
Magnetic field generator 131 described in the shell comprehensive surrounding and magnetic field limiting unit 136, providing space inside.
The magnetic field generator 131 is located in the shell.The magnetic field generator 131 includes at least one permanent magnet
133a,133b.Therefore, described permanent magnet 133a, 133b can provide magnetic field to the magneto-rheological fluid.As a result, the magnetic
Generating unit 131 due to including permanent magnet 133a, 133b, so as to omit the iron core of existing electromagnet etc, coil and
Along the power supply unit of coil supply power supply.That is, the magnetic field generator 131 include substitution electromagnet permanent magnet 133a,
133b, therefore not only structure is relatively easy, additionally it is possible to improve electric energy efficiency.
The magnetic field generator 131 includes permanent permanent magnet 133a, 133b that magnetic field occurs.Therefore, the permanent magnet
133a, 133b can apply magnetic field to the magneto-rheological fluid.It is subsequent described permanent magnet 133a, 133b to be carried out specifically
It is bright.
The magnetic field limiting unit 136 is located in the shell.Also, the magnetic field limiting unit 136 be configured to adjacent to
The magnetic field generator 131.The magnetic field limiting unit 136 includes electromagnet.
Fig. 3 a and Fig. 3 b are the sectional views in the magnetic field occurred for the grinding unit of explanatory diagram 1.
It referring to Fig. 3 a, is contained in the magnet spool in the case where no current flows, the magnetic field limiting unit 136
The magnetic field generator 131 is not influenced.Therefore, it is contained in around permanent magnet 133a, 133b of the magnetic field generator 131 solely
Magnetic field on the spot occurs.Here, the magnetic field is applied to magneto-rheological fluid, the magneto-rheological fluid becomes very from Newtonian fluid state
Strong semisolid (semi-solid) state.Therefore, the stickiness and yield stress of the magneto-rheological fluid can rise several times extremely
Decades of times.
Referring to Fig. 3 b, it is contained in the case where having electric current flowing in the coil of the electromagnet 138, the magnetic field limiting unit
136 are limited in the magnetic field of described permanent magnet 133a, 133b the inside of the shell.That is, it needs to release the permanent magnet
In the case that 133a, 133b are applied to the magnetic field of magneto-rheological fluid, it is contained in the electromagnet 138 of the magnetic field limiting unit 136
There is electric current flowing.At this point, being interfered between described permanent magnet 133a, 133b and the electromagnet 138, therefore the magnetic field exists
Magnetic field ring, reverse side are formed in the shell, the magnetic field for being applied to the magneto-rheological fluid is able to release (referring to Fig. 3 b).
One embodiment according to the present utility model, the grinding unit 130 can also include that yoke portion 1 41 and magnetic field are logical
Road portion 143.
Referring again to Fig. 2, described permanent magnet 133a, 133b and the electromagnet 138 are supported on institute by the yoke portion 141
It states in shell.Play the function in the channel of the magnetic line of force in the yoke portion 141.The yoke portion 141 includes extended to vertical direction
Multiple ratchets.
The magnetic field channel portion 143 is connected to the yoke portion 141.It is logical that the electromagnet 138 is arranged to surround the magnetic field
Road portion 143.In addition, described permanent magnet 133a, 133b can be arranged between the pawl to horizontal direction.Therefore, the magnetic field is logical
Road portion 143 can play the function of the magnetic field channel between the permanent magnet 133a, 133 b and the electromagnet 138.
Here, can be set to for the polarity of permanent magnet 133a, 133b for being arranged between the pawl with described
Yoke portion 141, the polarity having the same especially centered on the pawl.Therefore, along the extension of described permanent magnet 133a, 133b
Direction forms the magnetic field for surrounding described permanent magnet 133a, 133b.As a result, the magnetic field is applied to magneto-rheological fluid, can adjust
Save the flow behavior of the magneto-rheological fluid.
Described permanent magnet 133a, 133b are respectively provided with annular ring (Doughnut) shape, can be arranged in concentric circles form.
One embodiment according to the present utility model, the grinding unit 130 can also include rotary shaft 145, collector ring
(slip ring) 146 and power suppling part 147.
The rotary shaft 145 is connected to the magnetic force generating unit 131 and the magnetic force limiting unit 136.Make the rotary shaft
145 and the magnetic force generating unit 131 and the magnetic force limiting unit 136 rotate together.
The collector ring 146 is arranged to surround the rotary shaft 145.The collector ring 146 energy when rotary shaft 145 rotates
It is enough to supply power supply while the electric wire for preventing power suppling part 147 distortion.
The power suppling part 147 is capable of providing the rotary force of the rotary shaft 145.Also, the power suppling part 147
It can make have electric current flowing in the magnetic field limiting unit 136 with electromagnet 138 (referring to fig. 2) magnetic field occurs.
The lapping liquid supply pipe portion 150 between the magneto-rheological fluid and subject 10 supply grinding lapping liquid.And
And the lapping liquid supply pipe portion 150 can be recycled and grind the lapping liquid being discharged after subject 10 and the lapping liquid for recycling recycling.
