CN208346249U - A kind of novel graphite crucible - Google Patents
A kind of novel graphite crucible Download PDFInfo
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- CN208346249U CN208346249U CN201820403906.1U CN201820403906U CN208346249U CN 208346249 U CN208346249 U CN 208346249U CN 201820403906 U CN201820403906 U CN 201820403906U CN 208346249 U CN208346249 U CN 208346249U
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- occlusal area
- electron beam
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Abstract
When heated due to the existing vacuum coating equipment using electron beam heating, the temperature of the heating of electron beam is up to 1000 DEG C~3000 DEG C, and the volatilization temperature of organic matter is substantially between 400 DEG C~800 DEG C, therefore directly carry out heating to organic matter with electron beam and may result in have an opportunity to decompose.In order to use the existing commonly used vacuum evaporating coating machine heated using electron beam, the utility model proposes a kind of novel graphite crucibles, the novel graphite crucible can be applied in the existing vacuum evaporating coating machine using electron beam heating, replace conventional crucible, in this way, the electron beam of high-energy beats the surface in the novel graphite crucible of the utility model, and graphite has cooling effect, the organic matter structural evaporation coating film material in crucible can be protected in this way, enable organic matter structural evaporation coating film material to begin to evaporation lower than electron beam heating temperature and guarantees that organic matter will not decompose during entire organic matter carries out vacuum vapor plating.
Description
Technical field
The utility model relates to arrive vacuum coating technology, particularly with regard to a kind of novel graphite for vacuum coating equipment
Crucible.
Background technique
Evaporation coating techniques refer to that certain substance makes it be deposited on the surface of solids by heating evaporation, wherein there is a kind of heating
Mode is to be heated using electron beam heating, when being heated using electron beam heating, can make the temperature of heating
Degree reaches 1000 DEG C~3000 DEG C, and evaporation of metal Coating Materials is sufficiently evaporated and is deposited on the table of material to be coated
Face, therefore popularized at present by the way of electron beam heating.
With the development of evaporation coating techniques, it is mature to be evaporated coating technique under vacuum conditions, but basic
On be all that can only then be difficult to add by electron beam for the lower organic matter of volatilization temperature for the higher material of volatilization temperature
The mode of heat realizes that reason is that the volatilization temperature of substantially organic matter is relatively all relatively low using vacuum evaporation coating membrane technology,
Between 400 DEG C~800 DEG C, well below the heating temperature of electron beam, thus it can make organic matter may be in high temperature substantially
In the case where decompose, and these are not that we are happy to the phenomenon that seeing.
Utility model content
In view of this, in order to use the existing commonly used vacuum evaporating coating machine heated using electron beam,
The utility model proposes a kind of novel graphite crucible, the novel graphite crucible can be applied to it is existing using electron beam heating
In vacuum evaporating coating machine, replace conventional crucible, in this way, the electron beam of high-energy will not directly be beaten in structural evaporation coating film material
Surface, but the surface in the novel graphite crucible of the utility model is beaten, and graphite has cooling effect, it in this way can be in crucible
Organic matter structural evaporation coating film material protected, enable organic matter structural evaporation coating film material lower than electron beam heating temperature
In the case of begin to evaporate, and be deposited on workpiece surface to be coated, guarantee to carry out vacuum vapor plating in entire organic matter
Organic matter will not decompose in the process.
A kind of novel graphite crucible comprising: upper cover 1 and lower cover 2, it is characterised in that: successively arranged from top to bottom in upper cover 1
It is furnished with evaporator 11, electron beam sparking platform 12, cover rim 13 and circular protrusions occlusal area 14, wherein the upper table of evaporator 11
An evaporation apertures 111 are contained in face, which runs through entire evaporator 11 from top to bottom；Lower cover 2 contains edge lug boss 21, position
Medicine platform is set at circular recess occlusal area 22 inside edge lug boss 21, and center inside circular recess occlusal area 22
23；Circular protrusions occlusal area 14 in upper cover 1 can match identical, and electron beam with the circular recess occlusal area 22 on lower cover 2
The internal run-through of sparking platform 12, cover rim 13 and circular protrusions occlusal area 14 sets the formation of medicine platform 23 with the center of lower cover 2
Chamber resettling 15, the chamber resettling 15 are interior for storing organic matter structural evaporation coating film material.
