JPH05257069A - Optical switch - Google Patents

Optical switch

Info

Publication number
JPH05257069A
JPH05257069A JP5792092A JP5792092A JPH05257069A JP H05257069 A JPH05257069 A JP H05257069A JP 5792092 A JP5792092 A JP 5792092A JP 5792092 A JP5792092 A JP 5792092A JP H05257069 A JPH05257069 A JP H05257069A
Authority
JP
Japan
Prior art keywords
optical waveguide
liquid metal
groove
optical
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP5792092A
Other languages
Japanese (ja)
Inventor
Makoto Sato
佐藤  誠
Hideo Kobayashi
英夫 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP5792092A priority Critical patent/JPH05257069A/en
Publication of JPH05257069A publication Critical patent/JPH05257069A/en
Withdrawn legal-status Critical Current

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  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

PURPOSE:To obtain the self-holding type optical switch which is used to switch an optical signal. CONSTITUTION:The optical switch is equipped with an optical waveguide substrate 12 which has an optical waveguide 11, a groove part 13 which is formed in a direction crossing the optical waveguide 11 at right angles, a glass piece 15 which is freely slidable in the groove part 13 and provided with a metallic mirror 14 crossing the optical waveguide 11 at right angles, a liquid metal holding groove 17 which is formed opposite across the optical waveguide 11 and holds liquid metal (mercury) 16 inside, electrodes 18A and 18B, and 19A and 19B which supply currents to the liquid metal 16 in the liquid metal holding groove 17, and a magnetic field application part which applies a magnetic field at right angles to the flowing direction of the currents. The currents are supplied to the liquid metal 16 to apply the magnetic field at right angles to the flowing direction of the currents, a Lorentz's force is made to operate on the liquid metal 16, which is moved in the liquid holding groove to cut off the optical waveguide 11 by the metallic mirror 14 provided at part of the glass piece; and input light which has passed through the optical waveguide is reflected to provide the operation of the self-holding type optical switch.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は光信号の切り替えに用い
る自己保持型の光スイッチに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a self-holding type optical switch used for switching optical signals.

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】従来よ
り、光導波路を横断する溝に屈折率整合剤(例えば、シ
リコンオイル)を注入、除去して、それぞれ、透過、反
射の状態を切り替える光導波路型の自己保持機能を有す
る光スイッチが提案されている。
2. Description of the Related Art Conventionally, a refractive index matching agent (for example, silicon oil) is injected into and removed from a groove traversing an optical waveguide to switch the transmission and reflection states, respectively. A waveguide type optical switch having a self-holding function has been proposed.

【0003】このような光スイッチでは屈折率整合剤の
注入、除去は精密な移動構成に搭載した注射器を用いて
行われるため、光スイッチが光導波路により高集積され
ても、機械的な機構があるため小型にすることは困難で
ある。また、精密な移動機構を含むため、光スイッチと
しての信頼性を高めることも困難である。
In such an optical switch, since the injection and removal of the refractive index matching agent are carried out by using a syringe mounted in a precise moving structure, even if the optical switch is highly integrated by an optical waveguide, a mechanical mechanism is not provided. Therefore, it is difficult to make it small. Further, since it includes a precise moving mechanism, it is difficult to improve the reliability as an optical switch.

【0004】本発明は、上記事情に鑑み、前述した従来
の光スイッチとは異なり、屈折率整合剤の移動を行うた
めの機械的な構成を必要としない、小型化が容易な自己
保持型の光スイッチを提供することを目的とする。
In view of the above-mentioned circumstances, the present invention is different from the above-mentioned conventional optical switch in that it does not require a mechanical structure for moving the refractive index matching agent and is self-holding type which can be easily miniaturized. An object is to provide an optical switch.

