CN208079039U - A kind of electromagnetic drive bistable light switch - Google Patents
A kind of electromagnetic drive bistable light switch Download PDFInfo
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- CN208079039U CN208079039U CN201820658025.4U CN201820658025U CN208079039U CN 208079039 U CN208079039 U CN 208079039U CN 201820658025 U CN201820658025 U CN 201820658025U CN 208079039 U CN208079039 U CN 208079039U
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Abstract
The utility model discloses a kind of electromagnetic drive bistable light switches, including：Photoswitch frame；It is set to the mobile center platform of void region inside the photoswitch frame；A pair of of torsion-beam of coilable connection the mobile center platform and the photoswitch frame, the pair of torsion-beam are symmetrical along the center line of the mobile center platform；Be arranged positive first side of the mobile center platform the first driving coil and the second driving coil in the mobile center platform front the second side opposite with first side is set；Be arranged positive first side of the mobile center platform first group of soft magnetic stripe and second group of soft magnetic stripe in the mobile center platform front the second side opposite with first side is set；A pair of lead wires on the pair of torsion-beam is set, and the first lead of the pair of lead is electrically connected the first driving coil to the first external electrode, and the second lead of the pair of lead is electrically connected the second driving coil to the second external electrode；And first position limiting structure and the second position limiting structure.
Description
Technical field
The utility model is related to the MEMS field (MEMS) more particularly to a kind of bistable state MEMS light of electromagnetic drive
Switch.
Background technology
Since the 1990s, after optical communication technique has obtained quick development, especially 2000 year, with all kinds of
The fast development of mobile consumer electronics product, mobile consumer electronics product want the quality such as speed, the delay of network communication
Ask higher and higher, and optical communication technique meets corresponding demand well, to further promote its application.
Also become more and more important as the light network of optic communication key link and the status of photoswitch, it is traditional to be with electricity
The switch of core has been unable to meet high speed, the demand of large capacity optic communication.Especially all-optical transmission net instead full light
Switch, all-optical switch are the system units of break-make and interactive connection that light is realized using light as core, at work, photoelectricity are not present
Conversion, inborn advantage promotes it to be increasingly becoming the replacer of traditional switch.
Photoswitch in order to meet be showing improvement or progress day by day optical communication technique requirement, it is necessary to have low-loss, high stable feature, together
When application in mobile communications, and need the requirement for meeting low-power consumption.With the development of MEMS (MEMS) technology, go out
Show MEMS light to open the light, it has small, at low cost, easy of integration, stability good and appearance as common MEMS product
Measure the features such as big.And existing mems optical switch generally uses the driving principles such as electrostatic, electroluminescent, mangneto, marmem, heat
Come drive micro mirror to be lifted, rotate etc. it is mobile realized to change light path, during generally existing driving micro mirror deflection angle compared with
It is small, micro mirror deflection after state holding need continuous loading, it is higher so as to cause photoswitch power consumption the problems such as.
Therefore, it is necessary to a kind of novel MEMS light to open, and close at least part of solution problem above, to meet the need in market
It asks.
Utility model content
For problems of the prior art, one embodiment according to the present utility model provides a kind of electromagnetic drive
Bistable light switch, including：Photoswitch frame；It is set to the mobile center platform of void region inside the photoswitch frame；
A pair of of torsion-beam of coilable connection the mobile center platform and the photoswitch frame, the pair of torsion-beam is along described movable
The center line of central platform is symmetrical；The first driving coil in positive first side of the mobile center platform and setting are set
In the second driving coil of the mobile center platform front the second side opposite with first side；Setting it is described it is movable in
It entreats first group of soft magnetic stripe of positive first side of platform and is arranged opposite with first side in mobile center platform front
Second group of soft magnetic stripe of the second side；A pair of lead wires on the pair of torsion-beam, the first lead electricity of the pair of lead are set
The first driving coil to the first external electrode is connected, the second lead of the pair of lead is electrically connected the second driving coil to second
External electrode；And first position limiting structure and the second position limiting structure, first position limiting structure and the second position limiting structure are for limiting
Make the deflection angle of the mobile center platform.
