CN104999344A - Magnetic field generator of magnetorheological polishing equipment - Google Patents
Magnetic field generator of magnetorheological polishing equipment Download PDFInfo
- Publication number
- CN104999344A CN104999344A CN201510502499.0A CN201510502499A CN104999344A CN 104999344 A CN104999344 A CN 104999344A CN 201510502499 A CN201510502499 A CN 201510502499A CN 104999344 A CN104999344 A CN 104999344A
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- CN
- China
- Prior art keywords
- magnetic
- field generator
- magnetic field
- poles
- magnetic core
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
Abstract
The invention discloses a magnetic field generator of magnetorheological polishing equipment. The magnetic field generator comprises multiple electromagnetic pole groups capable of generating gradient magnetic fields, wherein each electromagnetic pole group comprises two electromagnetic poles in opposite polarities, the electromagnetic poles constituting the multiple electromagnetic pole groups adopt triangular magnetic poles arranged annularly, and polarities of every two adjacent magnetic poles are opposite. The magnetic field generator is applied to machining of multi-degree-of-freedom moving workpieces with a magnetorheological fluid, outer surfaces of one or more workpieces can be polished simultaneously under the condition of one-time clamping, and the outer surfaces can be planes, cambered surfaces or complex cambered surfaces. Trials prove that the magnetic field generator can effectively solve the problem that complex surfaces are difficult to polish, workpiece machining procedures can be reduced, and the polishing efficiency can be effectively improved.
Description
Technical field
The invention belongs to magnetorheological finishing device, be specifically related to a kind of field generator for magnetic of MRF equipment.
Background technology
Along with the continuous progress of present information electronic technology, optical technology, in IT, electron trade, ultra-smooth element application gets more and more, as Sapphire Substrate, monocrystalline silicon surface, cell phone rear cover etc., the manufacturing batch of this class component is large, and its surface will meet ultra-smooth, and glossiness is high, uniform color, without requirements such as scuffings.At present, the polisher lapper on market is all adopt plane to grind principle mutually, and workpiece is stuck in trip heart wheel, under the abrasive action of upper and lower polishing disk, realize polishing.The limitation of this polishing mode is exactly can only processing plane, can not process the curved surfaces such as cambered surface.
Magnetic flow liquid is a kind of intellectual material, is the suspended substance mixed by high permeability, low hysteresis small soft magnetic particles and non-magnetic liquid.It is liquid under normal conditions, when adding loaded magnetic field, liquid-solid phase occurring and becomes, and when the field is removed, the magnetic, solid-liquid phase occurs again and becomes.In certain magnetic field strength range, the apparent viscosity of magnetic flow liquid is relevant with magnetic field intensity, and this phenomenon is called magnetic rheology effect.Utilize the magnetic rheology effect of magnetic flow liquid, agglomeration of abrasive particles can be formed flexible bistrique in polishing area, have bistrique hardness adjustable, abrasive particle is from sharp, and face type such as to post at the advantage, for polishing function admirable.
The hardness of bistrique can be changed by changing magnetic field intensity during existing magnetorheological finishing device polishing operation, due to the limitation of field generator for magnetic structure, the effective polishing area in magnetic field is less, and the Material removal model of whole polishing area is fixing, cannot complete complex-curved polishing.
Summary of the invention
The object of this invention is to provide a kind of Distribution of Magnetic Field even, the effective polishing area in magnetic field is comparatively large, is suitable for the field generator for magnetic of the MRF equipment of the complex-curved polishing of multifreedom motion workpiece.
The field generator for magnetic of MRF equipment provided by the invention, comprise multiple electromagnetic pole group be made up of opposite polarity two electromagnetic poles producing gradient magnetic, the electromagnetic pole forming described multiple electromagnetic pole group adopts and circularizes layout and the opposite polarity triangular shape magnetic pole of two adjacent poles.
Described magnetic pole comprises triangle magnetic core, the triangular ring cartridge be arranged on magnetic core, the magnetic core coil be wound around on magnetic core, and magnetic core and magnetic core coil integral installation are at one piece of substrate.
The air gap that spacing is 10-20mm is provided with between described adjacent two magnetic poles.
Beneficial effect of the present invention:
1, the air gap of (10-20mm) at regular intervals is stayed between adjacent two magnetic poles of the present invention, after energising, adjacent two pole polarity are contrary, magnetic pole can form a gradient magnetic at air gap position, whole like this magnetic field can form a uniform gradient magnetic at circumferencial direction.
2, because each magnetic core in this magnetic field is larger, the coil turn of each magnetic core surface wrap is more, and therefore the number of ampere turns of single coil is higher, and the magnetic induction intensity of generation is larger.
3, because two adjacent pole air-gaps are strip gap, air gap position is polishing main region, and therefore, the effective polishing area in magnetic field that the present invention is formed is larger, and such polishing efficiency is also higher.
