CN209097739U - A kind of multistation silicon wafer transfer system - Google Patents

Abstract

The utility model relates to silicon chip process technology fields, more particularly to a kind of multistation silicon wafer transfer system, including transport mechanism, rotating mechanism, elevating mechanism and adsorbing mechanism, silicon wafer is drawn by adsorbing mechanism, it is vertically moving by elevating mechanism driving adsorbing mechanism, silicon wafer is lifted, by rotating mechanism driving elevating mechanism rotation, silicon wafer is driven to do circular-rotation, realize position transfer, it is moved reciprocatingly in the horizontal direction by transport mechanism driving elevating mechanism, following process is carried out to which silicon wafer to be transferred on processing stations, whole process automatic operation, device structure is compact, transmit process is smooth quick, realize that a transfer device cooperates more processing stations, it will be respectively sent on multiple processing stations for processing silicon wafer, work efficiency is high, solves transmission long flow path existing in the prior art, expend the time, it can not essence Certainly position, the problems such as single transfer device can not dock more processing stations, working efficiency is low, device structure is complicated.

Description

A kind of multistation silicon wafer transfer system

Technical field

The utility model relates to silicon chip process technology field more particularly to a kind of multistation silicon wafer transfer systems.

Background technique

Since 21 century, global Energy Consumption sharply rises, and traditional fossil energy is increasingly depleted, and energy problem and environment are asked Topic is increasingly becoming two big Important Problems of global concern.Under the pressure of the pressure of sustainable development, solar photovoltaic industry becomes can be again The emphasis of raw energy exploitation and application.

Crystal silicon solar battery is that current technology is most mature, most widely used photovoltaic product.In crystal silicon and its system It in the production process of product, needs that silicon rod is first cut into silicon wafer, since silicon wafer has corner angle burr chipping by cutting back edge surface Even there are crack or other defects, edge surface is relatively rough, therefore in order to increase silicon slicing edge surface mechanical strength, reduce Particle contamination, by its edge grind in arc-shaped or trapezoidal, which is chamfering, needs to shift using a kind of silicon wafer before chamfering Silicon wafer to chamfering is placed on chamfering device by device.

Chinese Patent Application No. is silicon wafer slicing apparatus and silicon chip unloading system disclosed in 201510021848.7, including Conveyer belt, flaps device, quartz boat, slicing apparatus, by the way that conveyer belt is arranged in the silicon wafer group bottom for stacking setting, by silicon wafer through passing It send band to be sent at flaps device, divides the wafer into monolithic through flaps device, and be transferred to next conveyer belt and continue to be sent to stone It is processed in Ying Zhou, the communicated band of the silicon wafer completed the process is sent at slicing apparatus, adsorbs top by upper sucker air-breathing Silicon wafer, lower sucker air-breathing adsorb lower side silicon wafer, and upper sucker, which moves up, separates silicon wafer, and sucker stops suction at present for this, lower section Silicon wafer is able to continue to be sent to next processing mechanism by conveyer belt, to realize the transfer of single silicon chip.

However in above-mentioned technical proposal, it is transmitted using multiple conveyer belts, transmits long flow path, expends the time, and can only It realizes that single silicon chip is sent at silicon wafer organisation of working, precise positioning can not be carried out, and be unable to satisfy a transfer device cooperation The requirement of multiple silicon wafer processing stations, working efficiency is low, and device structure is complicated, and higher operating costs is unfavorable for industrial metaplasia It produces and uses.

In conclusion above-mentioned technical proposal exist transmission long flow path, expend the time, can not precise positioning, single transfer dress It sets and can not dock more processing stations, the problems such as working efficiency is low, device structure is complicated.

Utility model content

The purpose of this utility model is in view of the deficiencies of the prior art, to provide a kind of multistation silicon wafer transfer system, It is sequentially connected setting by transport mechanism, rotating mechanism, elevating mechanism and adsorbing mechanism, is drawn silicon wafer by adsorbing mechanism, Silicon wafer is lifted along the vertical direction by elevating mechanism driving adsorbing mechanism, drives silicon wafer to do circular-rotation by rotating mechanism, realizes Silicon wafer horizontal is transferred on each station by transport mechanism and carries out following process by position transfer, whole process automatic operation, Device structure is compact, the smooth quick, transfer device of transmit process cooperates that more processing stations, work efficiency is high, solves Transmission long flow path existing in the prior art, expend the time, can not precise positioning, single transfer device can not dock more processing The problems such as station, working efficiency are low, device structure is complicated.

