CN106441407A - Non-contact eddy current sensor calibration device and automatic calibration method thereof - Google Patents
Non-contact eddy current sensor calibration device and automatic calibration method thereof Download PDFInfo
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- CN106441407A CN106441407A CN201611057773.9A CN201611057773A CN106441407A CN 106441407 A CN106441407 A CN 106441407A CN 201611057773 A CN201611057773 A CN 201611057773A CN 106441407 A CN106441407 A CN 106441407A
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- inductive disks
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
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Abstract
The invention discloses a non-contact eddy current sensor calibration device and an automatic calibration method thereof. Static calibration of a conventional eddy current sensor is manually implemented, thus being high in working intensity, low in efficiency and inaccurate in standard displacement. According to the technical scheme of the invention, a sensation disc is driven by an electric cylinder to move transversely so as to achieve relative movement of the sensation disc and the testing head of a detected eddy current sensor; the sensation disc is connected with data acquisition module for acquiring sensation voltage; a magnetostriction displacement sensor for detecting precise displacement of the testing head of the eddy current sensor and the sensation disc is arranged between the sensation disc and the data acquisition module. By adopting the non-contact eddy current sensor calibration device disclosed by the invention, the calibration process can be automatically completed, the working intensity is low, the calibration efficiency and reliability are high, and the automatic calibration method disclosed by the invention is convenient and reliable.
Description
Technical field
The present invention relates to non-contact electric eddy pick up calibration field, specifically a kind of non-contact electric eddy pass
Sensor calibrating installation and its automatic calibrating method.
Background technology
Current vortex sensor is the one kind for forming the principle of " eddy current effect " based on high frequency magnetic field in metal surface and making
Multi-function sensor, has that reliable long-term working is good, sensitivity is high, strong antijamming capability, non-cpntact measurement, response speed
The features such as hurry up, do not affected by media such as profits, is widely used in the industries such as electric power, oil, chemical industry, metallurgy and some scientific research lists
Position, the footpath to large rotating machinery axles such as steam turbine, the hydraulic turbine, aerator, compressor, air separation machine, gear-box, large-scale cooling pumps
Enter to vibration, axial displacement, key phase device, rotating speed, swollen difference, bias and rotor dynamics research and accessory size inspection etc.
Row on-line monitoring and protection.Because current vortex sensor is being monitored and protecting the effect of pilot production secure context particularly great, therefore
How to ensure its value accurately and reliably becomes each side's focus of attention.
In current calibration, the calibration of current vortex sensor is divided into dynamic calibration and static calibration, with analog sensor
Actual condition, be close to the performance test of practical situation.
Static calibration be primarily adapted for use in monitor axial displacement current vortex sensor calibration, it be with displacement static correcting machine
Sensing card with respect to the change in location of current vortex sensor end face, test perception that sensor changes and anti-to static displacement
Should be able to power.
At present, the static calibration of current vortex sensor or manual, single Zhi Jinhang, producing standard displacement need to can be manually rotated
Micrometer, artificial visual judge that rotation amount, artificial readout sign level are moved, test 3 strokes totally 66 points back and forth, there is work strong
Many deficiencies such as degree is big, efficiency is low, standard displacement is inaccurate, the easy error of artificial judgment, being not suitable with work and development of the situation needs
Will.When tracing to the source, displacement static correcting machine can not completely censorship, micrometer therein can only be removed censorship, waste time and energy, trace to the source
Method is reliable not enough.
Content of the invention
The technical problem to be solved is the defect for overcoming above-mentioned prior art to exist, and provides a kind of contactless
Current vortex sensor calibrating installation, makes calibration process all be automatically performed, to reduce labor intensity, improve calibration efficiency and can
By property.
For this purpose, the present invention is adopted the following technical scheme that：A kind of non-contact electric eddy calibrating device for sensors, including to
Few one inductive disks for being used for forming induced field between tested current vortex sensor measuring head,
Described inductive disks drive which to move laterally by electric cylinders, realize between inductive disks and tested current vortex sensor measuring head
Relative motion, inductive disks are used for gathering the data acquisition module of induced voltage with one and being connected, and described inductive disks are adopted with data
One is provided between collection module to stretch for detecting the mangneto of precise displacement amount between tested current vortex sensor measuring head and inductive disks
Condense displacement sensor；
Displacement is transferred to data acquisition module by described magnetostrictive displacement sensor, and data acquisition module will be collected
Induced voltage and displacement are transferred to data analysiss and processing module, by the data analysiss and processing module be analyzed with
Processing, displacement commands being sent as needed to data acquisition module, data acquisition module sends driving instruction to electric cylinders.
