CN207840872U - Pressure of surging suspension polishing Fluid pressure wireless acquisition system - Google Patents
Pressure of surging suspension polishing Fluid pressure wireless acquisition system Download PDFInfo
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- CN207840872U CN207840872U CN201721774308.7U CN201721774308U CN207840872U CN 207840872 U CN207840872 U CN 207840872U CN 201721774308 U CN201721774308 U CN 201721774308U CN 207840872 U CN207840872 U CN 207840872U
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- pressure sensor
- acquisition system
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- 238000005498 polishing Methods 0.000 title claims abstract description 59
- 239000012530 fluid Substances 0.000 title claims abstract description 24
- 239000000725 suspension Substances 0.000 title claims abstract description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 230000009467 reduction Effects 0.000 claims description 2
- 230000006837 decompression Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 7
- 230000033228 biological regulation Effects 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000010534 mechanism of action Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
One kind, which is surged, presses suspension polishing Fluid pressure wireless acquisition system, including pressure sensor, balance adjustment stud, compartment, wireless transmitter module and wireless receiver；By one of location of workpiece together with polishing tool disk trepanning, the pressure sensor measured for hydraulic pressure is fixed on the location of workpiece from top to bottom, on the position of the symmetrical side of the location of workpiece, using same way stable equilibrium regulation stud, the balance adjustment stud is equal with pressure sensor quality and rotary inertia；A compartment, the fixed wireless transmitting module in compartment are fixed above polishing tool disk, the pressure sensor is connected with wireless transmitter module, and the wireless transmitter module coordinates with the wireless receiver.The utility model accuracy is higher, and the pressure of target fixed point (location of workpiece) is acquired by wireless (bluetooth) method.
Description
Technical field
The utility model is related to non-contact polishing fluids pressure acquisition fields, in particular to a kind of liquid hydrodynamic floating
The acquisition system of polishing fluids pressure.
Background technology
Pressure of surging suspension polishing method is to be applied to a kind of polishing method of the low injured surface processing of atom level ultra-smooth.
During pressure of surging suspension polishing, polishing tool disk rotates under the driving of servo motor and liquid is driven to flow, the liquid of flowing
Know from experience the sample generation fluid pressure effect to pasting face of trying to get to the heart of a matter in polishing tool, the size of the fluid pressure and distribution are to sample
Surfacing removal rate and surface uniformity important.Therefore, to the pressure of workpiece area in polishing processing
Measurement is one of research very effective means of its mechanism of action.
A kind of existing hydraulic pressure, buoyancy and floating distance detection method, pressure sensor are fixed on container bottom,
Same circumferential directions four, sensor radial position is corresponding with sample patch location.When biography is skimmed in polishing tool sweeping
Sensor position, sensor collect pressure signal with certain sample frequency.The pressure signal measured is defeated by data collecting card
It is sent in computer and saves.Due to the polishing tool in the patented method try to get to the heart of a matter face flow passage structure be it is periodic,
It is also cyclically-varying to measure the pressure signal come.It is not mesh although pressure time variation has some reference value
Mark the pressure of fixed point (location of workpiece).And sensor arrangement, in container bottom, what is measured is the liquid pressure of the nearly bottom of container
Power, since there are certain deviations for the pressure at the presence of polishing fluid film thickness, and the workpiece patch of actual needs measurement.
Invention content
In order to overcome the lower deficiency of accuracy of existing polishing fluids pressure detecting, the utility model to provide a kind of standard
The higher pressure suspension polishing Fluid pressure wireless acquisition system that surges of true property, target fixed point is acquired by wireless (bluetooth) method
The pressure of (location of workpiece).
Technical solution adopted by the utility model to solve its technical problems is：
One kind, which is surged, presses suspension polishing Fluid pressure wireless acquisition system, in pressure of surging suspension polishing equipment, polishing tool
Parallel zone below disk is provided with groove, and workpiece is pasted in the groove, and the polishing tool disk is mounted on ball spline shaft
Lower end；The system comprises pressure sensor, balance adjustment stud, compartment, wireless transmitter module and wireless receivers；It will
One of location of workpiece fixes the pressure sensor measured for hydraulic pressure together with polishing tool disk trepanning from top to bottom
It is described flat using same way stable equilibrium regulation stud on the position of the symmetrical side of the location of workpiece in the location of workpiece
The regulation stud that weighs is equal with pressure sensor quality and rotary inertia；A compartment is fixed above polishing tool disk, it is described
The fixed wireless transmitting module in compartment, the pressure sensor are connected with wireless transmitter module, the wireless transmission mould
Block coordinates with the wireless receiver.
