CN107932201A - Pressure of surging suspension polishing point fluid pressure detecting system - Google Patents
Pressure of surging suspension polishing point fluid pressure detecting system Download PDFInfo
- Publication number
- CN107932201A CN107932201A CN201711370134.2A CN201711370134A CN107932201A CN 107932201 A CN107932201 A CN 107932201A CN 201711370134 A CN201711370134 A CN 201711370134A CN 107932201 A CN107932201 A CN 107932201A
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- Prior art keywords
- slip ring
- pressure
- conducting slip
- pressure sensor
- workpiece
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
One kind, which is surged, presses suspension polishing point fluid pressure detecting system, and in pressure of surging suspension polishing equipment, the parallel zone below polishing tool disk is provided with groove, and workpiece is pasted with groove, and the polishing tool disk is installed on the lower end of ball spline shaft；System includes pressure sensor, balance adjustment stud and conducting slip ring, and by one of location of workpiece together with polishing tool disk perforate, the pressure sensor for hydraulic pressure measurement is fixed on the location of workpiece from top to bottom；It is equal with pressure sensor quality and rotary inertia using same way stable equilibrium regulation stud, balance adjustment stud on the position of the symmetrical side of the location of workpiece；Conducting slip ring is installed on ball spline shaft, the inner ring of conducting slip ring coordinates with ball spline shaft, the outer shroud of conducting slip ring is fixed on intermediate support plate bottom, and the connecting line of the inner ring of conducting slip ring is connected with pressure sensor, and the connecting line of the outer shroud of conducting slip ring is data output end.Present invention kind accuracy is higher.
Description
Technical field
The present invention relates to non-contact polishing fluids pressure sensing arts, surge in particular to one kind and press suspension polishing
The detecting system of Fluid pressure.
Background technology
Pressure of surging suspension polishing method is to be applied to a kind of polishing method of the low injured surface processing of atom level ultra-smooth.
During pressure of surging suspension polishing, polishing tool disk rotates under the driving of servomotor and drives liquid to flow, the liquid of flowing
Know from experience the sample generation fluid pressure effect to pasting face of trying to get to the heart of a matter in polishing tool, the size of the fluid pressure and distribution are to sample
Surfacing removal rate and surface uniformity important.Therefore, to the pressure of workpiece area in polishing processing
Measurement is one of research very effective means of its mechanism of action.
A kind of existing hydraulic pressure, buoyancy and floating distance detection method, pressure sensor are fixed on container bottom,
Same circumferential directions four, sensor radial position is corresponding with sample patch location.When biography is skimmed in polishing tool sweeping
Sensor position, sensor collect pressure signal with certain sample frequency.The pressure signal measured is defeated by data collecting card
It is sent in computer and saves.Due to the polishing tool in the patented method try to get to the heart of a matter face flow passage structure be it is periodic,
It is also cyclically-varying to measure the pressure signal come.It is not mesh although pressure time change has some reference value
Mark the pressure of fixing point (location of workpiece).And sensor arrangement, in container bottom, what is measured is the liquid pressure of the nearly bottom of container
Power, due to the presence of polishing fluid thickness, and there are certain deviation for the pressure being actually needed at the workpiece patch of measurement.
The content of the invention
In order to overcome the shortcomings of that the accuracy of existing polishing fluids pressure detecting is relatively low, the present invention provides a kind of accuracy
The higher pressure suspension polishing point fluid pressure detecting system that surges, to collect the pressure of target fixing point (location of workpiece).
The technical solution adopted by the present invention to solve the technical problems is：
One kind, which is surged, presses suspension polishing point fluid pressure detecting system, in pressure of surging suspension polishing equipment, polishing tool
Parallel zone below disk is provided with groove, and workpiece is pasted with the groove, and the polishing tool disk is installed on ball spline shaft
Lower end；The system comprises pressure sensor, balance adjustment stud and conducting slip ring, by one of location of workpiece together with throwing
Optical tool disk perforate, the pressure sensor for hydraulic pressure measurement are fixed on the location of workpiece from top to bottom；In the workpiece position
On the position for putting symmetrical side, using same way stable equilibrium regulation stud, balance adjustment stud and pressure sensor quality
It is equal with rotary inertia；Conducting slip ring is installed on ball spline shaft, inner ring and the ball spline shaft of conducting slip ring coordinate, conductive
The outer shroud of slip ring is fixed on intermediate support plate bottom, and the connecting line of the inner ring of conducting slip ring is connected with pressure sensor, conductive
The connecting line of the outer shroud of slip ring is data output end.
