CN208844192U - Continuous vacuum coating device and coating system - Google Patents
Continuous vacuum coating device and coating system Download PDFInfo
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- CN208844192U CN208844192U CN201821555052.5U CN201821555052U CN208844192U CN 208844192 U CN208844192 U CN 208844192U CN 201821555052 U CN201821555052 U CN 201821555052U CN 208844192 U CN208844192 U CN 208844192U
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Abstract
This application involves technical field of vacuum plating, and more particularly, to a kind of continuous vacuum coating device and coating system, continuous vacuum coating device includes vacuum chamber, and the first side wall of vacuum chamber offers entrance, and the opposite second sidewall of vacuum chamber offers outlet；At least two transport mechanisms are provided in vacuum chamber；Wherein at least one transport mechanism is arranged on the third side wall of vacuum chamber, and wherein at least another transport mechanism is arranged on the 4th opposite side wall of vacuum chamber；The quantity of vacuum chamber is multiple and sequentially arranges, and is provided with plate valve system between two vacuum chambers of arbitrary neighborhood.It can be seen that, entire technique is respectively multiple steps by the present apparatus, each step carries out in different vacuum chambers, adjacent vacuum chamber has gate valve mechanism controls to be isolated, and then avoids and influence each other, and guarantees coating effects, and transport mechanism is provided in each vacuum chamber, the transmission to workpiece in adjacent vacuum room, high degree of automation, high production efficiency can be realized in turn.
Description
Technical field
This application involves technical field of vacuum plating, more particularly, to a kind of continuous vacuum coating device and coating system.
Background technique
Currently, existing technique for vacuum coating is to concentrate in a vacuum chamber completing, each step process can interact,
Lead to coating effects difference etc., and need manually to place more, adjust and take out workpiece from vacuum chamber, production efficiency is low.
Utility model content
The application's is designed to provide a kind of continuous vacuum coating device and coating system, to solve to deposit in the prior art
Technique for vacuum coating be to concentrate in a vacuum chamber completing, each step process can interact, cause coating effects poor,
And the technical problem that production efficiency is low.
This application provides a kind of continuous vacuum coating devices, comprising: vacuum chamber, the vacuum chamber are the knot of inner hollow
Structure, and the first side wall of the vacuum chamber offers entrance, the opposite second sidewall of institute's vacuum chamber offers outlet；It is described true
At least two transport mechanisms are provided in empty room；The third side of the vacuum chamber is arranged in transport mechanism described in wherein at least one
On wall, wherein at least another described transport mechanism is arranged on the 4th opposite side wall of the vacuum chamber, and transport mechanism is used
Be delivered to vacuum chamber from entrance in the pallet of workpiece will be carried, or the pallet for being placed on carrying workpiece in vacuum chamber from
Outlet output vacuum chamber；The quantity of the vacuum chamber be it is multiple, multiple vacuum chambers are sequentially arranged, and two vacuum of arbitrary neighborhood
Be provided with plate valve system between room, two vacuum chambers that the plate valve system is used to control arbitrary neighborhood be connected or
Person is isolated.
In the above-mentioned technical solutions, further, the inlet of the first vacuum chamber is provided with rotatable first
The exit of body, the tail vacuum chamber is provided with rotatable second door body.
In any of the above-described technical solution, further, the transport mechanism include first driving device, mounting blocks and
Transmission wheel；Wherein, the transmission wheel is connected with the mounting blocks, and the mounting blocks and the transmission wheel are sequentially set in
On the output shaft of the first driving device；The mounting blocks are between the first driving device and the transmission wheel.
In any of the above-described technical solution, further, the continuous vacuum coating device further includes at least two guiding
Component, multiple guidance sets are above the transport mechanism；The setting of guidance set described in wherein at least one is described the
On the inner wall of three side walls, wherein at least another described guidance set is arranged on the inner wall of the 4th side wall, the guiding
Component is for carrying and being driven the pallet for carrying workpiece；The guidance set includes fixed block, guide holder and directive wheel；Its
In, the fixed block is arranged on the inner sidewall of the vacuum chamber；The guide holder is arranged on the fixed block, and described leads
It is provided with to seat along the output shaft extended vertically, the directive wheel is set on the output shaft.
In any of the above-described technical solution, further, the continuous vacuum coating device further includes rotating mechanism, described
Rotating mechanism is arranged on the vacuum chamber, and the rotating mechanism is for driving the revolution gear of the pallet to rotate；It is described
Rotating mechanism includes the second driving device, the second device for sealing magnetic fluid, coupling base and ratchet；The coupling base is arranged in institute
It states on the inner sidewall of vacuum chamber, and is embedded with shaft coupling in the coupling base；The ratchet is equipped with shaft, and the shaft plugs
In one end of the shaft coupling；Second device for sealing magnetic fluid is embedded in the bottom wall of the vacuum chamber, and described
Two device for sealing magnetic fluid are equipped with second driving shaft；One end of the second driving shaft is located in the vacuum chamber, and described
One end of second driving shaft is plugged in the other end of the shaft coupling, and the other end of the second driving shaft is located at the vacuum
Outdoor, and the other end of the second driving shaft is connected with second driving device.
