JPH06308400A - Optical waveguide switch - Google Patents

Abstract

PURPOSE:To provide a compact and economical optical waveguide switch without necessitating a liquid injection/exhaust device and having a high switching speed by providing a gap variable means varying the width of a gap continuing to the groove of an intersection part between an optical waveguide for input optical signal and an optical waveguide for output optical signal. CONSTITUTION:An electromagnet is constituted of a soft magnetic 8 and a coil 7, and magnetic field is generated when current is allowed to flow through the coil 7, and a soft magnetic hooked cross shape beam 10 is attracted, and a variable gap member 13 attached to the beam 10 is moved. When the current is not allowed to flow through the coil, the gap 11a becomes smaller than the gap of the groove 5 by being compressed by the variable gap member 13, and a silicone oil 12 is gathered to the gap 11a by a capillary phenomenon, and becomes the state 12a of the silicone oil to form a reflection state. When the current is allowed to flow through the coil 7, the variable gap member 13 is moved upward, and the gap becomes the gap 11b larger than the gap of the groove 5, and the silicone oil 12 is gathered to the groove 5 by the capillary phenomenon, and becomes the state 12b, and a transmission state.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical waveguide switch used for setting / switching an optical path in an optical communication system or the like.

[0002]

2. Description of the Related Art Conventionally, as an example of this type of optical waveguide switch, an optical path switching device disclosed in Japanese Patent Application Laid-Open No. 1-47067 and a matrix optical waveguide switch disclosed in Japanese Patent Application Laid-Open No. 4-235496 are disclosed. Has been done. FIG. 23
Shows the structure of the conventional example disclosed in the former, and FIG. 24 shows the structure of the conventional example disclosed in the latter.

In FIGS. 23 and 24, reference numerals 21 and 22 are ridge type optical waveguides, and 23 is a ridge type optical waveguides 21 and 22.
It is the gap provided at the intersection. In FIG. 24, 24 is a buried optical waveguide, 25 is a clad, 26 is an input signal core, 27 is an output signal core, 28 is a groove, and 29 is a liquid reservoir.

The switching operation of the conventional optical waveguide switch is as follows. That is, the optical path is switched by injecting or discharging silicone oil having a refractive index close to that of the waveguide core in the gap 23 in the example of FIG. 23 and in the groove 28 in the example of FIG. When the silicone oil fills the gap 23 or the groove 28, the input light travels straight at the intersection, and when the silicone oil is discharged, the input light is reflected at the intersection. The light is guided to the ridge type optical waveguide 22 on the output side or the output signal core 27.

[0005]

However, in the above-mentioned conventional optical waveguide switch, the predetermined gap 23 or the groove 2 is formed.
Since a separate liquid injection / exhaust device capable of highly accurate positioning for externally injecting or exhausting a small amount of silicone oil is required, the entire optical waveguide switch becomes large and the economy is low. there were.

Further, since the liquid is injected or discharged after positioning in a predetermined gap or groove for switching the optical path, there is a problem that there is a limit to the increase in switching speed.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a compact optical waveguide switch having a high switching speed.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[0009]

In order to achieve the above object, the means (1) of the present invention has at least one input optical signal optical waveguide and at least one output optical signal optical waveguide. A matrix having input optical signal optical waveguides and output optical signal optical waveguides intersecting each other, and having grooves at each intersection forming a predetermined angle with the optical axes of the input optical signal and output optical signal optical waveguides. In the optical waveguide switch, the most main feature is to have a gap changing means that forms a gap that is continuous with the groove that can be changed in size as compared with the gap that each groove has.

The gap varying means is characterized in that an electromagnet, a magnetic member facing a wall surface continuous with the groove, and a gap member having an elastically deformable portion are provided near the groove.

The gap changing means is provided with a variable gap member having an electrode, a wall surface continuous with the groove, and a portion which is elastically deformed with a conductive member facing the wall surface and insulated from the wall, near the groove. Is characterized by.

