CN205342813U - Detection apparatus for hydraulic pressure , buoyancy and come -up distance - Google Patents
Detection apparatus for hydraulic pressure , buoyancy and come -up distance Download PDFInfo
- Publication number
- CN205342813U CN205342813U CN201521015890.XU CN201521015890U CN205342813U CN 205342813 U CN205342813 U CN 205342813U CN 201521015890 U CN201521015890 U CN 201521015890U CN 205342813 U CN205342813 U CN 205342813U
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- buoyancy
- container
- distance
- spline shaft
- hydraulic pressure
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model provides a detection apparatus for hydraulic pressure, buoyancy and come -up distance, surging of adopting presses throwing optical equipment to include polishing dish, container, ball spline shaft, movable plate and curb plate, and the polishing dish passes through coupling joint ball spline shaft, and ball spline shaft fixes on the movable plate, and vertical direction up -and -down motion can be followed to the movable plate under linear guide, ball and step motor's drive, the polishing lower extreme is equipped with the container, the utility model discloses the little pressure detection that has realized promptly in clearance has realized again that the distance detects at the micron order, the come -up volume of rotatory polishing dish detects the come -up volume detection that turns into the movable plate at a high speed, has reduced the detection error that polishing dish surface irregularities arouses, the measuring of set up hydraulic pressure respectively, going up buoyancy and clearance distance and unsteady distance can contrast through the match experimental result, guarantees the accuracy nature of experiment.
Description
Technical field
The present invention relates to a kind of precise polished technical field, in particular, relate to the detecting device of a kind of hydraulic pressure, buoyancy and floating distance.
Background technology
In recent years, flourish along with optical field and microelectronics domain and correlation technique thereof, the surface quality requirements of material requested is more and more higher, wherein that the roughness requirements of element surface is more harsh.Noncontact finishing method arises at the historic moment, and it is widely used in the preparation of super-smooth surface, and namely roughness rms is less than 1nm, and has the preparation on the surface of higher surface precision and relatively low surface waviness.
The development trend of present stage noncontact polishing is higher precision, higher efficiency and processing and testing integrated, but common noncontact polishing, as floating polishing and dynamic pressure float off polishing, surge pressure detection technique and polishing clearance detection technique not complete in their equipment, the machining status of workpiece is difficult to learn, reliable working condition and machined parameters cannot ensure, thus the workpiece surface quality after processing is difficult to break through.
Summary of the invention
The purpose of the present invention is that and designs the detecting device that a kind of liquid collecting dynamic pressure, buoyancy and floating distance are integrated in order to solve the problems referred to above, to meet noncontact polishing technology growth requirement, provides for client and reliably polishes work information intuitively.
The present invention is achieved through the following technical solutions above-mentioned purpose: the detecting device of a kind of hydraulic pressure, buoyancy and floating distance, the pressure polissoir that surges adopted includes polishing disk, container, ball spline shaft, dynamic plate and side plate, polishing disk connects ball spline shaft by shaft coupling, ball spline shaft is fixed on dynamic plate, and dynamic plate can vertically move up and down under the drive of line slideway, ball-screw and motor；Polishing lower end is provided with container；
The silicon piezoresistance type pressure sensor measured for buoyancy is fixed on container bottom, and uniform four on the same circumference of container bottom, and this circumference is corresponding with the workpiece patch location bottom polishing disk；
Piezoelectric type force cell for hydraulic pressure detection is arranged on the top of ball spline shaft, and piezoelectric type force cell is connected with micrometer knob, can regulating the upper-lower position of piezoelectric type force cell thus realizing the contact of piezoelectric type force cell and ball spline shaft and separating by regulating micrometer knob, piezoelectric type force cell is connected with digital display meter；
Be fixed on container bottom for the inductance type transducer of detector gap distance, and along the same circumference of container bottom uniform three inductance type transducers；
Grating reading head for detecting floating distance is arranged on dynamic plate, and utilize step motor drive ball-screw, and drive dynamic plate and grating reading head to move up and down, line slideway plays support and gearing, digital display meter is connected with grating reading head, is shown the motion of grating reading head by digital display meter.
Further, described silicon piezoresistance type pressure sensor adopts embedded structure to be distributed on the bottom of container.
Further, described inductance type transducer adopts embedded structure to be arranged on the bottom of described container.
Further, described inductance type transducer passes through capture card by data acquisition to industrial computer.
The beneficial effects of the present invention is: not only the present invention is little in micron order gap achieves pressure detecting but also achieve distance detection；The float-amount of the polishing disk of high speed rotating is detected the float-amount detection being converted into dynamic plate, reduces the detection error that polishing disk surface irregularity causes；It is respectively provided with hydraulic pressure, buoyancy and clearance distance and the detection of floating distance, it is possible to contrasted by matching experimental result, it is ensured that the accuracy of experiment.
