CN208521910U - The Suction cup assembly picked and placed for graphite boat silicon wafer - Google Patents
The Suction cup assembly picked and placed for graphite boat silicon wafer Download PDFInfo
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- CN208521910U CN208521910U CN201821090182.6U CN201821090182U CN208521910U CN 208521910 U CN208521910 U CN 208521910U CN 201821090182 U CN201821090182 U CN 201821090182U CN 208521910 U CN208521910 U CN 208521910U
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- sucker
- slot
- suction cup
- cup assembly
- tracheae
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a kind of Suction cup assembly picked and placed for graphite boat silicon wafer is provided, the Suction cup assembly includes mounting portion and the drawing section that is connected on the downside of the mounting portion；The first air flue is equipped in the mounting portion；The drawing section includes substrate, and the y direction along the substrate offers a plurality of holding tank in parallel, and a tracheae is equipped in every holding tank；The lower end of every holding tank is communicatively equipped with a sucker through slot；The upper end of the every tracheae is connected to first air flue, and the lower end of the every tracheae is respectively connected with a sucker, and the sucker is located in the sucker through slot；It is communicatively equipped with four spring through slots around each sucker through slot, is equipped with spring in every spring through slot, one end of the spring is connected on the sucker, and the other end connects on the substrate.Suction cup assembly provided by the utility model has excellent elasticity, to cope with the dimensional instability of graphite boat.
Description
Technical field
The utility model relates to crystal silicon solar energy battery fields, and in particular to a kind of suction picked and placed for graphite boat silicon wafer
Disk component.
Background technique
In the manufacturing process of crystal silicon solar energy battery silicon wafer, silicon chip of solar cell is usually carried by silicon slice bearing boat
It is processed again afterwards.PECVD (Plasma Enhanced Chemical Vapor Deposition) coating process is benefit
Required gas source molecular is ionized with strong electrical field and generates plasma, and the very high chemical base of many activity is contained in plasma
Group, these groups pass through through a series of chemistry and plasma reaction, form solid film in silicon chip surface.In the process,
It needs that first uncoated silicon wafer is inserted on graphite boat, after completing plated film, then silicon wafer is taken out from graphite boat, due to graphite
The characteristic that the material is soft, with the passage for using the time, graphite boat is easily deformed, conventional Suction cup assembly can not with it is deformed
Graphite boat matching, causes silicon wafer that can not be inserted on graphite boat and can not take out from graphite boat silicon wafer.
It is existing that silicon wafer is placed on deformed graphite boat or is used when taking out silicon wafer from deformed graphite boat
It is artificial to pick and place, inefficiency, while silicon wafer be easy inserted sheet and during take piece by different degrees of pollution and scuffing, influence
Product quality.
Utility model content
The purpose of the utility model is to provide take in a kind of processing of crystal silicon solar energy battery for graphite boat silicon wafer
The Suction cup assembly put, to solve above-mentioned the shortcomings of the prior art.
In order to solve the above technical problems, the technical solution that the utility model uses is: providing a kind of for graphite boat
The Suction cup assembly that silicon wafer picks and places, the Suction cup assembly include mounting portion and the drawing section that is connected on the downside of the mounting portion；It is described
The first air flue is equipped in mounting portion；The drawing section includes substrate, and the y direction along the substrate offers a plurality of appearance in parallel
It receives slot, a tracheae is equipped in every holding tank；It is logical that the lower end of every holding tank is communicatively equipped with a sucker
Slot；The upper end of the every tracheae is connected to first air flue, and the lower end of the every tracheae is respectively connected with a sucker, described
Sucker is located in the sucker through slot；Four spring through slots are communicatively equipped with around each sucker through slot, described in every
Spring is equipped in spring through slot, one end of the spring is connected on the sucker, and the other end connects on the substrate；
The sucker includes shell, and the second air flue is provided in the shell, offers in the front of the shell
One air entry, second air flue are connected to the lower end of first air entry and the tracheae；
First air entry is the round hole set on the front center, and the front is successively arranged positioned at described first
The first annular boss of air entry periphery, positioned at the first annular boss periphery annular groove and be located at the annular groove
Second annular convex platform of periphery；
At least one second air entry is offered on the annular groove, second air flue is connected to second air-breathing
The lower end of mouth and the tracheae.
