CN111910157A - Graphite crucible for vacuum coating machine - Google Patents
Graphite crucible for vacuum coating machine Download PDFInfo
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- CN111910157A CN111910157A CN202010767794.XA CN202010767794A CN111910157A CN 111910157 A CN111910157 A CN 111910157A CN 202010767794 A CN202010767794 A CN 202010767794A CN 111910157 A CN111910157 A CN 111910157A
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- Prior art keywords
- crucible
- layer
- isolation layer
- inner layer
- outer layer
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
Abstract
A graphite crucible for a vacuum coating machine comprises an upper cover and a crucible main body; an upper cover is arranged on the crucible main body; the crucible main body comprises a crucible inner layer, a crucible outer layer, an isolation layer and a high-temperature air pump; the outer layer of the crucible is made of graphite; the electron beam acts on the outer layer of the crucible; the outer layer of the crucible is internally provided with an inner layer of the crucible; the inner layer of the crucible is made of a high-temperature resistant metal material; an isolation layer is arranged between the inner layer of the crucible and the outer layer of the crucible, and the isolation layer is a closed cavity; the outlet of the isolation layer, the high-temperature air pump and the inlet of the isolation layer are connected through a connecting pipe; the isolation layer is utilized to prevent the crucible inner layer from being heated unevenly due to the fact that the crucible outer layer directly heats the crucible inner layer; the inlet of the isolation layer, the high-temperature air pump and the inlet of the isolation layer are connected through a connecting pipe; the high-temperature air pump is used for promoting the air flow in the isolation layer, so that the inner layer of the crucible is uniformly heated; and the isolating layer plays a certain role in heat insulation, so that the temperature of the inner layer of the crucible can be better controlled.
Description
Technical Field
The invention relates to the field of crucibles, in particular to a graphite crucible for a vacuum coating machine.
Background
The evaporation coating technology is to evaporate a certain substance by heating to deposit the substance on the surface of a solid, wherein one heating method is to heat the substance by using an electron beam heating source, and when the electron beam heating source is used for heating, the heating temperature can reach 1000-3000 ℃, so that the metal evaporation coating material can be fully evaporated and deposited on the surface of the material to be coated, and the electron beam heating method is currently popularized.
With the development of the evaporation coating technology, the evaporation coating technology under vacuum conditions is mature, but basically only can be applied to materials with higher volatilization temperature, and is difficult to be realized by adopting the vacuum evaporation coating technology in an electron beam heating mode for organic matters with lower volatilization temperature, because the volatilization temperature of the organic matters is relatively lower basically between 400 ℃ and 800 ℃, and is far lower than the heating temperature of the electron beam, so that the organic matters can be decomposed under the condition of high temperature, which is not a phenomenon that people like to see.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the graphite crucible for the vacuum coating machine, which ensures that organic matters are not decomposed in the whole process of vacuum evaporation coating of the organic matters.
The invention provides the following technical scheme:
a graphite crucible for a vacuum coating machine comprises an upper cover and a crucible main body; an upper cover is arranged on the crucible main body; the crucible main body comprises a crucible inner layer, a crucible outer layer, an isolation layer and a high-temperature air pump; the outer layer of the crucible is made of graphite; the electron beam acts on the outer layer of the crucible; the outer layer of the crucible is internally provided with an inner layer of the crucible; the inner layer of the crucible is made of a high-temperature resistant metal material; an isolation layer is arranged between the inner layer of the crucible and the outer layer of the crucible, and the isolation layer is a closed cavity; the outlet of the isolation layer, the high-temperature air pump and the inlet of the isolation layer are connected through a connecting pipe.
Preferably, a temperature sensor is arranged on a connecting pipe between the outlet of the isolation layer and the high-temperature air pump; and a heater is arranged on a connecting pipe between the inlet of the isolation layer and the high-temperature air pump.
