CN208844191U - Plated film vacuum chamber and coating system - Google Patents
Plated film vacuum chamber and coating system Download PDFInfo
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- CN208844191U CN208844191U CN201821554992.2U CN201821554992U CN208844191U CN 208844191 U CN208844191 U CN 208844191U CN 201821554992 U CN201821554992 U CN 201821554992U CN 208844191 U CN208844191 U CN 208844191U
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Abstract
This application involves technical field of vacuum plating, and more particularly, to a kind of plated film vacuum chamber and coating system, plated film vacuum chamber includes: vacuum chamber and at least two transport mechanisms；Wherein, vacuum chamber is the structure of inner hollow, and the first side wall of vacuum chamber offers entrance, and the opposite second sidewall of institute's vacuum chamber offers outlet；Wherein at least one transport mechanism is arranged on the third side wall of vacuum chamber, and wherein at least another transport mechanism is arranged on the 4th opposite side wall of vacuum chamber, and transport mechanism is for transmitting the pallet for carrying workpiece.It can be seen that, this plated film is passed through with vacuum chamber in vacuum chamber inlet porting and outlet, and it is provided with transport mechanism between the inlet, workpiece can be thus sent in vacuum chamber from entrance is defeated, or vacuum chamber is exported from outlet, it is simple, convenient, high degree of automation, and then improve working efficiency.
Description
Technical field
This application involves technical field of vacuum plating, more particularly, to a kind of plated film vacuum chamber and coating system.
Background technique
Currently, existing vacuum coating cell structure is simple, only there is single-side-door, workpiece is directly placed into vacuum chamber by worker
It is interior, then the position of workpiece is manually adjusted, it is manually being taken out after plated film, it is troublesome in poeration, and low efficiency.
Utility model content
The application's is designed to provide a kind of plated film vacuum chamber and coating system, existing in the prior art to solve
Vacuum film coating chamber only has unilateral enabling, and by manually part, adjustment and pickup is put, the degree of automation is low, ineffective
Technical problem.
This application provides a kind of plated film vacuum chambers, comprising: vacuum chamber and at least two transport mechanisms；Wherein, institute
The structure that vacuum chamber is inner hollow is stated, and the first side wall of the vacuum chamber offers entrance, opposite the of institute's vacuum chamber
Two side walls offer outlet；Transport mechanism described in wherein at least one is arranged on the third side wall of the vacuum chamber, and wherein
At least one described transport mechanism is arranged on the 4th opposite side wall of the vacuum chamber, and the transport mechanism will be for that will carry
There is the pallet of workpiece to be delivered in the vacuum chamber from the entrance, or for being placed on carrying workpiece in the vacuum chamber
Pallet exports the vacuum chamber from the outlet.
In any of the above-described technical solution, further, the transport mechanism includes first driving device and multiple biographies
Dynamic component；Multiple transmission components are arranged on the side wall of the vacuum chamber, and along the entrance of the vacuum chamber described in
The outlet of vacuum chamber is intervally arranged；The transmission component includes the first device for sealing magnetic fluid, the first transmission shaft and driving wheel；
Wherein, first device for sealing magnetic fluid is embedded on the side wall of the vacuum chamber, and first transmission shaft is threaded through described
On first device for sealing magnetic fluid, and one end of first transmission shaft is located at outside the vacuum chamber, first transmission shaft
The other end is located in the vacuum chamber, and the driving wheel tube is located on the other end of first transmission shaft；Multiple transmission
One end that first transmission shaft of component is located at outside the vacuum chamber is connected by synchronous belt, and the first driving device passes through
The synchronous belt drives the first transmission shaft of multiple transfer assemblies to rotate.
In any of the above-described technical solution, further, the plated film vacuum chamber further includes at least two guidance sets,
Multiple guidance sets are above the transport mechanism；Guidance set described in wherein at least one is arranged in the third side wall
Inner wall on, wherein at least another described guidance set is arranged on the inner wall of the 4th side wall, and the guidance set is used
The pallet of workpiece is carried in carrying and being driven.
In any of the above-described technical solution, further, the guidance set includes fixed block, guide holder and guiding
Wheel；Wherein, the fixed block is arranged on the inner sidewall of the vacuum chamber；The guide holder is arranged on the fixed block, and
The guide holder is provided with the output shaft extended along vertical direction, and the directive wheel is set on the output shaft.