【0005】[0005]

【課題を解決するための手段】前記目的を達成する本発
明に係る光スイッチの構成は、内部に光導波路を形成し
た光導波路基板と、上記光導波路と直交する方向に横断
して形成された溝部と、当該溝部内を摺動自在とし上記
光導波路と直交する一側面に金属鏡を設けてなるガラス
片と、上記光導波路基板に形成した光導波路を境とし上
記溝部の両端と連通するよう相対向して形成され且つ内
部に液体金属を移動自在に保持する液体金属保持溝と、
当該液体金属保持溝内の液体金属に各々電流を流す電極
と、この電流が流れる方向に対して直交する方向に磁界
を印加する磁場印加部とを具備してなり、電流と磁界で
該液体金属に発生する力により、上記金属鏡を設けたガ
ラス片が上記光導波路を横断して設けた溝に沿って摺動
し、当該光導波路を金属鏡で遮る状態と遮らない状態と
に切り替えてなることを特徴とする。
The structure of an optical switch according to the present invention for achieving the above-mentioned object is formed by an optical waveguide substrate having an optical waveguide formed therein and a substrate crossing in a direction orthogonal to the optical waveguide. A groove portion, a glass piece that is slidable in the groove portion and has a metal mirror provided on one side surface orthogonal to the optical waveguide, and an optical waveguide formed on the optical waveguide substrate are used as boundaries to communicate with both ends of the groove portion. A liquid metal holding groove formed opposite to each other and holding a liquid metal movably therein,
The liquid metal holding groove is provided with an electrode for applying an electric current to the liquid metal, and a magnetic field applying unit for applying a magnetic field in a direction orthogonal to the direction of the electric current. The glass piece provided with the metal mirror slides along the groove provided across the optical waveguide due to the force generated on the optical waveguide, and the optical waveguide is switched between the state of being blocked by the metal mirror and the state of not being blocked. It is characterized by

【0006】[0006]

【作用】前記構成に係る光スイッチは、光導波路を横断
して設けられた溝に、金属鏡を一部に取付けたガラス片
が挿入されており、このガラス片がどちらか一方に寄っ
ているときは金属鏡は光導波路を遮らず、逆に他方側に
寄っているときは金属鏡が光導波路を遮るようにしてい
る。上記ガラス片を移動させるには、液体金属保持溝内
に保持された液体金属に電流を流すと共に、この電流が
流れる方向に対して直交する方向に磁界を印加し、上記
液体金属にローレンツ力を働かせることで、液体保持溝
内の液体金属を移動させる。この結果、液体金属の移動
と共にガラス片が溝内を摺動し、当該ガラス片の一部に
設けた金属鏡が光導波路を遮断し、光導波路を通って来
た入力光はここで反射され戻ることとなり、自己保持型
の光スイッチの働きをなす。
In the optical switch having the above-mentioned structure, the glass piece partially attached with the metal mirror is inserted into the groove provided across the optical waveguide, and the glass piece leans to one of the two. At this time, the metal mirror does not block the optical waveguide, and conversely, when the metal mirror approaches the other side, the metal mirror blocks the optical waveguide. In order to move the glass piece, a current is passed through the liquid metal held in the liquid metal holding groove, and a magnetic field is applied in a direction orthogonal to the direction in which the current flows, and a Lorentz force is applied to the liquid metal. By working, the liquid metal in the liquid holding groove is moved. As a result, the glass piece slides in the groove along with the movement of the liquid metal, the metal mirror provided on a part of the glass piece blocks the optical waveguide, and the input light passing through the optical waveguide is reflected here. It will return and act as a self-holding optical switch.

【0007】[0007]

【実施例】以下、本発明に係る光スイッチの好適な一実
施例を図面を参照して説明する。図1は本実施例に係る
光スイッチの斜視図である。同図に示すように、本実施
例に係る光スイッチは、光導波路基板(シリコン)10
の上面に積層され且つ内部に光導波路11を形成した光
導波路基板(クラッド)12と、上記光導波路11と直
交する方向に横断して形成された溝部13と、当該溝部
13内を摺動自在とし上記光導波路11と直交する一側
面に蒸着等の処理によって金属鏡14を設けてなるガラ
ス片15と、上記光導波路基板に形成した光導波路11
を境とし、上記溝部13の両端と連通するよう相対向し
て形成され、且つ内部に液体金属(本実施例では水銀)
16を移動自在に保持する液体金属保持溝17と、当該
液体金属保持溝17内の液体金属16に各々電流を流す
電極18A,B、19A,Bと、この電流が流れる方向
に対して直交する方向に磁界を印加する磁場印加部(図
示せず)とを具備するものである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the optical switch according to the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of an optical switch according to this embodiment. As shown in the figure, the optical switch according to the present embodiment includes an optical waveguide substrate (silicon) 10
An optical waveguide substrate (clad) 12 laminated on the upper surface of the optical waveguide 11 and having an optical waveguide 11 formed therein, a groove portion 13 formed across the optical waveguide 11 in a direction orthogonal to the optical waveguide 11, and slidable in the groove portion 13. And a glass piece 15 provided with a metal mirror 14 on one side surface orthogonal to the optical waveguide 11 by a process such as vapor deposition, and the optical waveguide 11 formed on the optical waveguide substrate.
Is formed as a boundary and is formed so as to face each other so as to communicate with both ends of the groove portion 13, and a liquid metal (mercury in this embodiment) is formed inside.
Liquid metal holding groove 17 for holding 16 movably, electrodes 18A, B, 19A, B for passing currents respectively through liquid metal 16 in the liquid metal holding groove 17, and orthogonal to the flowing direction of the current. And a magnetic field applying unit (not shown) for applying a magnetic field in the direction.

