CN208826323U - It is double to get rid of wax chip mounter - Google Patents

Abstract

The utility model discloses a kind of pair to get rid of wax chip mounter, comprising: rack, including shield and the workbench being located in the shield；Feeding device is mounted on the workbench side；Discharging device is mounted on the other side of the workbench；It is double to get rid of wax component, feed bin, drop wax Machine for throwing wax structure, Baking out device and the turnover mechanism set gradually on the table, carrying wafers manipulator between the feed bin and the drop wax Machine for throwing wax structure is set, and in drop wax Machine for throwing wax structure, moving feeding takes piece shift unit between Baking out device and turnover mechanism；Pre-add thermal station, warm table and the cooling work platform linearly set gradually along side direction where side-direction discharging device where feeding device on the table, the position of the warm table are corresponding with the turnover mechanism；Double cold pressing mechanisms are arranged above the warm table；And cooling device, it is arranged above the cooling work platform.Production efficiency can be improved in the utility model, increases production capacity.

Description

It is double to get rid of wax chip mounter

Technical field

The utility model relates to substrate manufacture field, in particular to a kind of pair is got rid of wax chip mounter.

Background technique

It in the polishing process of chip, needs to secure the wafer on holder (disk), what is generallyd use is to have wax polishing Polished chip is fixed on disk by technique by the bonding of wax.Existing patch wax equipment uses flow line production Technique gradually carries out drop wax that is, in an integral device, gets rid of wax, heating, bonding and cooling technique, due to some processing step example As dripped, wax, to get rid of the time consumed by ceroplastic more, causes entire procedure for producing slower, causes production cost excessively high.

Utility model content

The utility model provides a kind of pair and gets rid of wax chip mounter, to solve the above-mentioned technical problems in the prior art.

In order to solve the above technical problems, the utility model, which provides a kind of pair, gets rid of wax chip mounter, comprising: rack, including protection The workbench for covering and being located in the shield；Feeding device is mounted on the workbench side；Discharging device is mounted on institute State the other side of workbench；Feed bin, drop wax Machine for throwing wax structure, Baking out dresses double to get rid of wax component, set gradually on the table It sets and turnover mechanism, the carrying wafers manipulator between the feed bin and the drop wax Machine for throwing wax structure is set, and in drop wax Moving feeding takes piece shift unit between Machine for throwing wax structure, Baking out device and turnover mechanism；It is filled on the table along feeding Pre-add thermal station, warm table and the cooling work platform that side direction where side-direction discharging device where setting linearly is set gradually, it is described The position of warm table is corresponding with the turnover mechanism；Double cold pressing mechanisms are arranged above the warm table；And cooling device, It is arranged above the cooling work platform.

Preferably, the frame top is provided with purification device.

Preferably, further including the feed bin locomotive for being separately positioned on the feeding device and discharging device end.

Preferably, further including horizontal handling device, the edge of the workbench is arranged in the horizontal handling device, and The moving feeding between feeding device, pre-add thermal station, warm table, cooling work platform and discharging device.

Preferably, further including the dust exhaust apparatus of setting on the workbench.

Preferably, described take piece shift unit including being located at drop wax Machine for throwing wax structure, Baking out device and turnover mechanism Outside and the manipulator conveyer belt being arranged along a straight line and the mobile manipulator being arranged on the manipulator conveyer belt.

Preferably, the feed bin is provided with multiple groups, and the arc-shaped arrangement of multiple groups feed bin.

Preferably, double cold pressing mechanisms include fixed hold-down devices and removable hold-down devices.

Preferably, the removable hold-down devices include: connecting plate, the first fixation for being mounted on the connecting plate bottom Plate, the second fixed plate for being mounted on first fixed plate bottom, the first driving for driving first fixed plate to be moved forward and backward Mechanism, the second driving mechanism that driving second fixed plate moves left and right, the cylinder being mounted in second fixed plate and It is mounted on the air bag component of the cylinder bottom.

Preferably, first driving mechanism includes: to be fixed on the connecting plate bottom and multiple groups disposed in parallel One guide rod, the first straight line bearing being mounted on first guide rod and driving the first servo that wherein one group of first guide rod rotates Motor, wherein the first straight line bearing and first fixed plate are affixed.