Accompanying drawing explanation
Fig. 1 is that lifting unit of the present invention divides grating scale schematic layout pattern.
Fig. 2 is the structural representation of the detecting device of a kind of hydraulic pressure of the present invention, buoyancy and floating distance.
Fig. 3 is the scheme of installation of piezoelectric type force cell of the present invention.
Fig. 4 is inventive container bottom sensor layout.
Fig. 5 is grating scale structural representation of the present invention.
In figure, 1-scale grating, 2-grating reading head, 3-intermediate support plate, 4-guide rail, 5-ball-screw, 6-motor, 7-digital display meter, 8-silicon piezoresistance type pressure sensor, 9-inductance type transducer, 10-container, 11-polishing disk, 12-ball spline shaft, 13-drivewheel, 14-servomotor, 15-vernier knob, 16-piezoelectric type force cell, 17-axle sleeve, 18-driven pulley, 19-move plate, 20-capture card, 21-industrial computer, 22-micrometer knob, 23-deep groove ball bearing, 24-thrust ball bearing.
Detailed description of the invention
Below in conjunction with accompanying drawing, the invention will be further described:
Power detection is realized by silicon piezoresistance type pressure sensor 8 and piezoelectric type force cell 16, they highly sensitive, drift is little, reproducible and structure is small.Four silicon piezoresistance type pressure sensors 8 being distributed on container bottom adopt embedded structure, can meet the requirement of dynamometry under minim gap.Piezoelectric type force cell 16 is arranged on one end of splined shaft, detection buoyancy suffered by polishing disk；Distance detection is made up of three embedded type inductance type transducers 9 and grating scale.Being distributed in the inductance type transducer of container bottom, its detecting distance is little of 0～1mm, and operating frequency is up to thousand hertz, it is possible to meet the testing requirement of polishing clearance.Grating ruler reading head is connected with dynamic plate, and accuracy of detection, up to 0.5 μm, is entirely capable of meeting the testing requirement of float-amount.
Fig. 1 is that lifting unit divides grating scale schematic layout pattern, grating reading head 2 is connected with intermediate support plate 3, scale grating 1 two ends are fixed, motor 6 drives ball-screw 5, intermediate support plate 3 and grating reading head 2 is driven to move up and down, 4, guide rail supports and gearing, is shown that by digital display meter 7 motion of grating ruler reading head 2, motion reach to specify position to complete just location.
Fig. 2 is polishing component sensor placement schematic diagram, before polishing starts, first regulates vernier knob 15, plate 19 is made to drive ball spline shaft 12 to move together with polishing disk 11, the inductance type transducer 9 of bottom is by capture card 20, by data acquisition to industrial computer 21, arrives specific bit and postpones stopping.When being polished, servomotor 14 is by belt wheel 13, 18 transmission moments of torsion, axle sleeve 17 and ball spline shaft 12 is driven to move, because polishing disk 11 and ball spline shaft 12 are fastenedly connected, therefore polishing disk 11 is also driven to rotate, the hydraulic pressure formed between polishing disk 11 and container is detected by the silicon piezoresistance type pressure sensor 8 bottom container 10, buoyancy suffered by polishing disk is detected by the piezoelectric type force cell 16 of the ball spline shaft other end, in the same collected industrial computer 21 of data, now, polishing disk 11 is floated certain distance vertically by buoyancy, this distance is gathered by grating ruler reading head 2, shown by digital display meter 7, inductance type transducer 9 collects corresponding data equally, the data of Comprehensive Evaluation digital display meter 7 data and inductance type transducer 9, draw optimum conclusion.
Fig. 3 is the scheme of installation of piezoelectric type force cell 16, the end of ball spline shaft 12 is equipped with deep groove ball bearing 23 and thrust ball bearing 24, one end of described thrust ball bearing 24 contacts with piezoelectric type force cell 16, rotates micrometer knob 22 and regulates the contact force size between force cell 16 and thrust ball bearing 24.The operation principle of piezoelectric type force cell 16 determines its response and needs certain deformation, finds through test, and this deformation necessary force has no effect on the floating of polishing disk 11, and its model is LCFD-5, range 50N.