【0008】上記光導波路基板12に設けられた溝部1
3及び液体金属保持溝17はエッチング加工等で処理さ
れている。また、金属鏡14はガラス片13に蒸着等の
処理で取付けられている。上部溝部13に挿入されたガ
ラス片15は溝部13に沿って摺動する構造になってお
り、何らかの力が加われば働くが、力が働いていないと
きは摩擦によりその位置を保持している。また、液体金
属保持溝17に注入された液体金属16は表面張力のた
め、一つの塊を構成するが、図1に示すように水銀は空
間を空けて溝の中に注入されている。
Groove 1 provided on the optical waveguide substrate 12
3 and the liquid metal holding groove 17 are processed by etching or the like. The metal mirror 14 is attached to the glass piece 13 by a process such as vapor deposition. The glass piece 15 inserted into the upper groove portion 13 has a structure of sliding along the groove portion 13 and works if some force is applied, but when the force is not working, the position is held by friction. Further, the liquid metal 16 injected into the liquid metal holding groove 17 constitutes one lump due to surface tension, but as shown in FIG. 1, mercury is injected into the groove with a space.

【0009】すなわち、図1に示すようにガラス片15
が最も右側に寄った状態で水銀16の表面がガラス片1
5を左側に押し返すことのないように、溝17の容積に
対して水銀の量が少なく注入されている。また、図1の
II−II矢視断面を示す図2に記載してあるように、
電極19A,19Bを設けた蓋20が光導波路基板12
の上に設けられ、水銀16は液体金属保持溝17の中に
密閉されている。
That is, as shown in FIG.
The surface of the mercury 16 is the glass piece 1
A small amount of mercury is injected with respect to the volume of the groove 17 so as not to push 5 back to the left. In addition, as described in FIG. 2 showing a cross section taken along the line II-II of FIG.
The lid 20 provided with the electrodes 19A and 19B is the optical waveguide substrate 12
The mercury 16 is sealed in the liquid metal holding groove 17 on the upper surface of the liquid metal holding groove 17.

【0010】また、図には示していないが、光導波路基
板12の面に垂直な方向に磁場が印加されている。この
磁場の印加はフェライト等の永久磁石を光導波路基板の
上部もしくは下部に設置することで実現されている。な
お、ガラス片15の摺動を容易にする効果と、ガラス表
面での光の反射を防止するため、溝部13の隙間を屈折
率整合剤で満たすのも有効な手段である。
Although not shown in the figure, a magnetic field is applied in a direction perpendicular to the surface of the optical waveguide substrate 12. The application of this magnetic field is realized by installing a permanent magnet such as ferrite above or below the optical waveguide substrate. In addition, in order to facilitate the sliding of the glass piece 15 and prevent the reflection of light on the glass surface, it is also an effective means to fill the gap of the groove 13 with a refractive index matching agent.

