CN208844190U - Vacuum coater and coating system - Google Patents

Abstract

This application involves technical field of vacuum plating, and more particularly, to a kind of vacuum coater and coating system, vacuum coater includes vacuum chamber and plate valve system；Wherein, the first side wall of vacuum chamber offers entrance, and opposite second sidewall offers outlet；At least two transport mechanisms are provided in vacuum chamber；Wherein at least one transport mechanism is arranged on the third side wall of vacuum chamber, and wherein at least another transport mechanism is arranged on the 4th opposite side wall；Transport mechanism is used to for the pallet for carrying workpiece being delivered in vacuum chamber from entrance, or is placed on the indoor pallet for carrying workpiece of vacuum and exports vacuum chamber from outlet.As it can be seen that plate valve system can turn on or off entrance or the outlet of vacuum chamber, the degree of automation is higher, high-efficient, in addition, realizing automatically delivering for workpiece, time saving and energy saving, high production efficiency by the indoor transport mechanism of vacuum.

Description

Vacuum coater and coating system

Technical field

This application involves technical field of vacuum plating, more particularly, to a kind of vacuum coater and coating system.

Background technique

Currently, existing vacuum coating cell structure is simple, only there is single-side-door, workpiece is directly placed into vacuum chamber by worker It is interior, then the position of workpiece is manually adjusted, it is manually being taken out after plated film, it is troublesome in poeration, and low efficiency, in addition, vacuum Room does not have the valve that can be automatically opened or close, especially when multiple vacuum chambers link together, cannot achieve and beats automatically On or off is closed.

Utility model content

The application's is designed to provide a kind of vacuum coater and coating system, existing in the prior art to solve Vacuum film coating chamber only has unilateral enabling, and by manually part, adjustment and pickup is put, the degree of automation is low, and working efficiency is low, this Outside, do not have the technical issues of valve for automatically opening or closing.

This application provides a kind of vacuum coaters, comprising: vacuum chamber and plate valve system；Wherein, the vacuum Room is the structure of inner hollow, and the first side wall of the vacuum chamber offers entrance, the opposite second sidewall of institute's vacuum chamber Offer outlet；At least two transport mechanisms are provided in the vacuum chamber；The setting of transport mechanism described in wherein at least one exists On the third side wall of the vacuum chamber, wherein at least another described transport mechanism opposite the 4th that the vacuum chamber is set On side wall, the transport mechanism is used to for the pallet for carrying workpiece being delivered in the vacuum chamber from the entrance, or is used for The pallet for being placed on carrying workpiece in the vacuum chamber exports the vacuum chamber from the outlet.

In the above-mentioned technical solutions, further, the plate valve system includes cylinder, installation door and is arranged described Support plate, sealing plate, bellows, slide assemblies and strut component in installation door；Wherein, the cylinder is arranged in the peace It fills on door；The installation door is the structure of inner hollow, and the first port is offered in the one side wall of the installation door, the peace It fills and offers the second port on opposite another side wall of door；When the outlet one of the vacuum chamber is arranged in the plate valve module When side, the installation door is connected with the second sidewall, and first port is connected with the outlet；When the plate When the entrance of the vacuum chamber is arranged in valve module, the installation door is connected with the first side wall, and second port It is connected with the entrance；The support plate and the sealing plate are connected by spring；The slide assemblies are arranged described Between support plate and the sealing plate, and the slide assemblies are for driving the support plate and the sealing plate along institute The guide rod in installation door is stated, and is parallel to the second sidewall sliding；The bellows is arranged in the support plate, and described Bellows and the strut component are respectively positioned between the support plate and the sealing plate；Wherein, the cylinder is used for institute It states bellows and air is provided；The bellows is described for expanding and driving support plate described in the strut components drive to cover First port and the promotion sealing plate cover second port.

In any of the above-described technical solution, further, the inner sidewall of the installation door is provided with mounting groove, the installation Slot is for placing the sealing plate；The sealing plate is embedded with sealing strip, and the sealing strip is located at the inside of the installation door Between wall and the sealing plate.

In any of the above-described technical solution, further, the slide assemblies include boom and two guide wheels；Wherein, Two guide wheels are symmetrically disposed on the both ends of the boom；The quantity of the guide rod is two, and two guide rods are equal Row setting, one of them described guide wheel are slided along guide rod described in one of them, and guide wheel described in another one is along wherein another One guide rod sliding；The bottom end of the boom is connected with the support plate.

In any of the above-described technical solution, further, connecting plate is provided in the support plate；The strut component packet Include limit shaft, the first strut and the second strut；Wherein, the limit shaft is threaded through on the connecting plate, and first support Bar and second strut are sequentially set on the limit shaft；First strut is arranged far from one end of the limit shaft There is the first axle bed, first axle bed is connected with the support plate；Second strut is set far from one end of the limit shaft It is equipped with the second axle bed, second axle bed is connected with the sealing plate.

In any of the above-described technical solution, further, the installation door is arranged on the inner sidewall of the support plate There is limited block, the limited block is used to limit the support plate.