In one embodiment of the utility model, the back side of the mobile center platform is provided with speculum.
In one embodiment of the utility model, the coiling side of first driving coil and second driving coil
To on the contrary, generating the opposite electromagnetic field in direction when being powered.
In one embodiment of the utility model, first group of soft magnetic stripe setting is in mobile center platform front
The outside of first driving coil of the first side, and it is vertical with torsion-beam.
In one embodiment of the utility model, second group of soft magnetic stripe setting is in mobile center platform front
The outside of second driving coil of the second side, and it is vertical with torsion-beam.
In one embodiment of the utility model, first position limiting structure is the first backstop bridge, second limit
Structure is the second backstop bridge.
In one embodiment of the utility model, electromagnetic drive bistable light switch further include setting it is described it is movable in
The permanent magnet of platform above and or below, the permanent magnet is entreated to be used to generate and substantially vertical inclined of the mobile center platform
Set magnetic field.
Another embodiment according to the present utility model provides a kind of electromagnetic drive bistable light switch, including：Photoswitch
Frame；It is set to the mobile center platform of void region inside the photoswitch frame；The coilable connection mobile center
A pair of of torsion-beam of platform and the photoswitch frame, the pair of torsion-beam symmetrically divide along the center line of the mobile center platform
Cloth；Driving coil in mobile center platform front side is set；It is arranged in mobile center platform front side
First group of soft magnetic stripe and second group of soft magnetic stripe in the mobile center platform front other side is set；It is arranged in the pair of torsion
A pair of lead wires on beam, the first end of the first lead electrical connection driving coil of the pair of lead is to the first external electrode, institute
The second end of the second lead electrical connection driving coil of a pair of lead wires is stated to the second external electrode；Setting is flat in the mobile center
The magnet of platform above and or below；And first position limiting structure and the second position limiting structure, first position limiting structure and the second limit
Bit architecture is used to limit the deflection angle of the mobile center platform.
In another embodiment of the utility model, first group of soft magnetic stripe setting the mobile center platform just
The outside of first driving coil of the first side of face, second group of soft magnetic stripe are arranged in mobile center platform front the second side
The second driving coil outside, and it is all vertical with torsion-beam.
A kind of electromagnetic drive bistable light switch provided by the utility model, by the back side of photoswitch moving reflector
Electromagnetic drive coil and soft magnetic stripe are made, and is arranged perpendicular to the external bias magnetic field of plane where speculum, by electromagnetic drive
The on off state switching and holding for keeping being combined with permanent magnet bias realizing photoswitch.Both electromagnetic driver can be utilized to realize
The larger deflection pivot angle of speculum, but can utilize permanent magnet bias realize idle state keep, realize Larger Dynamic range with
The technique effect that low-power consumption takes into account.
Description of the drawings
In order to further elucidate the utility model each embodiment the above and other advantages and features, by refer to the attached drawing come
The more specific description of each embodiment of the utility model is presented.It is appreciated that these attached drawings only describe the allusion quotation of the utility model
Type embodiment, therefore be not to be regarded as being restriction on its scope.In the accompanying drawings, in order to cheer and bright, identical or corresponding portion
Part will be indicated with same or similar label.
Fig. 1 shows a kind of electromagnetic drive bistable light switch structure that one embodiment according to the present utility model is formed
100 face (vertical view) figure.
Fig. 2 shows a kind of electromagnetic drive bistable light switch structures that one embodiment according to the present utility model is formed
100 cross section, perspective diagram.
Fig. 3 shows a kind of electromagnetic drive bistable light switch structure that one embodiment according to the present utility model is formed
100 stereoscopic schematic diagram.
Fig. 4 shows a kind of electromagnetic drive bistable light switch structure that another embodiment according to the present utility model is formed
600 cross section, perspective diagram.