In any of the above-described technical solution, further, the plate valve system includes that cylinder, installation door and setting exist
Support plate, sealing plate, bellows, slide assemblies and strut component in the installation door；Wherein, the cylinder is arranged in institute
It states in installation door；The installation door is the structure of inner hollow；The one side wall of the installation door and the adjacent vacuum chamber
Second sidewall is affixed merging connection, and the first port is offered in the one side wall of the installation door；The installation door it is opposite
Another side wall is affixed with the first side wall of the adjacent vacuum chamber merges connection, and opposite another side wall of the installation door
On offer the second port；The support plate and the sealing plate are connected by spring；The slide assemblies are arranged described
Between support plate and the sealing plate, and the slide assemblies are for driving the support plate and the sealing plate along institute
The guide rod in installation door is stated, and is parallel to the second sidewall sliding；The bellows is arranged in the support plate, and described
Bellows and the strut component are respectively positioned between the support plate and the sealing plate；Wherein, the cylinder is used for institute
It states bellows and air is provided；The bellows is described for expanding and driving support plate described in the strut components drive to cover
First port and the promotion sealing plate cover second port.
In any of the above-described technical solution, further, the slide assemblies include boom and two guide wheels；Wherein,
Two guide wheels are symmetrically disposed on the both ends of the boom；The quantity of the guide rod is two, and two guide rods are equal
Row setting, one of them described guide wheel are slided along guide rod described in one of them, and guide wheel described in another one is along wherein another
One guide rod sliding；The bottom end of the boom is connected with the support plate.
In any of the above-described technical solution, further, connecting plate is provided in the support plate；The strut component packet
Include limit shaft, the first strut and the second strut；Wherein, the limit shaft is threaded through on the connecting plate, and first support
Bar and second strut are sequentially set on the limit shaft；First strut is arranged far from one end of the limit shaft
There is the first axle bed, first axle bed is connected with the support plate；Second strut is set far from one end of the limit shaft
It is equipped with the second axle bed, second axle bed is connected with the sealing plate.
In any of the above-described technical solution, further, the installation door is arranged on the inner sidewall of the support plate
There is limited block, the limited block is used to limit the support plate.
Present invention also provides a kind of coating systems, fill including continuous vacuum coating described in any of the above-described technical solution
It sets, thus, whole advantageous effects with the device, here, repeating no more.
Compared with prior art, the application has the beneficial effect that
Continuous vacuum coating device provided by the present application is sequentially arranged, wherein arbitrary neighborhood by multiple vacuum chambers
Be provided with plate valve system between two vacuum chambers, plate valve system can be realized connection between two adjacent vacuum chambers or
Person separates, and different processing steps is executed in each vacuum chamber, and multiple processing steps will not interfere with each other, and guarantees process effect
Fruit.In addition, inside setting especially transport mechanism, the transport mechanism of vacuum chamber can drive the pallet for being mounted with workpiece to transport on it
It is dynamic, and then that realizes workpiece automatically enters and exports vacuum chamber, and the pallet for carrying workpiece can be realized in each vacuum chamber
Interior automatic conveying.
It is sequentially mutually arranged, is arranged for plate valve system between any two of them vacuum chamber, this company with three vacuum chambers
Continuous vacuum coater is in use, entering for vacuum chamber can be sent to by artificial placement or instrument by the pallet for being mounted with workpiece
At mouthful, and pallet is placed on the transfer mechanism, under the action of transport mechanism, it is indoor suitable that pallet is sent to vacuum
Position, and can live entrance closing cover using cover board etc., certain process, such as vacuum heating indoor are carried out to workpiece,
When the after treatment to workpiece recycles transport mechanism driving to load using the outlet of gate valve mechanism opening vacuum chamber
There is the pallet of workpiece to export vacuum chamber from outlet, and be input in next adjacent vacuum chamber, plate valve system is by this vacuum
Room is closed, and coating process processing is carried out in this vacuum chamber, and after plated film, the plate valve system of this vacuum chamber outlet side is dynamic
Make the outlet of this vacuum chamber of opening, repeat above-mentioned transmission process, i.e., the outlet that will be mounted with pallet from this vacuum chamber of workpiece is defeated
Out and be input in adjacent next vacuum chamber, workpiece is cooled down in the last one vacuum chamber, it is cooling after by
The last one vacuum chamber is defeated, that is, completes entire technique.As it can be seen that the continuous vacuum coating device of the application is by multiple vacuum chamber groups
At entire coating process can be resolved into more dry steps, corresponding processing step is completed in each vacuum chamber, is avoided more
A processing step influences each other, to ensure that the quality of plated film, in addition, high degree of automation, saves manpower, production efficiency
Height, and can be according to beat plated film shipment.Certainly, it is not limited only to this, the quantity of vacuum chamber and gate valve can be according to practical need
It is arranged, is not limited only to this.
As it can be seen that entire technique is respectively multiple steps by this continuous vacuum coating device, each step is in different vacuum
Indoor progress, and adjacent vacuum chamber has gate valve mechanism controls to be isolated, and then avoids and influence each other, and guarantees plated film effect
Fruit, and it is provided with transport mechanism in each vacuum chamber, being subject to plate valve system can control adjacent vacuum chamber, Jin Erke
The transmission to workpiece in adjacent vacuum room is realized, automation Chengdu is high, high production efficiency.