In any of the above-described technical solution, further, the guide holder includes the first mounting plate and the second mounting plate；
Wherein, first mounting plate and the perpendicular connection of the second mounting plate, and form T-type structure；First mounting plate is set
It sets on the fixed block, and is connected with the fixed block；The output shaft is arranged on second mounting plate, and described
The outer edge of the outer edge of directive wheel second mounting plate is close to the center of the vacuum chamber.
In any of the above-described technical solution, further, the plated film vacuum chamber further includes limit assembly, the limit
Component is arranged on the bottom wall of the vacuum chamber；The limit assembly includes the second driving device, limit base and limited block；Its
In, the limiting slot extended along vertical direction is offered on the limit base, the limited block is plugged in the limiting slot；Institute
The lower section that the vacuum chamber is arranged in the second driving device is stated, and second driving device passes through the vacuum chamber and the limit
Position block is connected, and second driving device is for driving the limited block to slide along the limiting slot.
In any of the above-described technical solution, further, the plated film vacuum chamber further includes rotating mechanism, the rotation
Mechanism is arranged on the vacuum chamber, and the rotating mechanism is for driving the revolution gear of the pallet to rotate；The rotation
Mechanism includes third driving device, the second device for sealing magnetic fluid, coupling base and ratchet；The coupling base setting is described true
On the inner sidewall of empty room, and shaft coupling is embedded in the coupling base；Shaft is equipped in the ratchet, the shaft is plugged in
In one end of the shaft coupling；Second device for sealing magnetic fluid is embedded in the bottom wall of the vacuum chamber, and described second
Second driving shaft is equipped in device for sealing magnetic fluid；One end of the second driving shaft is located in the vacuum chamber, and described
One end of second driving shaft is plugged in the other end of the shaft coupling, and the other end of the second driving shaft is located at the vacuum
Outdoor, and the other end of the second driving shaft is connected with the third driving device.
In any of the above-described technical solution, further, it is provided on the third side wall and the 4th side wall
The door body that can be rotated relative to the vacuum chamber.
In the above-mentioned technical solutions, further, the quantity of the transport mechanism is even number, and is transmitted described in even number
Mechanism is symmetrically disposed on opposite the third side wall and the 4th side wall.
Present invention also provides a kind of coating system, including plated film vacuum chamber described in any of the above-described technical solution, because
And whole advantageous effects with the device, here, repeating no more.
Compared with prior art, the application has the beneficial effect that
Plated film vacuum chamber provided by the present application, including vacuum chamber, driving mechanism and at least two transport mechanisms,
In, vacuum chamber is the structure of inner hollow, and the first side wall of vacuum chamber offers entrance, the opposite second sidewall of institute's vacuum chamber
Outlet is offered, wherein at least one transport mechanism is arranged on the third side wall of vacuum chamber, and transport mechanism will be for that will carry
The pallet of workpiece is delivered to vacuum chamber from entrance, or for being placed on carrying the pallet of workpiece in vacuum chamber from outlet output very
Empty room.
The pallet for being mounted with workpiece in use, can be sent to very by this plated film vacuum chamber by artificial placement or instrument
The inlet of empty room, and pallet is placed on the transfer mechanism, and pallet is in contact with driving mechanism, in driving mechanism
Under the action of, pallet is sent to the indoor suitable position of vacuum, and import and outlet can be being covered using cover board etc.,
Plated film etc. in certain process, such as vacuum heating indoor, vacuum chamber is carried out to workpiece, when processing terminate to workpiece
Afterwards, vacuum chamber is exported from outlet using the pallet that transport mechanism driving is mounted with workpiece, it is seen then that the degree of automation is higher, saves
Shi Shengli, especially when multiple vacuum chambers are simultaneously in use, can be realized workpiece continuously transmitting between multiple vacuum chambers.
As it can be seen that this plated film is with vacuum chamber by setting between vacuum chamber inlet porting and outlet and reentrancy and outlet
It is equipped with transport mechanism, it is thus possible to be sent in vacuum chamber from entrance by workpiece is defeated, or export vacuum chamber, operation letter from outlet
Singly, conveniently, high degree of automation, and then improve working efficiency.