In any of the above-described technical solution, further, the transport mechanism includes first driving device and multiple biographies Dynamic component；Multiple transmission components are arranged on the side wall of the vacuum chamber, and along the entrance of the vacuum chamber described in The outlet of vacuum chamber is intervally arranged；The transmission component includes the first device for sealing magnetic fluid, the first transmission shaft and driving wheel； Wherein, first device for sealing magnetic fluid is embedded on the side wall of the vacuum chamber, and first transmission shaft is threaded through described On first device for sealing magnetic fluid, and one end of first transmission shaft is located at outside the vacuum chamber, first transmission shaft The other end is located in the vacuum chamber, and the driving wheel tube is located on the other end of first transmission shaft；Multiple transmission One end that first transmission shaft of component is located at outside the vacuum chamber is connected by synchronous belt, and the first driving device passes through The synchronous belt drives the first transmission shaft of multiple transfer assemblies to rotate.

In any of the above-described technical solution, further, the vacuum coater further includes at least two guidance sets, Multiple guidance sets are above the transport mechanism；The vacuum chamber is arranged in guidance set described in wherein at least one On third side wall, wherein at least another described guidance set is arranged on the 4th opposite side wall of the vacuum chamber, described Guidance set is used to carry and the workpiece of transmission belt plated film；The guidance set includes fixed block, guide holder and directive wheel；Its In, the fixed block is arranged on the inner sidewall of the vacuum chamber；The guide holder is arranged on the fixed block, and described leads The output shaft extended along vertical direction is provided with to seat, the directive wheel is set on the output shaft.

In any of the above-described technical solution, further, the rotating mechanism is arranged on the vacuum chamber, and the rotation Rotation mechanism is for driving the revolution gear of the pallet to rotate；The rotating mechanism includes the second driving device, the second magnetic fluid Sealing device, coupling base and ratchet；The coupling base is arranged on the inner sidewall of the vacuum chamber, and the coupling base is embedded Equipped with shaft coupling；The ratchet is equipped with shaft, and the shaft is plugged in one end of the shaft coupling；Second magnetic fluid Sealing device is embedded in the bottom wall of the vacuum chamber, and second device for sealing magnetic fluid is equipped with second driving shaft；It is described One end of second driving shaft is located in the vacuum chamber, and one end of the second driving shaft is plugged in the another of the shaft coupling In end, the other end of the second driving shaft is located at outside the vacuum chamber, and the other end of the second driving shaft and described Second driving device is connected.

Present invention also provides a kind of coating system, including vacuum coater described in any of the above-described technical solution, because And whole advantageous effects with the device, here, repeating no more.

Compared with prior art, the application has the beneficial effect that

Vacuum coater provided by the present application, vacuum chamber are combined with gate valve, when plate valve system is located at vacuum chamber Inlet when, plate valve system can turn on or off this entrance, when plate valve module is located at the exit of vacuum chamber, Plate valve system can turn on or off this outlet, it is seen then that the degree of automation is higher, high-efficient, especially when multiple vacuum chambers Sequentially arrangement is in use, plate valve system can be arranged between two adjacent vacuum chambers, to realize that adjacent two are true The connection or closing of empty room, it is simple, convenient.

At least two transport mechanisms are provided in vacuum chamber, the third of vacuum chamber is arranged in wherein at least one transport mechanism On side wall, wherein at least another transport mechanism is arranged on the 4th opposite side wall of vacuum chamber, is mounted with the pallet of workpiece By mechanical or when being manually placed into the entrance of vacuum chamber, transport mechanism, which can drive, is mounted with the pallet of workpiece on it Sliding, more balance and stability, and realize in the indoor automatic advance of vacuum, the degree of automation is higher, especially when multiple vacuum It sequentially arranges in use, plate valve system can be arranged between two adjacent vacuum chambers, to realize adjacent two room The connection or closing of vacuum chamber, then cooperate and realize using in transport mechanism to carrying the pallet of workpiece along each vacuum chamber Automatically deliver so that technique is more efficient, according to beat shipment etc..

Coating system provided by the present application is thus filled by this vacuum coating including vacuum coater described above Automatically opening or closing for vacuum chamber inlet or outlet will be realized by setting, and the transport mechanism of internal vacuum chamber can drive from Entrance is put into the indoor pallet for the being mounted with material automatic moving in vacuum chamber of vacuum, and automatic output vacuum chamber etc., from Dynamicization degree is high, saves human and material resources etc..

Detailed description of the invention

It, below will be to specific in order to illustrate more clearly of the application specific embodiment or technical solution in the prior art Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below Attached drawing is some embodiments of the application, for those of ordinary skill in the art, before not making the creative labor It puts, is also possible to obtain other drawings based on these drawings.