【0011】次に、図3を用いて金属鏡の挿入、除去を
行うためのガラス片の移動方法について説明する。図3
は図1の光導波路基板を上部より眺めた図である。同図
中、印加磁場の方向は紙面の裏から表側とする。図の下
側の電極18A,19Aから、上側の電極18B,19
Bに向って電流を流すと水銀16にはローレンツ力が働
き、水銀は図の右側に移動する(図3(A)参照)。左
右の水銀16に共に右側に移動する力が働くと、ガラス
片15は左側の水銀16の表面に押されて右側に摺動す
る。水銀は表面張力が大きいので毛細管現象で狭い空間
には入らず、最終的には、図3(A)に示す状態にな
り、光導波路11は透過の状態になる。電流を止めて
も、摩擦力のため、ガラス片15や水銀16は位置を保
持する。
Next, a method of moving the glass piece for inserting and removing the metal mirror will be described with reference to FIG. Figure 3
FIG. 2 is a view of the optical waveguide substrate of FIG. 1 viewed from above. In the figure, the direction of the applied magnetic field is from the back side of the paper to the front side. From the lower electrodes 18A, 19A in the figure to the upper electrodes 18B, 19A
When a current is passed toward B, the Lorentz force acts on the mercury 16 and the mercury moves to the right side of the figure (see FIG. 3A). When the right and left mercury 16 both act to move to the right, the glass piece 15 is pushed by the surface of the left mercury 16 and slides to the right. Since mercury has a large surface tension, it does not enter the narrow space due to the capillary phenomenon, and finally the state shown in FIG. Even if the electric current is stopped, the glass piece 15 and the mercury 16 retain their positions due to the frictional force.

【0012】次に、電流の向きを逆にすると、水銀16
に働くローレンツ力の向きも逆になるため、ガラス片1
5は右側の水銀16に押されて左側へ移動し、最終的に
は図3(B)に示す状態になる。この状態では、光導波
路は金属鏡14により遮られ、図の下部の光導波路より
入射した光は反射されて戻ることになる。以上のような
原理で本発明の自己保持型光スイッチは動作する。
Next, when the direction of the electric current is reversed, the mercury 16
Since the direction of the Lorentz force acting on the
5 is pushed by the mercury 16 on the right side to move to the left side, and finally the state shown in FIG. In this state, the optical waveguide is blocked by the metal mirror 14, and the light incident from the lower optical waveguide in the figure is reflected and returned. The self-holding type optical switch of the present invention operates based on the above principle.

【0013】前述した図1に示した光スイッチは一本の
光導波路について透過、遮断の切り替えをおこなうもの
であったが、図4に示すように、本発明の自己保持型光
スイッチを互いに交差する光導波路11A〜11Dの交
差部に設けることにより、マトリックス光スイッチの基
本単位を構成することができる。
The above-described optical switch shown in FIG. 1 switches between transmission and blocking of one optical waveguide. As shown in FIG. 4, the self-holding optical switch of the present invention intersects with each other. By providing the optical waveguides 11A to 11D at the intersections thereof, a basic unit of the matrix optical switch can be constructed.

【0014】図4に示した状態、すなわち透過の状態で
は、光導波路11Aから入射した光は導波路11Bへ透
過し、光導波路11Cからの光は光導波路11Dへ透過
する。ガラス片15が左側に移動し、金属鏡14が光導
波路を遮ると、光導波路11Aから入射した光は光導波
路11Dへ反射され、光信号の切り替えが行われる。N
xNのマトリックス光スイッチを構成するには、図4に
示す光スイッチの単位をNxNの格子上に配置し、光導
波路で結合すれば実現できる。
In the state shown in FIG. 4, that is, in the transmitting state, the light incident from the optical waveguide 11A is transmitted to the waveguide 11B, and the light from the optical waveguide 11C is transmitted to the optical waveguide 11D. When the glass piece 15 moves to the left and the metal mirror 14 blocks the optical waveguide, the light incident from the optical waveguide 11A is reflected to the optical waveguide 11D, and the optical signal is switched. N
An xN matrix optical switch can be constructed by arranging the units of the optical switch shown in FIG. 4 on an NxN lattice and coupling them by an optical waveguide.