Coating system provided by the present application thus passes through the indoor biography of vacuum including plated film vacuum chamber described above
Mechanism is sent to realize automatically delivering for workpiece, time saving and energy saving, high degree of automation.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the application specific embodiment or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the application, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is that the assembling structure of plated film vacuum chamber provided by the embodiments of the present application and the pallet for carrying workpiece is illustrated
Figure；
Fig. 2 is enlarged structure schematic diagram of the Fig. 1 at A；
Fig. 3 is that the another structure of assembly of plated film vacuum chamber provided by the embodiments of the present application and the pallet for carrying workpiece is shown
It is intended to；
Fig. 4 is enlarged structure schematic diagram of the Fig. 3 at B；
Fig. 5 is enlarged structure schematic diagram of the Fig. 3 at C；
Fig. 6 is the structural schematic diagram of plated film vacuum chamber provided by the embodiments of the present application；
Fig. 7 is enlarged structure schematic diagram of the Fig. 6 at D.
Appended drawing reference:
1- vacuum chamber, 11- entrance, the outlet 12-, 13- door body, 2- transport mechanism, 21- transmission component, the first magnetic current of 211-
Body sealing device, the first transmission shaft of 212-, 213- transmission wheel, 3- guidance set, 31- fixed block, 32- guide holder, 321- first
Mounting plate, the second mounting plate of 322-, 33- directive wheel, 4- limit assembly, 41- limit base, 42- limited block, the driving dress of 43- second
It sets, 5- rotating mechanism, 51- coupling base, 52- ratchet, 53- shaft, 54- second driving shaft, 6- bracket, 7- molecular pump, 8- prime
Pump, 9- pallet, 91- revolution gear.
Specific embodiment
It is clearly and completely described below in conjunction with technical solution of the attached drawing to the application, it is clear that described implementation
Example is some embodiments of the present application, instead of all the embodiments.
The component of the embodiment of the present application for usually describing and showing in attached drawing here can be with a variety of different configurations
To arrange and design.Therefore, the detailed description of the embodiments herein provided in the accompanying drawings is not intended to limit below and is wanted
The scope of the present application of protection is sought, but is merely representative of the selected embodiment of the application.
Based on the embodiment in the application, those of ordinary skill in the art are obtained without making creative work
The every other embodiment obtained, shall fall in the protection scope of this application.
In the description of the present application, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for describe the application and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present application, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in application.
Referring to Fig. 1 to Fig. 7 description plated film according to the application some embodiments use and coating system.
Referring to shown in Fig. 1, Fig. 3 and Fig. 6, embodiments herein provides a kind of plated film vacuum chamber, comprising: vacuum
Room 1 and at least two transport mechanisms 2；Wherein, vacuum chamber 1 is the structure of inner hollow, and the first side wall of vacuum chamber 1 opens up
There is entrance 11, the opposite second sidewall of vacuum chamber 1 offers outlet 12；Wherein at least one transport mechanism 2 is arranged in vacuum
On the third side wall of room 1, and wherein at least another transport mechanism 2 is arranged on the 4th opposite side wall of vacuum chamber 1, transmission
Mechanism 2 is used to for the pallet 9 for carrying workpiece being delivered in vacuum chamber 1 from entrance 11, or for carrying workpiece in being placed on
Pallet 9 from outlet 12 export vacuum chamber 1.
Plated film vacuum chamber provided by the present application, including vacuum chamber 1 and at least two transport mechanisms 2, wherein vacuum chamber
1 is the structure of inner hollow, and the first side wall of vacuum chamber 1 offers entrance 11, and the opposite second sidewall of vacuum chamber 1 opens up
There is outlet 12, wherein at least one transport mechanism 2 is arranged on the third side wall of vacuum chamber 1, wherein at least one transport mechanism 2
It is arranged on the 4th opposite side wall of vacuum chamber 1, transport mechanism 2 is for conveying the pallet 9 for carrying workpiece from entrance 11
Pallet 9 to vacuum chamber 1, or for carrying workpiece in being placed on exports vacuum chamber 1 from outlet 12.