In order to solve the above technical problems, the utility model provides a kind of multistation silicon wafer transfer system, comprising:

Transport mechanism, the transport mechanism are horizontally disposed comprising lower cover plate, slide assemblies and horizontal drive component, The slide assemblies and the horizontal drive member parallel are arranged, and the horizontal drive component is located at the lower cover plate upper surface On middle line, the slide assemblies are symmetrically disposed on the two sides of the lower cover plate, institute along the length direction of the horizontal drive component It states lower cover plate and is reciprocatingly slided by the horizontal drive Component driver along the length direction of slide assemblies；

Rotating mechanism, the rotating mechanism are fixedly connected with the lower end surface of the lower cover plate, cunning synchronous with the lower cover plate It is dynamic, and it includes rotary drive assembly and slider assembly, the rotary drive assembly is vertically arranged on the lower cover plate, described Slider assembly is installed on the rotation end of the rotary drive assembly, drives rotary setting by the rotary drive assembly；

Elevating mechanism, the elevating mechanism is connect by the slider assembly with the rotating mechanism, with the cantilever group Part synchronous rotary, and it includes vertical driving assembly and guidance set, the vertical driving assembly is parallel with the guidance set Setting；And

Adsorbing mechanism, the adsorbing mechanism include connecting plate and absorbent module, and the absorbent module is installed by connecting plate In the push end of the vertical driving assembly, which adsorbs silicon wafer by the vertical driving assembly driving vertical lifting.

Further, the slide assemblies include:

Sliding rail, the sliding rail are set to the two sides of the lower cover plate upper surface by mounting rack horizontal symmetrical；And

Sliding block, several upper end of slide block faces are arranged in respectively on the sliding rail, and lower end surface is solid with the lower cover plate respectively Fixed connection.

Further, the horizontal drive component includes:

Horizontal drive part, the horizontal drive part are set to the side in mounting rack elongatedness direction；

Ball-screw, described ball-screw one end and the horizontal drive part are coaxially disposed, and the other end is rotatably dispose in institute One end that mounting rack deviates from the horizontal drive part is stated, the horizontal drive part drives the ball-screw rotation；And

Ball nut, the ball nut are sheathed on the ball-screw, and it is solid with the upper surface of the lower cover plate Fixed connection, the ball nut drive the length direction along the ball-screw to slide back and forth horizontally by ball-screw rotation It is dynamic.

Further, the rotary drive assembly includes:

Link block, the link block are fixedly installed on the lower end surface of the lower cover plate；

Mounting plate, the mounting plate are fixedly installed on the lower end surface of the link block；

Rotary drive, the rotary drive are fixedly installed on the lower end surface of the mounting plate；And

Rotating shaft base, the rotating shaft base are fixedly installed on the bottom of the rotary drive, are driven by the rotation Part driving rotation.

Further, the slider assembly includes:

The bottom of connecting flange, the connecting flange and the rotary drive assembly is coaxially disposed, and is driven by the rotation Dynamic component drives rotation；And

Cantilever, the cantilever be it is horizontally disposed, one end is fixedly connected with the bottom of the connecting flange, and the other end is hanging Setting.

Further, the vertical driving assembly includes:

Mounting base, the mounting base are vertically arranged at one end that the cantilever is vacantly arranged；

Vertical actuator, the vertical actuator are set in the mounting base；And

Vertical drive shaft, the vertical drive shaft are arranged on the vertical actuator, by the vertical actuator band Dynamic vertical reciprocating motion.

Further, the guidance set includes:

Fixture block, the fixture block are set to the side of the vertical driving assembly；

Straight line rail bar, the straight line rail bar are arranged in vertically on the fixture block.

Further, the connecting plate is L-type, and horizontally disposed side and the push end of the vertical driving assembly are solid Fixed connection, the side being vertically arranged is fixedly connected with the bottom of the guidance set vertical direction.