Fig. 5 shows a kind of electromagnetic drive bistable light switch structure that another embodiment according to the present utility model is formed
700 cross section, perspective diagram.
Fig. 6 shows a kind of electromagnetic drive bistable light switch structure work that one embodiment according to the present utility model is formed
Make the speculum reflected light signal schematic diagram of state.
Specific implementation mode
In the following description, the utility model is described with reference to each embodiment.However, those skilled in the art
It will be recognized that can in the case of neither one or multiple specific details or with it is other replacement and/or addition method, material or
Component implements each embodiment together.In other situations, be not shown or well known structure, material or operation are not described in detail in order to avoid
Keep the aspects of each embodiment of the utility model obscure.Similarly, for purposes of explanation, specific quantity, material are elaborated
And configuration, in order to provide the comprehensive understanding to the embodiments of the present invention.However, the utility model can be in no specific detail
In the case of implement.Further, it should be understood that each embodiment shown in the accompanying drawings is illustrative expression and is not drawn necessarily to scale.
In the present specification, the reference of " one embodiment " or " embodiment " is meaned to combine embodiment description
A particular feature, structure, or characteristic is included at least one embodiment of the utility model.Occur in everywhere in this specification
The phrase " in one embodiment " be not necessarily all referring to the same embodiment.
It should be noted that the embodiments of the present invention are described processing step with particular order, however this
It is to distinguish each step for convenience, and be not the sequencing for limiting each step, in the different embodiments of the utility model,
The sequencing of each step can be adjusted according to the adjusting of technique.
A kind of electromagnetic drive bistable light switch provided by the utility model, by the back side of photoswitch moving reflector
Electromagnetic drive coil and soft magnetic stripe are made, and is arranged perpendicular to the external magnetic field of plane where speculum, by electromagnetic drive and forever
The on off state switching and keep that magnetic bias keeps being combined realizing photoswitch.Both electromagnetic driver can be utilized to realize reflection
The larger deflection pivot angle of mirror, and permanent magnet bias can be utilized to realize that idle state is kept, realize Larger Dynamic range and low work(
Consume the technique effect taken into account.
Below in conjunction with the accompanying drawings 1, attached drawing 2 introduces a kind of electromagnetic drive that one embodiment according to the present utility model is formed
Bistable light switch structure.Fig. 1 shows a kind of electromagnetic drive bistable state light that one embodiment according to the present utility model is formed
Construction of switch 100 faces (vertical view) figure；Fig. 2 shows a kind of electromagnetic drives that one embodiment according to the present utility model is formed
Cross section, the perspective diagram of bistable light switch structure 100.
As shown in Figure 1 and Figure 2, which includes photoswitch frame 101, mobile center
Platform 102, the first driving coil 103, the second driving coil 104, the first soft magnetic stripe 105, the second soft magnetic stripe 106, third soft magnetism
Article the 107, the 4th soft magnetic stripe 108, the first torsion-beam 109, the second torsion-beam 110, the first lead 111, the limit of the second lead 112, first
Structure 113, the second position limiting structure 114 and speculum 115 (Fig. 1 does not go out).
Photoswitch frame 101 is formed after being performed etching by the body silicon to two-sided oxidation, double for carrying the electromagnetic drive
The other structures of stable state photoswitch.
Mobile center platform 102 is also process by body silicon etching, and specific processing method is in the follow-up portion of the utility model
Divide and will be described in detail, the first torsion-beam 109 and the second torsion-beam 110 that mobile center platform 102 passes through symmetric position at its center
It is connect with photoswitch frame 101, when mobile center platform 102 is by deflection torque around torsion-beam, torsion-beam will be surrounded
Deflection.
First driving coil 103 is arranged using torsion-beam as first side in the first face of the mobile center platform 102 in line of demarcation；
Second driving coil 104 is arranged using torsion-beam as the second side of the same face (the first face) of the mobile center platform 102 in line of demarcation.