The pallet 9 for being mounted with workpiece in use, can be sent to by this plated film vacuum chamber by artificial placement or instrument
At the entrance 11 of vacuum chamber 1, and pallet 9 is placed in transport mechanism 2, transport mechanism 2 by pallet 9 be sent in it is suitable
Position, and 12 being covered import and outlet using cover board etc., carries out certain process to workpiece, for example, in plus
Hot, interior plated film etc. is driven using transport mechanism 2 and is mounted with the pallet 9 of workpiece from outlet 12 when the after treatment to workpiece
Output, it is seen then that the degree of automation is higher, time saving and energy saving, especially when multiple while in use, can be realized workpiece between multiple
Continuously transmit.
As it can be seen that this plated film passes through 1 inlet porting 11 of vacuum chamber and outlet 12 and reentrancy 11 and outlet 12 with vacuum chamber
Between be provided with transport mechanism 2, it is thus possible to be sent in vacuum chamber 1 from entrance 11 by workpiece is defeated, or exported from outlet 12
Vacuum chamber 1, simple, convenient, high degree of automation, and then improve working efficiency.
Wherein, the first side wall is oppositely arranged with second sidewall, and third side wall and the 4th side wall are oppositely arranged.First side
Wall, the third side wall, the second sidewall and the 4th side wall are sequentially connected and connect, and form square structure, but not only limit
In this, it can also enclose and be set as other shapes, certainly, may also include other side walls, and be set as other shapes with enclosing with upper side wall.
Wherein, optionally, the bottom end of vacuum chamber 1 is also provided with through-hole, and through-hole is for being connected to the molecular pump 7 vacuumized；
The lower section of vacuum chamber 1 is also provided with bracket 6, and bracket 6 has been used to support, in order to which molecular pump 7 is placed under vacuum chamber 1
Side；This plated film vacuum chamber further includes fore pump 8, and fore pump 8 is connected by pipeline with the inside of vacuum chamber 1.
In one embodiment of the application, it is preferable that the quantity of transport mechanism 2 is even number, and even number transport mechanism 2
It is symmetrically disposed on opposite third side wall and the 4th side wall.
In this embodiment, third side wall and the 4th sidewall symmetry are provided with the transport mechanism 2 of same number, so that holding
The pallet 9 for being loaded with workpiece transmits more steady.Certainly, the quantity of transport mechanism 2 is not limited only in figure shown by embodiment
Eight.
In one embodiment of the application, it is preferable that shown in as shown in Figure 1, Figure 2, Fig. 6 and Fig. 7, transport mechanism 2 includes
First driving device and multiple transmission components 21；On the side wall that multiple transmission components 21 are arranged at, and along entrance 11
The outlet 12 of direction is intervally arranged；Transmission component 21 includes the first device for sealing magnetic fluid 211, the first transmission shaft 212 and passes
Driving wheel；Wherein, the first device for sealing magnetic fluid 211 be embedded side wall on, it is close that the first transmission shaft 212 is threaded through the first magnetic fluid
On seal apparatus 211, and one end of the first transmission shaft 212 is located at outside vacuum chamber 1, and the other end of the first transmission shaft 212 is located at vacuum
In room 1, driving wheel tube is located on the other end of the first transmission shaft 212；First transmission shaft 212 of multiple transfer assemblies 21 is located at true
One end outside empty room 1 is connected by synchronous belt, and first driving device drives the of multiple transfer assemblies 21 by synchronous belt
The rotation of one transmission shaft 212.
In this embodiment, first driving device can drive the transmission wheel 213 of multiple transfer assemblies 21 by synchronous belt
It rotates synchronously, transmission wheel 213, which is able to drive, to be carried the pallet 9 of workpiece thereon and move along rectilinear direction.Wherein, optionally,
Mounting blocks are cyclic structure.Wherein, first driving device is motor.Wherein, optionally, the first device for sealing magnetic fluid 211 is
The existing sealing device sold on the market.
Wherein, optionally, one of transport mechanism 2 is arranged on third side wall, multiple transmission of a transport mechanism 2
Component 21 is intervally arranged along from the entrance 11 of vacuum chamber 1 to outlet 12 on third side wall, and another one transport mechanism 2 is set
It sets on the 4th side wall, multiple transfer assemblies 21 of another transport mechanism 2 are on the 4th side wall along the entrance from vacuum chamber 1
11 are intervally arranged to outlet 12.
In one embodiment of the application, it is preferable that as shown in figures 1 to 6, plated film vacuum chamber further includes at least two
A guidance set 3, multiple guidance sets 3 are above transport mechanism 2；Wherein at least one guidance set 3 is arranged in third side wall
Inner wall on, wherein at least another guidance set 3 is arranged on the inner wall of the 4th side wall, and guidance set 3 is for carrying and pass
The dynamic pallet 9 for carrying workpiece.