Preferably, a boss is arranged above the upper cover; the boss is provided with an evaporation hole and a handle; the evaporation hole penetrates through the upper cover.
Preferably, a circular occlusion area is arranged below the upper cover; a plurality of bulges are arranged on the circular occlusion area; the plurality of bulges are distributed in an annular array by taking the circle center of the circular occlusion area as the center; a plurality of grooves are formed in the inner layer of the crucible; the shape, size and position of the groove and the bulge are mutually corresponding; the protrusion is arranged in the groove.
Preferably, a sealing ring for sealing the isolation layer is arranged between the inner layer of the crucible and the outer layer of the crucible.
Preferably, a supporting block is arranged in the isolation layer; one side of the supporting block is connected with the inner layer of the crucible; the other side of the supporting block is connected with the outer layer of the crucible; the supporting block is a heat insulating material.
Preferably, the isolation layer is filled with inert gas.
Compared with the prior art, the invention has the following advantages and effects:
the graphite crucible can be applied to the existing vacuum evaporation coating machine adopting electron beam heating to replace a conventional crucible, so that a high-energy electron beam cannot directly hit the surface of an evaporation coating material but hit the surface of the novel graphite crucible, and the graphite has a cooling effect, so that the organic evaporation coating material in the crucible can be protected, the organic evaporation coating material can be evaporated under the condition that the heating temperature of the electron beam is lower than the heating temperature of the electron beam and is deposited on the surface of a workpiece to be coated, and the organic matter is prevented from being decomposed in the whole process of vacuum evaporation coating of the organic matter.
An isolation layer is arranged between the crucible inner layer and the crucible outer layer, the isolation layer is a closed cavity, and the isolation layer is utilized to prevent the crucible inner layer from being directly heated by the crucible outer layer, so that the crucible inner layer is heated unevenly; the inlet of the isolation layer, the high-temperature air pump and the inlet of the isolation layer are connected through a connecting pipe; the high-temperature air pump is used for promoting the air flow in the isolation layer, so that the inner layer of the crucible is uniformly heated; and the isolating layer plays a certain role in heat insulation, so that the temperature of the inner layer of the crucible can be better controlled.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a front view of a graphite crucible for a vacuum coater of the present invention.
FIG. 2 is a top view of the upper cover of the present invention;
FIG. 3 is a bottom view of the upper cover of the present invention;
FIG. 4 is a plan view of the crucible body of the present invention.
In the figure: 1 upper cover, 11 handles, 12 evaporation holes, 13 bosses, 14 circular occlusion areas, 15 bulges, 2 crucible bodies, 21 crucible outer layers, 22 crucible inner layers, 23 isolation layers, 24 supporting blocks, 25 sealing rings, 26 containing chambers, 27 grooves, 3 connecting pipes, 4 heaters, 5 high-temperature air pumps and 6 temperature sensors.
Detailed Description
The specific implementation mode of the invention is as follows:
referring to fig. 1-4, a graphite crucible for a vacuum coating machine includes an upper cover 1, a crucible main body 2; the crucible main body 2 is provided with an upper cover 1; the crucible main body 2 comprises a crucible inner layer 22, a crucible outer layer 21, an isolation layer 23 and a high-temperature air pump 5; the outer layer 21 of the crucible is made of graphite; the electron beam acts on the outer layer 21 of the crucible; a crucible inner layer 22 is arranged in the crucible outer layer 21; the inner layer 22 of the crucible is made of high-temperature resistant metal material; an accommodating chamber 26 is arranged in the crucible inner layer 22; the organic evaporation coating material is placed in the accommodating chamber 26.