The electromagnet may be an electromagnet made of a semi-hard magnetic material, or the variable gap member may be a permanent magnet.

One of the variable gap member and the electrode has a conductive magnetic material, and the other has a permanent magnet, and the variable gap member is sandwiched between the variable gap member and the electrode. It is characterized by having a second electrode insulated from both the variable gap member and the electrode.

[0014]

According to the above-mentioned means, by changing the width of the gap continuous with the groove at the intersection of the input optical signal optical waveguide and the output optical signal optical waveguide, the liquid moves in the gap between the grooves, The optical path can be easily switched. for that reason,
It is possible to realize a compact and economical optical waveguide switch having a high switching speed that does not require a liquid injecting / discharging device.

[0015]

Embodiments of the present invention will now be described in detail with reference to the drawings.

(Embodiment 1) FIG. 1 is a plan view showing the structure of an optical waveguide switch according to Embodiment 1 of the present invention as seen from above, and FIG.
1 is a cross-sectional view taken along the line AA 'in FIG. 1, and FIG.
FIG. 4 is a cross-sectional view taken along the line B ′, and FIGS. 4, 5 and 6 are views for explaining an optical switching operation by the optical waveguide switch of the first embodiment.

1 to 6, 1 is an embedded optical waveguide, 2 is a clad, 3 is an input optical signal core, 4 is an output optical signal core, 5 is a groove, 6 is a liquid reservoir, 7 is a coil, 8 is a soft magnetic material, 9 is an electric circuit, 10 is a soft magnetic swath, 11
Is a gap, 11a is a small gap, 11b is a large gap, 12, 12
a and 12b are silicone oil, 13 is a variable gap member,
Reference numeral 14 is a support member.

1 to 3, the soft magnetic material 8 and the coil 7 constitute an electromagnet, and when a current is applied to the coil 7 from the electric circuit 9, a magnetic field is generated and the soft magnetic material supported by the support member 14 is used. An attraction force is generated between the swollen beam 10 and the soft magnetic swirl beam 10 to be deformed by suction.

The gap 11 formed by the lower surface of the variable gap member 13 connected to the soft magnetic swath beam 10 and the bottom surface of the liquid reservoir 6 is provided with a groove 5 when no current is passed through the coil 7.
And the volume of the gap 11 is smaller than that of the groove 5
Is configured to be larger than the volume.

The refractive index of the silicone oil 12 is substantially equal to that of the input optical signal core 3 and the output optical signal core 4,
The amount is set to be larger than the capacity of the groove 5 and smaller than the volume of the gap 11 when no current is applied to the coil 7.

Next, the light switching operation of the optical waveguide switch according to the first embodiment will be described with reference to FIGS.

As shown in FIG. 4, when the coil 7 is not energized (non-energized), the gap 11a is smaller than the gap of the groove 5 and the capillary phenomenon occurs due to the surface tension of the silicone oil. Is the gap 11a
And the silicone oil 12a is re-reflected. When a current is applied to the coil 7 (energization), as shown in FIG. 5, the soft magnetic swath-shaped beam 10 having a soft magnetic material is elastically deformed by the magnetic force to form a gap 11 b larger than the gap of the groove 5. Therefore, the silicone oil 12 collects in the groove 5 by the capillary phenomenon and becomes like the silicone oil 12b. This allows the propagation of light to be switched from a reflective state to a transmissive state.

Further, when the energization is stopped, the elastically deformed soft magnetic swath-shaped beam 10 returns to its original state as shown in FIG. 6, and the silicone oil 12 and the original silicone oil 12 are also returned.
It becomes like a. Therefore, the propagation of light switches from the transmissive state to the reflective state.

(Embodiment 2) FIG. 7 is a plan view showing the structure of an optical waveguide switch according to Embodiment 2 of the present invention as seen from above, and FIG.
FIG. 9 is a cross-sectional view taken along the line AA ′ in FIG. 7, and FIGS. 9 to 14 are views for explaining the optical switching operation by the optical waveguide switch of the second embodiment. 10 is a cross-sectional view taken along the line AA 'in FIG. 9, and FIG. 12 is B in FIG.
FIG. 14 is a cross-sectional view taken along the line -B ', and FIG. 14 is a cross-sectional view taken along the line CC' in FIG.