Further, the absorbent module includes:

Vaccum suction pipe, the vaccum suction pipe are vertically arranged, and one end is arranged in the connecting plate bottom, and the other end is outstanding Sky setting；

Vacuum chuck, the vacuum chuck are fixedly installed on one end that the vaccum suction pipe is vacantly arranged.

The utility model has the beneficial effects that

In the present invention, it is set by being sequentially connected for transport mechanism, rotating mechanism, elevating mechanism and adsorbing mechanism It sets, is drawn silicon wafer by adsorbing mechanism, it is vertically moving by elevating mechanism driving adsorbing mechanism, silicon wafer is lifted, by revolving Rotation mechanism drives elevating mechanism rotation, and silicon wafer is driven to do circular-rotation, realizes position transfer, drives elevating mechanism by transport mechanism It moves reciprocatingly in the horizontal direction, carries out following process so that silicon wafer is transferred on processing stations, whole process automation behaviour Work, device structure are compact, transmit process is smooth quick, by the way that multiple processing stations are arranged in transport mechanism two sides, realize one Transfer device cooperates more processing stations, will be respectively sent on multiple processing stations for processing silicon wafer, work efficiency is high, solves Transmission long flow path existing in the prior art, expend the time, can not precise positioning, single transfer device can not dock more plus The problems such as work station, working efficiency are low, device structure is complicated.

In conclusion a kind of multistation silicon wafer transfer system provided by the utility model is, it can be achieved that a transfer device Cooperate that more processing stations, work efficiency is high, full process automatization operation, device structure are compact, transmit process is smooth quick, steady It is qualitative good, use when being shifted one by one during suitable for producing to silicon wafer.

Detailed description of the invention

It, below will be to required in embodiment description for the clearer technical solution for illustrating the utility model embodiment The attached drawing used is briefly described, it should be apparent that, drawings discussed below is only some embodiments of the utility model, For those of ordinary skill in the art, without creative efforts, it can also obtain according to these attached drawings Obtain other accompanying drawings.

Fig. 1 is the utility model overall structure diagram；

Fig. 2 is enlarged diagram at A in Fig. 1；

Fig. 3 is transport mechanism partial schematic diagram；

Fig. 4 is rotating mechanism structural schematic diagram；

Fig. 5 is elevating mechanism and adsorbing mechanism structural schematic diagram.

Specific embodiment

The technical scheme in the embodiment of the utility model is clearly and completely illustrated with reference to the accompanying drawing.

Embodiment one

The embodiments of the present invention are described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng The embodiment for examining attached drawing description is exemplary, it is intended to for explaining the utility model, and should not be understood as to the utility model Limitation.

As shown in Figs. 1-2, a kind of multistation silicon wafer transfer system, comprising:

Transport mechanism 1, the transport mechanism 1 is horizontally disposed comprising lower cover plate 10, slide assemblies 11 and horizontal drive Component 12, the slide assemblies 11 are arranged in parallel with the horizontal drive component 12, and the horizontal drive component 12 is located at described On the middle line of 10 upper surface of lower cover plate, the slide assemblies 11 are symmetrically disposed on along the length direction of the horizontal drive component 12 The two sides of the lower cover plate 10, the lower cover plate 10 by the 12 drives edge slide assemblies 11 of horizontal drive component length direction It reciprocatingly slides；

Rotating mechanism 2, the rotating mechanism 2 are fixedly connected with the lower end surface of the lower cover plate 10, with the lower cover plate 10 Synchronous slide, and it includes rotary drive assembly 21 and slider assembly 22, the rotary drive assembly 21 is vertically arranged to described On lower cover plate 10, the slider assembly 22 is installed on the rotation end of the rotary drive assembly 21, by the rotation driving group Part 21 drives rotary setting；

Elevating mechanism 3, the elevating mechanism 3 are connect by the slider assembly 22 with the rotating mechanism 2, outstanding with this 22 synchronous rotary of arm component, and it includes vertical driving assembly 31 and guidance set 32, the vertical driving assembly 31 with it is described Guidance set 32 is arranged in parallel；And

Adsorbing mechanism 4, the adsorbing mechanism 4 include connecting plate 41 and absorbent module 42, and the absorbent module 42 passes through company Fishplate bar 41 is installed on the push end of the vertical driving assembly 31, which is driven perpendicular by the vertical driving assembly 31 Go straight up to drop absorption silicon wafer 5.

