CN213182194U - Electromagnetic MEMS (micro-electromechanical system) torsion micromirror - Google Patents
Electromagnetic MEMS (micro-electromechanical system) torsion micromirror Download PDFInfo
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- CN213182194U CN213182194U CN202021855942.5U CN202021855942U CN213182194U CN 213182194 U CN213182194 U CN 213182194U CN 202021855942 U CN202021855942 U CN 202021855942U CN 213182194 U CN213182194 U CN 213182194U
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Abstract
The utility model relates to an electromagnetic type MEMS twists reverse micro mirror, including micro mirror reflector surface, elastic beam, drive coil, frame and base, wherein: the micromirror reflecting mirror surface is connected with the frame through the elastic beam; the elastic beam is connected with the micromirror reflecting mirror surface and is used for fixedly connecting the micromirror reflecting mirror surface with the frame; the driving coil is arranged on the base and used for providing driving force for the micro-mirror reflection surface; the frame is used for fixing the micromirror reflecting mirror surface; the base is disposed on a plane on which the micromirror mirror surface is located.
Description
Technical Field
The utility model relates to a micro mirror technical field especially relates to an electromagnetic type MEMS twists reverse micro mirror.
Background
Micro-Electro-Mechanical systems (MEMS) are also known as Micro-machines, Micro-systems, Micro-electromechanical systems, and the like, and the volume of the systems is generally in the Micro-nano order, so that the systems can complete the work which cannot be completed by the conventional electromechanical systems.
The MEMS is an intelligent system which can be micro-sized to nano-scale, along with the deeper and more extensive research and the more development towards the manufacturing process of integrated circuit chips, the MEMS device has the advantages of high sensitivity, low power consumption, easy integration, small volume, wide application range, high stability and the like, and develops towards more intelligence and more multifunctionality, and the development trend is rapid. The application principle of the MEMS micro-mirror is roughly divided into two types, one is to control the mirror surface of the MEMS micro-mirror to twist and change the light path, such as optical communication and direction, the direction researches how to control the deflection of the micro-mirror through deformation and voltage driving so as to control the direction of the light path, and the MEMS micro-mirror is applied to switching, filtering and the like in optical communication. The other is to use the reflection of light to realize control, which is mostly used for digital micro-mirror array and projection instrument. With more and more intelligent control today, MEMS micromirrors are stepping into the market. The MEMS micro-mirror is widely used in the fields of turn-off, image, display, communication, etc. in the micro-optics field, and is receiving attention and research from researchers. However, in the prior art, the micro-actuator of the electromagnetic MEMS torsion micromirror has advantages of large deflection angle, low driving voltage, etc., so that it is widely applied in various fields, and its application is more diversified, for example, an optical switch is a novel optical path switching device based on the principle of the electromagnetic MEMS torsion micromirror, and its working principle is to change the propagation direction of input light and output light by changing the deflection angle of the micromirror, and finally realize the switching function. In the prior art, piezoelectric MEMS (micro-electromechanical systems) torsion micromirrors are mostly adopted, and the application of the piezoelectric MEMS torsion micromirrors is relatively less.
To sum up: the prior art is lack of packaging for the electromagnetic MEMS torsion micromirror chip, and the material of the micromirror reflection mirror surface is easily affected by the cost, which leads to the increase of the processing and cost.
SUMMERY OF THE UTILITY MODEL
Therefore, the utility model provides an electromagnetic type MEMS twists reverse the micro-mirror and is used for overcoming the material that uses micro-mirror reflector surface among the prior art and easily receives the influence of cost, leads to the problem of the increase of processing and cost.
In order to achieve the above object, the present invention provides an electromagnetic MEMS torsion micromirror, including a micromirror reflecting mirror surface, an elastic beam, a driving coil, a frame and a base, wherein:
the micromirror reflecting mirror surface is connected with the frame through the elastic beam;
the elastic beam is connected with the micromirror reflecting mirror surface and is used for fixedly connecting the micromirror reflecting mirror surface with the frame;
the driving coil is arranged on the base and used for providing driving force for the micro-mirror reflection surface;
the frame is used for fixing the micromirror reflecting mirror surface;
the base is disposed on a plane on which the micromirror mirror surface is located.