In FIGS. 7 and 8, 1 is an embedded optical waveguide, 2 is a clad, 3 is an input optical signal core, 4 is an output optical signal core, 5 is a groove, 9a is an electric circuit, 11 is a gap, 11c is a large gap, 11d is a small gap, 12, 12c,
Reference numeral 12d is silicone oil, 14 is a supporting member, 15 is a conductive beam, 16 is an electrode, 17a is an arrow indicating a transmission state of light propagation, and 17b is an arrow indicating a reflection state of light propagation.

In FIGS. 7 and 8, the electric circuit 9 is provided between the conductive beam 15 supported by the support member 14 and the electrode 16.
By applying a voltage from a, an electrostatic field is generated between the two, and the conductive beam 15 is deformed toward the electrode 16 side. Also,
Gap 11 formed by conductive beam 15 and electrode 16
Is smaller than the gap of the groove 8 when a voltage is applied from the electric circuit 9a, and the volume of the gap 11 is larger than the volume of the groove 5.

On the other hand, the other gap of the conductive beam 15 is
The groove 5 regardless of whether the switch of the electric circuit 9a is on or off.
It is configured to be sufficiently larger than the gap. Further, the refractive index of the silicone oil 12 is substantially equal to that of the input optical signal core 3 and the output optical signal core 4, and the amount thereof is equal to that of the groove 5.
Of the conductive beam 1 larger than the capacity of the electric circuit 9a
5 is smaller than the volume of the gap 11 when a voltage is applied between the electrode 5 and the electrode 16.

Next, the second embodiment will be described with reference to FIGS.
The optical switching operation by the optical waveguide switch will be described. As shown in FIG. 9, the gap 11
Since c is larger than the gap of the groove 5, silicone oil 12
Gather in the groove 5 and become like silicone oil 12c,
The light is in the transmissive state 17a.

When energized, as shown in FIG. 10, the conductive beam 15 is elastically deformed by the electrostatic field to form a gap 11d smaller than the gap between the grooves 5, so that the silicone oil 12 becomes like a silicone oil 12d. This allows the propagation of light to be switched from the transmissive state 17a to the reflective state 17b.

When the power supply is stopped, the beam 1 which is elastically deformed
5 returns to the original state as shown in FIGS. 13 and 14, and the silicone oil 12 is also the original silicone oil 12
Then, the propagation of light switches from the reflection state 17b to the transmission state 17a.

(Embodiment 3) In Embodiments 1 and 2, it was necessary to constantly energize in order to maintain the propagation state of light. This is not preferable in terms of energy and reliability.

FIG. 15 is a diagram for explaining the configuration of the optical waveguide switch according to the third embodiment of the present invention and the optical switching operation thereof. In FIG. 15, 1 is an embedded optical waveguide, 2 is a clad, 3 is an input optical signal core, 4 is an output optical signal core, 5 is a groove, 6 is a liquid reservoir, 7 is a coil, and 8a is a semi-hard magnetic material. Reference numeral 10 is a soft magnetic swath-shaped beam, 11a is a small gap, 11b is a large gap, 12a and 12b are silicone oils, 13 is a variable gap member, and 14 is a support member.

