CN208444824U - A kind of crystal plate taking separator - Google Patents

Abstract

The utility model relates to solar battery manufacturing equipment technical field more particularly to a kind of crystal plate taking separators.Wherein, driving assembly is connect with separation assembly, adsorption plate is fixed on separation assembly, the turnover absorption arm and adsorption plate that the side of adsorption plate is equipped with can be adsorbed on the lower surface of substrate and the upper surface of film respectively, so that wafer holder is between adsorption plate and absorption arm, and the energy synchronizing moving under the driving effect of driving assembly, chip is taken out from carrier；Absorption arm is connected with motion controller, driving assembly drives adsorption plate contact and vacuum suction is at the lower surface of substrate, it is vertically movable that motion controller can drive absorption arm to make, so that the contact of absorption arm and vacuum suction film, also absorption arm can be driven to make lateral turnover, so that absorption arm drives film to separate with substrate, to both be able to achieve quickly taking for chip, it is able to achieve the quick separating of substrate and film again, greatly improves production capacity.

Description

A kind of crystal plate taking separator

Technical field

The utility model relates to solar battery manufacturing equipment technical field more particularly to a kind of crystal plate taking separation dresses It sets.

Background technique

Thin-film solar cells is the novel photovoltaic device of alleviating energy crisis.Thin-film solar cells can be used in valence The different materials such as the cheap ceramics of lattice, graphite, sheet metal work as substrate to manufacture, therefore can serve as a contrast compared with silicon under same light-receiving area The dosage of raw material is greatly decreased in bottom solar battery, and the film thickness that formation can produce voltage only needs a few micrometers, and has very Good transfer efficiency.Hull cell solar cell is other than plane, also because having pliability that can be fabricated to non-planar structure It makes that its application range is big, in conjunction with building or some of building body can be become, it is very widely used.

In the manufacturing process of thin-film solar cells, the square shaped substrate with solar energy film is passing through etching technics Afterwards, film and square shaped substrate (wafer) abutment surface tension, which combine, is placed in carrier.In order to meet subsequent production technology need It asks, needs one by one to take out substrate from carrier, then by substrate and thin film separation.In the prior art, one can only be taken out every time Piece substrate, and after substrate taking-up, it needs to place the substrate into another separation assembly and carries out the separation of substrate and film, therefore is same Sample can only realize the separation process of one group of substrate and film every time, and above-mentioned substrate is taken and separation is divided into first latter two process, Need to employ distinct device completion, and the separation process used time is longer, strong influence production capacity.

Utility model content

(1) technical problems to be solved

The utility model provides a kind of crystal plate taking separator, has not only been able to achieve quickly taking for substrate, but also be able to achieve The quick separating of substrate and film, to improve production capacity.

(2) technical solution

In order to solve the above-mentioned technical problem, the utility model provides a kind of crystal plate taking separator, including separation group Part and driving assembly, chip include substrate and set film over the substrate, and the driving component is connect with separation assembly, institute It states and is fixed with adsorption plate on separation assembly, for adsorbing the fixed substrate, the side of the adsorption plate is equipped with the adsorption plate Turnover absorption arm, the adsorption plate and the absorption arm can be adsorbed on the lower surface of the substrate and described thin respectively The upper surface of film, so that the wafer holder is between the adsorption plate and the absorption arm, in the drive of the driving component Under movement is used, the absorption arm and the adsorption plate energy synchronizing moving take out the chip from carrier；

The absorption arm is connected with motion controller, and the driving component drives the adsorption plate contact and vacuum suction At the lower surface of the substrate, it is vertically movable that the motion controller can drive the absorption arm to make, so that the absorption Film described in arm contact and vacuum suction；The motion controller can also drive the absorption arm to make lateral turnover, so that The absorption arm drives the film to separate with the substrate.

Preferably, the motion controller includes rotating mechanism and slide control mechanism, and the slide control mechanism passes through The rotating mechanism is connect with the absorption arm, under the driving effect of the slide control mechanism, the rotating mechanism and What the absorption arm can synchronize is vertically sliding, and the rotating mechanism can drive the absorption arm to make lateral turnover.

Preferably, the rotating mechanism includes belt gear, and the driving wheel of the belt gear passes through rotation Shaft coupling is connected with servo motor, and any driven wheel of the belt gear is connect by shaft with the absorption arm； The rotation shaft coupling and the shaft are connect with the slide control mechanism respectively.

Preferably, the slide control mechanism includes:

Swivel slide is connected with guide rail by sliding block, and the sliding block is for driving the swivel slide perpendicular along the guide rail Straight sliding, the rotation shaft coupling and the shaft are separately fixed on the swivel slide；

Cylinder is connected to vertically on the swivel slide, and the swivel slide can be driven to slide in the Telescopic-cylinder；

Position-limiting unit is mounted on the swivel slide, respectively to the sliding stroke highest point of the swivel slide and most Low spot is limited.

Preferably, the position-limiting unit includes limit fixed block and limit external member, in the sliding stroke of the swivel slide Highest point and lowest point are respectively provided with the limit fixed block, and are respectively arranged with limiting stand in the two sides of the swivel slide, In a limiting stand be oppositely arranged with the limit fixed block that highest point is arranged in, another described limiting stand and setting The limit fixed block in lowest point is oppositely arranged；A pair limiting stand in office is arranged in the limit external member and limit is fixed On block.

Preferably, the limit external member includes the caging bolt and stop nut of mating setting.

Preferably, the both ends of the shaft pass through bearing fixed seat respectively and connect with the swivel slide.

Preferably, the absorption arm includes central axis and vacuum suction piece, and the rotating mechanism and vacuum suction piece divide It is not connected to the both ends of the central axis, and non-coaxial setting between the central axis and vacuum suction piece, is controlled in the sliding Under the drive of mechanism processed, the central axis can drive the vacuum suction piece to slide vertically and drive the vacuum suction piece Make lateral turnover around the central axis.

Preferably, the absorption arm further includes multi-diameter shaft, one end of the multi-diameter shaft and the center axis connection, another End is equipped with linking arm, and the multi-diameter shaft connect by the linking arm with the vacuum suction piece, the linking arm with it is described in Non-coaxial setting between mandrel, when rotated, the linking arm is under the rotary action of the multi-diameter shaft, energy band for the central axis It moves the vacuum suction piece to be overturn from a side of the central axis to the other side, so that the vacuum suction piece surrounds the center Axis makees lateral turnover.

Preferably, the vacuum suction piece is 0~360 ° around the flip angle range that the central axis makees lateral turnover.

Preferably, the absorption arm further includes vacuum generator, and the vacuum generator is connect with vacuum suction piece.

Preferably, the separation assembly further includes plummer, and the adsorption plate is fixed on the plummer, the absorption Arm is mounted on the plummer by motion controller, and the plummer is connected in the driving component, in the drive Under the drive of dynamic component, the plummer can drive the adsorption plate and the absorption arm synchronizing moving.