Coating system provided by the present application, including continuous vacuum coating device described above, thus, by vacuum chamber
Transport mechanism realize automatically delivering for workpiece, time saving and energy saving, high degree of automation, and multiple vacuum chambers are sequentially arranged, phase
Adjacent vacuum chamber is connected or is isolated by gate valve, is avoided previous multiple processing steps and is influenced each other.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the application specific embodiment or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the application, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of continuous vacuum coating device provided by the embodiments of the present application；
Fig. 2 is the schematic diagram that vacuum chamber provided by the embodiments of the present application and plate valve system assemble；
Fig. 3 is the structural schematic diagram of plate valve system provided by the embodiments of the present application；
Fig. 4 is the another structural schematic diagram of plate valve system provided by the embodiments of the present application；
Fig. 5 is cross-sectional view of the Fig. 1 in Section A-A；
Fig. 6 is enlarged structure schematic diagram of the Fig. 5 at B；
Fig. 7 is the partial structure diagram of plate valve system provided by the embodiments of the present application；
Fig. 8 is enlarged structure schematic diagram of the Fig. 7 at C；
Fig. 9 is the another partial structure diagram of plate valve system provided by the embodiments of the present application；
Figure 10 is enlarged structure schematic diagram of the Fig. 9 at C；
Figure 11 is the assembling structure schematic diagram of vacuum chamber provided by the embodiments of the present application with the pallet for carrying workpiece；
Figure 12 is enlarged structure schematic diagram of the Figure 11 at D；
Figure 13 is the another structural schematic diagram of assembly of vacuum chamber provided by the embodiments of the present application with the pallet for carrying workpiece；
Figure 14 is enlarged structure schematic diagram of the Figure 13 at E；
Figure 15 is enlarged structure schematic diagram of the Figure 13 at F；
Figure 16 is the structural schematic diagram of vacuum chamber provided by the embodiments of the present application；
Figure 17 is enlarged structure schematic diagram of the Figure 16 at G.
Appended drawing reference:
1- vacuum chamber, 11- entrance, the outlet 12-, the first door body of 13-, the second door body of 14-, 2- transport mechanism, 21- transmission group
Part, the first device for sealing magnetic fluid of 211-, the first transmission shaft of 212-, 213- transmission wheel, 3- guidance set, 31- fixed block, 32-
Guide holder, 33- directive wheel, 4- limit assembly, 41- limit base, 42- positive stop strip, 43- third driving device, 5- rotating mechanism,
51- coupling base, 52- ratchet, 53- shaft, 54- second driving shaft, 6- bracket, 7- molecular pump, 8- fore pump, 9- plate valve system
9,91- cylinders, 911- cylinder sealing, 92- installation door, the first port of 921-, the second port of 922-, 923- mounting groove, 924-
Guide rod, 93- support plate, 931- connecting plate, 94- sealing plate, 941- sealing strip, 95- bellows, 96- slide assemblies, 961- are hung
Arm, 962- guide wheel, 97- strut component, 971- limit shaft, the first strut of 972-, the second strut of 973-, the first axle bed of 974-,
The second axle bed of 975-, 98- limited block, 10- pallet, 101- revolution gear.
Specific embodiment
It is clearly and completely described below in conjunction with technical solution of the attached drawing to the application, it is clear that described implementation
Example is some embodiments of the present application, instead of all the embodiments.
The component of the embodiment of the present application for usually describing and showing in attached drawing here can be with a variety of different configurations
To arrange and design.Therefore, the detailed description of the embodiments herein provided in the accompanying drawings is not intended to limit below and is wanted
The scope of the present application of protection is sought, but is merely representative of the selected embodiment of the application.
Based on the embodiment in the application, those of ordinary skill in the art are obtained without making creative work
The every other embodiment obtained, shall fall in the protection scope of this application.
In the description of the present application, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for describe the application and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present application, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in application.
Continuous vacuum coating device and plated film according to the application some embodiments are described referring to Fig. 1 to Fig. 4
System.
Referring to shown in figure Fig. 1, Fig. 2, Figure 11, Figure 13 and Figure 16, embodiments herein provides a kind of continuous vacuum
Coating apparatus, comprising: vacuum chamber 1, vacuum chamber 1 is the structure of inner hollow, and the first side wall of vacuum chamber 1 offers entrance
11, the opposite second sidewall of institute's vacuum chamber 1 offers outlet 12；At least two transport mechanisms 2 are provided in vacuum chamber 1；Its
In at least one transport mechanism 2 be arranged on the third side wall of vacuum chamber 1, wherein at least another transport mechanism 2 be arranged true
On the 4th opposite side wall of empty room 1, transport mechanism 2 is used to the pallet 10 for carrying workpiece being delivered to vacuum chamber from entrance 11
1, or pallet 10 for being placed on carrying workpiece in vacuum chamber 1 exports vacuum chamber 1 from outlet 12；The quantity of vacuum chamber 1 is
Multiple, multiple vacuum chambers 1 are sequentially arranged, and are provided with plate valve system 9, gate valve between two vacuum chambers 1 of arbitrary neighborhood
Two vacuum chambers 1 that mechanism 9 is used to control arbitrary neighborhood are connected or are isolated.
Continuous vacuum coating device provided by the present application is sequentially arranged, wherein arbitrary neighborhood by multiple vacuum chambers 1
Two vacuum chambers 1 between be provided with plate valve system 9, plate valve system 9 can be realized between two adjacent vacuum chambers 1
It is connected to or separates, execute different processing steps in each vacuum chamber 1, multiple processing steps will not interfere with each other, and guarantee work
Skill treatment effect.In addition, transport mechanism 2 is arranged in the inside of vacuum chamber 1, transport mechanism 2 can drive the pallet for being mounted with workpiece
10 move over, and then realize that workpiece automatically enters and export vacuum chamber 1, can be realized the pallet 10 for carrying workpiece
Automatic conveying in each vacuum chamber 1.