As the improvement to above scheme, the first annular boss is identical as the second annular convex platform height.
As the improvement to above scheme, the first fixation hole is offered on the substrate, in the correspondence position of the shell
It sets and offers the second fixation hole, the both ends of the spring are connected to first fixation hole and second fixation hole
On.
As the improvement to above scheme, the holding tank is equipped with three, and the lower end of three holding tanks is communicatively set
There are three the sucker through slot, the center of three suckers in three sucker through slots forms an isosceles triangle.
As the improvement to above scheme, it is equipped with air exhaust nozzle in the side of the mounting portion, the air exhaust nozzle is connected to institute
It states on the first air flue.
The Suction cup assembly provided by the utility model picked and placed for graphite boat silicon wafer, suitable for silicon wafer is placed in graphite
It is taken out on boat or by silicon wafer from graphite boat, has excellent elasticity, the dimensional instability of graphite boat can be coped with, while can buffer
Suction cup assembly acts on the oppressive force on silicon wafer, reduces the probability that silicon wafer is subject to crushing damage；Overcoming the artificial silicon wafer that picks and places may
Caused by silicon chip surface scratch, reduce the contaminated probability of silicon wafer, improve yield rate while improving production efficiency.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the Suction cup assembly picked and placed in the utility model embodiment for graphite boat silicon wafer；
Fig. 2 is the portion the A enlarged drawing in Fig. 1；
Fig. 3 is the main view of sucker in the utility model embodiment；
The top view of sucker in Fig. 4 the utility model embodiment.
The components in the drawings are labeled as follows: 10- mounting portion；11- air exhaust nozzle；21- substrate；210- holding tank；211- inhales
Disk through slot；2110- spring through slot；The first fixation hole of 212-；22- tracheae；23- sucker；230- shell；2301- shell front；
The second air flue of 231-；The first air entry of 232-；The first annular boss of 233-；234- annular groove；The second annular convex platform of 235-；
The second air entry of 236-；The second fixation hole of 237-；24- spring.
Specific embodiment
In the description of the present invention, it should be understood that term " on ", "lower", "inner", "outside", " vertical ", " cross " etc.
The orientation or positional relationship of instruction is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description the utility model
It is described with simplifying, rather than the device or element of indication or suggestion meaning must have a particular orientation, with specific orientation structure
It makes and operates, therefore should not be understood as limiting the present invention.In addition, term " first ", " second ", etc. be only used for describing
Purpose is not understood to indicate or imply relative importance or implicitly indicates the quantity of indicated technical characteristic.As a result,
The feature for defining " first ", " second " etc. can explicitly or implicitly include one or more of the features.In this reality
With in novel description, it should be noted that unless otherwise clearly defined and limited, term " installation ", " connected ", " connection "
It shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can be mechanical connect
It connects, can be directly connected, the connection inside two elements can also be can be indirectly connected through an intermediary.For this
For the those of ordinary skill in field, the concrete meaning of above-mentioned term in the present invention can be understood by concrete condition.
The preferred embodiment of the utility model is described in detail with reference to the accompanying drawing, so that the advantages of the utility model
It can be easier to be readily appreciated by one skilled in the art with feature, to make the protection scope of the utility model apparent clear
Define.
The utility model provides a kind of Suction cup assembly picked and placed for graphite boat silicon wafer, for silicon wafer to be inserted into graphite boat
Or silicon wafer is taken out from graphite boat, it please refers to Fig. 1-Fig. 2, Fig. 1 and Fig. 2 and shows sucker group described in the utility model embodiment
The structure of part, the Suction cup assembly include mounting portion 10 and the drawing section for being connected to 10 downside of mounting portion.The sucker group
Part is installed by the mounting portion 10 to the grabbing assemblies such as manipulator；The drawing section is inserted into graphite boat for drawing silicon wafer
On, or the silicon wafer on graphite boat drawn and taken out, overcome it is artificial pick and place the silicon chip surface that silicon wafer may cause and scratch, reduce
Silicon wafer contaminated probability, improves production efficiency.