Further, there are one or more protrusions to be engaged angle 141 at the edge of circular protrusions occlusal area 14.
Further, there are one or more recess to be engaged angle 221 at the edge of circular recess occlusal area 22.
Further, the shape at the described protrusion occlusion angle and recess occlusion angle include semicircle, ellipse, square,
Rectangle, diamond shape etc., and can matches mutually.
Further, the protrusion occlusion angle 141 recess occlusal area identical, described as the raised height of occlusal area 14
22 is identical as the recess occlusion height at angle 221, and height is 0.5mm~2mm.
Further, the raised occlusal area 14 and the recess occlusal area 22 are annular, raised occlusal area 14
Annular outside diameter it is 1.5mm~2.5mm bigger than interior circular diameter, recess occlusal area 22 annular outside diameter it is more straight than inner circle
Big 1.6mm~the 3mm of diameter, and the interior circular diameter of the annular for the occlusal area 22 that is recessed is than the interior circular diameter of the annular of raised occlusal area 14
Small, the outside diameter of the annular of recess occlusal area 22 is smaller than the outside diameter of the annular of raised occlusal area 14.
Further, the upper surface of the evaporator 11 is semicircle, and diameter is 15mm~20mm, evaporator 11
Height is 3mm~6mm.
Further, the evaporation apertures 111 are located at the center of 11 upper surface of evaporator.
Further, the shape of the evaporation apertures 111 includes circle, ellipse, square, diamond shape etc..
Further preferred, the shape of the evaporation apertures 111 is circle, and diameter is 1mm~3mm.
Further, the upper surface of electron beam sparking platform 12 is round, and the upper surface of electron beam sparking platform 12
Circular diameter is identical as the semicircular diameter of the upper surface of evaporator 11.
Further, the upper surface of the cover rim 13 is round, and the upper table of diameter > electron beam sparking platform 12
The circular diameter in face.
Further, the circular diameter of the upper surface of the cover rim 13 is 20mm~23mm, and diameter is than electricity
The upper surface big 4mm of circular diameter of beamlet sparking platform 12.
In use, placement organic matter structural evaporation coating film material on medicine platform 23 can be set at the center of lower cover 2, then by upper cover
1 circular protrusions occlusal area 14, which match with the circular recess occlusal area 22 of lower cover 2, to coincide, the electron beam of upper cover 1 after coincideing
Sparking platform 12, cover rim 13 and circular protrusions occlusal area 14 set medicine platform 23 with the center of lower cover 2 and form chamber resettling
15, organic matter structural evaporation coating film material is then located in the chamber resettling 15.After organic matter structural evaporation coating film material is installed, vacuum
Coating machine can start to work, using electron gun to the electricity of the upper cover 1 of the graphite crucible of the utility model in the course of work
The upper surface of beamlet sparking platform 12 is heated, and organic matter structural evaporation coating film material volatilizees out of chamber resettling 15 after heating, and leads to
Evaporation apertures 111 on pervaporation platform 11 are volatilized so that evaporated organic film material volatile matter smoothly volatilizees, and be deposited on to
The surface of film-coating workpiece.
Since the chemical property of graphite is stablized, and there are the characteristics such as high temperature resistant and heat absorption, so that the graphite of the utility model
Crucible can guarantee that the high temperature of electron gun during vacuum vapor plating will not damage internal organic matter evaporation coating material
Material, ensure that organic matter structural evaporation coating film material can be smooth deposit to workpiece surface to be coated, without decomposing.
Detailed description of the invention
Fig. 1 is the main view of the graphite crucible of the utility model.
Fig. 2 is the left view of the graphite crucible of the utility model.
Fig. 3 is the right view of the graphite crucible of the utility model.
Fig. 4 is the rearview of the graphite crucible of the utility model.
Fig. 5 is the top view of the graphite crucible of the utility model.
Fig. 6 is the main view of lower cover.
Fig. 7 is the top view of lower cover.
Fig. 8 is the bottom view of lower cover.
Fig. 9 is the main view of upper cover.
Figure 10 is the left view of upper cover.