It is sequentially mutually arranged with three vacuum chambers 1, is arranged for plate valve system 9 between any two of them vacuum chamber 1, this
Continuous vacuum coating device is in use, vacuum chamber can be sent to by artificial placement or instrument by the pallet 10 for being mounted with workpiece
At 1 entrance 11, and pallet 10 is placed in transport mechanism 2, under the action of transport mechanism 2, pallet 10 is sent to
Suitable position in vacuum chamber 1, and can covered entrance 11 using cover board etc., certain process is carried out to workpiece,
Such as heating in vacuum chamber 1, when to workpiece after treatment, opening the outlet 12 of vacuum chamber 1 using plate valve system 9, then
It is driven using transport mechanism 2 and is mounted with the pallet 10 of workpiece and exports vacuum chamber 1 from outlet 12, and be input to next adjacent the
In two vacuum chambers, plate valve system 9 closes second vacuum chamber, and carries out at coating process in second vacuum chamber
It manages, after plated film, the outlet 12 of second vacuum chamber is opened in the movement of plate valve system 9 that second vacuum chamber 1 exports 12 sides,
Above-mentioned transmission process is repeated, i.e., the pallet 10 for being mounted with workpiece is exported and is input to adjacent from the outlet of second vacuum chamber 12
Third vacuum chamber in, recycle cover board etc. to cover the outlet 12 of third vacuum chamber, workpiece is in third vacuum chamber 1
It is inside cooled down, is exported after cooling by third vacuum chamber, that is, complete entire technique.As it can be seen that the application's is continuous true
Empty coating apparatus forms multiple vacuum chambers 1, and adjacent vacuum chamber 1 is separated by plate valve system 9, it is thus possible to will entirely plate
Membrane process resolves into more dry steps, completes corresponding processing step in each vacuum chamber 1, it is mutual to avoid multiple processing steps
It influences, to ensure that the quality of plated film, further, since setting transport mechanism, high degree of automation save manpower, produces
It is high-efficient, and can be according to beat plated film shipment.Certainly, it is not limited only to this, the quantity of vacuum chamber 1 and gate valve can be according to reality
Border needs to be arranged, and is not limited only to this.
As it can be seen that entire technique is respectively multiple steps by this continuous vacuum coating device, each step is in different vacuum
It is carried out in room 1, and adjacent vacuum chamber 1 has the control of plate valve system 9 to be isolated, and then avoids and influence each other, and guarantees plated film
Effect, and transport mechanism 2 is provided in each vacuum chamber 1, being subject to plate valve system 9 can control the adjacent connection of vacuum chamber 1,
The transmission to workpiece in adjacent vacuum chamber 1 can have been realized in turn, and automation Chengdu is high, high production efficiency.
Wherein, the first side wall is oppositely arranged with second sidewall, and third side wall and the 4th side wall are oppositely arranged.First side
Wall, the third side wall, the second sidewall and the 4th side wall are sequentially connected and connect, and form square structure, but not only limit
In this, it can also enclose and be set as other shapes, certainly, vacuum chamber 1 may also include other side walls, and be set as other shapes with enclosing with upper side wall
Shape.
Wherein, optionally, the bottom end of vacuum chamber 1 is also provided with through-hole, and through-hole is for being connected to the molecular pump vacuumized；Very
The lower section of empty room 1 is also provided with bracket, and bracket has been used to support vacuum chamber 1, in order to which molecular pump is placed under vacuum chamber 1
Side；With further including fore pump, fore pump is connected by pipeline with the inside of vacuum chamber 1 this plated film.
In one embodiment of the application, it is preferable that as depicted in figs. 1 and 2, the inlet of first vacuum chamber is provided with
Rotatable first door body 13, the exit of tail vacuum chamber are provided with rotatable second door body 14.
In this embodiment, it can realize that the entrance to first vacuum chamber turns on or off using the first door body 13, utilize
Second door body 14 can realize that the outlet to tail vacuum chamber turns on or off, simple to operate.
In one embodiment of the application, it is preferable that as shown in Figure 11, Figure 12, Figure 16 and Figure 17, transport mechanism 2
Including first driving device and multiple transmission components 21；Multiple transmission components 21 are arranged on the side wall of vacuum chamber 1, and edge
The outlet 12 of 11 direction of entrance of vacuum chamber 1 be intervally arranged；Transmission component 21 includes the first device for sealing magnetic fluid 211, the
One transmission shaft 212 and driving wheel；Wherein, the first device for sealing magnetic fluid 211 is embedded on the side wall of vacuum chamber 1, and first passes
Moving axis 212 is threaded through on the first device for sealing magnetic fluid 211, and one end of the first transmission shaft 212 is located at outside vacuum chamber 1, and first
The other end of transmission shaft 212 is located in vacuum chamber 1, and driving wheel tube is located on the other end of the first transmission shaft 212；Multiple transmission groups
One end that first transmission shaft 212 of part is located at outside vacuum chamber 1 is connected by synchronous belt, and first driving device passes through synchronous belt
The first transmission shaft 212 of multiple transfer assemblies is driven to rotate.
In this embodiment, first driving device can drive the transmission wheel 213 of multiple transfer assemblies same by synchronous belt
Step rotation, transmission wheel 213, which is able to drive, to be carried the pallet 10 of material thereon and moves along rectilinear direction.Wherein, optionally, pacify
Dress block is cyclic structure.Wherein, first driving device is motor.Wherein, optionally, the first device for sealing magnetic fluid 211 is existing
There is the sealing device sold on the market.
Wherein, optionally, one of transport mechanism 2 is arranged on third side wall, multiple transmission of a transport mechanism 2
Component is intervally arranged along from the entrance 11 of vacuum chamber 1 to outlet 12 on third side wall, and another one transport mechanism 2 is arranged
On the 4th side wall, multiple transfer assemblies of another transport mechanism 2 on the 4th side wall along the entrance 11 from vacuum chamber 1 to
Outlet 12 is intervally arranged.