Further, the system also includes signal condition amplifier, the pressure sensor to amplify with the signal condition
Device connects, and the signal condition amplifier is connected by conducting wire with conducting slip ring.
Further, the data output end is connected with data collecting card, and the data collecting card is connected with computer.
Either：The data output end is connected with pressure display instrument device.
Preferably, the pressure sensor is silicon piezoresistance type pressure sensor.
The conducting slip ring is disc type via precise conductive slip ring.
Further, the polishing tool disk is located in container, and the container bottom installation is used to measure polishing tool disk
The inductance type distance measuring sensor of the distance between container.
Beneficial effects of the present invention are mainly manifested in：Realize to the Fluid pressure of polishing regional aim fixing point into
Row measurement in real time, solves the problems, such as the kinking of sensor conductor during polishing tool disc spins, and sensor is installed on buffer
Have dynamic equilibrium problems caused by disk, accuracy is higher.
Brief description of the drawings
Fig. 1 is the structure diagram for surging and pressing suspension polishing point fluid pressure detecting system.
Fig. 2 is the scheme of installation of pressure sensor of the present invention.
Fig. 3 is the scheme of installation of conducting slip ring of the present invention
In figure, 1- intermediate support plates, 2- containers, 3- distance measuring sensors, 4- pressure sensors, 5- polishing tools disk, 6- are put down
Weigh regulation stud, 7- conducting slip rings, 8- ball spline shafts, 9- driving wheels, 10- servomotors, 11- vernier knobs, 12- piezoelectric types
Force cell, 13- axle sleeves, 14- driven wheels, 15- movable plates, 16- capture cards, 17- computers.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings.
With reference to Fig. 1~Fig. 3, one kind, which is surged, presses suspension polishing point fluid pressure detecting system, including pressure sensor 4,
Balance adjustment stud 6, signal condition amplifier, conducting slip ring 7, capture card 16 and computer 17.Put down the lower section of polishing tool disk 5
Row region is provided with groove, and workpiece is pasted with groove.By one of location of workpiece together with 5 perforate of polishing tool disk, will be used for
The pressure sensor 4 of hydraulic pressure measurement is fixed on the workpiece position of opening from top to bottom.In the symmetrical side of the location of workpiece
On position, using same way stable equilibrium regulation stud 6.Conducting slip ring 7 is installed on ball spline shaft 8, conducting slip ring
Inner ring 71 coordinates with ball spline shaft, and outer shroud 72 is fixed on 1 bottom of intermediate support plate.The connecting line of the inner ring 71 of conducting slip ring with
Pressure sensor 4 is connected, and the connecting line of outer shroud 72 is connected with capture card 16.
The pressure sensor 4 is silicon piezoresistance type pressure sensor.
The conducting slip ring 7 is disc type via precise conductive slip ring.
The balance adjustment stud 6 is equal with the quality and rotary inertia of pressure sensor 4.
Before polishing, the distance between polishing tool disk 5 and container 2 are adjusted by stepper motor and roller screw, by
Inductance type distance measuring sensor 3 installed in 2 bottom of container measures distance between the two.
The present embodiment surge pressure suspension polishing equipment on realize, so first place of matchmakers liquid hydrodynamic floating throw
Light device.Device therefor include servomotor 10, belt wheel 9 and 14, ball spline shaft 8, polishing tool disk 5, container 2, movable plate 15,
Intermediate support plate 1 and guide rail.Polishing tool disk 5 connects ball spline shaft 8 by shaft coupling, and ball spline shaft 8 is fixed on movable plate
On 15, and movable plate 15 can vertically move up and down under the drive of line slideway, ball-screw and stepper motor；Polishing
5 lower end of tool shelf is equipped with container 2.