First driving coil 103 and the second driving coil 104 are configured to opposite (such as first coil in the electrical current direction in its coil
When current direction in 103 is clockwise, the current direction in the second coil 104 is counterclockwise), both direction phase can be generated
Anti- magnetic field applies the deflection torque around torsion-beam, to realization pair under extraneous magnetic fields to mobile center platform 102
The deflection driven of mobile center platform.In one embodiment of the utility model, first coil 103 and the second coil 104 are gone here and there
Connection connection, however those skilled in the art should be known that first coil 103 and the second coil 104 can also be configured to carry out simultaneously
Correlation coupling when connection connection or other forms are worked.As long as in some working condition, two coils are mutual
Cooperation generates electromagnetic field, and mobile center platform 102 is driven to scheduled position, the scope of protection of the utility model is belonged to.
First soft magnetic stripe 105, the second soft magnetic stripe 106, third soft magnetic stripe 107 and the 4th symmetrically setting of soft magnetic stripe 108
On the first face (with driving coil the same face) of mobile center platform 102, the direction of each soft magnetic stripe and the extending direction of torsion-beam
Vertically.Soft magnetism strip material can be selected from the material that magnetic field force is generated under extraneous magnetic fields, and be easy to remove magnetism after magnetizing
Substance, such as iron-nickel alloy.Wherein the first soft magnetic stripe 105 and the second soft magnetic stripe 106 are located at 103 side of the first driving coil
Symmetrical position, and detached with the first driving coil；Third soft magnetic stripe 107 and the 4th soft magnetic stripe 108 are located at the second driving line
The symmetrical position of 104 sides is enclosed, and is detached with the second driving coil.First soft magnetic stripe 105, the second soft magnetic stripe 106, third
Soft magnetic stripe 107 and the 4th soft magnetic stripe 108 can generate magnetic field force under the action of external magnetic field, so as in the feelings of idle
The deflection state of mobile center platform 102 is kept under condition.
Mobile center platform 102 is torsionally connect with photoswitch frame 101 by the first torsion-beam 109 and the second torsion-beam 110.
As shown in Figure 1, the first torsion-beam 109 and the second torsion-beam 110 are located at the centre position of mobile center platform 102, and each one of left and right,
One torsion-beam 109 and the second torsion-beam 110 had both needed certain intensity, it is also necessary to which preferable ductility, intensity are in order to vacantly prop up
Support mobile center platform 102, ductility be in order to which the driving torque in coil drive mobile center platform 102 is smaller, and
With service life reliably and with long-term.First torsion-beam 109 and the second torsion-beam 110 are generally formed by body silicon etching.
First lead 111 is located at the surface of the first torsion-beam 109, and first end forms the company of being electrically connected with the second driving coil 104
It connects, second end is electrically connected to the first pole of external drive circuit；Second lead 112 is located at the surface of the second torsion-beam 110, and first
End is electrically connected with the formation of the first driving coil 103 and connect, and second end is electrically connected to the second pole of external drive circuit.
It is provided with the first position limiting structure 113 above 103 side of the first driving coil of mobile center platform 102, first
First deflection angle limit of the position limiting structure 113 for mobile center platform 102 when coil drive driven deflects；Movable
The second position limiting structure 114 is provided with above 104 side of the second driving coil of central platform 102, the second position limiting structure 113 is used for
Second deflection angle limit of the mobile center platform 102 when coil drive driven deflects.In a tool of the utility model
In body embodiment, the first position limiting structure 113 and the second position limiting structure 114 are backstop bridge structure, can be used by being arranged on backstop bridge
The flying height of side carrys out the accurate deflection angle adjusted when mobile center platform 102 is in deflection state, to meet different answer
Use demand.
Speculum 115 is arranged in the second face of mobile center platform 102, generally flat in center by depositing operations such as sputterings
It is formed on the body silicon in the second face of platform 102.In one embodiment of the utility model, speculum 115 can pass through deposition chromium
Or the metals such as silver are formed.