The present invention produces displacement with electric cylinders, and displacement is accurately measured by magneto strictive sensor, and tested current vortex is sensed
Device induced voltage is directly compared with standard displacement, draws sensitivity and the linear case of sensor, so as to complete sensor
Calibration.
Used as improving further and supplementing to technique scheme, the present invention takes following technical measures：
Described data analysiss are connected with processing module and a display module.Display module shows current sensing as needed in real time
The critical datas such as voltage.
Described data acquisition module data analysis is integrated into a multifunctional data acquisition card with processing module.
Described multifunctional data acquisition card is equipped with the industrial control computer in an industrial control computer
Control system, described control system is used for controlling multifunctional data acquisition card.
The axis that described inductive disks have multiple, all inductive disks is disposed in parallel relation to one another.Multiple current vortexs are calibrated simultaneously can
Sensor.
The automatic calibrating method of above-mentioned non-contact electric eddy pick up calibration, which makes inductive disks sense with tested current vortex
Induced field being formed between device measuring head, displacement commands are sent by control system, drives electric cylinders motion, drive and be rigidly attached to electricity
Inductive disks movement on cylinder moving parts, the actual displacement amount of control system collection inductive disks and tested current vortex sensor
Induced voltage, and then analyze whether the relation of variation delta u of displacement variable Δ L and induced voltage meets requirement.
The present invention is with two kinds of means of re-test change in displacement after precisely controlling displacement quantity and movement, it is ensured that change in displacement
True and reliable, so that original methods such as adjustment of displacement is not in place, counting is inaccurate is eliminated the drawbacks of intrinsic, it is determined that after mobile
The displacement variable of point-to-point transmission compares, as the method for standard shift value, the method that existing first determination displacement is adjusted again
More reasonable reliable.Meanwhile, it is to ensure this standard volume accurately and reliably, only need to be to measuring the instrument of this displacement：Mangneto
This standard of telescopic displacement sensor carries out censorship, simplifies the difficulty that traces to the source.Original method is in principle, it should
By whole device censorship, but present situation is can to receive to trace to the source without any unit, also can provide without any standard set-up and trace back
Source.By contrast, method proposed by the present invention is more reliable, feasible.
Above-mentioned automatic calibrating method, which comprises the following steps that：
1) axis of the axis of tested current vortex sensor measuring head and corresponding inductive disks is made on same straight line, tested electricity whirlpool
Flow sensor measuring head be located end face parallel with the surface of inductive disks, make inductive disks and tested current vortex sensor measuring head it
Between formed induced field；
2) control system, record initial voltage and initial relative position are started；
3) control system sends displacement commands according to setting value, drives the moving parts of electric cylinders, so as to drive inductive disks to move,
After mobile end, the actual displacement amount of inductive disks is gathered by magnetostrictive displacement sensor, while the tested current vortex of collection is passed
Sensor induced voltage；
4) actual displacement amount to collection and the variable quantity of induced voltage are analyzed and record, and are subsequent sensor test result
Judgement provide foundation；
5) repeat step 3) and 4) mobile 10 points, complete the test of the 1st stroke；
6) reverse movement electric cylinders and inductive disks, set actual displacement amount and the faradism of 11 points of re-test according to control system
Pressure；
7) repeat step 3) to 4), complete 3 altogether and move back and forth；
8) according to 3 test results for moving back and forth, using method of least square, the demarcation to tested sensor is completed.
The invention has the advantages that：The calibrating installation of the present invention, makes calibration process all be automatically performed, and work is strong
Degree is low, and the efficiency of calibration and reliability are high；It can not be interfere with each other while calibrating again with multichannel, tests, records, calculates, assesses, coming to testify
All carry out automatically, production efficiency has been significantly improved, has significantly reduced labor intensity.The present invention is using the position of point-to-point transmission after movement
Variable quantity is moved as the method for standard shift value, relative method is used, only need to be using the magnetostriction position as standard transducer
Displacement sensor censorship, convenient and reliable.
Description of the drawings
Fig. 1 is the principle schematic of calibrating installation embodiment 1 of the present invention.
Fig. 2 is the principle schematic of calibrating installation embodiment 2 of the present invention.
Specific embodiment
With reference to specification drawings and specific embodiments, the present invention is further illustrated.