Preferably, the plummer includes that fixed bottom plate and fixed side panel, the fixed side panel are stood in the fixed bottom plate On, the side of the fixed side panel is equipped with the motion controller, and the end of the fixed bottom plate is protruding fixed arm, The fixed arm is correspondingly arranged at the side of the motion controller, and the extension end of the fixed arm is connected with the adsorption plate.

Preferably, separative unit is formed with a turnover absorption arm and an adsorption plate, described point It include positive separative unit and reversed separative unit from unit, adsorption plate is arranged in the absorption arm of the forward direction separative unit The inside of adsorption plate is arranged in outside, the absorption arm of the reversed separative unit；The forward direction separative unit and described reversed Separative unit is alternatively arranged, and two absorption hands in the adjacent positive separative unit and the reversed separative unit The reverses direction of arm is opposite.

Preferably, the driving component includes:

X-axis driver is connect with the separation assembly, with drive the adsorption plate with it is described absorption arm it is synchronous make water Translation is dynamic；

Y-axis driver is connect with the X-axis driver, for driving the X-axis driver to make vertical shift.

Preferably, the driving component further includes bindiny mechanism, and the X-axis driver is fixed in bindiny mechanism, the Y Axis driver is connect with the bindiny mechanism, and under the driving effect of the Y-axis driver, the bindiny mechanism can drive described X-axis driver makees vertical shift.

Preferably, the bindiny mechanism includes connecting bottom board and connecting lateral plate, and the X-axis driver is fixed on the connection On bottom plate, the connecting bottom board is fixed on the connecting lateral plate, and the connecting lateral plate is connect with the Y-axis driver, in institute Under the drive for stating Y-axis driver, the connecting lateral plate can drive the connecting bottom board to make vertical shift.

Preferably, the X-axis driver includes X-axis driving motor, synchronous pulley and horizontal slide rail, the horizontal slide rail paving It is located on the connecting bottom board, slidable horizontal slider is equipped on the horizontal slide rail, the separation assembly is fixedly connected On the horizontal slider, the X-axis driving motor drives the horizontal slider along described horizontal sliding by the synchronous pulley Rail moves horizontally, so that the horizontal slider drives the separation assembly to move horizontally.

Preferably, the Y-axis driver includes Y-axis driving motor and upright slide rail, and the upright slide rail is equipped with and can live Dynamic upright slide block, the upright slide block are connect with the Y-axis driving motor, and can under the driving of the Y-axis driving motor, Make vertical shift along the upright slide rail；The connecting lateral plate is fixedly connected on the upright slide block, in the upright slide block Drive under, the connecting lateral plate drives the connecting bottom board vertical shift, to drive the X-axis driver to make vertical shift.

Preferably, the upright slide rail is lead screw, and the lead screw is connected by driving shaft coupling and the Y-axis driving motor It connects, the upright slide block is sleeved on the lead screw, and the Y-axis driving motor drives the lead screw by the driving shaft coupling Rotation, to drive the upright slide block to make vertical shift along the lead screw.

(3) beneficial effect

The above-mentioned technical proposal of the utility model has the advantages that

1, in crystal plate taking separator described in the utility model, using adsorption plate vacuum suction substrate, movement is utilized Vertical the sliding certainly of controller driving absorption arm, so that absorption arm adsorbs the film on substrate, so that chip be made to be pressed from both sides It holds between absorption arm and adsorption plate, drives absorption arm and adsorption plate synchronizing moving using driving assembly, to realize to crystalline substance Piece is quickly taken, and the substrate of chip and the integrality of film is effectively ensured when taking, and wafer quality is prevented to be affected； The device adsorbs the lateral turnover of arm using motion controller driving, so that the overturning by absorption arm will be thin on substrate Film laterally starts, so that substrate and film safe separating, so the present apparatus and method can both be able to achieve crystalline substance on same device Piece is quickly taken, and is able to achieve the substrate of chip and the quick separating of film, and effectively save process conversion time greatly mentions High production capacity；

It 2,, will be brilliant since motion controller drives the vertical from sliding of absorption arm in device described in the utility model The clamping of piece takes process and is further broken into two steps, and when adsorption plate absorption substrate, deposits between film and absorption arm There is vertical safe gap, film can be prevented impaired or is falling off；When adsorption plate complete to the absorption of the lower surface of substrate with Afterwards, then drive absorption arm vertically movable, to be adjacent to film, to live film using vacuum suction, prevent absorption arm with it is thin Offset is generated between film and between film and substrate, and then ensures adsorption plate and adsorb arm to clamp the safety of chip, is kept away It is impaired to exempt from film, and can ensure that do not have relative displacement between substrate and film in taking piece and separation process so that take piece and Separation process has very high accuracy；

3, in device described in the utility model, multiple groups separative unit is respectively set on same separation assembly, to realize one It is secondary to operate the pick-and-place and separation for being completed at the same time more wafers.

4, in device described in the utility model, positive separative unit and reversed separative unit are alternatively arranged, and adjacent The reverses direction of two absorption arms in positive separative unit and reversed separative unit is on the contrary, to prevent two adjacent groups from separating The absorption arm of unit is interfered with each other in overturning, improves device security, and can the effectively save device space；

5, in device described in the utility model, by the way that position-limiting unit is arranged, so that swivel slide has controllably vertical Sliding stroke takes piece and isolated accuracy to improve.

Detailed description of the invention

Fig. 1 is the structural schematic diagram of the crystal plate taking separator of the utility model embodiment one；

Fig. 2 is the top view of the separation assembly of the utility model embodiment one；

Fig. 3 is the structural schematic diagram of the rotating mechanism of the utility model embodiment one；

Fig. 4 is the working state figure of the motion controller of the utility model embodiment one；

Fig. 5 is the structural schematic diagram of the motion controller of the utility model embodiment two；

Fig. 6 is the structural schematic diagram of the carrier of the utility model embodiment one to three；

Fig. 7 is the loading condition schematic diagram of the chip of the utility model embodiment one to three；

Fig. 8 is that the separation assembly of the utility model embodiment one to three takes piece schematic diagram；

Fig. 9 is the structural schematic diagram of the separation original state of the separation assembly of the utility model embodiment one to three；

Figure 10 is the structural schematic diagram of the discrete state of the separation assembly of the utility model embodiment one to three.

Wherein, 1, Y-axis driver；2, X-axis driver；3, connecting bottom board；4, separation assembly；5, connecting lateral plate；6, it sprays water Mouthful；

10, fixed bottom plate；20, fixed side panel；30, rotating mechanism；40, swivel slide；50, cylinder；60, guide rail；70, it inhales Attached arm；80, fixed arm；90, adsorption plate；

31, servo motor；32, shaft coupling is rotated；33, rotary connection plate；34, driving wheel；35, belt；36, driven wheel； 37, shaft；38, bearing fixed seat；

401,406, limit fixed block；402,404, caging bolt；403,405, stop nut；407, fixed frame；

100, carrier；200, substrate；300, film.