4, workpiece motion s track is analyzed known, workpiece motion s track is always along the direction of shearing the magnetic line of force, and by MRF principle, surface of the work polishing mainly relies on the shearing force of magnetic flow liquid to remove surface of the work, therefore, polishing removal efficiency of the present invention is higher.
The present invention is used for the workpiece of magnetic flow liquid processing multifreedom motion, and under clamped one time, can carry out polishing to the outer surface of one or more workpiece, its outer surface can be plane, cambered surface or complex-curved simultaneously.The present invention is by probationary certificate: can be difficult to the difficult problem of polishing by effectively solution complicated surface, can reduce the operation of work pieces process, effectively improve polishing efficiency.
Technical scheme of the present invention is further illustrated below in conjunction with accompanying drawing.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is the top view of Fig. 1.
Fig. 3 is the schematic diagram of the present invention for processing work plane.
Fig. 4 is the schematic diagram of the present invention for machining curve surface of workpiece.
Detailed description of the invention
See Fig. 1, Fig. 2, field generator for magnetic 6 provided by the invention adopts multiple electromagnetic pole group A producing gradient magnetic, the electromagnetic pole forming described multiple electromagnetic pole group A adopts and circularizes layout and the opposite polarity triangular shape magnetic pole of two adjacent poles, each electromagnetic pole group A is made up of two opposite polarity magnetic poles, each magnetic pole comprises triangle magnetic core 602, be arranged on the triangular ring cartridge 601 on magnetic core 602, be wound around the magnetic core coil 603 on magnetic core 602, magnetic core 602 and magnetic core coil 603 integral installation are on one piece of base plate 604, the air gap that spacing is 10-20mm is provided with between adjacent two magnetic poles, be preferably the air gap of 15mm.
Field generator for magnetic 6 of the present invention can be used for comprising multiple complex surface such as plane and curved surface to the workpiece of multifreedom motion and carries out polishing.Apply polissoir of the present invention as shown in Figure 3, the workpiece 4 comprising the magnetic flow liquid case 5 be located in frame, be located at revolution deep bid 1 above magnetic flow liquid case 5, be located at the workpiece motion s frame 2 on revolution deep bid 1 and be arranged on by rotating shaft 3 on workpiece motion s frame 2, field generator for magnetic 6 of the present invention is arranged on the bottom of magnetic flow liquid case 5.
After energising, field generator for magnetic 6 produces gradient magnetic in magnetic flow liquid case 5, and magnetic flow liquid, under the effect of gradient magnetic, can form magnetic linkage along magnetic line of force direction, be equivalent to little magnetic bistrique one by one.When artifact-driven mechanism drives workpiece 4 to do multifreedom motion in magnetic flow liquid, workpiece 4 and magnetic flow liquid do relative motion, and magnetic flow liquid can produce removal effect to surface of the work, thus realizes polishing.
By magnetic circuit theorem, two opposite polarity magnetic poles can at gap location leakage field, and therefore leakage field place can produce a gradient magnetic.Because the magnetic conductivity μ of ferromagnetic material is very large, iron core has the effect making magnetic induction flux concentration to oneself inside.The line of magnetic induction not having the current-carrying coil of iron core to produce is that disperse is in whole space; If during same coil on a closed iron core, then not only the numerical value of magnetic flux increases greatly, and the line of magnetic induction is almost along iron core.By Ampère circuital theorem,
n and I in formula
0coil turn and electrical current respectively, B
ifor magnetic induction intensity, l
ifor the length of magnetic path, μ
ifor relative permeability, μ
0for air permeability.Therefore the size that the electrical current of coil and the length of magnetic path can change magnetic induction density B is changed.
Electrified wire can produce magnetic field therein with around in addition, according to Biot-Savart law,
magnetic induction density B is first magnetic induction intensity that each current elements Idl produces
vector superposed.Therefore, the magnetic induction intensity in MRF magnetic field is the magnetic induction intensity that each cartridge produces
vector superposed, namely
the large I changing field supply changes magnetic induction intensity
direction, thus realize magnetic induction intensity
direction adjustable.
By Biot-Sa farr's law, magnetic induction intensity is the multiplication cross that current elements and footpath are vowed, is axial vector, changes the direction that can change magnetic induction intensity that footpath is vowed.Footpath can be changed in each cartridge chamfering to vow, thus the direction of magnetic induction intensity can be changed.
The present embodiment, by controlling different servomotors, realizes the motion of the different free degree of workpiece, can any two interlocks between revolution, rotation, oscillating motion, also can independently moving, also can three motions link simultaneously.As shown in Figure 3, can the plane of processing work 4 when the deep bid 1 that revolves round the sun revolves round the sun and links with the rotation of workpiece motion s frame 2 drive shaft 3; As shown in Figure 4, when the deep bid 1 that revolves round the sun revolves round the sun, to wave with workpiece motion s frame 2 when (or workpiece motion s frame 2 waves, rotating shaft 3 rotation) links can the curved surface of processing work 4.