Preferably, second driving mechanism includes: to be fixed on first fixed plate bottom and disposed in parallel more The second guide rod of group, be mounted on second straight line bearing on second guide rod and driving wherein the rotation of one group of second guide rod second Servo motor, wherein the second straight line bearing and second fixed plate are affixed.

Compared with prior art, the utility model has the advantage that

1, the utility model gets rid of wax component using double, can carry out drop wax simultaneously to two groups of chips, get rid of wax and Baking out, Improve production efficiency.

2, the warm table of the utility model is provided with double cold pressing mechanisms, it can while two groups of chips and disk are carried out down Pressure, equally improves production efficiency, increases production capacity.

Detailed description of the invention

Fig. 1 is double schematic perspective views for getting rid of wax chip mounter in the utility model；

Fig. 2 is double top views (unshielded cover) for getting rid of wax chip mounter in the utility model；

Fig. 3 is the main view (having shield) of double racks for getting rid of wax chip mounter in the utility model；

Fig. 4 is double structural schematic diagrams for getting rid of wax component in the utility model；

Fig. 5 is the structural schematic diagram of double cold pressing mechanisms in the utility model；

Fig. 6 is the structural schematic diagram that hold-down devices are moved in the utility model.

It is as shown in the figure: 10- rack, 101- universal wheel, the enabling of 102- rack, 103- feed bin locomotive,

20- feed bin, 30- first drip wax wax throwing device, the first Baking out of 40- device, 50- first take piece mobile device, 51- manipulator conveyer belt, 52- mobile manipulator, 60- feeding device, 70- pre-add thermal station, the horizontal handling device of 80-, 90- heating The fixed hold-down devices of platform, 91- rotating electric machine, 100-；

110- moves hold-down devices, the second servo motor of 1101-, the second driven pulley of 1102-, the second guide rod of 1103- Fixing seat, the second guide rod of 1104-, 1105- air bag, 1106- air bag fixing seat, 1107- floating junction, the second fixed plate of 1108-, 1109- linear bearing, the first fixed plate of 1110-, 1111- first be leader fixed, the first driven pulley of 1112-, 1113- first Servo motor, 1114- cylinder, 1115- connecting plate, the first guide rod of 1116-；

120- cooling device, 130- cooling work platform, 140- discharging device, 150- carrying wafers manipulator, 160- dust suction Device, 170- second takes piece mobile device, the second Baking out of 180- device, 190- second to drip wax wax throwing device；

200- purification device, 210- operation panel, 220- turnover mechanism.

Specific embodiment

To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing to this The specific embodiment of utility model is described in detail.It should be noted that the utility model attached drawing is all made of simplified form And non-accurate ratio is used, only to convenient, lucidly aid illustration the utility model embodiment purpose.

As shown in Figures 1 to 6, the utility model, which provides, a kind of double gets rid of wax chip mounter, comprising: rack 10, feeding device 60, Discharging device 140 double gets rid of wax component, pre-add thermal station 70, warm table 90, cooling work platform 130, double cold pressing mechanisms, cooling device 120, dust exhaust apparatus 160 and horizontal handling device 80.

Please emphasis referring to figs. 1 to Fig. 3, the rack 10 includes shield and the workbench that is located in the shield, In, the shield is made of frame and glass, is provided with purification device 200 at the top of shield, the bottom of the shield is set It is equipped with universal wheel 101.Further, the lower section setting organic frame enabling 102 of the shield, top is provided with operation panel 210, User can carry out parameter setting to the equipment inside rack 10 by the operation panel 210.

Emphasis is additionally provided with feed bin locomotive 103 referring to Fig. 3, the workbench two sides, is used for 60 He of coordinated loading device Discharging device 140 carries out feeding and discharging, the feeding device 60 and discharging device 140 are equally divided into the two of the workbench Side, and the feed bin locomotive 103 is located at the end of the feeding device 60 and discharging device 140.When feeding, feeding device 60 The mobile disk by feed bin locomotive 103, which takes out, carries out feeding, and when discharging, the discharging device 140 is by patch on workbench The product of completion takes out, and is placed on the feed bin locomotive 103.