Further, the drive coil is a planar drive coil.
Further, the elastic beam comprises a first elastic beam and a second elastic beam, one end of the first elastic beam is arranged at one end of the micromirror reflecting mirror surface, the other end of the first elastic beam is arranged at one end of the frame, one end of the second elastic beam is arranged at one end of the micromirror reflecting mirror surface opposite to the first elastic beam, the other end of the second elastic beam is arranged at one end of the frame opposite to the first elastic beam, and the first elastic beam and the second elastic beam are located on the same plane.
Further, the base is arranged at the lower end of the frame and is arranged in parallel with the frame.
Further, the mirror body of the micro mirror reflecting mirror surface is 4mm multiplied by 250 μm in size, and magnetic particles MQFP-12-5 are doped into the PDMS matrix.
Furthermore, a gold foil with the thickness of 100nm is evaporated on the surface of the mirror surface of the micro mirror to be used as a reflecting layer.
Further, the elastic beam is a PDMS matrix.
Further, the length of the frame is greater than the length of the micromirror mirror surface, and the width of the frame is greater than the width of the micromirror mirror surface.
Further, the distance between the driving coil and the mirror surface of the micro mirror is 1 mm.
Further, the current starting point of the driving coil is outwards rotated at the center of the base, which is opposite to the right center of the side edge of the mirror surface of the micro mirror.
Compared with the prior art, the utility model has the advantages that the utility model provides an electromagnetic MEMS torsion micromirror, wherein, the micromirror reflecting mirror surface is connected with the frame through the elastic beam; the elastic beam is connected with the micromirror reflecting mirror surface and is used for fixedly connecting the micromirror reflecting mirror surface with the frame; the driving coil is arranged on the base and used for providing driving force for the micro-mirror reflection surface; the frame is used for fixing the micromirror reflecting mirror surface; the base is disposed on a plane on which the micromirror mirror surface is located. The limitation of material elements of the components is reduced through the planar driving coil, the manufacturing process of the planar coil is relatively perfectly compatible with the structural arrangement of the electromagnetic MEMS torsion micromirror, and the electromagnetic MEMS torsion micromirror has the advantages of low-voltage operation, large scanning range and high frequency, the structural construction difficulty of the electromagnetic MEMS torsion micromirror is improved, and the cost in the aspect of materials is reduced.
Furthermore, the electromagnetic type MEMS twists reverse the switch of micro-mirror, the demonstration of the small, hardware stability in the optics field of the volume magnitude of the micro-mirror, the scanning obtains extensive application, the utility model discloses a structure has huge prospect in later application market, moreover through the material of micro-mirror reflector surface sets up to magnetic particle MQFP-12-5 and dopes to the PDMS matrix, has further reduced the material cost that the electromagnetic type MEMS twists reverse the micro-mirror.
Furthermore, the current starting point of the driving coil is outwards rotated in the middle of the base and opposite to the right center of the side edge of the mirror surface of the micromirror, if the planar driving coil is not driven by current at the time, the coil can be balanced with the elastic force generated by the fixed beams at the two ends under the action of gravity, and the state can be used as the initial stable state of the micromirror. The current through the plane drive coil generates magnetic field force, and the distance between the drive coil and the micro-mirror surface is 1mm, so that the micro-mirror surface is twisted under the action of the magnetic field force, and the material cost of the micro-mirror surface is further reduced.
Drawings
Fig. 1 is a schematic structural diagram of an electromagnetic MEMS torsion micromirror according to the present invention;
fig. 2 is a schematic diagram illustrating the structure of the electromagnetic MEMS torsion micromirror according to the present invention.
Detailed Description
In order to make the objects and advantages of the present invention more apparent, the present invention will be further described with reference to the following embodiments; it should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only for explaining the technical principle of the present invention, and do not limit the scope of the present invention.
It should be noted that in the description of the present invention, the terms of direction or positional relationship indicated by the terms "upper", "lower", "left", "right", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, which are only for convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
Furthermore, it should be noted that, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Referring to fig. 1-2, the present invention provides an electromagnetic MEMS torsion micromirror, comprising a micromirror mirror surface 1, an elastic beam 2, a driving coil 4, a frame 3 and a base 5, wherein,
Specifically, in the embodiment of the present invention, the mirror body of the micromirror reflector 1 has a size of 4mm × 4mm × 250 μm, and is formed by doping magnetic particles MQFP-12-5 into PDMS matrix, and a layer of 100nm gold foil is deposited on the surface as a reflective layer, and the remanence after magnetization is 20 mT.