Fig. 3 shows a kind of electromagnetic drive bistable light switch structure that one embodiment according to the present utility model is formed
100 stereoscopic schematic diagram, according to Fig.3, this kind of electromagnetic drive bistable light switch of understanding the utility model that can be vivid
Structure.
The process to form electromagnetic drive bistable light switch structure 100 is described below.First, in the silicon chip of two-sided oxidation
The back side passes through light after photoetching, wet-etching technology difference etching silicon dioxide and thinned silicon being formed by cavity bottom
The depositing operations such as quarter, sputtering make speculum.In front corresponding position (opposite with reflector position) graphical photoetching of silicon chip
Graphically, mask plating, spin-applied technique make to form driving coil, driving coil, lead, soft magnetic stripe, then pass through electricity
Plating plus sacrifice layer process make to form position limiting structure.The mobile center platform that position limiting structure is used to subsequently discharge is in driven moving winding
Deflection angle limit when driving deflection.In a specific embodiment of the utility model, position limiting structure is backstop bridge structure,
It can be by the way that the flying height above backstop bridge be arranged come the accurate deflection angle for adjusting mobile center platform, to meet different answer
Use demand.Finally, front etching silicon wafer forms void region and torsion-beam, and final structure is realized to discharge mobile center platform.
So far the electromagnetic drive bistable light switch structure 100 completes, and is formed by the structure and torsion-beam of soft magnetic stripe
Vertically, and uniform layout is in the left and right sides of driving coil.After applying external magnetic field, to driving coil galvanization, in movable
It entreats platform that will surround torsion-beam by deflection torque effect, to deflect, stops after deflecting into position limiting structure, in external magnetic field
Under effect, after the electric current for disconnecting driving coil, the soft magnetic stripe on mobile center platform is acted on by external magnetic field, keeps movable
The deflection state of central platform, to realize permanent switching states；It, can after being generated in driving coil with aforementioned reversed electric current
Dynamic central platform will be acted on around torsion-beam by opposite torque, reversed deflection be generated, after deflecting into another position limiting structure
Stop, similarly under external magnetic field and soft magnetic stripe effect, can also keep the deflection state.
Another embodiment based on the utility model is introduced with reference to Fig. 4, Fig. 4 shows according to the present utility model
Cross section, the perspective diagram for a kind of electromagnetic drive bistable light switch structure 600 that another embodiment is formed.Such as Fig. 4 institutes
Show, which further comprises photoswitch frame 601, mobile center platform 602, first
Driving coil 603,604, first groups of soft magnetic stripes 605 of the second driving coil and 606, second groups of soft magnetic stripes 607 and 608, torsion-beam 609
With 610, lead 611 and the 612, first position limiting structure 613, the second position limiting structure 614, speculum 615 and magnet 616.Magnet
616 generate the external magnetic field relative to mobile center platform 602, and the magnetic direction is basically perpendicular to mobile center platform 602
And the plane where driving coil 603,604.In the embodiment shown in fig. 4, magnet 616 is located at mobile center platform 602
Top, however, it should be appreciated by those skilled in the art, magnet 616 may be located on the top of mobile center platform 602,
Alternatively, placing magnet 616 above and below mobile center platform 602.In the preferred embodiment of the utility model, magnetic
Body 616 is permanent magnet, however the protection scope of the utility model is not limited thereto.Magnetic field can be generated to mobile center platform 602,
To which the magnet for making mobile center platform 602 be maintained at stable state should all fall into the scope of protection of the utility model.