Specific embodiment

The embodiments of the present invention is described in further detail with reference to the accompanying drawings and examples.Following embodiment For illustrating the utility model, but cannot be used to limit the scope of the utility model.

In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or more.Term The orientation of the instructions such as "upper", "lower", "left", "right", "inner", "outside", " front end ", " rear end ", " head ", " tail portion " or position are closed System is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of describing the present invention and simplifying the description, rather than The device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot It is construed as a limitation of the present invention.

Embodiment one

As shown in Figure 1, the present embodiment one provides a kind of crystal plate taking separator, for carrying out quick fetching to chip And separation, wherein chip includes substrate 200 and the film 300 that is located on substrate 200.The device includes separation assembly 4 and driving Component, driving assembly are connect with separation assembly 4, and driving assembly can drive separation assembly to move integrally；Wherein, on separation assembly 4 It is fixed with adsorption plate 90, adsorption plate 90 is used for vacuum suction substrate 200, and the side of adsorption plate 90 is equipped with turnover absorption arm 70, absorption arm 70 can be turned to the top of substrate 200, can also overturn to leave 200 position of substrate axially outward.Absorption Arm 70 is connected with motion controller, and when driving assembly drives separation assembly 4 to move integrally, adsorption plate 90 can be contacted and vacuum is inhaled Be attached to the lower surface of substrate 200, at this point, motion controller can drive absorption arm 70 make it is vertically movable so that absorption arm 70 The upper surface of simultaneously vacuum suction film 300 is contacted, so that wafer holder is between adsorption plate 90 and absorption arm 70；Work as wafer clamp When holding between adsorption plate 90 and absorption arm 70, under the driving effect of driving assembly, arm 70 and 90 energy of adsorption plate are adsorbed Synchronizing moving takes out chip from carrier, to realize quickly taking to chip, and the effective protection chip when taking Substrate and film integrality, prevent wafer quality to be affected.In addition, absorption arm can also be operated alone in motion controller 70 make lateral turnover, so that absorption arm 70 can drive film 300 to separate with substrate 200, to realize substrate 200 and film 300 Safe separating.

It follows that the present apparatus can not only be able to achieve quickly taking for chip on same device, but also it is able to achieve chip The quick separating of substrate 200 and film 300, effectively save process conversion time, greatly improves production capacity；Simultaneously as movement Controller can drive the vertical from sliding of absorption arm 70, so that process is taken in the clamping of chip is further broken into two steps Suddenly, on the one hand, when adsorption plate 90 adsorbs substrate 200, there are vertical safety is empty between film 300 and absorption arm 70 Gap can prevent film 300 impaired or fall off；On the other hand, it after adsorption plate 90 is completed to the absorption of substrate 200, then drives Dynamic absorption arm 70 is vertically movable, so that the absolute displacement for adsorbing arm 70 be decomposed from least two freedom degrees, realizes and inhales The precision of the absorption position of attached arm 70 and film 300 is finely tuned, to prevent between absorption arm 70 and film 300 and thin Offset is generated between film 300 and substrate 200, and then ensures adsorption plate 90 and adsorb arm 70 to clamp the safety of chip, is avoided Film 300 is impaired, and can ensure that between substrate 200 and film 300 do not have relative displacement in taking piece and separation process, so that Take piece and separation process that there is very high accuracy.

The separation assembly 4 of the device can be realized respectively takes piece and separation.

When taking piece, drive separation assembly 4 mobile by driving assembly, simultaneously vacuum suction exists to drive the contact of adsorption plate 90 The lower surface of substrate 200；Since absorption arm 70 slides vertically stroke with preset, when absorption arm 70 is turned to substrate When 200 top, due between absorption arm 70 and film 200 there are safe gap, the overturning of absorption arm 70 will not touch Touching hurts chip, recycles motion controller that absorption arm 70 is driven vertically to glide, to make its contact, simultaneously vacuum suction exists On film 300, then chip is accurately clamped between adsorption plate 90 and absorption arm 70, prevents substrate 200 and film 300 from existing Relative displacement occurs when taking piece.After wafer holder is got well, moved integrally using driving assembly driving separation assembly 4, to drive Dynamic adsorption plate 90 and absorption 70 synchronizing moving of arm, chip is quickly removed from carrier 100.

In separation, which is respectively equipped with separation original state and separation end state, such as Fig. 9 and Figure 10 institute Show, when separation assembly 4 is in separation original state, adsorbs arm 70 and adsorption plate 90 clamps be adsorbed on the upper and lower of chip respectively Arm 70 is adsorbed from the upper direction of adsorption plate 90 and is turned to adsorption plate 90 when separation assembly 4 is in separation end state in two sides Side, separation assembly 4 by separation original state to separation end state during, separation assembly 4 utilize motion control Device driving absorption arm 70 makees lateral turnover, thus by the overturning of absorption arm 70 by 300 side of film on substrate 200 to lifting It rises, so that substrate 200 and 300 safe separating of film.

Specifically, using horizontal direction as X-axis, using vertical direction as Y-axis, driving mechanism includes 2 He of X-axis driver in Fig. 1 Y-axis driver 1, X-axis driver 2 are connect with separation assembly 4, for driving the entirety of separation assembly 4 to move horizontally, i.e., to drive Dynamic adsorption plate 90 and adsorb that arm 70 is synchronous to be moved horizontally；Y-axis driver 1 is connect with X-axis driver 2, for driving X-axis Driver 2 is for vertical movement.

In the present embodiment one, driving assembly further includes bindiny mechanism, and X-axis driver 2 is fixed in bindiny mechanism, connects machine Structure is connect with Y-axis driver 1, and under the driving effect of Y-axis driver 1, bindiny mechanism can drive X-axis driver 2 to move vertically It is dynamic.Bindiny mechanism includes connecting bottom board 3 and connecting lateral plate 5, and X-axis driver 2 is fixed on connecting bottom board 3, and connecting bottom board 3 is fixed On connecting lateral plate 5, connecting lateral plate 5 is connect with Y-axis driver 1, and under the drive of Y-axis driver 1, connecting lateral plate 5 can be driven Connecting bottom board 3 makees vertical shift, so that X-axis driver 2 be driven to make vertical shift.

It should be noted that bindiny mechanism is in addition to the above described configuration, and it can also include other structures, it can as long as meeting Guarantee that X-axis driver 2 is capable of fixing in the bindiny mechanism, and the bindiny mechanism connects Y-axis driver 1, so that Y-axis is driven When dynamic device drive connection mechanism movement, it is able to drive X-axis driver 2 and makees vertical shift.