The first air flue (not regarding out in figure) is equipped in the mounting portion 10.The drawing section includes substrate 21, along described
The y direction of substrate 21 offers a plurality of holding tank 210 in parallel, and a tracheae 22 is equipped in every holding tank 210,
The upper end of the every tracheae 22 is connected to first air flue.In the present embodiment, the holding tank 210 is described equipped with three
Tracheae 22 is correspondingly arranged on three.
The lower end of every holding tank 210 is communicatively equipped with a sucker through slot 211, the lower end of the every tracheae 22
It is respectively connected with a sucker 23, the sucker 23 is located in the sucker through slot 211, it is possible to understand that, in the present embodiment, the suction
Disk through slot 211, sucker 23 is corresponding be all provided with there are three.The substrate 21 is that the tracheae 22 and the sucker 23 provide support,
The drawing section silicon wafer is drawn by three suckers 23.
In the present embodiment, the center of three suckers 23 forms an isosceles triangle, and every silicon wafer is by described three
Sucker 23 is sucked from three directions, and silicon wafer uniformly can be securely sucked in suction, can effectively avoid the Suction cup assembly in movement
Silicon wafer occurs in the process to fall.
Please continue to refer to Fig. 2, in the present embodiment, four bullets are communicatively equipped with around each sucker through slot 211
Spring through slot 2110 is equipped with spring 24 in every spring through slot 2110, and one end of the spring 24 is connected to the sucker
On 23, the other end is connected on the substrate 21.
The setting of the spring 24 has the sucker 23 on direction in length, the width and thickness of the substrate 21
Excellent elasticity, the defect that graphite boat can be overcome easily-deformable, so that the silicon wafer of absorption can be smoothly inserted by the Suction cup assembly
On graphite boat and the sucker 23 is bonded more preferably with the silicon wafer on graphite boat, simultaneously as sucker 23 is in sucker through slot 211
In realized and be flexibly connected with the substrate 21 by the spring 24, sucker 23 by after the reaction force of silicon wafer to silicon wafer
Oppressive force buffered, to reduce the probability that silicon wafer is subject to crushing damage, improve yield rate, reduce production cost.
First fixation hole 212 there are four opening up on the substrate 21, offers on the corresponding position of the sucker 23
Four the second fixation holes 237, the both ends of the spring 24 are connected to first fixation hole 212 and second fixation hole
On 237.
Fig. 3 and Fig. 4 are please referred to, Fig. 3, Fig. 4 respectively illustrate the front view structure and vertical view of sucker 23 described in the present embodiment
Structure, the sucker 23 include shell 230, and second fixation hole 237 is provided on the shell 230.
It is provided with the second air flue 231 in the shell 230, offers the first suction in the front 2301 of the shell 230
Port 232, second air flue 231 are connected to the lower end of first air entry 232 and the tracheae 22.I.e. described first inhales
Port 232 passes sequentially through second air flue 231, the tracheae 22 is connected to first air flue.
Please continue to refer to Fig. 1, in one embodiment, it is equipped with air exhaust nozzle 11 in the side of the mounting portion 10, it is described
Air exhaust nozzle 11 is connected on first air flue, can be evacuated by the air exhaust nozzle 11, in first air flue, 22 and of tracheae
Vacuum is generated in second air flue 231, negative pressuren zone is formed at the sucker 23 by first air entry 232 and silicon is sucked
Piece.
Further, first air entry 232 be set on positive 2301 center round hole, described positive 2301
It is set as being sequentially located at first annular boss 233, annular groove 234 and the second convex annular of 232 periphery of the first air entry
Platform 235.Wherein, the first annular boss 233 is identical as 235 height of the second annular convex platform, and the sucker 23 draws silicon
When piece, silicon chip surface is attached in the annular surface of the first annular boss 233, the second annular convex platform 235.The front
2301 refer to that the one side of silicon wafer, i.e., the absorption face of the described sucker 23 is sucked in the sucker 23.