In one embodiment of the application, it is preferable that as shown in Figure 11, Figure 12, Figure 16 and Figure 17, continuous vacuum plating
Film device further includes at least two guidance sets 3, and multiple guidance sets 3 are above transport mechanism 2；Wherein at least one guiding group
Part 3 is arranged on the third side wall of vacuum chamber 1, wherein at least another guidance set 3 opposite the 4th that vacuum chamber 1 is arranged in
On side wall, guidance set 3 is used to carry and the workpiece of transmission belt plated film；Guidance set 3 include fixed block 31, guide holder 32 and
Directive wheel 33；Wherein, fixed block 31 is arranged on the inner sidewall of vacuum chamber 1；Guide holder 32 is arranged on fixed block 31, and is oriented to
Seat 32 is provided with along the output shaft extended vertically, and directive wheel 33 is set on output shaft.
In this embodiment, guidance set 3 is above transport mechanism 2, so that guidance set 3 will not interfere with transport mechanism
2 work, and the setting of guidance set 3 meets the structure setting of pallet 10.It is all provided on third side wall and the 4th opposite side wall
It is equipped with guidance set 3, can guarantee that pallet 10 is oriented in the left and right sides, because without departing from route.Wherein, guiding group
The axis of the output shaft of part 3 is placed in the vertical direction, and directive wheel 33 is set on output shaft, enable directive wheel 33 along
Vertical direction rotation, the outer edge and pallet 10 of directive wheel 33 are tangent, and play and be oriented to during pallet 10 is mobile to it
Effect, prevent its deviate operation route.Wherein, optionally, fixed block 31 passes through fastener side corresponding with vacuum chamber 1
Wall is connected.
In one embodiment of the application, it is preferable that as shown in Figure 13 and Figure 15, plated film with further including limit assembly 4,
Limit assembly 4 is arranged on the bottom wall of vacuum chamber 1；Limit assembly 4 includes third driving device 43, limit base 41 and positive stop strip
42；Wherein, the limiting slot extended along vertical direction is offered on limit base 41, positive stop strip 42 is plugged in limiting slot；Third
The lower section of vacuum chamber 1 is arranged in driving device 43, and third driving device 43 passes through vacuum chamber 1 and is connected with positive stop strip 42, and
Third driving device 43 is for driving positive stop strip 42 to slide along limiting slot.
In this embodiment, when the pallet 10 for carrying workpiece is located in transport mechanism 2, positive stop strip 42 can be to carrying
There is the pallet 10 of workpiece to be limited, it is made to stop at suitable position in vacuum chamber 1, wait to be processed, wherein third driving
Device 43 can adjust the height of positive stop strip 42 constantly, when workpiece needs to export after treatment, 43 energy of third driving device
Enough driving positive stop strips 42 move downward, and limit it no longer to pallet 10, pallet 10 can be in the driving lower edge of driving mechanism
Transport mechanism 2 move ahead.
Wherein, optionally, the quantity of limit assembly 4 is two, and two limit assemblies 4 are along being parallel to the first side wall interval
Arrangement, and two limit assemblies 4 are close to be arranged at the outlet 12 of vacuum chamber 1, certainly, are not limited only to this.
Wherein, optionally, limit base 41 includes mounting plate and protruding block, and protruding block is arranged on a mounting board, mounting plate
It being fixed on by fastener on the bottom wall of vacuum chamber 1, limiting slot is provided on protruding block, and through the top end face of protruding block,
Certainly, it is not limited only to this.
In one embodiment of the application, it is preferable that as shown in Figure 13, Figure 14, Figure 16 and Fig. 7, continuous vacuum plating
Film device further includes rotating mechanism 5, and rotating mechanism 5 is arranged on vacuum chamber 1, and rotating mechanism 5 is used to drive the public affairs of pallet 10
Rotating disk 101 rotates；Rotating mechanism 5 includes the second driving device, the second device for sealing magnetic fluid, coupling base 51 and ratchet
52；Coupling base 51 is arranged on the inner sidewall of vacuum chamber 1, and is embedded with shaft coupling in coupling base 51；Ratchet 52 is equipped with shaft
53, shaft 53 is plugged in one end of shaft coupling；Second device for sealing magnetic fluid be embedded bottom wall in, and the second magnetic fluid is close
Seal apparatus is equipped with second driving shaft 54；One end of second driving shaft 54 is located in vacuum chamber 1, and one end of second driving shaft 54
It is plugged in the other end of shaft coupling, the other end of second driving shaft 54 is located at outside vacuum chamber 1, and second driving shaft 54 is another
Hold with the second driving device be connected.
In this embodiment, the second driving device driving second driving shaft 54 rotates, and second driving shaft 54 passes through shaft coupling
The ratchet 52 being arranged outside shaft 53 and shaft 53 is driven to rotate, the tooth socket phase of ratchet 52 and the revolution gear 101 on pallet 10
Cooperation, such as when ratchet 52 rotates clockwise, pawl offsets with tooth socket, so that the revolution tooth on the driving pallet 10 of ratchet 52
101 rotation of wheel, on the contrary, pawl will be produced relative sliding with tooth socket when ratchet 52 rotates counterclockwise, so that ratchet 52 can not push away
Dynamic revolution gear 101 rotates, it is seen then that ratchet 52 can drive 101 single direction rotation of revolution gear on pallet 10, revolution gear
101 rotation can drive pallet 10 and thereon workpiece revolution, when the setting due to 10 self structure of pallet, revolution gear 101
Power is provided, also can be realized the rotation of workpiece, and then the process such as uniform coated for guaranteeing workpiece.