Preferably, X-axis driver 2 includes X-axis driving motor, synchronous pulley and horizontal slide rail, and horizontal slide rail is laid on company It connects on bottom plate 3, slidable horizontal slider is equipped on horizontal slide rail, separation assembly 4 is fixedly connected on horizontal slider, X-axis Driving motor drives horizontal slider to move horizontally along horizontal slide rail by synchronous pulley, so that horizontal slider drives separation The whole of component 4 is moved along horizontal X-axis.Similarly, Y-axis driver 1 includes Y-axis driving motor and upright slide rail, upright slide rail Setting is erect, which is provided with upright slide block, upright slide block can be slided along upright slide rail, and Y-axis driving motor is preferably mounted at The either end of upright slide rail, and upright slide block can be driven to slide, connecting lateral plate 5 is fixedly connected on upright slide block, so that Upright slide block is able to drive 5 vertical motion of connecting lateral plate, and then drives 2 vertical motion of X-axis driver.

In order to which the structural reliability of driving mechanism is stronger, the upright slide rail of Y-axis driver is in addition to above-mentioned sliding block activity dress It, can also be using the structure of lead screw and nut activity assembly outside with structure in orbit.Wherein, preferably upright slide rail is silk Thick stick, then upright slide block is nut, and lead screw passes through the output axis connection of driving shaft coupling and Y-axis driving motor, so that Y-axis driving electricity Machine drives lead screw rotation by driving shaft coupling, so that the upright slide block being screwed on lead screw is driven to move along lead screw, Jin Ershi The vertical shift of existing upright slide block.

It should be noted that driving motor can be selected and be watched in the X-axis driver 2 and Y-axis driver 1 of the present embodiment one Motor 31 is taken, stepper motor can also be selected；The horizontal slide rail of X-axis driver 2 and the upright slide rail of Y-axis driver 1 By lead screw and support holder assembly substitution；The synchronous pulley of X-axis driver 2 can be substituted by gear assembly, i.e. X-axis driving motor It is connect by gear assembly with separation assembly 4, to drive separation assembly 4 to move horizontally along horizontal slide rail；The drive of Y-axis driver 1 Dynamic shaft coupling could alternatively be synchronous pulley or gear assembly, as long as the drive of Y-axis driving motor is enabled to pass through connecting side Plate 5 drives X-axis driver 2 to move along upright slide rail.

The reference frame of the present apparatus is shown in Fig. 1, wherein using the forward direction of Z axis as outside, Z axis is reversed inside. It is separative unit with a turnover absorption arm 70 and an adsorption plate 90 in the device of the present embodiment one, separation is single Member includes positive separative unit and reversed separative unit, and the outer of adsorption plate 90 is arranged in the absorption arm 70 of positive separative unit The inside of adsorption plate 90 is arranged in side, the absorption arm 70 of reversed separative unit.In the present embodiment, separation assembly is equipped with one group Or multiple groups separative unit, when being equipped with one group of separative unit, which both can may be anti-for positive separative unit To separative unit；When being equipped with multiple groups separative unit, positive separative unit and reversed separative unit are alternatively arranged, due to every component It respectively can individually be controlled from the absorption arm 70 in unit, and the adjacent positive separative unit and the reversed separation The reverses direction of two absorption arms 70 in unit is rather, it is preferred to each flip angle adsorbed when arm 70 makees lateral turnover Range is 0~360 °, therefore, the present apparatus not only may be implemented to be completed at the same time in once-through operation multiple substrates 200 pick-and-place and Separation improves equipment it is also possible that two absorption arms 70 of two adjacent groups separative unit avoid interfering with each other in overturning Safety, and can the effectively save device space.

The structure of separation assembly 4 is specifically introduced for two groups of separative units are respectively set on a separation assembly 4 below, Wherein, in two groups of separative units one be positive separative unit, one is reversed separative unit, and for more convenient each group The safety overturning of arm 70 is adsorbed, two adsorption plates 90 in this two groups of separative units are adjacent.

As shown in Fig. 2, separation assembly 4 includes rotating mechanism 30 and slide control mechanism, motion controller includes whirler Structure 30 and slide control mechanism, slide control mechanism is connect by rotating mechanism 30 with absorption arm 70, in slide control mechanism Driving effect under under, rotating mechanism 30 synchronous can be vertically sliding with absorption arm 70, and rotating mechanism 30 can also be individual Driving absorption arm 70 makees lateral turnover.Since driving assembly can drive separation assembly 4 to move integrally, in separation assembly 4 When overall movement, it is meant that rotating mechanism 30, slide control mechanism and the adsorption plate 90 being fixed on separation assembly 4 synchronize It is mobile, thus after the position of adsorption plate 90 determines, rotating mechanism 30 and slide control mechanism can be passed through as benchmark It works in coordination, to drive absorption arm 70 to carry out mobile and flip-flop movement.

In order to further realize being reliably connected for separation assembly 4 and driving assembly, the operation precision of device is improved, is preferably divided It further include plummer from component 4, adsorption plate 90 is fixed on plummer, is adsorbed arm 70 by motion controller and is mounted on carrying On platform, plummer is connected on driving assembly, and it is mobile that driving assembly can drive plummer, so that plummer be made to drive adsorption plate 90 and absorption 70 synchronizing moving of arm, and then driving assembly is made to realize the driving effect to the overall movement of separation assembly 4.

Wherein, plummer includes but is not limited to fixed bottom plate 10 and fixed side panel 20, and fixed side panel 20 is stood in fixed bottom plate On 10, the rotating mechanism 30 and slide control mechanism of motion controller are installed in the same side of fixed side panel 20, fixed bottom plate 10 end is protruding fixed arm 80, and fixed arm 80 is correspondingly arranged at the side of motion controller, the stretching of fixed arm 80 End is connected with adsorption plate 90.

When separation assembly 4 is equipped with two groups of separative units, preferably at the both ends of fixed bottom plate 10, each stand has one respectively Fixed side panel 20 is separately connected there are two rotating mechanism 30 on two absorption arms 70 in two groups of separative units, the two rotations Rotation mechanism 30 is mounted on the inside of two fixed side panels 20 by slide control mechanism respectively, is fixing the same end of bottom plate 10 simultaneously Arrange protruding there are two fixed arm 80, the extension end of each fixed arm 80 is fixed with an adsorption plate 90, wherein adsorption plate 90 wraps Absorption end has been included, has been inserted into carrier 100 by absorption end, with vacuum suction in the lower surface of substrate 200.The two are fixed Be reserved with pre-determined distance between arm 80, to avoid when taking piece or separation, between the substrate 200 of two chips and film 300 it Between mutually collide, it is pre- between two fixed arms 80 this is because: if when the reverses direction of two rotating mechanisms 30 is identical If distance should stay it is sufficiently large, thus need there are sufficiently large spaces between two films 300, just can guarantee separation when not It interferes；But on the one hand when the distance between two films 300 are sufficiently large, organization volume will become larger, and the present apparatus Two absorption arms 70 be respectively adopted a first from left right side reverse flip mode, while separating the substrates 200 of two chips With film 300, so as to effectively reduce mechanism space occupied；On the other hand, the space between the film 300 of two chips It can be realized by increasing the size of carrier 100, it can also be in the case where 100 size constancy of carrier, by two absorption hands Arm 70 is set as movable state, so as to the spacing being adjustable between two absorption arms 70.And the present apparatus is using two suctions of setting The reverses direction of attached arm 70 is on the contrary, separation while film 300 and substrate 200 to realize two chips, to ensure that On the basis of not changing original 100 size of carrier, the process that multi-wafer separated in synchronization can be securely achieved, and be both not required to The spacing for adjusting absorption arm 70 will not cause the interference between two films 300, therefore be most preferred structure, tool There is highest security reliability.