Please emphasis referring to figs. 1 to Fig. 4, it is described that double to get rid of wax component include: the feed bin 20, first set gradually on the table Drop wax Machine for throwing wax structure 30, the first Baking out device 40, first take piece shift unit 50, second to drip wax Machine for throwing wax structure 190, second Baking out device 180, second take piece shift unit 170, turnover mechanism 220 and carrying wafers manipulator 150.Specifically, The feed bin 20 is provided with multiple groups, and the arc-shaped arrangement of the multiple groups feed bin 20.

Further, the feed bin 20 in the present embodiment is provided with 4 groups, which arranges in semicircular arc, the crystalline substance Piece conveying robot 150 is arranged in the region of arc formation, gets rid of for the chip in feed bin 20 to be placed into the first drop wax In wax mechanism 30 and the second drop wax Machine for throwing wax structure 190.

The first drop wax Machine for throwing wax structure 30 and the second drop wax Machine for throwing wax structure 190 are arranged symmetrically in the opening of arc.And And the first drop wax Machine for throwing wax structure 30, the first Baking out device 40 and turnover mechanism 220 are set gradually along straight line, it is described Second drop wax Machine for throwing wax structure 190, the second Baking out device 180 and turnover mechanism 220 are set gradually along same straight line, i.e., Two groups of Baking out devices share the turnover mechanism 220.

Further, described first take piece shift unit 50 along the first drop the wax Machine for throwing wax structure 30, the first Baking out The outside of device 40 and turnover mechanism 220 setting, so as in the first drop wax Machine for throwing wax structure 30, the first Baking out dress Set moving feeding between 40 and turnover mechanism 220；Likewise, described second takes piece shift unit 170 to get rid of along the second drop wax The side of wax mechanism 190, the second Baking out device 180 and turnover mechanism 220 is arranged, for getting rid of in the second drop wax Moving feeding between wax mechanism 190, the second Baking out device 180 and turnover mechanism 220.

Further, described first piece shift unit 50 and second is taken to take piece shift unit 170 including being arranged along a straight line Manipulator conveyer belt 51 and the mobile manipulator 52 that is arranged on the manipulator conveyer belt 51, the mobile manipulator 52 will drip Wax gets rid of the chip of wax completion, is transplanted on Baking out station and carries out Baking out, after the completion of heating to be baked, then chip is mobile To turnover mechanism 220, after being overturn chip by turnover mechanism 220, transfer is placed on warm table 90, to paste with disk It closes.

The pre-add thermal station 70, warm table 90 and cooling work platform 130 are lateral where feeding device 60 on the table 140 place side direction of discharging device is linearly set gradually.In other words, the pre-add thermal station 70 is close to the feeding device 60 Setting, the cooling work platform 130 are then arranged close to the discharging device 140, and the warm table 90 is arranged in the preheating Between platform 70 and cooling work platform 130, while position is corresponding with the turnover mechanism 220.Further, horizontal carry fills 80 edges that the workbench is set are set, and movement is sent between pre-add thermal station 70, warm table 90 and cooling work platform 130 Material.

The cooling device 120 is arranged above the cooling work platform 130, for cooling down to the product after patch The middle part of workbench is arranged in cooling, the dust exhaust apparatus 160, carries out convenient for larger range of each equipment to inside rack 10 Dust suction.

Please emphasis referring to figure 5 and figure 6, double cold pressing mechanisms are arranged the warm table 90 above, including fixed pushing Device 100 and removable hold-down devices 110.The fixed hold-down devices 100 and removable hold-down devices 110 can be simultaneously to adding Chip and disk in thermal station 90 are pressed, and production efficiency is improved.In specific operation process, when turnover mechanism 220 will be got rid of After chip after wax is placed on the disk on the warm table 90, the warm table 90 is driven by rotating electric machine 91 to be rotated, will It is sent to fixed 100 lower section of hold-down devices, is pushed by fixed hold-down devices 100.At the same time, the removable pushing Device 110 can the product as the case may be to any position on warm table 90 push, so that double cold pressing mechanisms can To push simultaneously to two set products, production efficiency is improved.