During polishing, servomotor 10 drives ball spline shaft 8 by the synchronous belt on belt wheel 9 and belt wheel 14
With 5 high-speed rotation of polishing tool disk.After the components such as spring offset the gravity such as movable plate 15, ball spline shaft 8, polishing tool disk 5,
When polishing tool disk 5 rotates, 5 bottom surface of polishing tool disk can be acted on be subject to hydraulic pressure, adaptively can be floated and be sunk.
Meanwhile the sensing element on pressure sensor 4 experiences the pressure change of the polishing fluid of workpiece area, measuring signal, which is nursed one's health, puts
After big, by conducting slip ring 7, then pressure display instrument device is transferred data to, or calculating is transported to by data collecting card 16
Save, polishing fluid dynamic pressure in polishing region can be measured in real time in machine 17.
The pressure detecting system of the present embodiment, to collect the pressure of target fixing point (location of workpiece).This method target
Fixing point refers not only to the location of workpiece, further includes any other position for needing to measure in polishing tool dish structure runner.Cause
It is even more important with respect to other positions for the location of workpiece, so the present invention selection location of workpiece is used as explanation.
Above-described embodiment is presently preferred embodiments of the present invention, is not the limitation to technical solution of the present invention, as long as
The technical solution that can be realized without creative work on the basis of above-described embodiment, is regarded as falling into patent of the present invention
Rights protection scope in.
Claims (7)
1. one kind is surged, pressure suspension polishing point fluid pressure detecting system, surges and presses in suspension polishing equipment, polishing tool disk
The parallel zone of lower section is provided with groove, and workpiece is pasted with the groove, and the polishing tool disk is installed on ball spline shaft
Lower end；It is characterized in that：The system comprises pressure sensor, balance adjustment stud and conducting slip ring, by one of workpiece
Together with polishing tool disk perforate, the pressure sensor for hydraulic pressure measurement is fixed on the location of workpiece from top to bottom for position；
On the position of the symmetrical side of the location of workpiece, using same way stable equilibrium regulation stud, balance adjustment stud and pressure
Sensor mass and rotary inertia are equal；Conducting slip ring, the inner ring and ball spline of conducting slip ring are installed on ball spline shaft
Axis coordinates, and the outer shroud of conducting slip ring is fixed on intermediate support plate bottom, the connecting line and pressure sensor of the inner ring of conducting slip ring
It is connected, the connecting line of the outer shroud of conducting slip ring is data output end.
2. the pressure suspension polishing point fluid pressure detecting system as claimed in claim 1 that surges, it is characterised in that：The system
Signal condition amplifier is further included, the pressure sensor is connected with the signal condition amplifier, the signal condition amplification
Device is connected by conducting wire with conducting slip ring.
3. the pressure suspension polishing point fluid pressure detecting system as claimed in claim 2 that surges, it is characterised in that：The data
Output terminal is connected with data collecting card, and the data collecting card is connected with computer.
4. the pressure suspension polishing point fluid pressure detecting system as claimed in claim 2 that surges, it is characterised in that：The data
Output terminal is connected with pressure display instrument device.
5. the pressure suspension polishing point fluid pressure detecting system that surges as described in one of Claims 1 to 4, it is characterised in that：
The pressure sensor is silicon piezoresistance type pressure sensor.
6. the pressure suspension polishing point fluid pressure detecting system that surges as described in one of Claims 1 to 4, it is characterised in that：
The conducting slip ring is disc type via precise conductive slip ring.