The magneto-rheological fluid supply department 170 supplies magneto-rheological fluid in subject 10.It is supplied to the subject 10
On magneto-rheological fluid can be applied from permanent magnet 133a, 133b occur magnetic field.
For example, the magneto-rheological fluid may include carbonyl iron powder.Therefore, Xiang Suoshu magneto-rheological fluid applies the feelings in magnetic field
Under condition, the magneto-rheological fluid becomes the chain structure of post shapes.Here, grinding lapping liquid is between the magneto-rheological fluid
Between subject 10.Here, the magneto-rheological fluid plays the function of soft abrasive sheet.
Embodiment according to the present utility model, the grinding unit 130 include the magnetic field with permanent magnet 133a, 133b
Generating unit 131 and the magnetic field occurred by the permanent magnet 133a, 1 33b can be limited in shell using electromagnet 138
Interior magnetic field limiting unit 136.Therefore, using the magnetic field generator 131 with permanent magnet 133a, 133b when grinding object body 10,
And in the case where releasing the magnetic field, electromagnet 138 converts the path for being applied to the magnetic field of the magneto-rheological fluid, so as to
The magneto-rheological fluid is desorbed easily.
Fig. 4 is the composition figure of the subject grinding device of the one embodiment for illustrating the utility model, and Fig. 5 is for saying
The sectional view of the magnetic field generator of bright Fig. 4.
Referring to fig. 4 and Fig. 5, the subject grinding device 200 of one embodiment of the utility model include workbench 210,
Grinding unit 245, lapping liquid supply pipe portion 250 and magneto-rheological fluid supply department 27 0.The subject grinding device 200 can be ground
The side of subject 20 or corner angle.
The grinding unit 245 is set to the side of the workbench 210.The rotatable grinding of the grinding unit 245 is matched
It is placed in the side wall or corner angle of the subject 20 on the workbench 210.
Multiple permanent magnet 233a, 233b, 233c, the 233d for being contained in the grinding unit 245 are vertically aligned into permanent magnetism
The opposed polarity of iron is alternately arranged.Therefore, permanent magnet 233a, 233b, 233 c, 233d form magnetic field ring along vertical direction.
The lapping liquid supply pipe portion 250 may include the pump of lapping liquid reserve tank 251, first 253 and blender 255.
The lapping liquid reserve tank 251 is equivalent to the container for storing the lapping liquid.It can be stored up by adjusting the lapping liquid
The temperature for depositing slot 251 supplies the lapping liquid for keeping predetermined temperature in subject.
First pump 253 pumps out the lapping liquid supply pipe to the subject 20 from the lapping liquid reserve tank 251.
The blender 255 stirs the lapping liquid recycled from the subject 20 in the lapping liquid reserve tank 251.Energy
It is enough to inhibit the abrasive grains in the lapping liquid reserve tank 251 in lapping liquid to precipitate with this.
The subject grinding device 200 of the embodiments of the present invention can grind the corner angle or side wall of subject 20.
Fig. 6 is the flow chart of the subject grinding method of the one embodiment for illustrating the utility model.
Referring to Fig. 1 to Fig. 3 b and Fig. 6, the subject grinding method of one embodiment according to the present utility model, by object
Body configures on moveable workbench (S110).Later, using permanent magnet to the magnetic current unsteady flow being supplied in the subject
Body applies the first magnetic field to arrange the magneto-rheological fluid (S120).
Later, grinding lapping liquid is supplied between Xiang Suoshu magneto-rheological fluid and the subject.As above, described magnetorheological
Fluid plays the function of abrasive sheet, grinds the subject (S130) using grinding lapping liquid.
Later, it is applied to the power supply of the electromagnet adjacent with the permanent magnet by turning on/off, passes through the electromagnet
The second magnetic field occurs.As above, limit that the permanent magnet occurs by the interference between first magnetic field and the second magnetic field the
One magnetic field (S140).
For example, disconnected in the engineering for grinding the subject while being applied to the power supply of the electromagnet it is described forever
Magnetic field is formed around magnet.Therefore, magneto-rheological fluid can arrange and utilize grinding lapping liquid grinding object body.
In addition, being formed in the magnetic field around the permanent magnet described magnetorheological during the magnetic field for limiting the permanent magnet
Reduce around fluid.Therefore, the magneto-rheological fluid (S150) can be released from the permanent magnet.
It, can the permanent magnet according to the polar alignment of the electromagnet for example, to limit the magnetic field of the permanent magnet
Polarity is to form magnetic field ring in inside.The magnetic field for being applied to the magneto-rheological fluid at this time reduces, therefore the magneto-rheological fluid
It can be detached from from the permanent magnet.
It is illustrated above by reference to the preferred embodiment of the utility model, but those skilled in the art answer
The utility model can be carried out in the range of the thought of the utility model recorded without departing from technical solution and field by understanding
A variety of amendments and change.