Please emphasis referring to Fig. 6, the removable hold-down devices 110 include: connecting plate 1115, are mounted on the connecting plate First fixed plate 1110 of 115 bottoms, the second fixed plate 1108 for being mounted on 1110 bottom of the first fixed plate, described in driving The second driving that the first driving mechanism, driving second fixed plate 1108 of first fixed plate 1110 back-and-forth motion move left and right Mechanism, the cylinder 1114 being mounted in second fixed plate 1108 and the air bag component for being mounted on 1114 bottom of cylinder.

Preferably, first driving mechanism includes: to be fixed on the connecting plate by first leader fixed 1111 1115 bottoms and first guide rod of multiple groups disposed in parallel 1116,1109 He of linear bearing being mounted on first guide rod 1116 The driving first servo motor 1113 that wherein one group of first guide rod 1116 rotates, wherein described on the first guide rod 1116 Linear bearing 1109 and first fixed plate 1110 are affixed, and the first servo motor 1113 passes through the first driven pulley 1112 First guide rod 1116 is driven to rotate, so that linear bearing 1109 thereon is mobile, so that and linear bearing First fixed plate 1110 of 1109 connections is mobile.Certainly, the arranged direction of first guide rod 1116 be from front to back, therefore, institute Stating the first driving mechanism drives the first fixed plate 1110 and component thereon along being moved forward and backward.

Preferably, second driving mechanism includes: to be fixed on described first by second leader fixed 1103 to consolidate 1110 bottom of fixed board and second guide rod of multiple groups disposed in parallel 1104, the linear bearing being mounted on second guide rod 1104 1109 and driving wherein one group of second guide rod 1104 rotation the second servo motor 1101, likewise, be located at the second guide rod 1104 On the linear bearing 1109 and second fixed plate 1108 it is affixed, second servo motor 1101 passes through second driven Belt wheel 1102 drives second guide rod 1104 to rotate, so that linear bearing 1109 thereon drives second fixed plate 1108 and component thereon it is mobile.Since the arranged direction of second guide rod 1104 and the direction of first guide rod 1116 are hung down Directly, therefore the moving direction of second fixed plate 1108 and its upper-part is to move left and right.

Further, the air bag component includes air bag fixing seat 1106 and is mounted on 1106 bottom of air bag fixing seat Air bag 1105, the air bag fixing seat 1106 and the bottom of the cylinder 1114 are connect by floating junction 1107.

With continued reference to Fig. 1 to Fig. 6, the working process of the utility model is as follows:

Drop wax gets rid of wax process: carrying wafers manipulator 150 takes out the chip in feed bin 20, and is sequentially placed described the On one drop wax Machine for throwing wax structure 30 and the second drop wax Machine for throwing wax structure 190, the first drop wax Machine for throwing wax structure 30 and the second drop wax Machine for throwing wax structure 190 pairs of wafer surfaces carry out drop wax and get rid of Lasaxing Oilfield, after the completion, chip are transplanted on to the first baking respectively by mobile manipulator 52 In heating device 40 and the second Baking out device 180, Baking out is carried out, after the completion of heating to be baked, then chip is mobile To turnover mechanism 220, after being overturn chip by turnover mechanism 220, transfer is placed on warm table 90.

Upper disk process: feeding device 60 takes out the disk in feed bin locomotive 103, and is transferred to pre-add thermal station 70 On, it is preheated by pre-add thermal station 70, after the completion of preheating, disk is transplanted on the warm table by horizontal handling device 80 On 90, wait turnover mechanism 220 that chip is placed on disk.

Fitting process: after chip is placed into together with disk, the warm table 90 heats it, while double cold pressings Mechanism pushes so that chip and disk can with uniform force, fitting it is more preferable.

Cooling procedure: the product after the completion of being bonded is sent by the movement of horizontal handling device 80 to cooling work platform 130, cooling Device 120 is contacted with product downwards, so that the two-sided progress to product is cooling simultaneously.