In the present invention, by setting absorbent module 42, it connect its air inlet and external vacuum suction component, Silicon wafer 5 is drawn by vacuum suction, is arranged by the connection of adsorbing mechanism 4 and elevating mechanism 3, by vertical driving assembly 31 driving guidance sets 32 are vertically moving, and silicon wafer 5 is lifted, is set by elevating mechanism 3 and the connection of rotating mechanism 2 It sets, and is fixedly connected with vertical driving assembly 31 with one end of slider assembly 22, driven by rotary drive assembly 21 outstanding Arm component 22 rotates, and then silicon wafer 5 is driven to do circular-rotation, realizes 5 position transfer of silicon wafer, passes through rotating mechanism 2 and conveyer The connection of structure 1 is arranged, and is fixedly connected with rotary drive assembly 21 with lower cover plate 10 and lower cover plate 10 and slide assemblies 11 are fixedly connected with setting, drive slide assemblies 11 to move reciprocatingly in the horizontal direction by horizontal drive component 12, to realize silicon Piece 5 is in the horizontal direction in linear to each station.

Further, as shown in Figures 1 and 3, the slide assemblies 11 include:

Sliding rail 111, the sliding rail 111 are set to the two of 10 upper surface of lower cover plate by 110 horizontal symmetrical of mounting rack Side；And

Sliding block 112, several 112 upper surfaces of sliding block are arranged in respectively on the sliding rail 111, lower end surface respectively with it is described Lower cover plate 10 is fixedly connected.

Further, as shown in Figures 1 and 3, the horizontal drive component 12 includes:

Horizontal drive part 121, the horizontal drive part 121 are set to the side in the 110 elongatedness direction of mounting rack；

Ball-screw 122, described 122 one end of ball-screw and the horizontal drive part 121 are coaxially disposed, other end rotation It is set to one end that the mounting rack 110 deviates from the horizontal drive part 121, the horizontal drive part 121 drives the ball Lead screw 122 rotates；And

Ball nut 123, the ball nut 123 are sheathed on the ball-screw 122, and itself and the lower cover plate 10 Upper surface be fixedly connected, the ball nut 123 by the ball-screw 122 rotation drive along the ball-screw 122 Length direction slides back and forth horizontally.

In the present invention, by rotating setting ball-screw 122 on mounting rack 110, in the side of mounting rack 110 Horizontal drive part 121 is set, and is coaxially disposed ball-screw 122 and horizontal drive part 121, is driven by horizontal drive part 121 Ball-screw 122 rotates, and by being arranged ball nut 123 on ball-screw 122, and makes ball nut 123 and lower cover plate 10 It is fixedly connected, realizes and drive ball nut 123 horizontal along the length direction of ball-screw 122 while ball-screw 122 rotates It reciprocatingly slides, and then drives 10 synchronous slide of lower cover plate.

In the present invention, by the way that sliding rail 111 is respectively set in the two sides of ball-screw 122, and block on sliding rail 111 If several sliding blocks 112, while it is fixedly connected with several sliding blocks 112 with lower cover plate 10 respectively, realize lower cover plate 10 in the horizontal direction Several sliding blocks 112 are driven to slide while reciprocatingly sliding on sliding rail 111, to carry out to the process that lower cover plate 10 reciprocatingly slides It limits and stablizes.

Further, as shown in Figures 2 and 4, the rotary drive assembly 21 includes:

Link block 211, the link block 211 are fixedly installed on the lower end surface of the lower cover plate 10；

Mounting plate 212, the mounting plate 212 are fixedly installed on the lower end surface of the link block 211；

Rotary drive 213, the rotary drive 213 are fixedly installed on the lower end surface of the mounting plate 212；And

Rotating shaft base 214, the rotating shaft base 214 is fixedly installed on the bottom of the rotary drive 213, by described The driving rotation of rotary drive 213.