In this embodiment, guidance set 3 is above transport mechanism 2, so that guidance set 3 will not interfere with transport mechanism
2 work, and the setting of guidance set 3 meets the structure setting of pallet 9.It is respectively provided on third side wall and the 4th opposite side wall
There is guidance set 3, can guarantee that pallet 9 is oriented in the left and right sides, because without departing from route.
In one embodiment of the application, it is preferable that as shown in Figure 1, Figure 2 and shown in Fig. 7, guidance set 3 includes fixing
Block 31, guide holder 32 and directive wheel 33；Wherein, fixed block 31 is arranged on the inner sidewall of vacuum chamber 1；The setting of guide holder 32 exists
On fixed block 31, and guide holder 32 is provided with the output shaft extended along vertical direction, and directive wheel 33 is set on output shaft.
In this embodiment, the axis of the output shaft of guidance set is placed in the vertical direction, and directive wheel 33 is set in defeated
On shaft, directive wheel 33 is rotated along vertical direction, the outer edge and pallet 9 of directive wheel 33 are tangent, and play
The effect being oriented to during pallet 9 is mobile to it, prevents it from deviateing the route of operation.Wherein, optionally, fixed block passes through tight
The side wall of firmware vacuum chamber 1 corresponding with vacuum chamber 1 is connected.
In one embodiment of the application, it is preferable that as shown in Figure 1 to Figure 3, guide holder 32 includes the first mounting plate
321 and second mounting plate 322；Wherein, the first mounting plate 321 and the perpendicular connection of the second mounting plate 322, and form T junction
Structure；The setting of first mounting plate 321 is connected on fixed block 31, and with fixed block 31；Output shaft is arranged in the second mounting plate 322
On, and the center that the outer edge of directive wheel 33 is close compared with the outer edge of the second mounting plate 322.
In this embodiment, the structure that the first mounting plate 321 and the second mounting plate 322 are combined into provides for directive wheel 33
Installation site, and directive wheel 33 is led to the inside of vacuum chamber 1, enable directive wheel 33 and the pallet 9 tangent.Wherein,
The outer edge of directive wheel 33 compared with the second mounting plate 322 outer edge close to the center of vacuum chamber 1, guarantee the outer edge of directive wheel 33
Can be tangent with pallet 9, and the second mounting plate 322 will not play the role of interference.
In one embodiment of the application, it is preferable that as shown in Figure 3 and Figure 5, plated film is limited with further including limit assembly 4
Hyte part 4 is arranged on the bottom wall of vacuum chamber 1；Limit assembly 4 includes the second driving device 43, limit base 41 and limited block
42；Wherein, the limiting slot extended along vertical direction is offered on limit base 41, limited block 42 is plugged in limiting slot；Second
The lower section of vacuum chamber 1 is arranged in driving device 43, and the second driving device 43 passes through vacuum chamber 1 and is connected with limited block 42, the
Two driving devices 43 are for driving limited block 42 to slide along limiting slot.
In this embodiment, when the pallet 9 for carrying workpiece is located in transport mechanism 2, limited block 42 can be to carrying
There is the pallet 9 of workpiece to be limited, it is made to stop at suitable position in vacuum chamber 1, wait to be processed, wherein the second driving
Device 43 can adjust the height of limited block 42 constantly, when workpiece needs to export after treatment, 43 energy of the second driving device
Enough driving limited block 42 move downward, limit it no longer to pallet 9, pallet 9 can under the driving of driving mechanism along
Transport mechanism 2 moves ahead.
Wherein, optionally, the quantity of limit assembly 4 is two, and two limit assemblies 4 are along being parallel to the first side wall interval
Arrangement, and two limit assemblies 4 are close to be arranged at the outlet 12 of vacuum chamber 1, certainly, are not limited only to this.
Wherein, optionally, limit base 41 includes mounting plate and protruding block, and protruding block is arranged on a mounting board, mounting plate
It being fixed on by fastener on the bottom wall of vacuum chamber 1, limiting slot is provided on protruding block, and through the top end face of protruding block,
Certainly, it is not limited only to this.