Further, the system also packet conducting slip ring installs conducting slip ring on ball spline shaft, the conducting slip ring
Inner ring coordinates with ball spline shaft, and the outer shroud of the conducting slip ring is fixed on intermediate support plate bottom；The conducting slip ring it is interior
The connecting line of ring is connected with wireless transmitter module, connecting line and 24V power cords and the ground wire of the outer shroud of the conducting slip ring
It is connected.This is the implementation that wireless transmitter module needs externally fed, can be with if wireless transmitter module is self-powered
Reduction procedure.
Further, the system also includes signal condition amplifier, the pressure sensor is put with the signal condition
Big device connection, the signal condition amplifier are connect with the wireless transmitter module.
Preferably, the pressure sensor is silicon piezoresistance type pressure sensor.
The conducting slip ring is disc type via precise conductive slip ring.
Further, the wireless transmitter module includes power voltage step down module, signal acquisition module and low-power consumption bluetooth mould
Block, the output end of the pressure sensor are connect with the signal acquisition module, the signal acquisition module and the low-power consumption
Bluetooth module connects, and the power voltage step down module is connect with the signal acquisition module.Bluetooth wireless mode is a kind of preferred
Scheme, it is of course also possible to select other wireless transmission methods.
The pressure sensor output is current signal, and a measurement resistance is accessed in sensor loop, is adopted with signal
Collect module and measure the voltage signal at resistance both ends, and voltage analog signal is converted into pressure on the number signal.Pressure signal is adopted
After collection module is transported to low-power consumption bluetooth, pressure signal is wirelessly sent to wireless receiver (bluetooth by bluetooth module
Receiving device).External 24V voltages are reduced to by 10V using power voltage step down module, are powered to signal acquisition module.It is adopted with signal
Collect the included 5V voltages of module to power to low-power consumption bluetooth.
Preferably, the microcontroller of the signal acquisition module is the ATMEGA328 of atmel corp.
The SoC System on Chip/SoC of the low-power consumption bluetooth module is the CC2541 of TI.
The power voltage step down chip is LM2596S.
The beneficial effects of the utility model are mainly manifested in：Realize the fluid pressure to polishing regional aim fixed point
Power is measured in real time, the kinking problem of sensor conductor and sensor installation when not only solving polishing tool disc spins
Dynamic equilibrium problems caused by polishing tool disk, accuracy are higher.
Description of the drawings
Fig. 1 is the structural schematic diagram for surging and pressing suspension polishing Fluid pressure wireless acquisition system.
Fig. 2 is the scheme of installation of the utility model pressure sensor.
Fig. 3 is the scheme of installation of the utility model conducting slip ring, compartment and wireless transmitter module.
Fig. 4 is the circuit diagram of the utility model wireless transmitter module and pressure sensor.
In figure, 1- intermediate support plates, 2- containers, 3- distance measuring sensors, 4- pressure sensors, 5- polishing tools disk, 6- are flat
Weighing apparatus regulation stud, 7- wireless transmissions element module, 8- compartments, 9- conducting slip rings, 10- ball spline shafts, 11- driving wheels, 12- are watched
Take motor, 13- vernier knobs, 14- piezoelectric types load cell, 15- axle sleeves, 16- driven wheels, 17- movable plates, 18- wireless receivings
Device.
Specific implementation mode
The utility model is further described below in conjunction with the accompanying drawings.
Referring to Fig.1~Fig. 3, one kind, which is surged, presses suspension polishing Fluid pressure wireless acquisition system, including pressure sensor 4,
Balance adjustment stud 6, signal condition amplifier, compartment 8, conducting slip ring 9, wireless transmitter module 7, wireless receiver 18.It throws
The parallel zone of 5 lower section of optical tool disk is provided with groove, and workpiece is pasted in groove.By one of location of workpiece together with buffer
Have 5 trepanning of disk, the pressure sensor 4 measured for hydraulic pressure is fixed on the location of workpiece from top to bottom.In the workpiece position
On the position for setting symmetrical side, using same way stable equilibrium regulation stud 6.A waterproof is fixed above polishing tool disk
Box 8, the fixed wireless transmitting module 7 in compartment 8.Conducting slip ring is installed on ball spline shaft, the inner ring of conducting slip ring with
Ball spline shaft coordinates, and outer shroud is fixed on intermediate support plate bottom.The connecting line and wireless transmitter module of the inner ring of conducting slip ring
It is connected, the connecting line of the outer shroud of conducting slip ring is connected with 24V power cords and ground wire.Pressure sensor 4 and wireless transmission
Module 7 is connected.