【0015】金属鏡を用いた光スイッチは、屈折率差を
用いた光スイッチと異なり、反射面における位相シフト
(グースヘンシェンシフト)の波長依存、偏波依存性が
なく、またそのシフト量も銀や金等の金属を使用した場
合では0.1μm以下であり、導波路設計に制約を与え
ない。したがって、本発明の光スイッチは基本的に、偏
波無依存、波長無依存であることがわかる。金属面での
反射を利用しているために、全反射でないので必ず光信
号の減衰が生じるが、金、銀等の金属の場合、通信に使
用する光波長、すなわち1.3μm,1.5μm付近で
は98%程度の反射効率を有しており実用上全く問題な
い。さらに、屈折率差を利用した光スイッチでは全反射
条件を満たすために、交差する光導波路のなす角度を8
5度以下にできない(導波路の屈折率を1.5としたと
き)が、金属鏡による反射を利用すればさらに低角度で
交差させることができ、光スイッチが透過の状態にある
ときの導波路間のクロストークを低減することができ
る。
Unlike an optical switch using a refractive index difference, an optical switch using a metal mirror has neither wavelength dependence nor polarization dependence of a phase shift (Goose-Henschen shift) on a reflecting surface, and the shift amount thereof is also different. When a metal such as silver or gold is used, the thickness is 0.1 μm or less, which does not limit the waveguide design. Therefore, it is understood that the optical switch of the present invention is basically polarization independent and wavelength independent. Since the reflection on the metal surface is used, the optical signal is always attenuated because the reflection is not total reflection. However, in the case of metal such as gold and silver, the light wavelength used for communication is 1.3 μm, 1.5 μm. In the vicinity, it has a reflection efficiency of about 98% and is practically no problem. Further, in the optical switch utilizing the difference in refractive index, the angle formed by the intersecting optical waveguides is set to 8 in order to satisfy the total reflection condition.
Although it cannot be less than 5 degrees (when the refractive index of the waveguide is 1.5), it can be crossed at a lower angle by using the reflection by the metal mirror, and the light guide when the optical switch is in the transmitting state. Crosstalk between the waveguides can be reduced.

【0016】[0016]

【発明の効果】以上述べたように、本発明の自己保持型
の光スイッチは、自己保持機能を有し、金属鏡の移動
を、液体金属に働く電磁力により行う、小型化に適した
構造を持つ自己保持型光スイッチを提供するものであ
る。さらに、本発明の自己保持型光スイッチは、集積し
てマトリックス光スイッチを実現することが容易である
という効果を奏する。また、本発明の自己保持型光スイ
ッチは、自己保持型であるので、切り替えを行うとき以
外は駆動電力を必要としないので、光伝送システムにお
ける光ファイバ心線切り替え端子に適用すれば、任意な
切り替えを可能とする光ファイバ心線の選択機能をシス
テムに付与することができ、切り替えに伴う作業の大幅
な削減が可能になる。
As described above, the self-holding type optical switch of the present invention has a self-holding function and is suitable for downsizing, in which the movement of the metal mirror is performed by the electromagnetic force acting on the liquid metal. A self-holding type optical switch having Furthermore, the self-holding type optical switch of the present invention has an effect that it is easy to integrate and realize a matrix optical switch. Further, since the self-holding type optical switch of the present invention is a self-holding type, it does not require driving power except when switching, so that it can be applied to an optical fiber core wire switching terminal in an optical transmission system. The system can be provided with a function of selecting the optical fiber core wire that enables switching, and the work involved in switching can be significantly reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による自己保持型の光スイッチの一実施
例の構成を示す斜視図である。
FIG. 1 is a perspective view showing a configuration of an embodiment of a self-holding type optical switch according to the present invention.

【図2】本発明の図1の自己保持型光スイッチのII−
II矢視断面図である。
FIG. 2 is a view of the self-holding optical switch of FIG. 1 according to the present invention II-
FIG. 11 is a sectional view taken along line II.

【図3】自己保持型の光スイッチの自己保持機能および
金属鏡の移動の原理を説明する図である。
FIG. 3 is a diagram illustrating a self-holding function of a self-holding type optical switch and a principle of movement of a metal mirror.

【図4】自己保持型の光スイッチをマトリックス光スイ
ッチの構成単位に適用したときの構成を説明する図であ
る。
FIG. 4 is a diagram illustrating a configuration when a self-holding type optical switch is applied to a constituent unit of a matrix optical switch.