Discharging process: product is taken out and is transferred in feed bin locomotive 103 by discharging device.

It is described it is double get rid of wax chip mounter and drop wax can be carried out to two groups of chips simultaneously get rid of wax and Baking out, and can paste When conjunction, two set products are carried out while being bonded using double cooling bodies, production efficiency is substantially increased, increases production capacity.

Obviously, it is practical new without departing from this can to carry out various modification and variations to utility model by those skilled in the art The spirit and scope of type.If in this way, these modifications and variations of the present invention belong to the utility model claims and its Within the scope of equivalent technologies, then the utility model is also intended to including these modification and variations.

Claims (10)

1. a kind of pair is got rid of wax chip mounter characterized by comprising

Rack, including shield and the workbench being arranged in the shield；

Feeding device is mounted on the workbench side；

Discharging device is mounted on the other side of the workbench；

It is double to get rid of wax component, including feed bin, turnover mechanism, it is arranged between the feed bin and turnover mechanism and symmetrical two groups Wax Machine for throwing wax structure and two groups of Baking out devices are dripped, the carrying wafers between the feed bin and the drop wax Machine for throwing wax structure are set Manipulator, and in drop wax Machine for throwing wax structure, moving feeding takes piece shift unit between Baking out device and turnover mechanism；

The side direction where side-direction discharging device where the feeding device is linearly set gradually on the table pre-add thermal station plus Thermal station and cooling work platform, the position of the warm table are corresponding with the turnover mechanism；

Double cold pressing mechanisms are arranged above the warm table；

And

Cooling device is arranged above the cooling work platform.

2. as described in claim 1 pair is got rid of wax chip mounter, which is characterized in that the frame top is provided with purification device, institute It states and is provided with dust exhaust apparatus on workbench.

Get rid of wax chip mounter 3. as described in claim 1 double, which is characterized in that further include be separately positioned on the feeding device and The feed bin locomotive of discharging device end.

4. as described in claim 1 pair is got rid of wax chip mounter, which is characterized in that further include horizontal handling device, the level is removed The edge of the workbench, and the moving feeding between the pre-add thermal station, warm table and cooling work platform is arranged in shipping unit.

5. as described in claim 1 pair is got rid of wax chip mounter, which is characterized in that described that piece shift unit is taken to get rid of including being located at drop wax On the outside of wax mechanism, Baking out device and turnover mechanism and the manipulator conveyer belt being arranged along a straight line and setting are in the machinery Mobile manipulator on hand conveyer belt.

6. as described in claim 1 pair is got rid of wax chip mounter, which is characterized in that the feed bin is provided with multiple groups, and the multiple groups The arc-shaped arrangement of feed bin.

7. as described in claim 1 pair is got rid of wax chip mounter, which is characterized in that double cold pressing mechanisms include fixed hold-down devices With removable hold-down devices.

Get rid of wax chip mounter 8. as claimed in claim 7 double, which is characterized in that the removable hold-down devices include: connecting plate, The second fixed plate for being mounted on the first fixed plate of the connecting plate bottom, being mounted on first fixed plate bottom drives institute State the first driving mechanism of the first fixed plate back-and-forth motion, the second driving mechanism that driving second fixed plate moves left and right, The cylinder being mounted in second fixed plate and the air bag component for being mounted on the cylinder bottom.

9. as claimed in claim 8 pair is got rid of wax chip mounter, which is characterized in that first driving mechanism includes: to be fixed on institute State connecting plate bottom and first guide rod of multiple groups disposed in parallel, the first straight line bearing being mounted on first guide rod and driving The wherein first servo motor of one group of first guide rod rotation, wherein the first straight line bearing and first fixed plate are affixed.

10. as claimed in claim 8 pair is got rid of wax chip mounter, which is characterized in that second driving mechanism includes: to be fixed on institute State the first fixed plate bottom and second guide rod of multiple groups disposed in parallel, be mounted on second straight line bearing on second guide rod and Driving the second servo motor that wherein one group of second guide rod rotates, wherein the second straight line bearing and second fixed plate It is affixed.