Further, as shown in Figures 2 and 4, the slider assembly 22 includes:

The bottom of connecting flange 221, the connecting flange 221 and the rotary drive assembly 21 is coaxially disposed, by institute It states rotary drive assembly 21 and drives rotation；And

Cantilever 222, the cantilever 222 be it is horizontally disposed, one end is fixedly connected with the bottom of the connecting flange 221, The other end is vacantly arranged.

In the use of the new type, by the way that rotary drive 213 is arranged, it is set to connect setting with rotating shaft base 214, further By being horizontally disposed with cantilever 222, it is fixedly connected with one end with rotating shaft base 214, rotating shaft base is driven by rotary drive 213 214 rotations drive cantilever 222 to do circular-rotation since cantilever 222 is horizontally disposed to realize and be rotated by rotating shaft base 214, Simultaneously, rotary drive 213 is fixedly connected by link block 211 and mounting plate 212 with lower cover plate 10, realizes cantilever 222 are moved reciprocatingly in the horizontal direction by the drive of lower cover plate 10.

Further, as shown in figures 2 and 5, the vertical driving assembly 31 includes:

Mounting base 311, the mounting base 311 are vertically arranged at one end that the cantilever 222 is vacantly arranged；

Vertical actuator 312, the vertical actuator 312 are set in the mounting base 311；And

Vertical drive shaft 313, the vertical drive shaft 313 are arranged on the vertical actuator 312, by described vertical Actuator 312 drives vertical reciprocating motion.

In the present invention, it by the way that vertical actuator 312 and vertical drive shaft 313 is arranged, is driven by vertical actuator 312 Vertical drive shaft 313 is moved to move back and forth along the vertical direction.At the same time, by mounting base 311 by vertical actuator 312 and cantilever 222 are fixedly connected, and realize that vertical actuator 312 is moved in a circle by the drive of cantilever 222.

Further, as shown in figures 2 and 5, the guidance set 32 includes:

Fixture block 321, the fixture block 321 are set to the side of the vertical driving assembly 31；

Straight line rail bar 322, the straight line rail bar 322 are arranged in vertically on the fixture block 321.

Further, the connecting plate 41 is L-type, the push of horizontally disposed side and the vertical driving assembly 31 End is fixedly connected, and the side being vertically arranged is fixedly connected with the bottom of 32 vertical direction of guidance set.

Further, as shown in figure 5, the absorbent module 42 includes:

Vaccum suction pipe 421, the vaccum suction pipe 421 are vertically arranged, and one end is arranged in 41 bottom of connecting plate, The other end is vacantly arranged；

Vacuum chuck 422, the vacuum chuck 422 are fixedly installed on one end that the vaccum suction pipe 421 is vacantly arranged.

In the present invention, by being fixedly connected with connecting plate 41 with vertical drive shaft 313, and vaccum suction pipe is set 421, it is arranged in it on connecting plate 41, and vacuum chuck 422 is set in its bottom, so that connecting plate 41 is by vertical drive shaft 313 drive and move reciprocatingly in the vertical direction, to be further driven to vaccum suction pipe 421 and vacuum chuck 422 moves synchronously.

In the present invention, by being provided with fixture block 321 and straight line rail bar 322 in the side of mounting base 311, make straight line Rail bar 322 is fastened on fixture block 321, and is fixedly connected with the bottom of 322 vertical direction of straight line rail bar with connecting plate 41, thus right The motion process of vertical driving assembly 31, connecting plate 41 and absorbent module 42 is limited and is stablized.

It should be noted that needing vaccum suction pipe 421 being threaded through connecting plate 41 in the implementation process of the utility model On air inlet at connect with external vacuum suction component, silicon wafer 5 is adsorbed onto vacuum chuck 422 to pass through air-extraction function On, further, the silicon wafer 5 on vacuum chuck 422 is adsorbed under the drive of vertical driving assembly 31 to rotary drive assembly 21 direction vertical shift, then does circular-rotation under the drive of rotary drive assembly 21, finally in horizontal drive component 12 Drive under in the horizontal direction linear transition to each station.

Embodiment two

Embodiment two uses appended drawing reference corresponding with embodiment one with component identical or corresponding in embodiment one, for letter Just for the sake of, hereafter only describe with the distinctive points of embodiment one, the embodiment two and embodiment one the difference is that:

In the actual production process, if can be respectively set as needed in the one or both sides of the length direction of transport mechanism 1 Dry 5 processing stations of silicon wafer drive silicon wafer 5 to do circular-rotation to which silicon wafer 5 is transferred to conveyer by rotary drive assembly 21 Following process is carried out on each station of the one or both sides of the length direction of structure 1.