Fig. 1 is the structural schematic diagram of vacuum coater provided by the embodiments of the present application；

Fig. 2 is the assembling schematic diagram of vacuum chamber provided by the embodiments of the present application and plate valve system；

Fig. 3 is the structural schematic diagram of plate valve system provided by the embodiments of the present application；

Fig. 4 is the another structural schematic diagram of plate valve system provided by the embodiments of the present application；

Fig. 5 is cross-sectional view of the Fig. 1 in Section A-A；

Fig. 6 is enlarged structure schematic diagram of the Fig. 5 at B；

Fig. 7 is the partial structure diagram of plate valve system provided by the embodiments of the present application；

Fig. 8 is enlarged structure schematic diagram of the Fig. 7 at C；

Fig. 9 is the another partial structure diagram of plate valve system provided by the embodiments of the present application；

Figure 10 is enlarged structure schematic diagram of the Fig. 9 at C；

Figure 11 is the assembling structure schematic diagram of vacuum chamber provided by the embodiments of the present application with the pallet for carrying workpiece；

Figure 12 is enlarged structure schematic diagram of the Figure 11 at D；

Figure 13 is the another structural schematic diagram of assembly of vacuum chamber provided by the embodiments of the present application with the pallet for carrying workpiece；

Figure 14 is enlarged structure schematic diagram of the Figure 13 at E；

Figure 15 is enlarged structure schematic diagram of the Figure 13 at F；

Figure 16 is the structural schematic diagram of vacuum chamber provided by the embodiments of the present application；

Figure 17 is enlarged structure schematic diagram of the Figure 16 at G.

Appended drawing reference:

1- vacuum chamber, 11- entrance, the outlet 12-, 13- door body, 2- transport mechanism, 21- transmission component, the first magnetic current of 211- Body sealing device, the first transmission shaft of 212-, 213- transmission wheel, 3- guidance set, 31- fixed block, 32- guide holder, 33- guiding Wheel, 4- limit assembly, 41- limit base, 42- positive stop strip, 43- third driving device, 5- rotating mechanism, 51- coupling base, 52- spine Wheel, 53- shaft, 54- second driving shaft, 6- bracket, 7- molecular pump, 8- fore pump, 9- plate valve system, 91- cylinder, 911- gas Cylinder shaft sealing, 92- installation door, the first port of 921-, the second port of 922-, 923- mounting groove, 924- guide rod, 93- support plate, 931- connecting plate, 94- sealing plate, 941- sealing strip, 95- bellows, 96- slide assemblies, 961- boom, 962- guide wheel, 97- support Bar assembly, 971- limit shaft, the first strut of 972-, the second strut of 973-, the first axle bed of 974-, the second axle bed of 975-, 98- limit Block, 10- pallet, 101- revolution gear.

Specific embodiment

It is clearly and completely described below in conjunction with technical solution of the attached drawing to the application, it is clear that described implementation Example is some embodiments of the present application, instead of all the embodiments.

The component of the embodiment of the present application for usually describing and showing in attached drawing here can be with a variety of different configurations To arrange and design.Therefore, the detailed description of the embodiments herein provided in the accompanying drawings is not intended to limit below and is wanted The scope of the present application of protection is sought, but is merely representative of the selected embodiment of the application.

Based on the embodiment in the application, those of ordinary skill in the art are obtained without making creative work The every other embodiment obtained, shall fall in the protection scope of this application.

In the description of the present application, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical", The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to Convenient for describe the application and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation, It is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.In addition, term " first ", " second ", " third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.

In the description of the present application, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition Concrete meaning in application.

The vacuum coater according to the application some embodiments and plating membrane system are described referring to Fig. 1 to Figure 17 System.

Referring to shown in Fig. 1, Fig. 2, Figure 11, Figure 13 and Figure 16, embodiments herein provides a kind of vacuum coating dress Set includes: vacuum chamber 1 and plate valve system 9；Wherein, vacuum chamber 1 is the structure of inner hollow, and the first side of vacuum chamber 1 Wall offers entrance 11, and the opposite second sidewall of institute's vacuum chamber 1 offers outlet 12；At least two are provided in vacuum chamber 1 Transport mechanism 2；Wherein at least one transport mechanism 2 is arranged on the third side wall of vacuum chamber 1, wherein at least one transport mechanism 2 are arranged on the 4th opposite side wall of vacuum chamber 1；The pallet 10 that transport mechanism 2 is used to carry workpiece is conveyed from entrance Pallet 10 to vacuum chamber 1, or for being placed on carrying workpiece in vacuum chamber exports vacuum chamber 1 from outlet；Gate valve machine The side of vacuum chamber 1 is arranged in structure 9, and plate valve module is used to open or closes entrance 11 or outlet 12.

Vacuum coater provided by the present application, vacuum chamber 1 are combined with gate valve, when plate valve system 9 is located at vacuum When at the entrance 11 of room 1, plate valve system 9 can turn on or off this entrance 11, when plate valve module is located at vacuum chamber 1 When exporting at 12, plate valve system 9 can turn on or off this outlet 12, it is seen then that the degree of automation is higher, high-efficient, especially It is sequentially arranged when multiple vacuum chambers 1 in use, plate valve system 9 can be arranged between two adjacent vacuum chambers 1, thus Realize the connection or closing of two adjacent vacuum chambers 1, it is simple, convenient.Certainly, it is not limited only to this, vacuum chamber 1 enters Side may be equipped with a plate valve system 9 at side and outlet 12 at mouthfuls 11, be arranged according to actual needs.