The pressure sensor 4 is silicon piezoresistance type pressure sensor.
The conducting slip ring 7 is disc type via precise conductive slip ring.
The balance adjustment stud 6 is equal with the quality of pressure sensor 4 and rotary inertia.
8 center opening of the compartment, is fixed on polishing tool disk, and concentric with polishing tool disk 5, around compartment
There is high wall surface, when preventing from processing in liquid splash to box, wireless transmitter module 7 is protected not to be short-circuited.
As shown in Figure 1, the utility model is realized in pressure suspension polishing equipment surging, so introducing first used
It surges and presses suspension polishing equipment and operation principle.Device therefor include servo motor 12, belt wheel 11 and 16, ball spline shaft 10,
Polishing tool disk 5, container 2, movable plate 17, intermediate support plate 1 and guide rail.Polishing tool disk 5 connects ball spline by shaft coupling
Axis 10, ball spline shaft 10 are fixed on movable plate 17, and movable plate 17 is under the drive of the linear guide, ball-screw and stepper motor
It can vertically move up and down；5 lower end of polishing tool disk is equipped with container 2.When polishing, servo motor 10 passes through installation
Synchronous belt on belt wheel 9 and belt wheel 14 drives ball spline shaft 8 and 5 high-speed rotation of polishing tool disk.It is supported in modules such as springs
Disappear after the gravity such as movable plate 15, ball spline shaft 8, polishing tool disk 5, when polishing tool disk 5 rotates, 5 bottom surface of polishing tool disk
It can be acted on by hydraulic pressure, adaptively can float and sink.
As shown in figure 4, the wireless transmitter module 7 includes power voltage step down module 71, signal acquisition module 72 and low-power consumption
Bluetooth module 73.A measurement resistance R is accessed in pressure sensor circuit, and resistance both ends are measured with signal acquisition module 72
Voltage signal, and voltage signal is converted into pressure signal.Pressure signal is transported to low-power consumption bluetooth 73, wirelessly will
Pressure signal is sent to wireless receiver (Bluetooth recipient devices).External 24V voltages are reduced to using power voltage step down module 71
10V powers to signal acquisition module 72.5V voltages are carried with signal acquisition module 72 to power to low-power consumption bluetooth module 73.
The microcontroller of the signal acquisition module is the ATMEGA328 of atmel corp.
The SoC (System on Chip/SoC) of the low-power consumption bluetooth module is the CC2541 of TI companies.
The power voltage step down chip is LM2596S.
When polishing, external power supply is powered by conducting slip ring 9 to pressure sensor 4, the induction on pressure sensor 4
Element experiences the pressure change of the polishing fluid of workpiece area, and the voltage for being connected on resistance both ends in pressure acquisition circuit becomes
Change.Signal acquisition chip 72 in wireless transmitter module 7 will measure voltage signal and be converted into pressure on the number signal.Wireless transmission mould
Pressure signal is wirelessly transmitted to wireless receiver by Bluetooth chip 73 in the block.
Above-described embodiment is the preferred embodiment of the utility model, is not the limit to technical solutions of the utility model
System, as long as without the technical solution that creative work can be realized on the basis of the above embodiments, is regarded as falling into
In the rights protection scope of the utility model patent.
Claims (9)
1. one kind is surged, pressure suspension polishing Fluid pressure wireless acquisition system, surges and presses in suspension polishing equipment, polishing tool disk
The parallel zone of lower section is provided with groove, and workpiece is pasted in the groove, and the polishing tool disk is mounted on ball spline shaft
Lower end；It is characterized in that：The system comprises pressure sensor, balance adjustment stud, compartment, wireless transmitter modules and wireless
Receiver；By one of location of workpiece together with polishing tool disk trepanning, certainly by the pressure sensor measured for hydraulic pressure
It is fixed on the location of workpiece under above, on the position of the symmetrical side of the location of workpiece, is adjusted using same way stable equilibrium
Stud, the balance adjustment stud are equal with pressure sensor quality and rotary inertia；One is fixed above polishing tool disk
Compartment, the fixed wireless transmitting module in the compartment, the pressure sensor is connected with wireless transmitter module, described
Wireless transmitter module coordinates with the wireless receiver.