Further, at least one second air entry 236, second gas are offered on the annular groove 234
Road 231 is also connected to the lower end of second air entry 236 and the tracheae 22.It is identical as first air entry 232, described
Two air entries 236 pass sequentially through second air flue 231, the tracheae 22 is connected to first air flue.When passing through the pumping
When gas nozzle 11 is evacuated, vacuum is generated in first air flue, tracheae 22 and second air flue 231, is inhaled by described first
Port 232, the second air entry 236 form negative pressuren zone at the sucker 23 and silicon wafer are sucked.
In the present embodiment, there are two second air entry 236 is set, positioned at the two sides of first air entry 232, so that
The sucker 23 applies sufficiently large suction to silicon wafer, is adsorbed to silicon wafer firmly on the drawing section.
The above description is only the embodiments of the present invention, and therefore it does not limit the scope of the patent of the utility model, all
Equivalent structure or equivalent flow shift made based on the specification and figures of the utility model, is applied directly or indirectly in
Other related technical areas are also included in the patent protection scope of the utility model.
Claims (5)
1. a kind of Suction cup assembly picked and placed for graphite boat silicon wafer, which is characterized in that the Suction cup assembly includes mounting portion and company
Connect the drawing section on the downside of the mounting portion；The first air flue is equipped in the mounting portion；The drawing section includes substrate, along described
The y direction of substrate offers a plurality of holding tank in parallel, and a tracheae is equipped in every holding tank；Every appearance
Receiving the lower end of slot is communicatively equipped with a sucker through slot；The upper end of the every tracheae is connected to first air flue, described every
The lower end of root tracheae is respectively connected with a sucker, and the sucker is located in the sucker through slot；Around each sucker through slot
Four spring through slots are communicatively equipped with, spring is equipped in every spring through slot, one end of the spring is connected to described
On sucker, the other end is connected on the substrate；
The sucker includes shell, and the second air flue is provided in the shell, offers the first suction in the front of the shell
Port, second air flue are connected to the lower end of first air entry and the tracheae；
First air entry is the round hole set on the front center, and the front is successively arranged positioned at first air-breathing
The first annular boss of mouthful periphery, positioned at the first annular boss periphery annular groove and be located at the annular groove periphery
The second annular convex platform；
Offer at least one second air entry on the annular groove, second air flue be connected to second air entry with
The lower end of the tracheae.
2. Suction cup assembly according to claim 1, which is characterized in that the first annular boss and second convex annular
Platform height is identical.
3. Suction cup assembly according to claim 1, which is characterized in that the first fixation hole is offered on the substrate,
Offer the second fixation hole on the corresponding position of the shell, the both ends of the spring be connected to first fixation hole and
On second fixation hole.
4. Suction cup assembly according to claim 1, which is characterized in that the holding tank is equipped with three, three receivings
The lower end of slot is communicatively set there are three the sucker through slot, and the center of three suckers in three sucker through slots forms
One isosceles triangle.
5. Suction cup assembly according to claim 1, which is characterized in that be equipped with air exhaust nozzle, institute in the side of the mounting portion
Air exhaust nozzle is stated to be connected on first air flue.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821090182.6U CN208521910U (en) | 2018-07-11 | 2018-07-11 | The Suction cup assembly picked and placed for graphite boat silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821090182.6U CN208521910U (en) | 2018-07-11 | 2018-07-11 | The Suction cup assembly picked and placed for graphite boat silicon wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208521910U true CN208521910U (en) | 2019-02-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821090182.6U Active CN208521910U (en) | 2018-07-11 | 2018-07-11 | The Suction cup assembly picked and placed for graphite boat silicon wafer |
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| Country | Link |
|---|---|
| CN (1) | CN208521910U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110571182A (en) * | 2019-08-30 | 2019-12-13 | 江苏润阳悦达光伏科技有限公司 | Graphite boat loading and unloading piece sucking disc |
-
2018
- 2018-07-11 CN CN201821090182.6U patent/CN208521910U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110571182A (en) * | 2019-08-30 | 2019-12-13 | 江苏润阳悦达光伏科技有限公司 | Graphite boat loading and unloading piece sucking disc |
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