Another embodiment based on the utility model is introduced with reference to Fig. 5, Fig. 5 shows according to the present utility model
Cross section, the perspective diagram for a kind of electromagnetic drive bistable light switch structure 700 that another embodiment is formed.Such as Fig. 5 institutes
Show, which further comprises photoswitch frame 701, mobile center platform 702, driving
703, first groups of soft magnetic stripes 704 of coil and 705, second groups of soft magnetic stripes 706 and 707, torsion-beam 708 and 709, lead 710 and 711,
First position limiting structure 712, the second position limiting structure 713, speculum 714 and magnet 715.Unlike embodiment illustrated in fig. 4,
In embodiment illustrated in fig. 5, only mobile center platform is placed in there are one driving coil using torsion-beam as the side on boundary, do not drive for another time
Moving winding.The electromagnetic drive bistable light switch structure 700 of the embodiment is generated and magnet 715 by electric current in the drive coil
The magnetic field being attracted or repelled makes mobile center platform by the deflection torque around torsion-beam, to make mobile center platform occur
Deflection stops deflection when deflecting into position limiting structure, under the magnetic fields of magnet 715, after the electric current for disconnecting driving coil, and position
It is acted on by external magnetic field in the soft magnetic stripe on mobile center platform, keeps the deflection state of mobile center platform, it is steady to realize
Determine on off state；When in driving coil by with aforementioned opposite circuit, opposite electromagnetic field is will produce, it is movable to make
The deflection of negative direction occurs for central platform, stops deflection when deflecting into another position limiting structure, similarly in external magnetic field and soft
Under magnetic stripe effect, the deflection state can be also kept.
In addition, those skilled in the art are in mobile center platform side it should be appreciated that can also be arranged multiple driving coils,
Or multiple driving coils are respectively set to realize similar electromagnetic drive function in both sides, it is new that these schemes belong to this practicality
The basic conception of type.Meanwhile the setting of externally-applied magnetic field can be such as disposed over, lower section there are many method, or using multiple
Discrete magnetic field, superposition magnetic field etc. also belong to the basic conception of the utility model, belong to the scope of protection of the utility model.
The work of the photoswitch speculum of one embodiment electromagnetic drive based on the utility model is introduced with reference to Fig. 6
Make state principle, Fig. 6 shows a kind of electromagnetic drive bistable light switch knot that one embodiment according to the present utility model is formed
The speculum reflected light signal schematic diagram of structure working condition.As shown in Figure 6：When speculum 801 does not drive, it is located at the positions O,
The normal of mirror surface is α at this time, after incident light 802 is along α line incidences, is projected along α after being reflected by speculum；When passing through
After the electric current driving of first direction, speculum 801 will deflect into position F, and the normal of mirror surface is β at this time, works as incident light
802 also after α line incidences, are projected along 803 directions after being reflected by speculum, generate the wide-angle biasing of a diagram to the left；
Again after being driven by the electric current of second direction, speculum 801 will deflect into position S, and the normal of mirror surface is γ at this time,
When incident light 802 also along α line incidences after, projected along 403 directions after being reflected by speculum, generate a diagram big angle to the right
Degree biasing.And in two bias states, it can be realized by the magnetic force of permanent magnet and soft magnetic stripe steady after driving coil power-off
Fixed biasing is kept.
Electromagnetic drive bistable light switch based on the utility model, by being made at the back side of photoswitch moving reflector
Electromagnetic drive coil and soft magnetic stripe, and be arranged perpendicular to the external magnetic field of plane where speculum, electromagnetic drive is inclined with permanent magnetism
Set the on off state switching and holding for keeping being combined to realize photoswitch.Both can utilize electromagnetic driver realize speculum compared with
Big deflection pivot angle, and permanent magnet bias can be utilized to realize that idle state is kept, it is simultaneous with low-power consumption to realize Larger Dynamic range
The technique effect of Gu.
Although described above is each embodiments of the utility model, however, it is to be understood that they are intended only as example to be in
Existing, and without limitation.For those skilled in the relevant art it is readily apparent that various combinations, change can be made to it
Type and the spirit and scope changed without departing from the utility model.Therefore, the width and model of the utility model disclosed herein
Enclosing should not be limited by above-mentioned disclosed exemplary embodiment, and should be according only to the appended claims and its equivalent replacement
To define.