Particularly, in the embodiment of the present invention, the elastic beam 2 is composed of a PDMS substrate, the micromirror mirror surface 1 is connected to the frame 3 through the elastic beam 2, the driving coil 4 is integrated below the micromirror mirror surface 1 and the frame 3, the distance between the driving coil 4 and the micromirror is 1mm, and the micromirror is driven to rotate by electromagnetic acting force.
Specifically, in the embodiment of the present invention, the current starting point of the driving coil 4 is turned outward at the center of the base 5 opposite to the side edge of the micromirror. If the planar driving coil is not driven by current at the time, the coil is balanced with the elastic force generated by the fixed beams at the two ends under the action of gravity, and the state can be used as the initial steady state of the micromirror; when external direct current is applied to the planar driving coil, the coil can generate a magnetic field from the outside, electromagnetic force can be generated on the micromirror mirror surface 1 at this time, and under the action of the electromagnetic force, the micromirror mirror surface 1 can be pulled to rotate around the torsion bar shaft, at the moment, the torsion bar can generate mechanical deformation, and the system can reach a steady state again until the electromagnetic force and the restoring force of the elastic beam 2 are balanced again; if the driving current is turned off at this time, the micromirror mirror surface 1 is returned to the initial position by the self-gravity of the driving coil 4 and the restoring force of the cantilever beam, and thus the output deflection angle of the micromirror mirror surface 1 can be controlled by controlling the intensity of the applied current.
Particularly, in the embodiment of the present invention, the current of the driving coil 4 is obtained by finite element analysis method from the magnetic field to the magnetic field force and from the magnetic field force to the magnetic field moment, and the deflection angle of the micromirror mirror surface 1 is obtained. It will be understood by those skilled in the art that the structure of the micromirror 1 is not deformed by the influence of force, or the sex of the micromirror 1 in deflection is negligible, and only the torsion degree of the mechanical deformation under the action of the elastic beam 2 is considered.
Particularly, in the embodiment of the present invention, the torsion angle of the micromirror mirror surface 1 and the supporting function of the elastic beam 2 for recovering the original state after the deformation caused by the electromagnetic force have a huge influence, the elastic deformation of the elastic beam 2 includes the length of the elastic beam 2 and the material of the elastic beam 2.
Particularly, in the embodiment of the utility model provides an in, the utility model discloses utilize the electromagnetic type MEMS of lorentz force principle to twist reverse the micro-mirror, through right MEMS twists reverse the design of micro-mirror's slipform control algorithm, and electromagnetic type MEMS twists reverse micro-mirror structure, theory of operation, drive mode and carries out the analysis.
Particularly, in the embodiment of the present invention, the MEMS torsion micromirror is controlled by the sliding mode control method, the sliding mode control is corresponding to time and has strong anti-interference capability, and the sliding mode variable structure is to make the MEMS torsion micromirror perform small-amplitude and high-frequency oscillating motion along the preset direction.
Particularly, the embodiment of the utility model provides an in, through providing a MEMS twists reverse micromirror based on sliding mode control, wherein, MEMS twists reverse the control mode of micromirror and adopts closed loop to handle, considers that MEMS twists reverse micromirror's micromirror mirror surface 1 and receives the interference of external other factors easily, can have the change of certain degree to micromirror mirror surface 1's atress to lead to micromirror mirror surface 1's location torsion volume and error grow.
Particularly, in the embodiment of the utility model provides an in, the sliding mode sets up on MEMS twists reverse the drive coil 4 of micro mirror, MEMS twists reverse the micro mirror and controls under traditional PID closed-loop control and sliding mode control, wherein, sliding mode control has faster governing speed, lower overshoot because of having the integral link than traditional PID closed-loop control, the utility model discloses a control structure of sliding mode.