Figure 11 is the right view of upper cover.
Figure 12 is the rearview of upper cover.
Figure 13 is upper cover top view.
Figure 14 is upper cover bottom view.
Main element symbol description
| Upper cover | 1 |
| Evaporator | 11 |
| Evaporation apertures | 111 |
| Electronic striking platform | 12 |
| Cover rim | 13 |
| Circular protrusions occlusal area | 14 |
| Protrusion occlusion angle | 141 |
| Chamber resettling | 15 |
| Lower cover | 2 |
| Edge lug boss | 21 |
| Circular recess occlusal area | 22 |
| Recess occlusion angle | 221 |
| Set medicine platform in center | 23 |
The following detailed description will be further explained with reference to the above drawings the utility model.
Specific embodiment
Case 1 is embodied:
As shown in Figure 1 it is the main view of novel graphite crucible, is illustrated in figure 2 the left view of novel graphite crucible, such as Fig. 3
It is shown the right view of novel graphite crucible, is illustrated in figure 4 the rearview of novel graphite crucible, is illustrated in figure 5 novel stone
The top view of black crucible comprising: upper cover 1 and lower cover 2, the circular protrusions occlusal area 14 in upper cover 1 and the circle on lower cover 2 are recessed
Identical, and the inside of electron beam sparking platform 12, cover rim 13 and circular protrusions occlusal area 14 can be matched by falling into occlusal area 22
Perforation sets medicine platform 23 with the center of lower cover 2 and forms chamber resettling 15, is used to store organic matter evaporation plating in the chamber resettling 15
Membrane material.
It is illustrated in figure 9 the main view of upper cover, if the left view that Figure 10 is upper cover, such as Figure 11 are the right view of upper cover, such as
Figure 12 is the rearview of upper cover, if Figure 13 is upper cover top view, if Figure 14 is upper cover bottom view, it can be seen from the figure that upper cover 1
On be successively placed with evaporator 11, electron beam sparking platform 12, cover rim 13 and circular protrusions occlusal area 14 from top to bottom,
An evaporation apertures 111 are contained in the upper surface of middle evaporator 11, which runs through entire evaporator 11 from top to bottom；
As the main view that Fig. 6 is lower cover, such as top view that Fig. 7 is lower cover can from figure such as the bottom view that Fig. 8 is lower cover
To find out, lower cover 2 contains edge lug boss 21, the circular recess occlusal area 22 inside edge lug boss 21, and is located at circle
Set medicine platform 23 in center inside recess occlusal area 22.
Wherein, there are 4 rectangle protrusions to be engaged angle 141, the protrusion occlusion at the edge of circular protrusions occlusal area 14
Angle 141 is identical as the raised height of occlusal area 14, and the recess occlusal area 22 is identical as the recess occlusion height at angle 221, and
Height is 1mm.The raised occlusal area 14 and the recess occlusal area 22 are annular, and the ring for the occlusal area 22 that is recessed
The interior circular diameter of shape is smaller than the interior circular diameter of the annular of raised occlusal area 14, and the outside diameter of the annular of recess occlusal area 22 is than convex
The outside diameter for playing the annular of occlusal area 14 is small, and the two can match each other and be engaged.
The upper surface of the evaporator 11 is semicircle, and diameter is 18mm, and the height of evaporator 11 is 4mm, described
Evaporation apertures 111 be located at the center of 11 upper surface of evaporator.The shape of the evaporation apertures 111 is circle, and diameter is
2mm。
The upper surface of the electron beam sparking platform 12 is round, and the circular diameter in upper surface of electron beam sparking platform 12
It is identical as the semicircular diameter of the upper surface of evaporator 11.The circular diameter of the upper surface of the cover rim 13 is
21mm, diameter diameter more circular than the upper surface of electron beam sparking platform 12 are 4mm big.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it should not be understood as limiting the scope of the patent of the utility model.It should be pointed out that for the common of this field
For technical staff, without departing from the concept of the premise utility, various modifications and improvements can be made, these all belong to
In the protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (10)
1. a kind of novel graphite crucible comprising: upper cover (1) and lower cover (2), it is characterised in that: in upper cover (1) from top to bottom according to
It is secondary to be placed with evaporator (11), electron beam sparking platform (12), cover rim (13) and circular protrusions occlusal area (14), wherein steaming
An evaporation apertures (111) are contained in the upper surface of hair platform (11), which runs through entire evaporator (11) from top to bottom；Under
It covers (2) and contains edge lug boss (21), be located at edge lug boss (21) internal circular recess occlusal area (22), and be located at round recessed
It falls into occlusal area (22) internal center and sets medicine platform (23)；On circular protrusions occlusal area (14) and lower cover (2) in upper cover (1)
Circular recess occlusal area (22) can match identical, and electron beam sparking platform (12), cover rim (13) and circular protrusions are stung
The internal run-through for closing area (14) sets medicine platform (23) with the center of lower cover (2) and forms chamber resettling (15), the chamber resettling (15)
It is interior to be used to store organic matter structural evaporation coating film material.