An isolation layer 23 is arranged between the crucible inner layer 22 and the crucible outer layer 21, and the isolation layer 23 is a closed cavity; a sealing ring 25 for sealing the isolation layer is arranged between the crucible inner layer 22 and the crucible outer layer 21, and the sealing ring 25 seals a gap between the crucible inner layer 22 and the crucible outer layer 21; a supporting block 24 is arranged in the isolation layer 23; one side of the supporting block 24 is connected with the inner layer 22 of the crucible; the other side of the supporting block 24 is connected with the outer crucible layer 21, and the inner crucible layer 22 and the outer crucible layer 21 are supported through the supporting block 24; the supporting block 24 is made of heat-insulating materials, so that the inner layer 22 of the crucible is prevented from being locally heated; the isolation layer 23 is filled with inert gas to prevent the gas from reacting with the material in the graphite crucible.
An inlet is arranged above one side of the isolation layer 23; an outlet is arranged below the other side of the isolation layer 23; the inlet of the isolation layer 23, the high-temperature air pump 5 and the outlet of the isolation layer 23 are connected through connecting pipes; a temperature sensor 6 is arranged on a connecting pipe between the outlet of the isolation layer 23 and the high-temperature air pump 5, and the temperature of the air in the isolation layer 23 is detected through the temperature sensor 6; a heater 4 is arranged on a connecting pipe between the inlet of the isolation layer 23 and the high-temperature air pump 5, and the heater 4 heats air.
A boss 13 is arranged above the upper cover 1; the boss 13 is provided with an evaporation hole 12 and a handle 11; the evaporation hole 12 penetrates through the upper cover 2; a circular occlusion area 14 is arranged below the upper cover 1; a plurality of bulges 15 are arranged on the circular occlusion area 14; the plurality of bulges 15 are distributed in an annular array by taking the circle center of the circular occlusion area 14 as the center; a plurality of grooves 27 are arranged on the crucible inner layer 22; the shape, size and position of the groove 27 and the protrusion 15 correspond to each other; the protrusion 15 is disposed in the groove 27 to prevent the rotation of the upper cover 2.
The working principle is as follows: a worker places the crucible in a vacuum coating machine; the electron beam acts on the outer layer 21 of the crucible; the crucible outer layer 21 heats the gas in the isolation layer 23; the gas in the isolating layer 23 heats the crucible inner layer 22, so that the crucible inner layer 22 is uniformly heated, and the isolating layer 23 plays a certain heat insulation role, thereby preventing the organic evaporation coating material from being decomposed at high temperature and better controlling the temperature of the crucible inner layer 22; the high-temperature air pump is used for promoting the air flow in the isolation layer, so that the inner layer of the crucible is uniformly heated; detecting the temperature of the gas in the isolation layer 23 by the temperature sensor 6; the heater 4 heats the gas to control the temperature of the crucible.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. The utility model provides a graphite crucible that vacuum coating machine was used which characterized in that: comprises an upper cover and a crucible body; an upper cover is arranged on the crucible main body; the crucible main body comprises a crucible inner layer, a crucible outer layer, an isolation layer and a high-temperature air pump; the outer layer of the crucible is made of graphite; the electron beam acts on the outer layer of the crucible; the outer layer of the crucible is internally provided with an inner layer of the crucible; the inner layer of the crucible is made of a high-temperature resistant metal material; an isolation layer is arranged between the inner layer of the crucible and the outer layer of the crucible, and the isolation layer is a closed cavity; the outlet of the isolation layer, the high-temperature air pump and the inlet of the isolation layer are connected through a connecting pipe.
2. The graphite crucible for a vacuum coating machine as set forth in claim 1, wherein: a temperature sensor is arranged on a connecting pipe between the outlet of the isolating layer and the high-temperature air pump; and a heater is arranged on a connecting pipe between the inlet of the isolation layer and the high-temperature air pump.
3. The graphite crucible for a vacuum coating machine as set forth in claim 1, wherein: a boss is arranged above the upper cover; the boss is provided with an evaporation hole and a handle; the evaporation hole penetrates through the upper cover.