At least two transport mechanisms 2 are provided in vacuum chamber 1, vacuum chamber 1 is arranged in wherein at least one transport mechanism 2 On third side wall, wherein at least another transport mechanism 2 is arranged on the 4th opposite side wall of vacuum chamber 1, is mounted with workpiece Pallet 10 by mechanical or when being manually placed into the entrance 11 of vacuum chamber 1, transport mechanism can drive and be mounted with workpiece Pallet 10 slide on, more balance and stability, and realize the automatic advance in vacuum chamber 1, the degree of automation is higher, Especially when multiple vacuum chambers 1 are sequentially arranged in use, plate valve system 9 can be arranged between two adjacent vacuum chambers 1, from And realize the connection or closing of two adjacent vacuum chambers 1, then cooperate and realize using transport mechanism 2 to the support for carrying workpiece Disk 10 is automatically delivered along each vacuum chamber 1, so that technique is more efficient, according to beat shipment etc..

Wherein, the first side wall is oppositely arranged with second sidewall, and third side wall and the 4th side wall are oppositely arranged.The first side wall, Third side wall, second sidewall and the 4th side wall are sequentially connected and connect, and form square structure, but be not limited only to this, can also enclose and be set as Other shapes, certainly, vacuum chamber 1 may also include other side walls, and be set as other shapes with enclosing with upper side wall.

Wherein, optionally, the bottom end of vacuum chamber 1 is also provided with through-hole, and through-hole is for being connected to the molecular pump 7 vacuumized； The lower section of vacuum chamber 1 is also provided with bracket 6, and bracket 6 has been used to support vacuum chamber 1, in order to which molecular pump 7 is placed on vacuum chamber 1 lower section.With further including fore pump 8, fore pump 8 is connected by pipeline with the inside of vacuum chamber 1 plated film.

In one embodiment of the application, it is preferable that as shown in Figures 3 to 6, plate valve system 9 includes cylinder 91, peace Dress door 92 and support plate 93, sealing plate 94, bellows 95, slide assemblies 96 and the strut component being arranged in installation door 92 97；Wherein, cylinder 91 is arranged in installation door 92；Installation door 92 is the structure of inner hollow；It is opened in the one side wall of installation door 92 Equipped with the first port 921, the second port 922 is offered on opposite another side wall of installation door 92；When plate valve module is arranged At 12 side of outlet of vacuum chamber 1, installation door 92 is connected with second sidewall, and the first port 921 is connected with outlet 12； When the entrance 11 of vacuum chamber 1 is arranged in plate valve module, installation door 92 is connected with the first side wall, and the second port 922 with Entrance 11 is connected；Support plate 93 and sealing plate 94 are connected by spring；The setting of slide assemblies 96 is in support plate 93 and close Between sealing plate 94, and slide assemblies 96 are used to drive support plate 93 and sealing plate 94 along the guide rod 924 in installation door 92, and It is parallel to second sidewall sliding；Bellows 95 is arranged in support plate 93, and bellows 95 and strut component 97 are respectively positioned on branch Between fagging 93 and sealing plate 94；Wherein, cylinder 91 is used to provide air to bellows 95；Bellows 95 is for expanding and driving Strut component 97 pushes support plate 93 to cover the first port 921 and sealing plate 94 is pushed to cover the second port 922.

In this embodiment, when plate valve system 9 is closed, cylinder 91 is inflated into installation door 92 back to front, sliding Component 96 drives support plate 93, sealing plate 94 and 97 synchronizing moving of strut component between the two, directly under the promotion of air-flow Projection to support plate 93 can cover the first port 921, when the projection of sealing plate 94 can cover the second port 922, 96 stop motion of slide assemblies, cylinder 91 provides gas to bellows 95 at this time, and the expansion of bellows 95 is elongated, it is intended to Xiang Fanfang To sealing plate 94 and support plate 93 is pushed open, strut component 97 also starts to push both sealing plate 94 and support plate 93 direction opposite Direction movement so that support plate 93 covers the first port 921, sealing plate 94 covers the second port 922, props up at this time Spring between fagging 93 and sealing plate 94 is elongated.When plate valve module is closed, cylinder 91 stops supplying to bellows 95 Air, and the gas inside bellows 95 by outlet pipe be discharged bellows 95, bellows 95 shrink, support plate 93 and Sealing plate 94 starts to move towards under the action of the spring, shortens distance between the two, then under the action of slide assemblies 96, So that the first port 921 is no longer blocked in the movement of support plate 93, that is, the first port 921 is opened, similarly, so that sealing plate 94 no longer hides The second port 922 is kept off, that is, opens the second port 922.

Wherein, when 12 side of outlet of vacuum chamber 1 is arranged in plate valve system 9, installation door 92 is connected with second sidewall It connects, and the first port 921 is connected with outlet 12, can also cover while support plate 93 can cover the first port 921 Outlet 12, in addition, support plate 93 also can no longer block out the first port 921 and outlet 12；When plate valve system 9 is arranged true When 11 side of entrance of empty room 1, installation door 92 is connected with the first side wall, and the second port 922 is connected with entrance 11, sealing Also entrance 11 can be covered while plate 94 can cover the second port 922, in addition, can also open the second port 922 and Entrance 11.