The optical waveguide switch of the third embodiment is shown in FIG.
As shown in, the self-holding property is imparted by using a semi-hard magnetic material 8a having a coercive force of about several kA / m instead of the soft magnetic material 8 used in the first embodiment. That is, Cu
-When a current in one direction is applied to the outer peripheral coil 7 wound around the semi-hard magnetic body 8a such as a Ni-Fe alloy, the semi-hard magnetic body 8a is magnetized in one direction and a magnetic field is generated. A suction force is generated for the beam 10. Soft magnetic swastika beam 10
After changing the gap 11 from the gap 11a to the gap 11b and moving the silicone oil 12 from the silicone oil 12a to 12b, the reluctance as a magnetic circuit is small even if the current is cut off, so that the entire magnetic circuit is demagnetized. The coefficient is small, and since the semi-hard magnetic material 8a exhibits remanent magnetization as if it were a permanent magnet, the soft magnetic swath-shaped beam 10 is continuously bent. Therefore, the transmission of light can be maintained in a transmissive state without supplying energy from the outside.

On the other hand, when a damping oscillating current whose maximum value is equal to or more than the one-way current is applied to the coil 7 while maintaining the residual magnetization, the semi-hard magnetic material 8a constituting the magnetic circuit is demagnetized by alternating current. Since the residual magnetization disappears, the magnetic field can be extinguished. Therefore, the elastic deflection of the soft magnetic swath-shaped beam 10 is eliminated, the gap 11 returns from the gap 11b to the gap 11a, the silicone oil 12 also moves from the silicone oil 12b to the silicone oil 12a, and the light propagation is switched to the reflective state.

It is well known that the coercive force of the semi-hard magnetic material may be determined from the magnitude of the demagnetization that is automatically determined from the shape design, and can be adjusted by the distribution of the alloy composition. Further, when a magnetic material is formed into a film by sputtering or plating in order to make the whole compact, the holding force may be determined by adjusting the temperature of heat treatment after the film formation.

(Fourth Embodiment) FIG. 16 shows a fourth embodiment of the present invention.
FIG. 3 is a diagram for explaining the configuration of the optical waveguide switch and the optical switching operation thereof. In FIG. 16, 1 is an embedded optical waveguide, 2 is a clad, 3 is an input optical signal core, 4 is an output optical signal core, 5 is a groove, 6 is a liquid reservoir, 7 is a coil, 8 is a soft magnetic material, Reference numeral 10 is a soft magnetic swath-shaped beam, 11a is a small gap, 11b is a large gap, 12a and 12b are silicone oils, 13 is a variable gap member, 14 is a support member, and 18 is a permanent magnet.

As shown in FIG. 16, the optical waveguide switch of the fourth embodiment is an optical waveguide switch having self-holding property as in the third embodiment. It differs from the first embodiment in that the soft magnetic swath-shaped beam 10 has a permanent magnet 18. As a result, when a current is applied to the coil 7 so that an attractive force is generated between the permanent magnet 18 and the electromagnet, the soft magnetic swath-shaped beam 10 bends and the permanent magnet 18 can be attracted to the soft magnetic body 8. Also,
Even if the current is cut off, the permanent magnet 18 and the soft magnetic material 8 can be kept attracted. When a current in the opposite direction to the current is applied to the coil 7, a magnetic field opposite to the above is generated and a repulsive force acts on the permanent magnet 18, so that the permanent magnet 18 is separated from the soft magnetic body 8. It can be returned to the state of.

(Embodiment 5) FIGS. 17 to 22 are views for explaining the structure of an optical waveguide switch according to Embodiment 5 of the present invention and its optical switching operation, and FIG.
20 is a cross-sectional view taken along the line AA ′ of FIG.
FIG. 22 is a sectional view taken along the line CC ′ of FIG. 21, taken along the line B ′.

17 to 22, 1 is a buried type optical waveguide, 2 is a clad, 3 is an input optical signal core, 4
Is an output optical signal core, 5 is a groove, 9b is an electric circuit, 11e
Is a small gap, 11f is a large gap, 12e and 12f are silicone oil, 14 is a supporting member, 15a is a conductive beam having soft magnetism, 16a and 16b are electrodes, 17a is an arrow indicating a transmission state of light propagation, and 17b. Is an arrow indicating the reflection state of light propagation, and 18 is a permanent magnet.