In order to realize the lateral turnover of absorption arm 70, preferably absorption arm 70 includes central axis and vacuum suction piece, rotation Rotation mechanism and vacuum suction piece are connected to the both ends of central axis, and non-coaxial setting between central axis and vacuum suction piece, Therefore, rotating mechanism vertical motion under the drive of slide control mechanism, while central axis can drive vacuum suction piece vertically to slide It is dynamic, and by itself rotation of central axis, to drive vacuum suction piece to make lateral turnover around the central axis.

Overturning precision when in order to ensure the overturning of vacuum suction piece is sufficiently high, and preferably absorption arm 70 further includes multi-diameter shaft, One end of the multi-diameter shaft and the center axis connection, the other end are equipped with linking arm, the multi-diameter shaft by the linking arm with The vacuum suction piece connection, when rotated, linking arm can drive vacuum suction piece under the rotary action of multi-diameter shaft to central axis It is overturn from a side of central axis to the other side, so that vacuum suction piece makees lateral turnover around central axis；And linking arm and center Non-coaxial setting between axis, and the overturning radius of the lateral turnover of linking arm can be rationally controlled, thus in the drive of rotating mechanism Under so that under the drive of motion controller, moved vertically downwards after vacuum suction piece is turned to the top of film 300, with from The upper surface clamped wafer of film 300, while then vacuum suction is driven on film 300 using the overturning of vacuum suction piece Film 300 is started from substrate 200；Wherein, the flight number of stages of multi-diameter shaft can according to the overturning radius of vacuum suction piece, And structural strength coefficient determines.The rotation angle of central axis can be regulated and controled by rotating mechanism 30, to control vacuum suction piece Upturned position and reversal rate.Vacuum suction piece is also connected with vacuum generator, thus between vacuum suction piece and film 200 Negative pressure of vacuum environment is created similarly, to be also connected on adsorption plate 90 in order to which vacuum suction piece vacuum suction lives film 200 Vacuum generator.

Specifically, as shown in figure 3, the rotating mechanism 30 of the present embodiment one includes belt gear, belt gear Driving wheel 34 be connected with servo motor 31 by rotating shaft coupling 32, can be equipped in belt gear it is one or more from Driving wheel 36, and any driven wheel 36 of belt gear is connect by shaft 37 with absorption arm 70, and servo electricity can be passed through The rotation of the driving shaft of machine 31 is to drive shaft 37 to rotate, so that absorption arm 70 be driven to make lateral turnover；Wherein, rotation connection Axis device 32 and shaft 37 are connect with slide control mechanism respectively, and slide control mechanism can drive rotation shaft coupling 32 simultaneously and turn 37 synchronizing moving of axis, to realize the vertical reciprocal from sliding of rotating mechanism 30.

It should be noted that the belt gear of rotating mechanism 30 can also use gear drive, it is corresponding, Driving gear in gear drive is connect with rotation shaft coupling 32, and any driven gear is connect with shaft 37, to realize The reliable transmission of 31 power of servo motor and torque；The power unit of rotating mechanism 30 can both select servo motor 31, can also To select stepper motor.

As shown in figure 4, the sliding of the present embodiment one controls in order to reliably control the vertical reciprocal from sliding of rotating mechanism 30 Mechanism includes swivel slide 40, cylinder 50 and position-limiting unit.

Specifically, guide rail 60 is preferably laid on the fixed side panel 20 of plummer, to drive plummer in driving mechanism When mobile, guide rail 60 can be moved with plummer, so that pushing moves rotating mechanism 30 with the entirety of separation assembly 4 It is dynamic；Swivel slide 40 is connect by sliding block with guide rail 60, and sliding block drives swivel slide 40 along 60 vertical sliding of guide rail, utilizes guide rail The moving direction of 60 pairs of swivel slides 40 limits；Rotation shaft coupling 32 and shaft 37 are separately fixed on swivel slide 40, It can be moved with the sliding of swivel slide 40, wherein the both ends of preferred shaft 37 pass through bearing fixed seat 38 and rotation respectively Turn the connection of slide plate 40, preferably rotation shaft coupling 32 is fixed on swivel slide 40 by rotary connection plate 33, to guarantee respectively Shaft 37 and the rotation precision of rotation shaft coupling 32 are high.

It, can also be using lead screw assembly to rotation other than being limited using moving direction of the guide rail 60 to swivel slide 40 The moving direction for turning slide plate 40 is limited, i.e., feed screw nut is arranged on swivel slide 40, and lead screw is fixed on fixed side panel On 20, so that the vertical sliding using feed screw nut on lead screw, realizes the vertical sliding of swivel slide 40.

Cylinder 50 is connected to vertically on swivel slide 40, and swivel slide 40 can be driven to slide when cylinder 50 stretches.This reality It applies in example one, preferably the cylinder barrel of cylinder 50 is fixed on fixed side panel 20 by fixed frame 407, and piston rod one end of cylinder 50 is solid It is scheduled on fixed bottom plate 10, the other end is reciprocating along the axial direction of cylinder barrel.Since fixed bottom plate 10 is relative to separation assembly 4 Generally speaking be it is fixed, when cylinder 50 is in stretching state, fixed bottom plate 10 is withstood in piston rod one end, and the other end pushes away Movable slider is moved upwards along guide rail 60；Swivel slide 40 is fixed on sliding block, and rotating mechanism 30 is fixed on swivel slide 40, and Absorption arm 70 is fixed on rotating mechanism 30 again.Therefore when the piston rod of cylinder 50 stretches out, 60 sliding block of guide rail can be transported upwards It is dynamic, so that swivel slide 40, rotating mechanism 30 and absorption arm 70 also move upwards therewith；When the piston rod of cylinder 50 tightens When, then piston rod pulls sliding block to move downward along guide rail 60, and swivel slide 40, rotating mechanism 30 and absorption arm 70 are also therewith It moves downward, to realize sliding vertically for rotating mechanism 30.

It should be noted that lead screw can also be used other than the flexible drive swivel slide 40 using cylinder 50 slides Nut assembling structure drives swivel slide 40 to slide, i.e., stands lead screw on fixed bottom plate 10, and feed screw nut is sleeved on outside lead screw, And moved axially along lead screw, feed screw nut is fixed on swivel slide 40, thus using the relative movement of feed screw nut and lead screw, Drive the vertical sliding of swivel slide 40.