Wherein, ratchet 52 is fixedly connected with connecting shaft.
Wherein, optionally, coupling base 51 be T-type structure, coupling base 51 by fastener be fixed on vacuum chamber 1 third or
On the 4th inner sidewall of person.
In one embodiment of the application, it is preferable that as shown in Figures 3 to 6, plate valve system 99 include cylinder 91,
Installation door 92 and the support plate 93 being arranged in installation door 92, sealing plate 94, bellows 95, slide assemblies 96 and strut group
Part 97；Wherein, cylinder 91 is arranged in installation door 92；Installation door 92 is the structure of inner hollow；In the one side wall of installation door 92
The first port 921 is offered, offers the second port 922 on opposite another side wall of installation door 92；When plate valve module is set
It sets at 12 side of outlet of vacuum chamber 1, installation door 92 is connected with second sidewall, and the first port 921 is connected with outlet 12
It is logical；When the entrance 11 of vacuum chamber 1 is arranged in plate valve module, installation door 92 is connected with the first side wall, and the second port 922
It is connected with entrance 11；Support plate 93 and sealing plate 94 are connected by spring；The setting of slide assemblies 96 in support plate 93 and
Between sealing plate 94, and slide assemblies 96 are for driving support plate 93 and sealing plate 94 along the guide rod 924 in installation door 92,
And it is parallel to second sidewall sliding；Bellows 95 is arranged in support plate 93, and bellows 95 and strut component 97 are respectively positioned on
Between support plate 93 and sealing plate 94；Wherein, cylinder 91 is used to provide air to bellows 95；Bellows 95 is for expanding simultaneously band
Dynamic strut component 97 pushes support plate 93 to cover the first port 921 and sealing plate 94 is pushed to cover the second port 922.
In this embodiment, when plate valve system 9 is closed, cylinder 91 is inflated into installation door 92 back to front, sliding
Component 96 drives support plate 93, sealing plate 94 and 97 synchronizing moving of strut component between the two, directly under the promotion of air-flow
Projection to support plate 93 can cover the first port 921, when the projection of sealing plate 94 can cover the second port 922,
96 stop motion of slide assemblies, cylinder 91 provides gas to bellows 95 at this time, and the expansion of bellows 95 is elongated, it is intended to Xiang Fanfang
To sealing plate 94 and support plate 93 is pushed open, strut component 97 also starts to push both sealing plate 94 and support plate 93 direction opposite
Direction movement so that support plate 93 covers the first port 921, sealing plate 94 covers the second port 922, props up at this time
Spring between fagging 93 and sealing plate 94 is elongated.When plate valve module is closed, cylinder 91 stops supplying to bellows 95
Air, and the gas inside bellows 95 by outlet pipe be discharged bellows 95, bellows 95 shrink, support plate 93 and
Sealing plate 94 starts to move towards under the action of the spring, shortens distance between the two, then under the action of slide assemblies 96,
So that the first port 921 is no longer blocked in the movement of support plate 93, that is, the first port 921 is opened, similarly, so that sealing plate 94 no longer hides
The second port 922 is kept off, that is, opens the second port 922.
Wherein, when 12 side of outlet of vacuum chamber 1 is arranged in plate valve system 9, installation door 92 is connected with second sidewall
It connects, and the first port 921 is connected with outlet 12, can also cover while support plate 93 can cover the first port 921
Outlet 12, in addition, support plate 93 also can no longer block out the first port 921 and outlet 12；When plate valve system 9 is arranged true
When 11 side of entrance of empty room 1, installation door 92 is connected with the first side wall, and the second port 922 is connected with entrance 11, sealing
Also entrance 11 can be covered while plate 94 can cover the second port 922, in addition, can also open the second port 922 and
Entrance 11.
Wherein, optionally, cooling water pipeline and admission line and gas channels, cylinder 91 are additionally provided in installation door 92
By the air that gas channels are in the supply air of bellows 95 or release bellows 95, cooling water pipeline is used for installation door
92 entirety are cooled down.Wherein, optionally, cylinder sealing 911 is additionally provided between installation door 92 and cylinder 91.
In one embodiment of the application, it is preferable that as shown in Figure 5 and Figure 6, the inner sidewall of installation door 92 is provided with peace
Tankage 923, mounting groove 923 is for placing sealing plate 94；Sealing plate 94 is embedded with sealing strip 941, and sealing strip 941 is located at installation
Between the inner sidewall and sealing plate 94 of door 92.
In this embodiment, when plate valve system 9 is closed, sealing plate 94 is moved at corresponding second port 922, and
Under the action of strut component 97, sealing plate 94 is moved towards mounting groove 923, and finally the wall surface with mounting groove 923 is affixed
It closes, to realize sealing of the sealing plate 94 to the second port 922, especially sealing plate 94 is embedded with sealing strip 941, and sealing strip
941 are located between the inner sidewall and sealing plate 94 of installation door 92, and sealing effect is more preferable.
In one embodiment of the application, it is preferable that as shown in Figure 9 and Figure 10, slide assemblies 96 include boom 961 with
And two guide wheels 962；Wherein, two guide wheels 962 are symmetrically disposed on the both ends of boom 961；The quantity of guide rod 924 is two, and
Two parallel settings of guide rod 924, one of guide wheel 962 are slided along one of guide rod 924, another one guide wheel
962 slide along another one guide rod 924；The bottom end of boom 961 is connected with support plate 93.