4. The graphite crucible for a vacuum coating machine as set forth in claim 1, wherein: a circular occlusion area is arranged below the upper cover; a plurality of bulges are arranged on the circular occlusion area; the plurality of bulges are distributed in an annular array by taking the circle center of the circular occlusion area as the center; a plurality of grooves are formed in the inner layer of the crucible; the shape, size and position of the groove and the bulge are mutually corresponding; the protrusion is arranged in the groove.
5. The graphite crucible for a vacuum coating machine as set forth in claim 1, wherein: and a sealing ring for sealing the isolation layer is arranged between the inner layer of the crucible and the outer layer of the crucible.
6. The graphite crucible for a vacuum coating machine as set forth in claim 1, wherein: a supporting block is arranged in the isolation layer; one side of the supporting block is connected with the inner layer of the crucible; the other side of the supporting block is connected with the outer layer of the crucible; the supporting block is a heat insulating material.
7. The graphite crucible for a vacuum coating machine as set forth in claim 1, wherein: and the isolation layer is filled with inert gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010767794.XA CN111910157A (en) | 2020-08-03 | 2020-08-03 | Graphite crucible for vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010767794.XA CN111910157A (en) | 2020-08-03 | 2020-08-03 | Graphite crucible for vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111910157A true CN111910157A (en) | 2020-11-10 |
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ID=73287098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010767794.XA Pending CN111910157A (en) | 2020-08-03 | 2020-08-03 | Graphite crucible for vacuum coating machine |
Country Status (1)
| Country | Link |
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| CN (1) | CN111910157A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1094561A (en) * | 1964-03-24 | 1967-12-13 | Mullard Ltd | Improvements in and relating to vapour deposition and evaporation sources |
| WO2011061013A1 (en) * | 2009-11-23 | 2011-05-26 | 44Solar Sarl | Crucible for an electron stream evaporator and operating method for said electron stream evaporator |
| JP2012149290A (en) * | 2011-01-18 | 2012-08-09 | Sanyu Electron Co Ltd | Lidded hearth liner and vapor deposition method using the same |
| JP2013057096A (en) * | 2011-09-07 | 2013-03-28 | Sumitomo Bakelite Co Ltd | Film forming method and method for producing test piece |
| CN206751970U (en) * | 2017-05-20 | 2017-12-15 | 福建亿田硅业有限公司 | A kind of monocrystalline silicon growing furnace insulation cylinder |
| CN208346249U (en) * | 2018-03-23 | 2019-01-08 | 苏州瑞康真空科技有限公司 | A kind of novel graphite crucible |
-
2020
- 2020-08-03 CN CN202010767794.XA patent/CN111910157A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1094561A (en) * | 1964-03-24 | 1967-12-13 | Mullard Ltd | Improvements in and relating to vapour deposition and evaporation sources |
| WO2011061013A1 (en) * | 2009-11-23 | 2011-05-26 | 44Solar Sarl | Crucible for an electron stream evaporator and operating method for said electron stream evaporator |
| JP2012149290A (en) * | 2011-01-18 | 2012-08-09 | Sanyu Electron Co Ltd | Lidded hearth liner and vapor deposition method using the same |
| JP2013057096A (en) * | 2011-09-07 | 2013-03-28 | Sumitomo Bakelite Co Ltd | Film forming method and method for producing test piece |
| CN206751970U (en) * | 2017-05-20 | 2017-12-15 | 福建亿田硅业有限公司 | A kind of monocrystalline silicon growing furnace insulation cylinder |
| CN208346249U (en) * | 2018-03-23 | 2019-01-08 | 苏州瑞康真空科技有限公司 | A kind of novel graphite crucible |
Non-Patent Citations (2)
| Title |
|---|
| 袁良本等编: "《核工业中的氪和氙》", 31 January 1983, 原子能出版社 * |
| 赵镇魁编著: "《烧结砖瓦生产应知应会600问》", 30 November 2013, 中国建材工业出版社 * |
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Application publication date: 20201110 |
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| RJ01 | Rejection of invention patent application after publication |