Preferably, position-limiting unit is mounted on swivel slide 40, respectively to the sliding stroke highest point of swivel slide 40 and Minimum point is limited, to realize the glide direction and cunning to swivel slide 40 using the combination of guide rail 60 and position-limiting unit The double limitation of dynamic stroke, and then realize that the displacement to absorption arm 70 is finely tuned, it is ensured that adsorbing for 70 safety of absorption arm is thin Film 300.

Specifically, position-limiting unit includes limit fixed block 401,406 and limit external member, in the sliding stroke of swivel slide 40 Highest point and lowest point are respectively provided with limit fixed block 401,406, and are respectively arranged with limiting stand in the two sides of swivel slide 40, In a limiting stand be oppositely arranged with the limit fixed block 401 that highest point is arranged in, another limiting stand and be arranged in lowest point Limit fixed block 406 be oppositely arranged；It limits on external member setting a pair of of limiting stand in office and limit fixed block 401,406, preferably Limit external member includes the caging bolt 402,404 and stop nut 403,405 of mating setting.

The top left side of the swivel slide 40 of the present embodiment one is equipped with a lower limiting stand, and it is protruding that right side is equipped with one Higher limiting stand, thus swivel slide 40 top formed hierarchic structure.On the one hand, it is set above the limiting stand of left side Highest point limit fixed block 401 is set, caging bolt 402 is set on the limit fixed block 401, and in the correspondence position of the limiting stand Stop nut 403 is installed, so as to be oppositely arranged between this set of caging bolt 402 and stop nut 403, to be formed a set of The limit external member of highest point is set；Similarly, in the lower section of right side limiting stand, setting minimum point limits fixed block 406, at this Caging bolt 404 is set on outwardly directed limiting stand, and is correspondingly arranged stop nut 405 on the limit fixed block 406, with Make to be oppositely arranged between this set of caging bolt 404 and stop nut 405, to form a limit sleeve for being set on minimum point Part.When the piston rod of cylinder 50 stretches out, caging bolt 402 and stop nut 403 positioned at highest point are contacted, then this position is Sliding stroke highest point；When the piston rod of cylinder 50 retraction, caging bolt 404 and stop nut 405 positioned at minimum point are connect Touching, then this position is sliding stroke minimum point.No matter swivel slide 40 slides into stroke highest point or minimum point can be due to The collision of caging bolt 402,404 and stop nut 403,405 and stop sliding, to realize the sliding stroke of swivel slide 40 Limit up and down.

Embodiment two

The basic phase of apparatus structure described in the structure with embodiment one of crystal plate taking separator described in the present embodiment two Together, something in common repeats no more, the difference is that: as shown in figure 5, in device described in the present embodiment two, rotating mechanism 30 It is connect by oscillating cylinder 50 with shaft 37, oscillating cylinder 50 drives shaft 37 to rotate, so that absorption handle work be driven laterally to turn over Turn；Wherein, oscillating cylinder 50 and shaft 37 are connected on swivel slide 40, and are connect with slide control mechanism, sliding control Mechanism processed can drive 37 synchronizing moving of oscillating cylinder 50 and shaft simultaneously, to realize the vertical reciprocal from sliding of rotating mechanism 30 It is dynamic.

Embodiment three

On the basis of embodiment one or embodiment two, the present embodiment three provides a kind of crystal plate taking separation method, packet Include following steps:

S1, driving assembly driving adsorption plate contact and vacuum suction are driven in the lower surface of substrate, and by motion controller Dynamic absorption arm makees lateral turnover so that absorption arm is overturn to the top of substrate, and adsorb between arm and adsorption plate there are Gap.

S2, motion controller driving absorption arm are vertically sliding, so that on the contact of absorption arm and vacuum suction substrate Film.

S3, adsorption plate and absorption arm synchronizing moving are driven in driving assembly, substrate is synchronous from carrier with film It takes out.

S4, it keeps adsorption plate to fix, drives absorption arm to make lateral turnover by motion controller, so that absorption arm band Dynamic film is separated with substrate.

Wherein, step S1~step S4 is to take piece step, and step S5 is separating step.

Further, it takes in piece step, specifically can be analyzed to following steps:

S201: driving X-axis driver 2 moves horizontally, and driving Y-axis driver 1 moves upwards, so that adsorption plate 90 and substrate 200 following table face contact, and through vacuum suction on substrate 200；Absorption is driven by the rotating mechanism 30 of motion controller Arm 70 makees lateral turnover, so that absorption arm 70 is overturn to the top of substrate 200, and adsorbs between arm 70 and adsorption plate 90 There are gaps.

As shown in Figure 6 and Figure 7, multiple rectangular carriers 100 are set side by side, and are equipped in each carrier 100 for loading chip Square shaped substrate 200 groove, when substrate 200 is loaded in groove, the edge of the film 300 on substrate 200 is mounted in load Have 100 upper surfaces；One end of carrier 100 is equipped with the channel to match with adsorption plate 90, and on the quantity in channel and adsorption plate 90 Absorption end quantity it is identical, in the present embodiment three, the absorption end of adsorption plate 90 is two, then the channel pair of carrier 100 There are two should setting.

As shown in figure 8, separation assembly 4 is when taking piece, can first by 90 vacuum suction of adsorption plate substrate 100 following table Then face will adsorb arm 70 again and be turned to the top of adsorption plate 90 so that chip be located at adsorption plate 90 and adsorb arm 70 it Between；Absorption arm 70 can also be first turned to the top of adsorption plate 90, then drive adsorption plate 90 mobile simultaneously by driving assembly It is adsorbed onto the lower surface of substrate 100, i.e., chip is inserted between adsorption plate 90 and absorption arm 70.

Since cylinder 50 is maintained at stretching state, adsorb between arm 70 and adsorption plate 90 there are certain safe gap, Therefore when adsorption plate 90 is located in the channel of carrier 100, and is adsorbed on the lower section of substrate 200, absorption arm 70 is located at film 300 top, no and film 300 contact.

S201: driving cylinder 50 retracts, to drive rotating mechanism 30 and adsorb the synchronous downward fortune along the y axis of arm 70 It is dynamic, so that absorption arm 70 and 300 upper surface of film be made to be in contact, and make to adsorb arm 70 by vacuum suction in film On 300.

S301: guaranteeing that chip is clamped between absorption arm 70 and adsorption plate 90, and driving Y-axis driver 1 moves upwards Certain distance so that the adsorption plate 90 of separation assembly 4 and absorption 70 synchronous drive chip of arm substrate 200 and film 300 from Carrier 100 is opened, and guarantees not contact between separation assembly 4 and carrier 100.

S302: drive the overall movement of separation assembly 4 to preset disengaged position by X-axis driver 2, then adsorption plate 90 Film 300 and substrate 200 can be taken out from carrier 100 respectively simultaneously with absorption arm 70, piece step is taken to complete.