2. the pressure suspension polishing Fluid pressure wireless acquisition system as described in claim 1 that surges, it is characterised in that：The system
Also packet conducting slip ring installs conducting slip ring on ball spline shaft, and inner ring and the ball spline shaft of the conducting slip ring coordinate, institute
The outer shroud for stating conducting slip ring is fixed on intermediate support plate bottom；The connecting line and wireless transmitter module of the inner ring of the conducting slip ring
It is connected, the connecting line of the outer shroud of the conducting slip ring is connected with 24V power cords and ground wire.
3. the pressure suspension polishing Fluid pressure wireless acquisition system as claimed in claim 1 or 2 that surges, it is characterised in that：It is described
System further includes signal condition amplifier, and the pressure sensor is connect with the signal condition amplifier, the signal condition
Amplifier is connect with the wireless transmitter module.
4. the pressure suspension polishing Fluid pressure wireless acquisition system as claimed in claim 1 or 2 that surges, it is characterised in that：It is described
Pressure sensor is silicon piezoresistance type pressure sensor.
5. the pressure suspension polishing Fluid pressure wireless acquisition system as claimed in claim 2 that surges, it is characterised in that：The conduction
Slip ring is disc type via precise conductive slip ring.
6. the pressure suspension polishing Fluid pressure wireless acquisition system as claimed in claim 1 or 2 that surges, it is characterised in that：It is described
Wireless transmitter module includes power voltage step down module, signal acquisition module and low-power consumption bluetooth module, the pressure sensor it is defeated
Outlet is connect with the signal acquisition module, and the signal acquisition module is connect with the low-power consumption bluetooth module, the power supply
Voltage reduction module is connect with the signal acquisition module.
7. the pressure suspension polishing Fluid pressure wireless acquisition system as claimed in claim 6 that surges, it is characterised in that：The signal
The microcontroller of acquisition module is the ATMEGA328 of atmel corp.
8. the pressure suspension polishing Fluid pressure wireless acquisition system as claimed in claim 6 that surges, it is characterised in that：The low work(
The SoC System on Chip/SoC for consuming bluetooth module is the CC2541 of TI.
9. the pressure suspension polishing Fluid pressure wireless acquisition system as claimed in claim 6 that surges, it is characterised in that：The power supply
Decompression chip is LM2596S.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721774308.7U CN207840872U (en) | 2017-12-19 | 2017-12-19 | Pressure of surging suspension polishing Fluid pressure wireless acquisition system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721774308.7U CN207840872U (en) | 2017-12-19 | 2017-12-19 | Pressure of surging suspension polishing Fluid pressure wireless acquisition system |
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| Publication Number | Publication Date |
|---|---|
| CN207840872U true CN207840872U (en) | 2018-09-11 |
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ID=63421174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721774308.7U Active CN207840872U (en) | 2017-12-19 | 2017-12-19 | Pressure of surging suspension polishing Fluid pressure wireless acquisition system |
Country Status (1)
| Country | Link |
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| CN (1) | CN207840872U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109333360A (en) * | 2018-10-15 | 2019-02-15 | 北京工业大学 | A kind of thinned grinding force on-line measurement device and method of wafer |
| CN110497317A (en) * | 2019-07-25 | 2019-11-26 | 杭州电子科技大学 | A kind of constant-voltage equipment suitable for automatically grinding equipment |
-
2017
- 2017-12-19 CN CN201721774308.7U patent/CN207840872U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109333360A (en) * | 2018-10-15 | 2019-02-15 | 北京工业大学 | A kind of thinned grinding force on-line measurement device and method of wafer |
| CN109333360B (en) * | 2018-10-15 | 2020-07-03 | 北京工业大学 | Online measuring device and method for wafer thinning grinding force |
| CN110497317A (en) * | 2019-07-25 | 2019-11-26 | 杭州电子科技大学 | A kind of constant-voltage equipment suitable for automatically grinding equipment |
| CN110497317B (en) * | 2019-07-25 | 2024-05-03 | 杭州电子科技大学 | Constant pressure device suitable for automatic polishing equipment |
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