Wherein, optionally, cooling water pipeline and admission line and gas channels, cylinder 91 are additionally provided in installation door 92 By the air that gas channels are in the supply air of bellows 95 or release bellows 95, cooling water pipeline is used for installation door 92 entirety are cooled down.Wherein, optionally, cylinder sealing 911 is additionally provided between installation door 92 and cylinder 91.

In one embodiment of the application, it is preferable that as shown in Figure 5 and Figure 6, the inner sidewall of installation door 92 is provided with peace Tankage 923, mounting groove 923 is for placing sealing plate 94；Sealing plate 94 is embedded with sealing strip 941, and sealing strip 941 is located at installation Between the inner sidewall and sealing plate 94 of door 92.

In this embodiment, when plate valve system 9 is closed, sealing plate 94 is moved at corresponding second port 922, and Under the action of strut component 97, sealing plate 94 is moved towards mounting groove 923, and finally the wall surface with mounting groove 923 is affixed It closes, to realize sealing of the sealing plate 94 to the second port 922, especially sealing plate 94 is embedded with sealing strip 941, and sealing strip 941 are located between the inner sidewall and sealing plate 94 of installation door 92, and sealing effect is more preferable.

In one embodiment of the application, it is preferable that as shown in Figure 9 and Figure 10, slide assemblies 96 include boom 961 with And two guide wheels 962；Wherein, two guide wheels 962 are symmetrically disposed on the both ends of boom 961；The quantity of guide rod 924 is two, and Two parallel settings of guide rod 924, one of guide wheel 962 are slided along one of guide rod 924, another one guide wheel 962 slide along another one guide rod 924；The bottom end of boom 961 is connected with support plate 93.

In this embodiment, two guide wheels 962 slide on corresponding guide rod 924, to drive support plate 93, sealing plate 94 and 97 synchronizing moving of strut component that is arranged between the two, that is, it realizes to the entrance 11 of vacuum chamber 1 or beating for outlet 12 It opens, either when the entrance 11 or outlet 12 for needing to close vacuum chamber 1, by support plate 93 and is sealed using slide assemblies 96 Plate 94 be moved to the entrance 11 of vacuum chamber 1 or outlet 12 corresponding positions at, convenient for the seal operation of next step.

Wherein, optionally, when 12 side of outlet of vacuum chamber 1 is arranged in the plate valve system 9, two guide rods 924 It is arranged along second sidewall is parallel to；When the entrance 11 of vacuum chamber 1 is arranged in plate valve module, sealing plate 94 covers second The entrance 11 of port 922 and vacuum chamber 1, two guide rods 924 are arranged along the first side wall is parallel to.

In one embodiment of the application, it is preferable that as shown in Figure 7 and Figure 8, be provided with connecting plate in support plate 93 931；Strut component 97 includes limit shaft 971, the first strut 972 and the second strut 973；Wherein, 971 company of being threaded through of limit shaft On fishplate bar 931, and the first strut 972 and the second strut 973 are sequentially set on limit shaft 971；First strut 972 is far from limit One end of position axis 971 is provided with the first axle bed 974, and the first axle bed 974 is connected with support plate 93；Second strut 973 is far from limit One end of position axis 971 is provided with the second axle bed 975, and the second axle bed 975 is connected with sealing plate 94.

In this embodiment, cylinder 91 supplies air to bellows 95 by admission line, and bellows 95 is expanded and is extended, And continue pressurizing urges so that support plate 93 and sealing plate 94 are forced the trend moved round about, the first strut 972 with And second strut 973 moved round about around limit shaft 971, and respectively by corresponding support plate 93 and sealing plate 94 into One step pushes, i.e., further struts support plate 93 and sealing plate 94, so that the first support plate 93 covers the first port 921, Second support plate 93 covers the second port 922, so that when the outlet 12 of vacuum chamber 1 is arranged in the plate valve system 9 When side, support plate 93 covers the outlet 12 of the first port 921 and vacuum chamber 1；When plate valve system 9 is arranged in vacuum chamber When 1 entrance 11, sealing plate 94 covers the entrance 11 of the second port 922 and vacuum chamber 1.

Wherein, the first axle bed 974 is threadedly coupled with support plate 93；Second axle bed 975 is threadedly coupled with sealing plate 94.

In one embodiment of the application, it is preferable that as shown in Figure 5 and Figure 6, installation door 92 is in support plate 93 Limited block 98 is provided on side wall, limited block 98 is used to limit support plate 93.

In this embodiment, when support plate 93 is moved towards the first port 921, limited block 98 plays the work limited to it With so that there are certain gaps between support plate 93 and the first port 921, for accommodating sealing ring, to prevent sealing ring quilt It presss from both sides bad.