In use, several silicon wafers 5 are respectively set in the one or both sides of the length direction of transport mechanism 1 and process work Position will be connect at air inlet that vaccum suction pipe 421 is threaded through on connecting plate 41 with external vacuum suction component, unlatching power supply, Vertical actuator 312 drives absorbent module 42 to move vertically to the direction away from rotary drive assembly 21 by vertical drive shaft 313 It moves to vacuum chuck 422 and is attached on the upper surface of silicon wafer 5 and silicon wafer 5 is adsorbed on by vacuum by vacuum suction component air-extraction function On sucker 422, vertical actuator 312 drives absorbent module 42 will to the direction vertical shift close to rotary drive assembly 21 at this time Silicon wafer 5 lifts, and then rotary drive 213 drives cantilever 222 to rotate by rotating shaft base 214, and then is driven and erected by cantilever 222 Silicon wafer 5, is turned to the side of 5 processing stations position of silicon wafer, most by 42 synchronous rotary of straight driving assembly 31 and absorbent module Horizontal drive part 121 drives lower cover plate 10 along the length direction of transport mechanism 1 by ball-screw 122 and ball nut 123 afterwards It moves horizontally, and then 213 synchronizing moving of rotary drive is driven by link block 211 and mounting plate 212, silicon wafer 5 is transferred to Subsequent processing operations are carried out on each processing stations.

In the present invention, it is to be understood that: term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside", " up time The orientation or positional relationship of the instructions such as needle ", " counterclockwise " are to be based on the orientation or positional relationship shown in the drawings, merely to just In description the utility model and simplify description, rather than the specific side that the equipment of indication or suggestion meaning or element must have Position is constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.

In addition, term " first ", " second " are used for description purposes only, it is not understood to indicate or imply opposite important Property or implicitly indicate the quantity of indicated technical characteristic.Therefore, define " first ", the feature of " second " can be expressed or Person implicitly includes one or more of the features.In the description of the utility model, the meaning of " plurality " is two or two More than a, unless otherwise specifically defined.

The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not It is confined to this, the variation that anyone skilled in the art can readily occur under the technical clarification of the utility model Or replacement, such as cooperated by push component and positioning mechanism, realizes the automatic preliminary bending after the orientation transfer of bending steel pipe, knot It closes placing modules and pushes the special construction setting of component, make to carry out amount of feeding adjustment in steel pipe bending process automatically, realize steel The design concept of the high-precision bending production of pipe, should be covered within the scope of the utility model.Therefore, this is practical new The protection scope of type should be subject to the scope of protection of the claims.

Claims (9)

1. a kind of multistation silicon wafer transfer system characterized by comprising

Transport mechanism (1), the transport mechanism (1) is horizontally disposed comprising lower cover plate (10), slide assemblies (11) and level Driving assembly (12), the slide assemblies (11) are arranged in parallel with the horizontal drive component (12), the horizontal drive component (12) on the middle line of the lower cover plate (10) upper surface, the slide assemblies (11) are along the horizontal drive component (12) Length direction is symmetrically disposed on the two sides of the lower cover plate (10), and the lower cover plate (10) is driven by the horizontal drive component (12) The dynamic length direction along slide assemblies (11) reciprocatingly slides；

Rotating mechanism (2), the rotating mechanism (2) is fixedly connected with the lower end surface of the lower cover plate (10), with the lower cover plate (10) synchronous slide, and it includes rotary drive assembly (21) and slider assembly (22), the rotary drive assembly (21) is vertical It being installed on the lower cover plate (10), the slider assembly (22) is installed on the rotation end of the rotary drive assembly (21), It drives rotary setting by the rotary drive assembly (21)；

Elevating mechanism (3), the elevating mechanism (3) are connect by the slider assembly (22) with the rotating mechanism (2), with Slider assembly (22) synchronous rotary, and it includes vertical driving assembly (31) and guidance set (32), the vertical driving group Part (31) is arranged in parallel with the guidance set (32)；And

Adsorbing mechanism (4), the adsorbing mechanism (4) include connecting plate (41) and absorbent module (42), the absorbent module (42) The push end of the vertical driving assembly (31) is installed on by connecting plate (41), the absorbent module (42) is by the vertical driving Component (31) drives vertical lifting absorption silicon wafer (5).