It takes in piece step in above-mentioned, since the separation assembly 4 of the present apparatus is equipped with two groups of separators, may be implemented It can synchronize every time and take out two substrates 200, effectively improve production capacity.

Further, in separating step, following steps specifically be can be analyzed to:

S401: respectively driving X-axis driver 2 and Y-axis driver 1 is moved to preset disengaged position, which sets There is water jet 6.

S402: the position of film 300 and substrate 200 is synchronized by the movement of X-axis driver 2 and Y-axis driver 1 Adjustment, so as to be respectively provided with a water jet 6 between the film 300 and substrate 200 of each chip.

S403: driving rotating mechanism 30 rotates, and adsorbs 70 lateral turnover of arm to drive, thus by film 300 from substrate It is started on 200, rotating mechanism 30 is started film 300, to realize film 300 by rotating by a certain angle from substrate 200 With the separation of substrate 200.

Separation assembly 4 between step 402 and step 403 experienced separation original state to the mistake of separation end state Journey, in the process, water jet 6 continue to spray water to the faying face of substrate 200 and film 300, to improve film 300 and substrate Lubricity between 200 guarantees isolated safety and workpiece integrality.

Since the present apparatus is equipped with two groups of separative units, then two 30 energy of rotating mechanism being respectively arranged in two groups of separative units It slowly rotates by a certain angle in the opposite direction simultaneously, i.e. left side in Fig. 8 absorption arm 70 carries out left-handed, and right side is adsorbed Arm 70 carries out dextrorotation.After two rotating mechanisms 30 rotate by a certain angle respectively, two substrates 200 and film 300 are respectively complete Ingredient from.

S504: after substrate 200 is separated with film 300, driving rotating mechanism 30 quickly rotates, and adsorbs arm 70 to drive Overturning so far completes the separating step of substrate 200 and film 300 so that substrate 200 is kept completely separate with film 300 to outside position.

Likewise, two rotating mechanisms 30 are quickly rotated to as shown in Figure 10 respectively in two groups of separative units of the present apparatus Outside position so that film 300 and substrate 200 are kept completely separate, separation assembly 4 is in discrete state at this time.

As shown in the above, when being equipped with two groups of separative units on separation assembly 4, one is positive in two groups of separative units To separative unit, one is reversed separative unit, and the safety overturning of the absorption arm 70 for more convenient each group, this two groups Two adsorption plates 90 in separative unit are adjacent, and the reverses direction phase of two absorption arms 70 in this two groups of separative units Instead, therefore, substrate 200 and film 300 are separated by this method, once-through operation may be implemented and be completed at the same time multiple substrates 200 pick-and-place and separation, and can effectively prevent two adjacent groups separator and interfered with each other when arm 70 is adsorbed in overturning, improve equipment Safety, and can the effectively save device space.

In conclusion in crystal plate taking separator described in above each embodiment and method, it is true using adsorption plate 90 The attached substrate 200 of suction drives the vertical from sliding of absorption arm 70 using motion controller, so that absorption arm 70 adsorbs lining Film 300 on bottom 200 is driven so that chip be made to be clamped between absorption arm 70 and adsorption plate 90 using driving assembly Arm 70 and 90 synchronizing moving of adsorption plate are adsorbed, to realize quickly taking to chip, and chip is effectively ensured when taking The integrality of substrate 200 and film 300, prevents wafer quality to be affected；The device utilizes motion controller driving absorption hand The lateral turnover of arm 70, thus by the overturning of absorption arm 70 by 300 side of film on substrate 200 to starting, so that substrate 200 with 300 safe separating of film, it is therefore provided that the present apparatus and method can be both able to achieve on same device chip quickly take With, and it is able to achieve the substrate 200 of chip and the quick separating of film 300, effectively save process conversion time is greatly improved and is produced Energy.

In the present apparatus and method, since motion controller drives the vertical from sliding of absorption arm 70, by the clamping of chip It takes process and is further broken into two steps, and when the absorption substrate 200 of adsorption plate 90, between film 300 and absorption arm 70 There are vertical safe gaps, and film 300 can be prevented impaired or fallen off；When adsorption plate 90 completes the following table to substrate 200 After the absorption in face, then drive absorption arm 70 vertically movable, to be adjacent to film 300, to live film using vacuum suction 300, it prevents from generating offset between absorption arm 70 and film 300 and between film 300 and substrate 200, and then ensure to adsorb Plate 90 and absorption arm 70 clamp the safety of chip, it is impaired to avoid film 300, and can ensure that in taking piece and separation process There is no relative displacement between substrate 200 and film 300, so that taking piece and separation process that there is very high accuracy；

In the present apparatus and method, multiple groups separative unit is respectively set on same separation assembly, to realize once-through operation simultaneously Complete the pick-and-place and separation of more wafers.

In the present apparatus and method, positive separative unit and reversed separative unit are alternatively arranged, and adjacent positive separation is single The reverses direction of two absorption arms 70 in first and reversed separative unit is on the contrary, to prevent the suction of two adjacent groups separative unit Attached arm 70 is interfered with each other in overturning, improves device security, and can the effectively save device space；

In the present apparatus and method, by the way that position-limiting unit is arranged, so that swivel slide 40 slides vertically stroke with controllable, Piece and isolated accuracy are taken to improve.

The embodiments of the present invention are given for the purpose of illustration and description, and are not exhaustively or to incite somebody to action The utility model is limited to disclosed form.Many modifications and variations are aobvious and easy for the ordinary skill in the art See.Embodiment was chosen and described in order to better illustrate the principle and practical application of the utility model, and makes this field Those of ordinary skill it will be appreciated that the utility model to designing various embodiments suitable for specific applications with various modifications.

Claims (20)

1. a kind of crystal plate taking separator, which is characterized in that including separation assembly and driving assembly, chip includes substrate and sets Film over the substrate, the driving component are connect with separation assembly, and adsorption plate is fixed on the separation assembly, described For adsorption plate for adsorbing the fixed substrate, the side of the adsorption plate is equipped with turnover absorption arm, the adsorption plate and The absorption arm can be adsorbed on the upper surface of the lower surface and the film of the substrate respectively, so that the wafer holder exists Between the adsorption plate and the absorption arm, under the driving effect of the driving component, the absorption arm and the suction Attached plate energy synchronizing moving, the chip is taken out from carrier；

The absorption arm is connected with motion controller, and the driving component drives the adsorption plate contact and vacuum suction is in institute When stating the lower surface of substrate, it is vertically movable that the motion controller can drive the absorption arm to make, so that the absorption arm Contact film described in simultaneously vacuum suction；The motion controller can also drive the absorption arm to make lateral turnover, so that described Absorption arm drives the film to separate with the substrate.

2. crystal plate taking separator according to claim 1, which is characterized in that the motion controller includes whirler Structure and slide control mechanism, the slide control mechanism is connect by the rotating mechanism with the absorption arm, in the cunning Under the driving effect of dynamic control mechanism, what the rotating mechanism and the absorption arm can be synchronous is vertically sliding, the rotation Mechanism can drive the absorption arm to make lateral turnover.