The optical waveguide switch of the fifth embodiment is shown in FIG.
As shown in FIG. 22 to FIG. 22, it is an optical waveguide switch in which the method shown in Example 2 is provided with self-holding property. Unlike the second embodiment, the conductive beam 15a having soft magnetism and the electrode 16b insulated from the conductive beam 15a and the electrode 16a at a position facing the electrode 16a with the conductive beam 15a interposed therebetween.
And a permanent magnet 18 near the electrode 16b.

In the fifth embodiment, the gap 11e formed by the conductive beam 15a and the electrode 16a when no voltage is applied between the conductive beam 15a and the electrode 16a is smaller than the gap of the groove 8. The volume of the gap 11e is larger than that of the groove 8. On the other hand, the gap between the conductive beam 15a and the electrode 16b is configured to be sufficiently larger than the gap of the groove 5 regardless of whether the switch of the electric circuit 9b is on or off.

Next, the optical switching operation of the optical waveguide switch of the fifth embodiment will be described with reference to FIGS. 17 to 22. When a voltage is applied between the conductive beam 15a and the electrode 16a, an electrostatic force is generated, the conductive beam 15a bends, and the permanent magnet 18 is attracted. After that, even if the power is turned off, the state in which the conductive beam 15a is bent by the magnetic force of the permanent magnet 18 can be maintained. In this way, the gap 11e changes to a gap 11f larger than the gap of the groove 5, so that the silicone oil 12 of the groove 5 changes from 12e (silicone oil) to 12f.
Move to (silicone oil) and reflect the propagation of light 1
The light propagation state can be maintained by switching from 7b to the transmissive state 17a. When a voltage is applied between the conductive beam 15a and the electrode 16b, the generated electrostatic force causes the conductive beam 15a to move.
Is separated from the permanent magnet 18 and returns to its original state.

As a result of the above, it is possible to realize a compact and economical optical waveguide switch having a high switching speed which does not require the liquid injection and the discharge by the robot.

In the first to fifth embodiments, 1
The switch configuration with two inputs and two outputs has been described. However, even for a switch with multiple inputs and multiple outputs such as that shown in FIG. It goes without saying that a highly reliable matrix optical waveguide switch can be realized. Further, since the structure in which the silicone oil is hermetically sealed can be easily formed, evaporation of the liquid, deterioration of the liquid, inclusion of foreign matter, etc. can be avoided, and reliability can be improved.

Although the present invention has been specifically described based on the embodiments, it is needless to say that the present invention is not limited to the above embodiments and various modifications can be made without departing from the scope of the invention. Absent.

[0046]

As described above, according to the optical waveguide switch of the present invention, the optical path can be switched without injecting and discharging the liquid from the outside, so that the positioning and the liquid for injecting and discharging the liquid can be changed. High speed optical switching and miniaturization of the device can be realized without requiring a mechanism for injecting and discharging.

Further, by providing self-holding property, it is not necessary to continuously supply energy from the outside, so that it is possible to realize an optical waveguide switch which is economical and excellent in reliability.

[Brief description of drawings]

FIG. 1 is a plan view showing the configuration of an optical waveguide switch according to a first embodiment of the present invention, as seen from above.

2 is a cross-sectional view taken along line A-A ′ of FIG.

3 is a sectional view taken along line B-B ′ of FIG.

FIG. 4 is a diagram for explaining an optical switching operation by the optical waveguide switch according to the first embodiment,

FIG. 5 is a diagram for explaining an optical switching operation by the optical waveguide switch of the first embodiment,

FIG. 6 is a diagram for explaining an optical switching operation by the optical waveguide switch according to the first embodiment,

FIG. 7 is a plan view showing the configuration of the optical waveguide switch according to the second embodiment of the present invention, as seen from above.

FIG. 8 is a cross-sectional view taken along line A-A ′ of FIG.

FIG. 9 is a diagram for explaining an optical switching operation by the optical waveguide switch according to the second embodiment,

10 is a cross-sectional view taken along line A-A ′ of FIG.