2. novel graphite crucible as described in claim 1, it is characterised in that: the edge of circular protrusions occlusal area (14) has one
A or multiple protrusion occlusions angle (141).
3. novel graphite crucible as described in claim 1, it is characterised in that: the edge of circular recess occlusal area (22) has one
A or multiple recess are engaged angle (221).
4. the novel graphite crucible as described in Claims 2 or 3, it is characterised in that: the protrusion occlusion is angle (141) and recessed
The shape for falling into occlusion angle (221) includes semicircle, ellipse, square, rectangle, diamond shape, and can matches mutually.
5. novel graphite crucible as described in claim 1, it is characterised in that: protrusion occlusion angle (141) is stung with protrusion
The height for closing area (14) is identical, and the recess occlusal area (22) is identical as the recess occlusion height of angle (221), and height is
0.5mm~2mm.
6. novel graphite crucible as claimed in claim 5, it is characterised in that: the raised occlusal area (14) and described recessed
Falling into occlusal area (22) is annular, and the outside diameter of the annular of raised occlusal area (14) is 1.5mm~2.5mm bigger than interior circular diameter,
The outside diameter of the annular of recess occlusal area (22) is 1.6mm~3mm bigger than interior circular diameter, and the annular of recess occlusal area (22)
Interior circular diameter is smaller than the interior circular diameter of the annular of raised occlusal area (14), and the outside diameter of the annular of recess occlusal area (22) is than convex
The outside diameter for playing the annular of occlusal area (14) is small.
7. novel graphite crucible as described in claim 1, it is characterised in that: the upper surface of the evaporator (11) is semicircle
Shape, and diameter is 15mm~20mm, the height of evaporator (11) is 3mm~6mm.
8. novel graphite crucible as described in claim 1, it is characterised in that: the evaporation apertures (111) are located at evaporator
(11) center of upper surface, and the shape of evaporation apertures (111) includes round, ellipse, square, diamond shape.
9. novel graphite crucible as described in claim 1, it is characterised in that: the upper surface of electron beam sparking platform (12)
For circle, and the semicircular diameter of the upper surface of the circular diameter in upper surface and evaporator (11) of electron beam sparking platform (12)
It is identical.
10. novel graphite crucible as described in claim 1, it is characterised in that: the upper surface of the cover rim (13)
Circular diameter is 20mm~23mm, and diameter diameter more circular than the upper surface of electron beam sparking platform (12) is 4mm big.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820403906.1U CN208346249U (en) | 2018-03-23 | 2018-03-23 | A kind of novel graphite crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820403906.1U CN208346249U (en) | 2018-03-23 | 2018-03-23 | A kind of novel graphite crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208346249U true CN208346249U (en) | 2019-01-08 |
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ID=64885460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820403906.1U Active CN208346249U (en) | 2018-03-23 | 2018-03-23 | A kind of novel graphite crucible |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208346249U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111910157A (en) * | 2020-08-03 | 2020-11-10 | 苏州瑞康真空科技有限公司 | Graphite crucible for vacuum coating machine |
-
2018
- 2018-03-23 CN CN201820403906.1U patent/CN208346249U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111910157A (en) * | 2020-08-03 | 2020-11-10 | 苏州瑞康真空科技有限公司 | Graphite crucible for vacuum coating machine |
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