Wherein, optionally, limited block 98 includes the connection strap and positive stop strip being connected；Connection strap and positive stop strip form L Type structure；Wherein, connection strap is fixed in the outside wall surface of the second sidewall of vacuum chamber 1 by fastener, and positive stop strip protrudes from The outside wall surface of two side walls is arranged.

Wherein, optionally, the quantity of limited block 98 is four, and four limited blocks 98 are symmetrically disposed on going out for vacuum chamber 1 The two sides of mouth 12, but it is not limited only to number as described in the examples.

In one embodiment of the application, it is preferable that as shown in Figure 11, Figure 12, Figure 16 and Figure 17, transport mechanism 2 Including first driving device and multiple transmission components 21；Multiple transmission components 21 are arranged on the side wall of vacuum chamber 1, and edge The outlet 12 of 11 direction of entrance of vacuum chamber 1 be intervally arranged；Transmission component 21 includes the first device for sealing magnetic fluid 211, the One transmission shaft 212 and driving wheel；Wherein, the first device for sealing magnetic fluid 211 be embedded side wall on, the first transmission shaft 212 It is threaded through on the first device for sealing magnetic fluid 211, and one end of the first transmission shaft 212 is located at outside vacuum chamber 1, the first transmission shaft 212 other end is located in vacuum chamber 1, and driving wheel tube is located on the other end of the first transmission shaft 212；The of multiple transfer assemblies One end that one transmission shaft 212 is located at outside vacuum chamber 1 is connected by synchronous belt, and first driving device is more by synchronous belt driving First transmission shaft 212 of a transfer assembly rotates.

In this embodiment, first driving device can drive the transmission wheel 213 of multiple transfer assemblies same by synchronous belt Step rotation, transmission wheel 213, which is able to drive, to be carried the pallet 10 of material thereon and moves along rectilinear direction.Wherein, optionally, pacify Dress block is cyclic structure.Wherein, first driving device is motor.Wherein, optionally, the first device for sealing magnetic fluid 211 is existing There is the sealing device sold on the market.

Wherein, optionally, one of transport mechanism 2 is arranged on third side wall, multiple transmission of a transport mechanism 2 Component is intervally arranged along from the entrance 11 of vacuum chamber 1 to outlet 12 on third side wall, and another one transport mechanism 2 is arranged On the 4th side wall, multiple transfer assemblies of another transport mechanism 2 on the 4th side wall along the entrance 11 from vacuum chamber 1 to Outlet 12 is intervally arranged.

In one embodiment of the application, it is preferable that as shown in Figure 11, Figure 12, Figure 16 and Figure 17, vacuum coating dress Setting further includes at least two guidance sets 3, and multiple guidance sets 3 are above transport mechanism 2；Wherein at least one guidance set 3 It is arranged on the third side wall of vacuum chamber 1, wherein at least another guidance set 3 the 4th opposite side that vacuum chamber 1 is set On wall, guidance set 3 is used to carry and the workpiece of transmission belt plated film；Guidance set 3 includes fixed block 31, guide holder 32 and leads To wheel 33；Wherein, fixed block 31 is arranged on the inner sidewall of vacuum chamber 1；Guide holder 32 is arranged on fixed block 31, and guide holder 32 are provided with the output shaft extended along vertical direction, and directive wheel 33 is set on output shaft.

In this embodiment, guidance set 3 is above transport mechanism 2, so that guidance set 3 will not interfere with transport mechanism 2 work, and the setting of guidance set 3 meets the structure setting of pallet 10.It is all provided on third side wall and the 4th opposite side wall It is equipped with guidance set 3, can guarantee that pallet 10 is oriented in the left and right sides, because without departing from route.Wherein, guiding group The axis of the output shaft of part 3 is placed in the vertical direction, and directive wheel 33 is set on output shaft, enable directive wheel 33 along Vertical direction rotation, the outer edge and pallet 10 of directive wheel 33 are tangent, and play and be oriented to during pallet 10 is mobile to it Effect, prevent its deviate operation route.Wherein, optionally, fixed block 31 passes through fastener side corresponding with vacuum chamber 1 Wall is connected.

In one embodiment of the application, it is preferable that as shown in Figure 13 and Figure 15, plated film with further including limit assembly 4, Limit assembly 4 is arranged on the bottom wall of vacuum chamber 1；Limit assembly 4 includes third driving device 43, limit base 41 and positive stop strip 42；Wherein, the limiting slot extended along vertical direction is offered on limit base 41, positive stop strip 42 is plugged in limiting slot；Third The lower section of vacuum chamber 1 is arranged in driving device 43, and third driving device 43 passes through vacuum chamber 1 and is connected with positive stop strip 42, and Third driving device 43 is for driving positive stop strip 42 to slide along limiting slot.

In this embodiment, when the pallet 10 for carrying workpiece is located in transport mechanism 2, positive stop strip 42 can be to carrying There is the pallet 10 of workpiece to be limited, it is made to stop at suitable position in vacuum chamber 1, wait to be processed, wherein third driving Device 43 can adjust the height of positive stop strip 42 constantly, when workpiece needs to export after treatment, 43 energy of third driving device Enough driving positive stop strips 42 move downward, and limit it no longer to pallet 10, pallet 10 can be in the driving lower edge of driving mechanism Transport mechanism 2 move ahead.