In one embodiment of the application, it is preferable that as shown in Fig. 3, Fig. 4, Fig. 6 and Fig. 7, plated film with vacuum chamber also
Including rotating mechanism 5, rotating mechanism 5 is arranged on vacuum chamber 1, and rotating mechanism 5 is for driving the revolution gear 91 of pallet 9 to revolve
Turn；Rotating mechanism 5 includes third driving device, the second device for sealing magnetic fluid, coupling base 51 and ratchet 52；Coupling base 51 is set
It sets on the inner sidewall of vacuum chamber 1, and is embedded with shaft coupling in coupling base 51；Ratchet 52 is equipped with shaft 53, and shaft 53 plugs
In one end of shaft coupling；Second device for sealing magnetic fluid is embedded in the bottom wall of vacuum chamber 1, and the second device for sealing magnetic fluid
It is equipped with second driving shaft 54；One end of second driving shaft 54 is located in vacuum chamber 1, and one end of second driving shaft 54 is plugged in
In the other end of shaft coupling, the other end of second driving shaft 54 is located at outside vacuum chamber 1, and the other end of second driving shaft 54 and
Third driving device is connected.
In this embodiment, third driving device driving second driving shaft 54 rotates, and second driving shaft 54 passes through shaft coupling
The ratchet 52 being arranged outside shaft 53 and shaft 53 is driven to rotate, the tooth socket of the revolution gear 91 on ratchet 52 and pallet 9 matches
It closes, such as when ratchet 52 rotates clockwise, pawl offsets with tooth socket, so that the revolution gear on the driving pallet 9 of ratchet 52
91 rotations, on the contrary, pawl will be produced relative sliding with tooth socket when ratchet 52 rotates counterclockwise, so that ratchet 52 can not push
Revolution gear 91 rotates, it is seen then that ratchet 52 can drive 91 single direction rotation of revolution gear on pallet 9, and revolution gear 91 rotates
Pallet 9 and workpiece revolution thereon can be driven, when the setting due to 9 self structure of pallet, revolution gear 91 provides power,
It can be realized the rotation of workpiece, and then the process such as uniform coated for guaranteeing workpiece, avoid 91 energy of revolution gear of pallet 9
It is enough to rotate in both directions, lead to occur lapping defect etc. when plated film.
Wherein, ratchet 52 is fixedly connected with shaft 53.
Wherein, optionally, coupling base 51 be T-type structure, coupling base 51 by fastener be fixed on vacuum chamber 1 third or
On the 4th inner sidewall of person.
In one embodiment of the application, it is preferable that as shown in figures 1 to 6, on third side wall and the 4th side wall
Be provided with can relative vacuum room 1 rotate door body 13.
In this embodiment, be provided on third side wall and the 4th side wall can the door body 13 that rotates of relative vacuum room 1,
Convenient for clearing up etc. vacuum chamber 1 to by opening the above door body 13.
Wherein, optionally, door body 13 and vacuum chamber 1 are hinged.
Embodiments herein also provides a kind of coating system, uses including plated film described in any of the above-described embodiment, thus,
Whole advantageous effects with the device, here, repeating no more.
Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the application, rather than its limitations；To the greatest extent
Pipe is described in detail the application referring to foregoing embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, each embodiment technology of the application that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (10)
1. a kind of plated film vacuum chamber characterized by comprising vacuum chamber and at least two transport mechanisms；
Wherein, the vacuum chamber is the structure of inner hollow, and the first side wall of the vacuum chamber offers entrance, institute's vacuum chamber
Opposite second sidewall offer outlet；
Transport mechanism described in wherein at least one is arranged on the third side wall of the vacuum chamber, and wherein at least described in another
Transport mechanism is arranged on the 4th opposite side wall of the vacuum chamber, and the transport mechanism is used to carry the pallet of workpiece
Be delivered in the vacuum chamber from the entrance, or the pallet for being placed on carrying workpiece in the vacuum chamber from it is described go out
Mouth exports the vacuum chamber.