As can be seen here, when workpiece and magnetic flow liquid generation relative motion, the spinning motion of workpiece can realize the polishing of plane, and the oscillating motion of workpiece can realize the polishing of curved surface or facade, and the revolution motion of workpiece spindle can realize the uniformity of polishing.
Claims (3)
1. the field generator for magnetic of a MRF equipment, it is characterized in that comprising multiple electromagnetic pole group be made up of opposite polarity two electromagnetic poles producing gradient magnetic, the electromagnetic pole forming described multiple electromagnetic pole group adopts and circularizes layout and the opposite polarity triangular shape magnetic pole of two adjacent poles.
2. the field generator for magnetic of MRF equipment according to claim 1, it is characterized in that described magnetic pole comprises triangle magnetic core, the triangular ring cartridge be arranged on magnetic core, the magnetic core coil be wound around on magnetic core, magnetic core and magnetic core coil integral installation are at one piece of substrate.
3. the field generator for magnetic of MRF equipment according to claim 1 and 2, is characterized in that being provided with the air gap that spacing is 10-20mm between described adjacent two magnetic poles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510502499.0A CN104999344A (en) | 2015-08-17 | 2015-08-17 | Magnetic field generator of magnetorheological polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510502499.0A CN104999344A (en) | 2015-08-17 | 2015-08-17 | Magnetic field generator of magnetorheological polishing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104999344A true CN104999344A (en) | 2015-10-28 |
Family
ID=54372340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510502499.0A Pending CN104999344A (en) | 2015-08-17 | 2015-08-17 | Magnetic field generator of magnetorheological polishing equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN104999344A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106985013A (en) * | 2017-05-22 | 2017-07-28 | 上海理工大学 | Clustered MRF head |
| CN109048506A (en) * | 2018-08-10 | 2018-12-21 | 太原理工大学 | A kind of magneto liquid-magnetic abrasive tool surface finishing device and method |
Citations (6)
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| US20050113001A1 (en) * | 2003-10-30 | 2005-05-26 | Nobuyuki Kurashima | Semiconductor device fabrication method and apparatus |
| US20050193550A1 (en) * | 2004-03-02 | 2005-09-08 | Hitachi Global Storage Technologies | Reactive ion milling / RIE assisted CMP |
| CN101482158A (en) * | 2009-02-11 | 2009-07-15 | 江苏大学 | Shearing valve type magneto-rheological fluid damping vibration absorber |
| CN102723840A (en) * | 2012-06-26 | 2012-10-10 | 张珩 | Circumference magnet-cutting fluid power generation device |
| CN203413016U (en) * | 2013-08-09 | 2014-01-29 | 谭苹 | Magneto-rheological elastomer double-ejection rod and single-annular membrane type damper |
| CN204935271U (en) * | 2015-08-17 | 2016-01-06 | 宇环数控机床股份有限公司 | A kind of field generator for magnetic of MRF equipment |
-
2015
- 2015-08-17 CN CN201510502499.0A patent/CN104999344A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050113001A1 (en) * | 2003-10-30 | 2005-05-26 | Nobuyuki Kurashima | Semiconductor device fabrication method and apparatus |
| US20050193550A1 (en) * | 2004-03-02 | 2005-09-08 | Hitachi Global Storage Technologies | Reactive ion milling / RIE assisted CMP |
| CN101482158A (en) * | 2009-02-11 | 2009-07-15 | 江苏大学 | Shearing valve type magneto-rheological fluid damping vibration absorber |
| CN102723840A (en) * | 2012-06-26 | 2012-10-10 | 张珩 | Circumference magnet-cutting fluid power generation device |
| CN203413016U (en) * | 2013-08-09 | 2014-01-29 | 谭苹 | Magneto-rheological elastomer double-ejection rod and single-annular membrane type damper |
| CN204935271U (en) * | 2015-08-17 | 2016-01-06 | 宇环数控机床股份有限公司 | A kind of field generator for magnetic of MRF equipment |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106985013A (en) * | 2017-05-22 | 2017-07-28 | 上海理工大学 | Clustered MRF head |
| CN109048506A (en) * | 2018-08-10 | 2018-12-21 | 太原理工大学 | A kind of magneto liquid-magnetic abrasive tool surface finishing device and method |
| CN109048506B (en) * | 2018-08-10 | 2020-10-23 | 太原理工大学 | Permanent magnet type liquid magnetic grinding tool surface finishing processing device and method |
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Application publication date: 20151028 |
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