Claims (8)
1. a kind of subject grinding device characterized by comprising
Workbench can move and can be used in configuring subject；
Grinding unit is rotatably disposed on the workbench, is had shell, is set in the shell and using extremely
A few permanent magnet applies magnetic field to the magneto-rheological fluid being supplied in the subject to arrange the magnetic of the magneto-rheological fluid
Generating unit and adjacent with the magnetic field generator and by connecting the power supply applied to electromagnet for the magnetic field of the permanent magnet
It is limited in the magnetic field limiting unit of the inside of the shell；
Magneto-rheological fluid supply department can supply the magneto-rheological fluid in the subject；And
Lapping liquid supply pipe portion, to supply grinding lapping liquid between the magneto-rheological fluid and the subject.
2. subject grinding device according to claim 1, it is characterised in that:
The permanent magnet includes the multiple permanent magnets arranged to horizontal direction.
3. subject grinding device according to claim 1, which is characterized in that the grinding unit further include:
Yoke portion supports the permanent magnet and the electromagnet；And
The function of the magnetic field channel between the permanent magnet and the electromagnet is played in magnetic field channel portion.
4. subject grinding device according to claim 3, it is characterised in that:
The permanent magnet have it is multiple, multiple permanent magnets be arranged in across to the extended yoke portion of vertical direction have same pole
Property.
5. subject grinding device according to claim 4, it is characterised in that:
Multiple permanent magnets are respectively provided with shapes of annular rings, are arranged in concentric circles form.
6. subject grinding device according to claim 1, it is characterised in that:
The opposed polarity that the permanent magnet is vertically aligned into permanent magnet is alternately arranged.
7. subject grinding device according to claim 1, which is characterized in that the grinding unit further include:
Rotary shaft；
Collector ring surrounds the rotary shaft；And
Power suppling part supplies power supply to the electromagnet.
8. subject grinding device according to claim 1, which is characterized in that the lapping liquid supply pipe portion includes:
Lapping liquid reserve tank stores the lapping liquid；
Pump, pumps out the lapping liquid supply pipe to the subject from the lapping liquid reserve tank；And
Blender stirs the lapping liquid recycled from the subject in the lapping liquid reserve tank.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2018-0073861 | 2018-06-27 | ||
| KR1020180073861A KR102058796B1 (en) | 2018-06-27 | 2018-06-27 | Apparatus for polishing an object and method of polishing an object |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209110814U true CN209110814U (en) | 2019-07-16 |
Family
ID=67196386
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810835788.6A Pending CN110640622A (en) | 2018-06-27 | 2018-07-26 | Object polishing apparatus and object polishing method |
| CN201821194832.1U Expired - Fee Related CN209110814U (en) | 2018-06-27 | 2018-07-26 | Subject grinding device |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810835788.6A Pending CN110640622A (en) | 2018-06-27 | 2018-07-26 | Object polishing apparatus and object polishing method |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR102058796B1 (en) |
| CN (2) | CN110640622A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110640622A (en) * | 2018-06-27 | 2020-01-03 | 株式会社Pdt | Object polishing apparatus and object polishing method |
| CN111151350A (en) * | 2020-01-15 | 2020-05-15 | 李沛泽 | High-efficient medicine grinding device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111168480B (en) * | 2020-01-15 | 2021-05-07 | 陕西国防工业职业技术学院 | Magnetorheological polishing device |
| CN111515764A (en) * | 2020-05-06 | 2020-08-11 | 深圳市路维光电股份有限公司 | Method for repairing surface defects of micro-area of glass substrate |
| CN114800253B (en) * | 2022-06-06 | 2022-10-21 | 浙江大学杭州国际科创中心 | Grinding device and method for silicon carbide wafer |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3471520B2 (en) * | 1996-04-30 | 2003-12-02 | 富士通株式会社 | Method of manufacturing magnetoresistive head and method of manufacturing magnetoresistive head |
| US5991147A (en) * | 1997-07-03 | 1999-11-23 | Chiang; Wen-Hsuan | Electromagnetic chuck with magnetizing/demagnetizing circuit |
| CN106826411B (en) * | 2017-02-21 | 2019-06-14 | 广东工业大学 | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method |
| CN107215744A (en) * | 2017-07-19 | 2017-09-29 | 金陵科技学院 | A kind of elevator permanent-magnetic is with the magnetorheological deceleration buffer device being combined |
| CN107481832B (en) * | 2017-08-04 | 2023-07-25 | 北京交通大学 | Electric control permanent magnet type magnetic field generating device for magnetorheological plane polishing |
| KR102058796B1 (en) * | 2018-06-27 | 2020-01-22 | 주식회사 피디티 | Apparatus for polishing an object and method of polishing an object |
-
2018
- 2018-06-27 KR KR1020180073861A patent/KR102058796B1/en active IP Right Grant
- 2018-07-26 CN CN201810835788.6A patent/CN110640622A/en active Pending
- 2018-07-26 CN CN201821194832.1U patent/CN209110814U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110640622A (en) * | 2018-06-27 | 2020-01-03 | 株式会社Pdt | Object polishing apparatus and object polishing method |
| CN111151350A (en) * | 2020-01-15 | 2020-05-15 | 李沛泽 | High-efficient medicine grinding device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110640622A (en) | 2020-01-03 |
| KR102058796B1 (en) | 2020-01-22 |
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