Fig. 4 is container bottom sensor placement, arranging three inductance type transducers 9 along centrage, be uniformly distributed along the circumference four silicon piezoresistance type pressure sensors 8, and this circumference is corresponding with workpiece patch location on polishing disk, make sensor arranged apart as far as possible, reduce interfering between sensor.Inductance type transducer model used by the present invention is IWRM04U9701/S05, and its detecting distance is 0～1mm, and sensitivity is less than 5 μm, and response time is less than 0.5ms；Silicon piezoresistance type pressure sensor model used is CYG506, and range is 100kPa.
Fig. 5 is grating scale structural representation, by the relative motion between grating reading head 2 and scale grating 1, changes the width of Moire fringe, thus transmitting displacement parameter.The present invention adopts SINOK300 grating scale, its good operating stability, and certainty of measurement is high, and resolution is up to 0.5 μm.
Above-described embodiment is presently preferred embodiments of the present invention; it it is not the restriction to technical solution of the present invention; as long as without the technical scheme that creative work can realize on the basis of above-described embodiment, be regarded as falling within the scope of the rights protection of patent of the present invention.
Claims (4)
1. the detecting device of a hydraulic pressure, buoyancy and floating distance, the pressure polissoir that surges adopted includes polishing disk, container, ball spline shaft, dynamic plate and side plate, polishing disk connects ball spline shaft by shaft coupling, ball spline shaft is fixed on dynamic plate, and dynamic plate can vertically move up and down under the drive of line slideway, ball-screw and motor；Polishing lower end is provided with container,
The silicon piezoresistance type pressure sensor measured for buoyancy is fixed on container bottom, and uniform four on the same circumference of container bottom, and this circumference is corresponding with the workpiece patch location bottom polishing disk；
Piezoelectric type force cell for hydraulic pressure detection is arranged on the top of ball spline shaft, and piezoelectric type force cell is connected with micrometer knob, can regulating the upper-lower position of piezoelectric type force cell thus realizing the contact of piezoelectric type force cell and ball spline shaft and separating by regulating micrometer knob, piezoelectric type force cell is connected with digital display meter；
Be fixed on container bottom for the inductance type transducer of detector gap distance, and along the same circumference of container bottom uniform three inductance type transducers；
Grating reading head for detecting floating distance is arranged on dynamic plate, and utilize step motor drive ball-screw, and drive dynamic plate and grating reading head to move up and down, line slideway plays support and gearing, digital display meter is connected with grating reading head, is shown the motion of grating reading head by digital display meter.
2. the detecting device of a kind of hydraulic pressure according to claim 1, buoyancy and floating distance, it is characterised in that: described silicon piezoresistance type pressure sensor adopts embedded structure to be distributed on the bottom of container.
3. the detecting device of a kind of hydraulic pressure according to claim 1, buoyancy and floating distance, it is characterised in that: described inductance type transducer adopts embedded structure to be arranged on the bottom of described container.
4. the detecting device of a kind of hydraulic pressure according to claim 1, buoyancy and floating distance, it is characterised in that: described inductance type transducer passes through capture card by data acquisition to industrial computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521015890.XU CN205342813U (en) | 2015-12-09 | 2015-12-09 | Detection apparatus for hydraulic pressure , buoyancy and come -up distance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521015890.XU CN205342813U (en) | 2015-12-09 | 2015-12-09 | Detection apparatus for hydraulic pressure , buoyancy and come -up distance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205342813U true CN205342813U (en) | 2016-06-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521015890.XU Expired - Fee Related CN205342813U (en) | 2015-12-09 | 2015-12-09 | Detection apparatus for hydraulic pressure , buoyancy and come -up distance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205342813U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105382697A (en) * | 2015-12-09 | 2016-03-09 | 浙江工业大学 | Detection method for hydrodynamic pressure, buoyancy and upward-floating distance |
| CN115067401A (en) * | 2021-07-02 | 2022-09-20 | 黄山优团电子科技有限公司 | Tea rolling pressure monitoring method, automatic rolling process, equipment and storage medium |
-
2015
- 2015-12-09 CN CN201521015890.XU patent/CN205342813U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105382697A (en) * | 2015-12-09 | 2016-03-09 | 浙江工业大学 | Detection method for hydrodynamic pressure, buoyancy and upward-floating distance |
| CN105382697B (en) * | 2015-12-09 | 2017-11-07 | 浙江工业大学 | A kind of detection method of hydraulic pressure, buoyancy and floating distance |
| CN115067401A (en) * | 2021-07-02 | 2022-09-20 | 黄山优团电子科技有限公司 | Tea rolling pressure monitoring method, automatic rolling process, equipment and storage medium |
| CN115067401B (en) * | 2021-07-02 | 2024-05-10 | 黄山优团电子科技有限公司 | Tea rolling pressure monitoring method, automatic rolling process, equipment and storage medium |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160629 Termination date: 20181209 |