3. crystal plate taking separator according to claim 2, which is characterized in that the rotating mechanism includes belt transmission Mechanism, the driving wheel of the belt gear are connected with servo motor by rotating shaft coupling, the belt gear Any driven wheel is connect by shaft with the absorption arm；The rotation shaft coupling and the shaft are controlled with the sliding respectively Mechanism connection processed.

4. crystal plate taking separator according to claim 3, which is characterized in that the slide control mechanism includes:

Swivel slide is connected with guide rail by sliding block, and the sliding block is for driving the swivel slide to slide vertically along the guide rail Dynamic, the rotation shaft coupling and the shaft are separately fixed on the swivel slide；

Cylinder is connected to vertically on the swivel slide, and the swivel slide can be driven to slide in the Telescopic-cylinder；

Position-limiting unit is mounted on the swivel slide, respectively to the sliding stroke highs and lows of the swivel slide It is limited.

5. crystal plate taking separator according to claim 4, which is characterized in that the position-limiting unit includes that limit is fixed Block and limit external member, are respectively provided with the limit fixed block in the sliding stroke highest point of the swivel slide and lowest point, and The two sides of the swivel slide are respectively arranged with limiting stand, one of them described limiting stand and the limit that highest point is arranged in Fixed block is oppositely arranged, another described limiting stand is oppositely arranged with the limit fixed block that lowest point is arranged in；The limit Position external member is arranged on a pair limiting stand in office and limit fixed block.

6. crystal plate taking separator according to claim 5, which is characterized in that the limit external member includes mating setting Caging bolt and stop nut.

7. crystal plate taking separator according to claim 4, which is characterized in that the both ends of the shaft pass through axis respectively Fixing seat is held to connect with the swivel slide.

8. crystal plate taking separator according to claim 2, which is characterized in that the absorption arm include central axis and Vacuum suction piece, the rotating mechanism and vacuum suction piece are connected to the both ends of the central axis, and the central axis with Non-coaxial setting between vacuum suction piece, under the drive of the slide control mechanism, the central axis can drive the vacuum Suction sheet slides vertically and drives the vacuum suction piece to make lateral turnover around the central axis.

9. crystal plate taking separator according to claim 8, which is characterized in that the absorption arm further includes ladder Axis, one end of the multi-diameter shaft and the center axis connection, the other end are equipped with linking arm, and the multi-diameter shaft passes through the linking arm Connect with the vacuum suction piece, non-coaxial setting between the linking arm and the central axis, the central axis when rotated, The linking arm can drive the vacuum suction piece from a side of the central axis to another under the rotary action of the multi-diameter shaft One side to overturn, so that the vacuum suction piece makees lateral turnover around the central axis.

10. crystal plate taking separator according to claim 8, which is characterized in that the vacuum suction piece is around described The flip angle range that central axis makees lateral turnover is 0~360 °.

11. crystal plate taking separator according to claim 8, which is characterized in that the absorption arm further includes vacuum Generator, the vacuum generator are connect with vacuum suction piece.

12. crystal plate taking separator according to claim 2, which is characterized in that the separation assembly further includes carrying Platform, the adsorption plate are fixed on the plummer, and the absorption arm is mounted on the plummer by motion controller, The plummer is connected in the driving component, and under the drive of the driving component, the plummer can drive the suction Attached plate and the absorption arm synchronizing moving.

13. crystal plate taking separator according to claim 12, which is characterized in that the plummer includes fixed bottom plate And fixed side panel, the fixed side panel are stood on the fixed bottom plate, the side of the fixed side panel is equipped with the movement control Device processed, the end of the fixed bottom plate is protruding fixed arm, and the fixed arm is correspondingly arranged at the motion controller Side, the extension end of the fixed arm are connected with the adsorption plate.

14. -13 described in any item crystal plate taking separators according to claim 1, which is characterized in that turnover with one The absorption arm and an adsorption plate form separative unit, and the separative unit includes positive separative unit and reversed point From unit, the outside of adsorption plate, the absorption hand of the reversed separative unit is arranged in the absorption arm of the forward direction separative unit The inside of adsorption plate is arranged in arm；The forward direction separative unit and the reversed separative unit are alternatively arranged, and adjacent described The reverses direction of two absorption arms in positive separative unit and the reversed separative unit is opposite.

15. -13 described in any item crystal plate taking separators according to claim 1, which is characterized in that the driving component packet It includes:

X-axis driver is connect with the separation assembly, with the work level shifting for driving the adsorption plate synchronous with the absorption arm It is dynamic；

Y-axis driver is connect with the X-axis driver, for driving the X-axis driver to make vertical shift.

16. crystal plate taking separator according to claim 15, which is characterized in that the driving component further includes connection Mechanism, the X-axis driver are fixed in bindiny mechanism, and the Y-axis driver is connect with the bindiny mechanism, in the Y-axis Under the driving effect of driver, the bindiny mechanism can drive the X-axis driver to make vertical shift.

17. crystal plate taking separator according to claim 16, which is characterized in that the bindiny mechanism includes connection bottom Plate and connecting lateral plate, the X-axis driver are fixed on the connecting bottom board, and the connecting bottom board is fixed on the connecting lateral plate On, the connecting lateral plate is connect with the Y-axis driver, and under the drive of the Y-axis driver, the connecting lateral plate can be driven The connecting bottom board makees vertical shift.

18. crystal plate taking separator according to claim 17, which is characterized in that the X-axis driver includes that X-axis is driven Dynamic motor, synchronous pulley and horizontal slide rail, the horizontal slide rail are laid on the connecting bottom board, are set on the horizontal slide rail There is slidable horizontal slider, the separation assembly is fixedly connected on the horizontal slider, and the X-axis driving motor passes through institute Stating synchronous pulley drives the horizontal slider to move horizontally along the horizontal slide rail, so that the horizontal slider drives described point It is moved horizontally from component.

19. crystal plate taking separator according to claim 17, which is characterized in that the Y-axis driver includes that Y-axis is driven Dynamic motor and upright slide rail, the upright slide rail are equipped with mobilizable upright slide block, and the upright slide block and the Y-axis drive Motor connection, and vertical shift can be made under the driving of the Y-axis driving motor, along the upright slide rail；The connecting lateral plate It is fixedly connected on the upright slide block, under the drive of the upright slide block, the connecting lateral plate drives the connecting bottom board Vertical shift, to drive the X-axis driver to make vertical shift.

20. crystal plate taking separator according to claim 19, which is characterized in that the upright slide rail is lead screw, institute Lead screw is stated by driving shaft coupling to connect with the Y-axis driving motor, the upright slide block is sleeved on the lead screw, the Y Axis driving motor drives the lead screw rotation by the driving shaft coupling, to drive the upright slide block to erect along the lead screw Translation is dynamic.