2. plated film vacuum chamber according to claim 1, which is characterized in that the transport mechanism includes first driving device
And multiple transmission components；Multiple transmission components are arranged on the side wall of the vacuum chamber, and entering along the vacuum chamber
Mouth is intervally arranged towards the outlet of the vacuum chamber；
The transmission component includes the first device for sealing magnetic fluid, the first transmission shaft and driving wheel；Wherein, first magnetic current
Body sealing device is embedded on the side wall of the vacuum chamber, and first transmission shaft passes through first device for sealing magnetic fluid
On, and one end of first transmission shaft is located at outside the vacuum chamber, the other end of first transmission shaft is located at the vacuum
Interior, the driving wheel tube are located on the other end of first transmission shaft；First transmission axle position of multiple transfer assemblies
It is connected in one end outside the vacuum chamber by synchronous belt, and the first driving device is multiple by synchronous belt driving
First transmission shaft of the transfer assembly rotates.
3. plated film vacuum chamber according to claim 2, which is characterized in that it further include at least two guidance sets, it is multiple
The guidance set is above the transport mechanism；Guidance set described in wherein at least one is arranged in the third side wall
On wall, wherein at least another described guidance set is arranged on the inner wall of the 4th side wall, and the guidance set is for holding
It carries and is driven the pallet for carrying workpiece.
4. plated film vacuum chamber according to claim 3, which is characterized in that the guidance set includes fixed block, guiding
Seat and directive wheel；Wherein, the fixed block is arranged on the inner sidewall of the vacuum chamber；The guide holder is arranged described solid
Determine on block, and the guide holder is provided with the output shaft extended along vertical direction, the directive wheel is set in the output shaft
On.
5. plated film vacuum chamber according to claim 4, which is characterized in that the guide holder include the first mounting plate and
Second mounting plate；Wherein, first mounting plate and the perpendicular connection of the second mounting plate, and form T-type structure；Described
The setting of one mounting plate is connected on the fixed block, and with the fixed block；The output shaft setting is in second installation
On plate, and the outer edge of outer edge second mounting plate of the directive wheel is close to the center of the vacuum chamber.
6. plated film vacuum chamber according to any one of claim 1 to 5, which is characterized in that it further include limit assembly, institute
Limit assembly is stated to be arranged on the bottom wall of the vacuum chamber；The limit assembly includes the second driving device, limit base and limit
Position block；Wherein, the limiting slot extended along vertical direction is offered on the limit base, the limited block is plugged in the limit
In slot；The lower section of the vacuum chamber is arranged in second driving device, and second driving device passes through the vacuum chamber
It is connected with the limited block, second driving device is for driving the limited block to slide along the limiting slot.
7. plated film vacuum chamber according to any one of claim 1 to 5, which is characterized in that it further include rotating mechanism, institute
It states rotating mechanism to be arranged on the vacuum chamber, and the rotating mechanism is for driving the revolution gear of the pallet to rotate；
The rotating mechanism includes third driving device, the second device for sealing magnetic fluid, coupling base and ratchet；The coupling base
It is arranged on the inner sidewall of the vacuum chamber, and is embedded with shaft coupling in the coupling base；The ratchet is equipped with shaft, described
Shaft is plugged in one end of the shaft coupling；Second device for sealing magnetic fluid is embedded in the bottom wall of the vacuum chamber,
And second device for sealing magnetic fluid is equipped with second driving shaft；One end of the second driving shaft is located at the vacuum chamber
It is interior, and one end of the second driving shaft is plugged in the other end of the shaft coupling, the other end position of the second driving shaft
In outside the vacuum chamber, and the other end of the second driving shaft is connected with the third driving device.
8. plated film vacuum chamber according to any one of claim 1 to 5, which is characterized in that the third side wall and
The door body that can be rotated relative to the vacuum chamber is provided on 4th side wall.
9. plated film vacuum chamber according to any one of claim 1 to 5, which is characterized in that the number of the transport mechanism
Amount is even number, and transport mechanism described in even number is symmetrically disposed on opposite the third side wall and the 4th side wall.
10. a kind of coating system, which is characterized in that including plated film vacuum chamber described in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821554992.2U CN208844191U (en) | 2018-09-21 | 2018-09-21 | Plated film vacuum chamber and coating system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821554992.2U CN208844191U (en) | 2018-09-21 | 2018-09-21 | Plated film vacuum chamber and coating system |
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| Publication Number | Publication Date |
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| CN208844191U true CN208844191U (en) | 2019-05-10 |
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| CN201821554992.2U Active CN208844191U (en) | 2018-09-21 | 2018-09-21 | Plated film vacuum chamber and coating system |
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