In this embodiment, two guide wheels 962 slide on corresponding guide rod 924, to drive support plate 93, sealing plate
94 and 97 synchronizing moving of strut component that is arranged between the two, that is, it realizes to the entrance 11 of vacuum chamber 1 or beating for outlet 12
It opens, either when the entrance 11 or outlet 12 for needing to close vacuum chamber 1, by support plate 93 and is sealed using slide assemblies 96
Plate 94 be moved to the entrance 11 of vacuum chamber 1 or outlet 12 corresponding positions at, convenient for the seal operation of next step.
Wherein, optionally, when 12 side of outlet of vacuum chamber 1 is arranged in the plate valve system 9, two guide rods 924
It is arranged along second sidewall is parallel to；When the entrance 11 of vacuum chamber 1 is arranged in plate valve module, sealing plate 94 covers second
The entrance 11 of port 922 and vacuum chamber 1, two guide rods 924 are arranged along the first side wall is parallel to.
In one embodiment of the application, it is preferable that as shown in Figure 7 and Figure 8, be provided with connecting plate in support plate 93
931；Strut component 97 includes limit shaft 971, the first strut 972 and the second strut 973；Wherein, 971 company of being threaded through of limit shaft
On fishplate bar 931, and the first strut 972 and the second strut 973 are sequentially set on limit shaft 971；First strut 972 is far from limit
One end of position axis 971 is provided with the first axle bed 974, and the first axle bed 974 is connected with support plate 93；Second strut 973 is far from limit
One end of position axis 971 is provided with the second axle bed 975, and the second axle bed 975 is connected with sealing plate 94.
In this embodiment, cylinder 91 supplies air to bellows 95 by admission line, and bellows 95 is expanded and is extended,
And continue pressurizing urges, so that support plate 93 and sealing plate 94 are forced to move round about, the first strut 972 and second
The trend that strut 973 moves round about around limit shaft 971, and respectively by corresponding support plate 93 and sealing plate 94 into
One step pushes, i.e., further struts support plate 93 and sealing plate 94, so that the first support plate 93 covers the first port 921,
Second support plate 93 covers the second port 922, so that when the outlet 12 of vacuum chamber 1 is arranged in the plate valve system 9
When side, support plate 93 covers the outlet 12 of the first port 921 and vacuum chamber 1；When plate valve system 9 is arranged in vacuum chamber
When 1 entrance 11, sealing plate 94 covers the entrance 11 of the second port 922 and vacuum chamber 1.
Wherein, the first axle bed 974 is threadedly coupled with support plate 93；Second axle bed 975 is threadedly coupled with sealing plate 94.
In one embodiment of the application, it is preferable that as shown in Figure 5 and Figure 6, installation door 92 is in support plate 93
Limited block 98 is provided on side wall, limited block 98 is used to limit support plate 93.
In this embodiment, when support plate 93 is moved towards the first port 921, limited block 98 plays the work limited to it
With so that there are certain gaps between support plate 93 and the first port 921, for accommodating sealing ring, to prevent sealing ring quilt
It presss from both sides bad.
Wherein, optionally, limited block 98 includes the connection strap and positive stop strip being connected；Connection strap and positive stop strip form L
Type structure；Wherein, connection strap is fixed in the outside wall surface of the second sidewall of vacuum chamber 1 by fastener, and positive stop strip protrudes from
The outside wall surface of two side walls is arranged.
Wherein, optionally, the quantity of limited block 98 is four, and four limited blocks 98 are symmetrically disposed on going out for vacuum chamber 1
The two sides of mouth 12, but it is not limited only to number as described in the examples.
Embodiments herein also provides a kind of coating system, uses including plated film described in any of the above-described embodiment, thus,
Whole advantageous effects with the device, here, repeating no more.
Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the application, rather than its limitations；To the greatest extent
Pipe is described in detail the application referring to foregoing embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, each embodiment technology of the application that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (10)
1. a kind of continuous vacuum coating device characterized by comprising vacuum chamber, the vacuum chamber are the structure of inner hollow,
And the first side wall of the vacuum chamber offers entrance, the opposite second sidewall of institute's vacuum chamber offers outlet；
At least two transport mechanisms are provided in the vacuum chamber；Transport mechanism described in wherein at least one is arranged in the vacuum
On the third side wall of room, wherein at least another described transport mechanism is arranged on the 4th opposite side wall of the vacuum chamber,
The transport mechanism is used to for the pallet for carrying workpiece being delivered in the vacuum chamber from the entrance, or for being placed on
It states and carries the pallet of workpiece in vacuum chamber and export the vacuum chamber from the outlet；
The quantity of the vacuum chamber be it is multiple, multiple vacuum chambers are sequentially arranged, and are arranged between two vacuum chambers of arbitrary neighborhood
There is plate valve system, two vacuum chambers that the plate valve system is used to control arbitrary neighborhood are connected or are isolated.
2. continuous vacuum coating device according to claim 1, which is characterized in that the inlet of the first vacuum chamber is set
It is equipped with rotatable first door body, the exit of the tail vacuum chamber is provided with rotatable second door body.
3. continuous vacuum coating device according to claim 1, which is characterized in that the transport mechanism includes the first driving
Device and multiple transmission components；Multiple transmission components are arranged on the side wall of the vacuum chamber, and along the vacuum chamber
The outlet of entrance towards the vacuum chamber be intervally arranged；
The transmission component includes the first device for sealing magnetic fluid, the first transmission shaft and driving wheel；Wherein, first magnetic current
Body sealing device is embedded on the side wall of the vacuum chamber, and first transmission shaft is threaded through first device for sealing magnetic fluid
On, and one end of first transmission shaft is located at outside the vacuum chamber, the other end of first transmission shaft is located at the vacuum
Interior, the driving wheel tube are located on the other end of first transmission shaft；First transmission axle position of multiple transport mechanisms
It is connected in one end outside the vacuum chamber by synchronous belt, and the first driving device is multiple by synchronous belt driving
First transmission shaft of the transport mechanism rotates.