7. the pressure suspension polishing point fluid pressure detecting system that surges as described in one of Claims 1 to 4, it is characterised in that：
The polishing tool disk is located in container, and 2 bottom of the container installation is used to measure the distance between polishing tool disk and container
Inductance type distance measuring sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711370134.2A CN107932201A (en) | 2017-12-19 | 2017-12-19 | Pressure of surging suspension polishing point fluid pressure detecting system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711370134.2A CN107932201A (en) | 2017-12-19 | 2017-12-19 | Pressure of surging suspension polishing point fluid pressure detecting system |
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| Publication Number | Publication Date |
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| CN107932201A true CN107932201A (en) | 2018-04-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711370134.2A Pending CN107932201A (en) | 2017-12-19 | 2017-12-19 | Pressure of surging suspension polishing point fluid pressure detecting system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112643529A (en) * | 2020-12-16 | 2021-04-13 | 华虹半导体(无锡)有限公司 | Internal and external pressure balance structure of CMP equipment |
| CN113252234A (en) * | 2021-07-15 | 2021-08-13 | 成都辰迈科技有限公司 | Real-time monitoring device and method for fluid pressure |
| CN113977451A (en) * | 2021-10-25 | 2022-01-28 | 长鑫存储技术有限公司 | Detection system and detection method of semiconductor equipment |
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| CN103331691A (en) * | 2013-05-22 | 2013-10-02 | 浙江工业大学 | Floating disc suspension polishing device |
| CN105345663A (en) * | 2015-11-25 | 2016-02-24 | 厦门理工学院 | Grinding wheel device capable of monitoring grinding working conditions in real time |
| CN105382697A (en) * | 2015-12-09 | 2016-03-09 | 浙江工业大学 | Detection method for hydrodynamic pressure, buoyancy and upward-floating distance |
| CN105397572A (en) * | 2015-12-09 | 2016-03-16 | 浙江工业大学 | Hydrodynamic float polishing device |
| CN105397573A (en) * | 2015-12-09 | 2016-03-16 | 浙江工业大学 | Hydrodynamic suspension polishing device based on hydraulic mechanism |
| CN105538046A (en) * | 2015-12-09 | 2016-05-04 | 浙江工业大学 | Hydraulic pressure suspension polishing method and device thereof |
| CN207788448U (en) * | 2017-12-19 | 2018-08-31 | 浙江工业大学 | Pressure of surging suspension polishing point fluid pressure detecting system |
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2017
- 2017-12-19 CN CN201711370134.2A patent/CN107932201A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103331691A (en) * | 2013-05-22 | 2013-10-02 | 浙江工业大学 | Floating disc suspension polishing device |
| CN105345663A (en) * | 2015-11-25 | 2016-02-24 | 厦门理工学院 | Grinding wheel device capable of monitoring grinding working conditions in real time |
| CN105382697A (en) * | 2015-12-09 | 2016-03-09 | 浙江工业大学 | Detection method for hydrodynamic pressure, buoyancy and upward-floating distance |
| CN105397572A (en) * | 2015-12-09 | 2016-03-16 | 浙江工业大学 | Hydrodynamic float polishing device |
| CN105397573A (en) * | 2015-12-09 | 2016-03-16 | 浙江工业大学 | Hydrodynamic suspension polishing device based on hydraulic mechanism |
| CN105538046A (en) * | 2015-12-09 | 2016-05-04 | 浙江工业大学 | Hydraulic pressure suspension polishing method and device thereof |
| CN207788448U (en) * | 2017-12-19 | 2018-08-31 | 浙江工业大学 | Pressure of surging suspension polishing point fluid pressure detecting system |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112643529A (en) * | 2020-12-16 | 2021-04-13 | 华虹半导体(无锡)有限公司 | Internal and external pressure balance structure of CMP equipment |
| CN113252234A (en) * | 2021-07-15 | 2021-08-13 | 成都辰迈科技有限公司 | Real-time monitoring device and method for fluid pressure |
| CN113252234B (en) * | 2021-07-15 | 2021-09-21 | 成都辰迈科技有限公司 | Real-time monitoring device and method for fluid pressure |
| CN113977451A (en) * | 2021-10-25 | 2022-01-28 | 长鑫存储技术有限公司 | Detection system and detection method of semiconductor equipment |
| CN113977451B (en) * | 2021-10-25 | 2023-08-25 | 长鑫存储技术有限公司 | Semiconductor device detection system and detection method |
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