CN208990470U - 一种半导体制程废气的燃烧处理装置 - Google Patents
一种半导体制程废气的燃烧处理装置 Download PDFInfo
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108636046A (zh) * | 2018-07-09 | 2018-10-12 | 安徽京仪自动化装备技术有限公司 | 一种半导体制程废气的燃烧处理装置 |
CN114392631A (zh) * | 2022-01-17 | 2022-04-26 | 北京京仪自动化装备技术股份有限公司 | 废气处理效率调整方法及废气处理设备 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108636046A (zh) * | 2018-07-09 | 2018-10-12 | 安徽京仪自动化装备技术有限公司 | 一种半导体制程废气的燃烧处理装置 |
CN114392631A (zh) * | 2022-01-17 | 2022-04-26 | 北京京仪自动化装备技术股份有限公司 | 废气处理效率调整方法及废气处理设备 |
CN114392631B (zh) * | 2022-01-17 | 2022-12-09 | 北京京仪自动化装备技术股份有限公司 | 废气处理效率调整方法及废气处理设备 |
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Effective date of registration: 20200716 Address after: 102600 block a, building 14, yard 8, Liangshuihe 2nd Street, Daxing District, Beijing Patentee after: BEIJING JINGYI AUTOMATION EQUIPMENT Co.,Ltd. Address before: 241000 403-J room, B building, Jiangbei industrial concentration zone, Wuhu, Anhui Patentee before: ANHUI JINGYI AUTOMATION EQUIPMENT TECHNOLOGY Co.,Ltd. |
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Address after: 100176 block a, 14th floor, yard 8, Liangshuihe 2nd Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Jingyi automation equipment Technology Co.,Ltd. Address before: 102600 block a, building 14, yard 8, Liangshuihe Second Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee before: BEIJING JINGYI AUTOMATION EQUIPMENT Co.,Ltd. |