【符号の説明】[Explanation of symbols]

10 光導波路基板(シリコン) 11 光導波路 12 光導波路基板(クラッド) 13 溝部 14 金属鏡 15 ガラス片 16 液体金属(水銀) 17 液体金属保持溝 18A,B、19A,B 電極 10 Optical Waveguide Substrate (Silicon) 11 Optical Waveguide 12 Optical Waveguide Substrate (Clad) 13 Groove 14 Metal Mirror 15 Glass Piece 16 Liquid Metal (Mercury) 17 Liquid Metal Retaining Groove 18A, B, 19A, B Electrode

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 内部に光導波路を形成した光導波路基板
と、上記光導波路と直交する方向に横断して形成された
溝部と、当該溝部内を摺動自在とし上記光導波路と直交
する一側面に金属鏡を設けてなるガラス片と、上記光導
波路基板に形成した光導波路を境とし上記溝部の両端と
連通するよう相対向して形成され且つ内部に液体金属を
移動自在に保持する液体金属保持溝と、当該液体金属保
持溝内の液体金属に各々電流を流す電極と、この電流が
流れる方向に対して直交する方向に磁界を印加する磁場
印加部とを具備してなり、電流と磁界で該液体金属に発
生する力により、上記金属鏡を設けたガラス片が上記光
導波路を横断して設けた溝に沿って摺動し、当該光導波
路を金属鏡で遮る状態と遮らない状態とに切り替えてな
ることを特徴とする光スイッチ。
1. An optical waveguide substrate having an optical waveguide formed therein, a groove formed transversely to a direction orthogonal to the optical waveguide, and one side surface which is slidable in the groove and orthogonal to the optical waveguide. A liquid metal for holding a liquid metal movably inside the glass piece provided with a metal mirror and the optical waveguide formed on the optical waveguide substrate as opposed to each other so as to communicate with both ends of the groove. A holding groove, an electrode for passing an electric current through the liquid metal in the liquid metal holding groove, and a magnetic field applying unit for applying a magnetic field in a direction orthogonal to the direction in which the current flows, are provided. The force generated on the liquid metal causes the glass piece provided with the metal mirror to slide along the groove provided across the optical waveguide, and the state where the optical waveguide is blocked by the metal mirror and the state where it is not blocked. It is characterized by switching to Optical switch.
JP5792092A 1992-03-16 1992-03-16 Optical switch Withdrawn JPH05257069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5792092A JPH05257069A (en) 1992-03-16 1992-03-16 Optical switch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5792092A JPH05257069A (en) 1992-03-16 1992-03-16 Optical switch

Publications (1)

Publication Number Publication Date
JPH05257069A true JPH05257069A (en) 1993-10-08

Family

ID=13069440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5792092A Withdrawn JPH05257069A (en) 1992-03-16 1992-03-16 Optical switch

Country Status (1)

Country Link
JP (1) JPH05257069A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2818927A1 (en) * 1977-04-30 1978-11-02 Hitachi Cable PROCESS AND DEVICE FOR MANUFACTURING A COMPOSITE WIRE FROM METAL
KR100332996B1 (en) * 2000-05-04 2002-04-15 박호군 Light Switching Aparatus
GB2388918A (en) * 2002-05-25 2003-11-26 Alcatel Optronics Netherlands Optical waveguide switch with movable reflector in trench
US7082251B2 (en) 2002-03-28 2006-07-25 Ntt Electronics Corporation Optical device
KR20210058072A (en) * 2019-11-13 2021-05-24 한국과학기술원 Optical switching element and system using movable optical waveguide by electromagnetic force

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2818927A1 (en) * 1977-04-30 1978-11-02 Hitachi Cable PROCESS AND DEVICE FOR MANUFACTURING A COMPOSITE WIRE FROM METAL
KR100332996B1 (en) * 2000-05-04 2002-04-15 박호군 Light Switching Aparatus
US7082251B2 (en) 2002-03-28 2006-07-25 Ntt Electronics Corporation Optical device
CN1294441C (en) * 2002-03-28 2007-01-10 Ntt电子股份有限公司 Optical device
GB2388918A (en) * 2002-05-25 2003-11-26 Alcatel Optronics Netherlands Optical waveguide switch with movable reflector in trench
KR20210058072A (en) * 2019-11-13 2021-05-24 한국과학기술원 Optical switching element and system using movable optical waveguide by electromagnetic force

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Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 19990518