4. continuous vacuum coating device according to claim 3, which is characterized in that it further include at least two guidance sets,
Multiple guidance sets are above the transport mechanism；Guidance set described in wherein at least one is arranged in the third side wall
Inner wall on, wherein at least another described guidance set is arranged on the inner wall of the 4th side wall, and the guidance set is used
The pallet of workpiece is carried in carrying and being driven；
The guidance set includes fixed block, guide holder and directive wheel；Wherein, the vacuum chamber is arranged in the fixed block
On inner sidewall；The guide holder is arranged on the fixed block, and the guide holder be provided with extend along vertical direction it is defeated
Shaft, the directive wheel are set on the output shaft.
5. continuous vacuum coating device according to claim 1, which is characterized in that it further include rotating mechanism, the rotation
Mechanism is arranged on the vacuum chamber, and the rotating mechanism is for driving the revolution gear of the pallet to rotate；
The rotating mechanism includes the second driving device, the second device for sealing magnetic fluid, coupling base and ratchet；The coupling base
It is arranged on the inner sidewall of the vacuum chamber, and is embedded with shaft coupling in the coupling base；The ratchet is equipped with shaft, described
Shaft is plugged in one end of the shaft coupling；Second device for sealing magnetic fluid is embedded in the bottom wall of the vacuum chamber,
And second device for sealing magnetic fluid is equipped with second driving shaft；One end of the second driving shaft is located at the vacuum chamber
It is interior, and one end of the second driving shaft is plugged in the other end of the shaft coupling, the other end position of the second driving shaft
In outside the vacuum chamber, and the other end of the second driving shaft is connected with second driving device.
6. continuous vacuum coating device according to any one of claim 1 to 5, which is characterized in that the gate valve machine
Structure includes cylinder, installation door and the support plate being arranged in the installation door, sealing plate, bellows, slide assemblies and support
Bar assembly；
Wherein, the cylinder is arranged in the installation door；The installation door is the structure of inner hollow, and the installation door
One side wall is affixed with the second sidewall of the adjacent vacuum chamber merges connection, and is offered in the one side wall of the installation door
One port；Opposite another side wall of the installation door is affixed with the first side wall of the adjacent vacuum chamber merges connection, and
The second port is offered on opposite another side wall of the installation door；
The support plate and the sealing plate are connected by spring；Slide assemblies setting is in the support plate and described
Between sealing plate, and the slide assemblies are for driving the support plate and the sealing plate along leading in the installation door
Bar, and it is parallel to the second sidewall sliding；The bellows is arranged in the support plate, and the bellows and described
Strut component is respectively positioned between the support plate and the sealing plate；Wherein, the cylinder is used to provide to the bellows empty
Gas；The bellows is for expanding and support plate described in the strut components drive being driven to cover first port and push away
It moves the sealing plate and covers second port.
7. continuous vacuum coating device according to claim 6, which is characterized in that the slide assemblies include boom and
Two guide wheels；Wherein, two guide wheels are symmetrically disposed on the both ends of the boom；The quantity of the guide rod is two, and two
The parallel setting of a guide rod, one of them described guide wheel is slided along guide rod described in one of them, described in another one
Guide wheel is slided along guide rod described in another one；The bottom end of the boom is connected with the support plate.
8. continuous vacuum coating device according to claim 6, which is characterized in that be provided with connection in the support plate
Plate；The strut component includes limit shaft, the first strut and the second strut；Wherein, the limit shaft is threaded through the connection
On plate, and first strut and second strut are sequentially set on the limit shaft；First strut is far from institute
The one end for stating limit shaft is provided with the first axle bed, and first axle bed is connected with the support plate；Second strut is separate
One end of the limit shaft is provided with the second axle bed, and second axle bed is connected with the sealing plate.
9. continuous vacuum coating device according to claim 6, which is characterized in that the installation door is close to the support plate
Inner sidewall on be provided with limited block, the limited block is used to limit the support plate.
10. a kind of coating system, which is characterized in that filled including continuous vacuum coating described in any one of claims 1 to 9
It sets.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821555052.5U CN208844192U (en) | 2018-09-21 | 2018-09-21 | Continuous vacuum coating device and coating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821555052.5U CN208844192U (en) | 2018-09-21 | 2018-09-21 | Continuous vacuum coating device and coating system |
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| Publication Number | Publication Date |
|---|---|
| CN208844192U true CN208844192U (en) | 2019-05-10 |
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ID=66374461
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821555052.5U Active CN208844192U (en) | 2018-09-21 | 2018-09-21 | Continuous vacuum coating device and coating system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112080731A (en) * | 2020-07-22 | 2020-12-15 | 湘潭宏大真空技术股份有限公司 | Multi-chamber continuous optical film coating machine |
-
2018
- 2018-09-21 CN CN201821555052.5U patent/CN208844192U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112080731A (en) * | 2020-07-22 | 2020-12-15 | 湘潭宏大真空技术股份有限公司 | Multi-chamber continuous optical film coating machine |
| CN112080731B (en) * | 2020-07-22 | 2022-10-18 | 湘潭宏大真空技术股份有限公司 | Multi-chamber continuous optical film coating machine |
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