Particularly, in the embodiment of the utility model, will the slipform structure is placed on the drive coil 4, through the slipform structure controls the MEMS twists reverse the micro mirror, through with drive coil 4 fixed welding in on the base 5, thereby make drive coil 4 produces the electromagnetic force under the state of circular telegram and makes micro mirror reflecting surface 1 produces the angle and twists reverse, elastic beam 2 is in rotate under micro mirror reflecting surface 1's the drive, works as when the drive coil outage, elastic beam 2 can drive micro mirror reflecting surface 1 resumes initial position.
So far, the technical solution of the present invention has been described with reference to the preferred embodiments shown in the drawings, but it is easily understood by those skilled in the art that the scope of the present invention is obviously not limited to these specific embodiments. Without departing from the principle of the present invention, a person skilled in the art can make equivalent changes or substitutions to the related technical features, and the technical solutions after these changes or substitutions will fall within the protection scope of the present invention.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention; various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An electromagnetic MEMS torsion micromirror comprising a micromirror mirror surface, an elastic beam, a driving coil, a frame and a base, wherein:
the micromirror reflecting mirror surface is connected with the frame through the elastic beam;
the elastic beam is connected with the micromirror reflecting mirror surface and is used for fixedly connecting the micromirror reflecting mirror surface with the frame;
the driving coil is arranged on the base and used for providing driving force for the micro-mirror reflection surface;
the frame is used for fixing the micromirror reflecting mirror surface;
the base is disposed on a plane on which the micromirror mirror surface is located.
2. The electromagnetic MEMS torsion micromirror of claim 1, wherein the drive coil is a planar drive coil.
3. The electromagnetic MEMS torsion micromirror of claim 1, wherein the elastic beam comprises a first elastic beam and a second elastic beam, one end of the first elastic beam is disposed at one end of the micromirror mirror surface, the other end of the first elastic beam is disposed at one end of the frame, one end of the second elastic beam is disposed at the opposite end of the micromirror mirror surface from the first elastic beam, the other end of the second elastic beam is disposed at the opposite end of the frame from the first elastic beam, and the first elastic beam and the second elastic beam are on the same plane.
4. The electromagnetic MEMS torsion micromirror of claim 1, wherein the base is disposed at a lower end of the frame, parallel to the frame.
5. The electromagnetic MEMS torsion micromirror of claim 1, wherein the mirror body dimensions of the micromirror mirror surface are 4mm x 250 μm.
6. The electromagnetic MEMS torsion micromirror of claim 5, wherein the surface of the micromirror mirror surface is evaporated with 100nm gold foil as a reflective layer.
7. The electromagnetic MEMS torsion micromirror of claim 1, wherein the elastic beam is a PDMS matrix.
8. The electromagnetic MEMS torsion micromirror of claim 5, wherein the frame has a length greater than a length of the micromirror mirror surface and a width greater than a width of the micromirror mirror surface.
9. The electromagnetic MEMS torsion micromirror of claim 1, wherein the driving coil is spaced 1mm from the micromirror mirror surface.
10. The electromagnetic MEMS torsion micromirror of claim 1, wherein the current origin of the driving coil is turned outward at the center of the base opposite to the side of the micromirror plate.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202021855942.5U CN213182194U (en) | 2020-08-31 | 2020-08-31 | Electromagnetic MEMS (micro-electromechanical system) torsion micromirror |
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| CN202021855942.5U CN213182194U (en) | 2020-08-31 | 2020-08-31 | Electromagnetic MEMS (micro-electromechanical system) torsion micromirror |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115268060A (en) * | 2022-07-27 | 2022-11-01 | 杭州士兰微电子股份有限公司 | MEMS micro-mirror and preparation method thereof |
| WO2023036269A1 (en) * | 2021-09-10 | 2023-03-16 | 华为技术有限公司 | Micromirror chip packaging structure, laser apparatus, and automobile |
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2020
- 2020-08-31 CN CN202021855942.5U patent/CN213182194U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023036269A1 (en) * | 2021-09-10 | 2023-03-16 | 华为技术有限公司 | Micromirror chip packaging structure, laser apparatus, and automobile |
| CN115268060A (en) * | 2022-07-27 | 2022-11-01 | 杭州士兰微电子股份有限公司 | MEMS micro-mirror and preparation method thereof |
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