Claims (10)
1. a kind of electromagnetic drive bistable light switch, including：
Photoswitch frame；
It is set to the mobile center platform of void region inside the photoswitch frame；
A pair of of torsion-beam of coilable connection the mobile center platform and the photoswitch frame, the pair of torsion-beam is described in
The center line of mobile center platform is symmetrical；
Be arranged positive first side of the mobile center platform the first driving coil and setting the mobile center platform just
Second driving coil of the face the second side opposite with first side；
Be arranged positive first side of the mobile center platform first group of soft magnetic stripe and setting the mobile center platform just
Second group of soft magnetic stripe of the face the second side opposite with first side；
A pair of lead wires on the pair of torsion-beam is set, and the first lead of the pair of lead is electrically connected the first driving coil extremely
Second lead of the first external electrode, the pair of lead is electrically connected the second driving coil to the second external electrode；And
First position limiting structure and the second position limiting structure, first position limiting structure and the second position limiting structure are described movable for limiting
The deflection angle of central platform.
2. electromagnetic drive bistable light switch as described in claim 1, which is characterized in that the back side of the mobile center platform
It is provided with speculum.
3. electromagnetic drive bistable light switch as described in claim 1, which is characterized in that first driving coil and described
The direction of winding of second driving coil is on the contrary, generate the opposite electromagnetic field in direction when being powered.
4. electromagnetic drive bistable light switch as described in claim 1, which is characterized in that first group of soft magnetic stripe setting exists
The outside of first driving coil of positive first side of the mobile center platform, and it is vertical with torsion-beam.
5. electromagnetic drive bistable light switch as described in claim 1, which is characterized in that second group of soft magnetic stripe setting exists
The outside of second driving coil of mobile center platform front the second side, and it is vertical with torsion-beam.
6. electromagnetic drive bistable light switch as described in claim 1, which is characterized in that first position limiting structure is first
Backstop bridge, second position limiting structure are the second backstop bridge.
7. electromagnetic drive bistable light switch as described in claim 1, which is characterized in that further include setting it is described it is movable in
The permanent magnet of platform above and or below, the permanent magnet is entreated to be used to generate and substantially vertical inclined of the mobile center platform
Set magnetic field.
8. a kind of electromagnetic drive bistable light switch, including：
Photoswitch frame；
It is set to the mobile center platform of void region inside the photoswitch frame；
A pair of of torsion-beam of coilable connection the mobile center platform and the photoswitch frame, the pair of torsion-beam is described in
The center line of mobile center platform is symmetrical；
Driving coil in mobile center platform front side is set；
It is arranged in first group of soft magnetic stripe of mobile center platform front side and setting in mobile center platform front
Second group of soft magnetic stripe of the other side；
A pair of lead wires on the pair of torsion-beam is set, and the first lead of the pair of lead is electrically connected the first of driving coil
End is to the first external electrode, the second end of the second lead electrical connection driving coil of the pair of lead to the second external electrode；
Magnet in the mobile center platform above and or below is set；And
First position limiting structure and the second position limiting structure, first position limiting structure and the second position limiting structure are described movable for limiting
The deflection angle of central platform.
9. electromagnetic drive bistable light switch as claimed in claim 8, which is characterized in that first group of soft magnetic stripe setting exists
The outside of first driving coil of positive first side of the mobile center platform, second group of soft magnetic stripe setting is described movable
The outside of second driving coil of central platform front the second side, and it is all vertical with torsion-beam.
10. electromagnetic drive bistable light switch as claimed in claim 8, which is characterized in that first position limiting structure is the
One backstop bridge, second position limiting structure are the second backstop bridge.
Priority Applications (1)
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| CN201820658025.4U CN208079039U (en) | 2018-05-04 | 2018-05-04 | A kind of electromagnetic drive bistable light switch |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108347239A (en) * | 2018-05-04 | 2018-07-31 | 上海交通大学 | A kind of electromagnetic drive bistable light switch |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108347239A (en) * | 2018-05-04 | 2018-07-31 | 上海交通大学 | A kind of electromagnetic drive bistable light switch |
| CN108347239B (en) * | 2018-05-04 | 2024-01-26 | 上海交通大学 | Electromagnetic drive bistable optical switch |
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