Wherein, optionally, the quantity of limit assembly 4 is two, and two limit assemblies 4 are along being parallel to the first side wall interval Arrangement, and two limit assemblies 4 are close to be arranged at the outlet 12 of vacuum chamber 1, certainly, are not limited only to this.

Wherein, optionally, limit base 41 includes mounting plate and protruding block, and protruding block is arranged on a mounting board, mounting plate It being fixed on by fastener on the bottom wall of vacuum chamber 1, limiting slot is provided on protruding block, and through the top end face of protruding block, Certainly, it is not limited only to this.

In one embodiment of the application, it is preferable that as shown in Figure 13, Figure 14, Figure 16 and Figure 17, vacuum coating dress Setting further includes rotating mechanism 5, and rotating mechanism 5 is arranged on vacuum chamber 1, and rotating mechanism 5 is used to drive the revolution tooth of pallet 10 101 rotation of wheel；Rotating mechanism 5 includes the second driving device, the second device for sealing magnetic fluid, coupling base 51 and ratchet 52；Connection Axle bed 51 is arranged on the inner sidewall of vacuum chamber 1, and is embedded with shaft coupling in coupling base 51；Ratchet 52 is equipped with shaft 53, turns Axis 53 is plugged in one end of shaft coupling；Second device for sealing magnetic fluid is embedded in the bottom wall of vacuum chamber 1, and the second magnetic fluid is close Seal apparatus is equipped with second driving shaft 54；One end of second driving shaft 54 is located in vacuum chamber 1, and one end of second driving shaft 54 It is plugged in the other end of shaft coupling, the other end of second driving shaft 54 is located at outside vacuum chamber 1, and second driving shaft 54 is another Hold with the second driving device be connected.

In this embodiment, the second driving device driving second driving shaft 54 rotates, and second driving shaft 54 passes through shaft coupling The ratchet 52 being arranged outside shaft 53 and shaft 53 is driven to rotate, the tooth socket phase of ratchet 52 and the revolution gear 101 on pallet 10 Cooperation, such as when ratchet 52 rotates clockwise, pawl offsets with tooth socket, so that the revolution tooth on the driving pallet 10 of ratchet 52 101 rotation of wheel, on the contrary, pawl will be produced relative sliding with tooth socket when ratchet 52 rotates counterclockwise, so that ratchet 52 can not push away Dynamic revolution gear 101 rotates, it is seen then that ratchet 52 can drive 101 single direction rotation of revolution gear on pallet 10, revolution gear 101 rotation can drive pallet 10 and thereon workpiece revolution, when the setting due to 10 self structure of pallet, revolution gear 101 Power is provided, the rotation of workpiece, and then the process such as uniform coated for guaranteeing workpiece is also can be realized, avoids pallet 10 Revolution gear 101 can rotate in both directions, lead to occur lapping defect etc. when plated film.

Wherein, ratchet 52 is fixedly connected with shaft 53.

Wherein, optionally, coupling base 51 be T-type structure, coupling base 51 by fastener be fixed on vacuum chamber 1 third or On the 4th inner sidewall of person.

In one embodiment of the application, it is preferable that as shown in figures 11 and 16, on third side wall and the 4th side wall Be provided with can relative vacuum room 1 rotate door body 13.

In this embodiment, be provided on third side wall and the 4th side wall can the door body 13 that rotates of relative vacuum room 1, Convenient for clearing up etc. vacuum chamber 1 to by opening the above door body 13.

Wherein, optionally, door body 13 and vacuum chamber 1 are hinged.

Embodiments herein also provides a kind of coating system, fills including vacuum coating described in any of the above-described embodiment It sets, thus, whole advantageous effects with the device, here, repeating no more.

Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the application, rather than its limitations；To the greatest extent Pipe is described in detail the application referring to foregoing embodiments, those skilled in the art should understand that: its according to So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into Row equivalent replacement；And these are modified or replaceed, each embodiment technology of the application that it does not separate the essence of the corresponding technical solution The range of scheme.

Claims (10)

1. a kind of vacuum coater characterized by comprising vacuum chamber and plate valve system；

Wherein, the vacuum chamber is the structure of inner hollow, and the first side wall of the vacuum chamber offers entrance, institute's vacuum chamber Opposite second sidewall offer outlet；At least two transport mechanisms are provided in the vacuum chamber；

Transport mechanism described in wherein at least one is arranged on the third side wall of the vacuum chamber, wherein at least another described biography Send mechanism to be arranged on the 4th opposite side wall of the vacuum chamber, the transport mechanism be used to carry the pallet of workpiece from The entrance is delivered in the vacuum chamber, or the pallet for being placed on carrying workpiece in the vacuum chamber is from the outlet Export the vacuum chamber；

The plate valve system is arranged in the side of the vacuum chamber, and described in the plate valve module is used to open or closes Entrance or the outlet.