2. a kind of multistation silicon wafer transfer system according to claim 1, which is characterized in that slide assemblies (11) packet It includes:

Sliding rail (111), the sliding rail (111) are set to the lower cover plate (10) upper surface by mounting rack (110) horizontal symmetrical Two sides；And

Sliding block (112), several sliding block (112) upper surfaces are arranged in respectively on the sliding rail (111), lower end surface respectively with institute Lower cover plate (10) is stated to be fixedly connected.

3. a kind of multistation silicon wafer transfer system according to claim 2, which is characterized in that the horizontal drive component (12) include:

Horizontal drive part (121), the horizontal drive part (121) are set to the side in the mounting rack (110) elongatedness direction；

Ball-screw (122), described ball-screw (122) one end and the horizontal drive part (121) are coaxially disposed, and the other end turns Dynamic one end for being set to the mounting rack (110) and deviating from the horizontal drive part (121), horizontal drive part (121) driving Ball-screw (122) rotation；And

Ball nut (123), the ball nut (123) are sheathed on the ball-screw (122), and itself and the lower cover plate (10) upper surface is fixedly connected, and the ball nut (123) is driven by the ball-screw (122) rotation along the ball wire The length direction of thick stick (122) slides back and forth horizontally.

4. a kind of multistation silicon wafer transfer system according to claim 1, which is characterized in that the rotary drive assembly (21) include:

Link block (211), the link block (211) are fixedly installed on the lower end surface of the lower cover plate (10)；

Mounting plate (212), the mounting plate (212) are fixedly installed on the lower end surface of the link block (211)；

Rotary drive (213), the rotary drive (213) are fixedly installed on the lower end surface of the mounting plate (212)；With And

Rotating shaft base (214), the rotating shaft base (214) is fixedly installed on the bottom of the rotary drive (213), by institute State rotary drive (213) driving rotation.

5. a kind of multistation silicon wafer transfer system according to claim 1, which is characterized in that slider assembly (22) packet It includes:

Connecting flange (221), the bottom coaxial arrangement of the connecting flange (221) and the rotary drive assembly (21), by The rotary drive assembly (21) drives rotation；And

Cantilever (222), the cantilever (222) are horizontally disposed, the fixed company in the bottom of one end and the connecting flange (221) It connects, the other end is vacantly arranged.

6. a kind of multistation silicon wafer transfer system according to claim 5, which is characterized in that the vertical driving assembly (31) include:

Mounting base (311), the mounting base (311) are vertically arranged at one end that the cantilever (222) is vacantly arranged；

Vertical actuator (312), the vertical actuator (312) are set on the mounting base (311)；And

Vertical drive shaft (313), the vertical drive shaft (313) are arranged on the vertical actuator (312), by described perpendicular Straight actuator (312) drives vertical move back and forth.

7. a kind of multistation silicon wafer transfer system according to claim 1, which is characterized in that guidance set (32) packet It includes:

Fixture block (321), the fixture block (321) are set to the side of the vertical driving assembly (31)；

Straight line rail bar (322), the straight line rail bar (322) are arranged in vertically on the fixture block (321).

8. a kind of multistation silicon wafer transfer system according to claim 1, which is characterized in that the connecting plate (41) is L Type, horizontally disposed side are fixedly connected with the push end of the vertical driving assembly (31), the side being vertically arranged with The bottom of guidance set (32) vertical direction is fixedly connected.

9. a kind of multistation silicon wafer transfer system according to claim 1, which is characterized in that absorbent module (42) packet It includes:

Vaccum suction pipe (421), the vaccum suction pipe (421) are vertically arranged, and one end is arranged in the connecting plate (41) bottom Portion, the other end are vacantly arranged；

Vacuum chuck (422), the vacuum chuck (422) are fixedly installed on one end that the vaccum suction pipe (421) is vacantly arranged.