FIG. 11 is a diagram for explaining an optical switching operation by the optical waveguide switch according to the second embodiment,

12 is a cross-sectional view taken along line B-B ′ of FIG.

FIG. 13 is a diagram for explaining an optical switching operation by the optical waveguide switch according to the second embodiment,

14 is a cross-sectional view taken along line C-C ′ of FIG.

FIG. 15 is a diagram for explaining a configuration of an optical waveguide switch according to a third embodiment of the present invention and a light switching operation thereof;

FIG. 16 is a diagram for explaining a configuration of an optical waveguide switch according to a fourth embodiment of the present invention and an optical switching operation thereof,

FIG. 17 is a diagram for explaining a configuration of an optical waveguide switch according to a fifth embodiment of the present invention and an optical switching operation thereof,

FIG. 18 is a cross-sectional view taken along the line A-A ′ of FIG.

FIG. 19 is a diagram for explaining a configuration of an optical waveguide switch according to a fifth embodiment of the present invention and an optical switching operation thereof.

20 is a cross-sectional view taken along the line B-B ′ of FIG.

FIG. 21 is a diagram for explaining a configuration of an optical waveguide switch according to a fifth embodiment of the present invention and an optical switching operation thereof.

22 is a cross-sectional view taken along the line C-C ′ of FIG.

FIG. 23 is a diagram showing a configuration example of a conventional optical waveguide switch,

FIG. 24 is a diagram showing another configuration example of a conventional optical waveguide switch.

[Explanation of symbols]

21, 22 ... Ridge type optical waveguide, 23 ... Gap provided at the intersection of the ridge type waveguides 21 and 22, 1 ... Embedded optical waveguide, 2 ... Clad, 3 ... Input optical signal core, 4 ...
Output optical signal core, 5 ... Groove, 6 ... Liquid reservoir, 7 ... Coil, 8
... soft magnetic material, 8a ... semi-hard magnetic material, 9, 9a, 9b ... electric circuit, 10 ... soft magnetic swath-shaped beam (beam having soft magnetic material), 11 ... gap, 11a, 11d, 11e ... small gap ,
11b, 11c, 11f ... Large gap, 12, 12a, 12
b, 12c, 12d, 12e, 12f ... Silicone oil, 13 ... Variable gap member, 14 ... Support member, 15 ... Conductive beam, 15a ... Conductive beam having soft magnetism, 16, 16
a, 16b ... Electrode, 17a ... Arrow showing transmission state of light propagation, 17b ... Arrow showing reflection state of light propagation, 18 ...
permanent magnet.

Claims (5)

[Claims] 1. An optical waveguide for input optical signals and at least one optical waveguide for output optical signals, wherein the optical waveguide for input optical signals and the optical waveguide for output optical signals intersect each other, and In a matrix optical waveguide switch having a groove forming a predetermined angle with the optical axes of the input optical signal optical waveguide and the output optical signal optical waveguide at a crossing portion, the size can be changed to be larger or smaller than the gap of each groove. An optical waveguide switch comprising a gap changing means that forms a gap continuous with the groove. 2. The gap varying means includes an electromagnet near the groove, and a magnetic member facing a wall surface continuous with the groove.
The optical waveguide switch according to claim 1, further comprising a gap member having a portion that elastically deforms. 3. The variable gap member includes a variable gap member near the groove, which has an electrode, a wall surface continuous with the groove, and a portion which is elastically deformed with a conductive member facing the wall surface and insulated. The optical waveguide switch according to claim 1, wherein the optical waveguide switch is provided. 4. An electromagnet made of a semi-hard magnetic material is used as the electromagnet, or one having a permanent magnet in the variable gap member is used.
The optical waveguide switch described in. 5. One of the variable gap member and the electrode has a conductive magnetic material, and the other has a permanent magnet, and the variable gap member is located at a position facing the electrode with the variable gap member interposed therebetween. The optical waveguide switch according to claim 3, further comprising a second electrode insulated from both the variable gap member and the electrode.