2. vacuum coater according to claim 1, which is characterized in that the plate valve system includes cylinder, installation Door and support plate, sealing plate, bellows, slide assemblies and the strut component being arranged in the installation door；

Wherein, the cylinder is arranged in the installation door；The installation door is the structure of inner hollow, and the installation door The first port is offered in one side wall, offers the second port on opposite another side wall of the installation door；When the plate When the outlet side of the vacuum chamber is arranged in valve module, the installation door is connected with the second sidewall, and described first Port is connected with the outlet；When the entrance of the vacuum chamber is arranged in the plate valve module, the installation door and institute It states the first side wall to be connected, and second port is connected with the entrance；

The support plate and the sealing plate are connected by spring；Slide assemblies setting is in the support plate and described Between sealing plate, and the slide assemblies are for driving the support plate and the sealing plate along leading in the installation door Bar, and it is parallel to the second sidewall sliding；The bellows is arranged in the support plate, and the bellows and described Strut component is respectively positioned between the support plate and the sealing plate；Wherein, the cylinder is used to provide to the bellows empty Gas；The bellows is for expanding and support plate described in the strut components drive being driven to cover first port and push away It moves the sealing plate and covers second port.

3. vacuum coater according to claim 2, which is characterized in that the inner sidewall of the installation door is provided with installation Slot, the mounting groove is for placing the sealing plate；The sealing plate is embedded with sealing strip, and the sealing strip is located at the peace Between the inner sidewall and the sealing plate for filling door.

4. vacuum coater according to claim 2, which is characterized in that the slide assemblies include boom and two Guide wheel；Wherein, two guide wheels are symmetrically disposed on the both ends of the boom；The quantity of the guide rod is two, and two institutes The parallel setting of guide rod is stated, one of them described guide wheel is slided along guide rod described in one of them, guide wheel described in another one It is slided along guide rod described in another one；The bottom end of the boom is connected with the support plate.

5. vacuum coater according to claim 2, which is characterized in that be provided with connecting plate in the support plate；Institute Stating strut component includes limit shaft, the first strut and the second strut；Wherein, the limit shaft is threaded through on the connecting plate, And first strut and second strut are sequentially set on the limit shaft；First strut is far from the limit One end of axis is provided with the first axle bed, and first axle bed is connected with the support plate；Second strut is far from the limit One end of position axis is provided with the second axle bed, and second axle bed is connected with the sealing plate.

6. vacuum coater according to claim 2, which is characterized in that the installation door is in the support plate Limited block is provided on side wall, the limited block is used to limit the support plate.

7. vacuum coater according to any one of claim 1 to 6, which is characterized in that the transport mechanism includes First driving device and multiple transmission components；Multiple transmission components are arranged on the side wall of the vacuum chamber, and along institute The outlet for stating entrance towards the vacuum chamber of vacuum chamber is intervally arranged；

The transmission component includes the first device for sealing magnetic fluid, the first transmission shaft and driving wheel；Wherein, first magnetic current Body sealing device is embedded on the side wall of the vacuum chamber, and first transmission shaft is threaded through first device for sealing magnetic fluid On, and one end of first transmission shaft is located at outside the vacuum chamber, the other end of first transmission shaft is located at the vacuum Interior, the driving wheel tube are located on the other end of first transmission shaft；First transmission axle position of multiple transfer assemblies It is connected in one end outside the vacuum chamber by synchronous belt, and the first driving device is multiple by synchronous belt driving First transmission shaft of the transfer assembly rotates.

8. vacuum coater according to claim 7, which is characterized in that it further include at least two guidance sets, it is multiple The guidance set is above the transport mechanism；The third of the vacuum chamber is arranged in guidance set described in wherein at least one On side wall, wherein at least another described guidance set is arranged on the 4th opposite side wall of the vacuum chamber, the guiding Component is used to carry and the workpiece of transmission belt plated film；

The guidance set includes fixed block, guide holder and directive wheel；Wherein, the vacuum chamber is arranged in the fixed block On inner sidewall；The guide holder is arranged on the fixed block, and the guide holder be provided with extend along vertical direction it is defeated Shaft, the directive wheel are set on the output shaft.

9. vacuum coater according to any one of claim 1 to 6, which is characterized in that it further include rotating mechanism, institute It states rotating mechanism to be arranged on the vacuum chamber, and the rotating mechanism is for driving the revolution gear of the pallet to rotate；

The rotating mechanism includes the second driving device, the second device for sealing magnetic fluid, coupling base and ratchet；The coupling base It is arranged on the inner sidewall of the vacuum chamber, and is embedded with shaft coupling in the coupling base；The ratchet is equipped with shaft, described Shaft is plugged in one end of the shaft coupling；Second device for sealing magnetic fluid is embedded in the bottom wall of the vacuum chamber, And second device for sealing magnetic fluid is equipped with second driving shaft；One end of the second driving shaft is located at the vacuum chamber It is interior, and one end of the second driving shaft is plugged in the other end of the shaft coupling, the other end position of the second driving shaft In outside the vacuum chamber, and the other end of the second driving shaft is connected with second driving device.

10. a kind of coating system, which is characterized in that including vacuum coater described in any one of claims 1 to 9.