Embodiment 1
Non-contact electric eddy calibrating device for sensors as shown in Figure 1, between tested current vortex sensor measuring head
The inductive disks for forming induced field drive which to move laterally by electric cylinders, and the motor in electric cylinders is motor, to realize inductive disks
With the relative motion between tested current vortex sensor measuring head, inductive disks and the data acquisition module for gathering induced voltage
Connection, is provided between described inductive disks and data acquisition module for detecting tested current vortex sensor measuring head and inductive disks
Between precise displacement amount magnetostrictive displacement sensor.
Displacement is transferred to data acquisition module by described magnetostrictive displacement sensor, and data acquisition module will be gathered
To induced voltage and displacement be transferred to data analysiss and processing module, be analyzed by the data analysiss and processing module
With process, displacement commands are sent as needed to data acquisition module, data acquisition module sends driving instruction to electric cylinders.
Described data analysiss are connected with processing module and display module.
The axis that described inductive disks have 4, all inductive disks is disposed in parallel relation to one another.
Embodiment 2
Non-contact electric eddy calibrating device for sensors as shown in Figure 2, between tested current vortex sensor measuring head
The inductive disks for forming induced field drive which to move laterally by electric cylinders, and the motor in electric cylinders is motor, to realize inductive disks
With the relative motion between tested current vortex sensor measuring head, inductive disks are adopted with multi-functional data for gathering induced voltage
Truck connects, and is provided with for detecting tested current vortex sensor measuring head and sense between described inductive disks and data acquisition module
The magnetostrictive displacement sensor of precise displacement amount between should coiling.
Displacement is transferred to multifunctional data acquisition card, multifunctional data acquiring by described magnetostrictive displacement sensor
Data processing module in card is analyzed to displacement and induced voltage and after process, sends driving instruction as needed to electricity
Cylinder.
Described multifunctional data acquisition card is equipped with control in industrial control computer, in the industrial control computer
System processed, control system is used for controlling multifunctional data acquisition card.
The automatic calibrating method of above-described embodiment 1-2 lieutenant colonel's standard apparatus, which comprises the following steps that：
1) axis of the axis of tested current vortex sensor measuring head and corresponding inductive disks is made on same straight line, tested electricity whirlpool
Flow sensor measuring head be located end face parallel with the surface of inductive disks, make inductive disks and tested current vortex sensor measuring head it
Between formed induced field；
2) control system, record initial voltage and initial relative position are started；
3) control system sends displacement commands according to setting value, drives the moving parts of electric cylinders, so as to drive inductive disks to move,
After mobile end, the actual displacement amount of inductive disks is gathered by magnetostrictive displacement sensor, while the tested current vortex of collection is passed
Sensor induced voltage；
4) actual displacement amount to collection and the variable quantity of induced voltage are analyzed and record, and are subsequent sensor test result
Judgement provide foundation；
5) repeat step 3) and 4) mobile 10 points, complete the test of the 1st stroke；
6) reverse movement electric cylinders and inductive disks, set actual displacement amount and the faradism of 11 points of re-test according to control system
Pressure；
7) repeat step 3) to 4), complete 3 altogether and move back and forth；
8) according to 3 test results for moving back and forth, using method of least square, the demarcation to tested sensor is completed.
The above, be only presently preferred embodiments of the present invention, not the structure of the present invention is made any pro forma
Limit.Any simple modification, equivalent variations and modification that every technical spirit according to the present invention is made to above example, all
Fall within the scope of protection of the present invention.
Claims (7)
1. a kind of non-contact electric eddy calibrating device for sensors, is used for testing with tested current vortex sensor including at least one
The inductive disks of induced field are formed between head, it is characterised in that
Described inductive disks drive which to move laterally by electric cylinders, realize between inductive disks and tested current vortex sensor measuring head
Relative motion, inductive disks are used for gathering the data acquisition module of induced voltage with one and being connected, and described inductive disks are adopted with data
One is provided between collection module to stretch for detecting the mangneto of precise displacement amount between tested current vortex sensor measuring head and inductive disks
Condense displacement sensor；
Displacement is transferred to data acquisition module by described magnetostrictive displacement sensor, and data acquisition module will be collected
Induced voltage and displacement are transferred to data analysiss and processing module, by the data analysiss and processing module be analyzed with
Processing, displacement commands being sent as needed to data acquisition module, data acquisition module sends driving instruction to electric cylinders.
2. non-contact electric eddy calibrating device for sensors according to claim 1, it is characterised in that described data are divided
Analysis is connected with processing module and a display module.
3. non-contact electric eddy calibrating device for sensors according to claim 1, it is characterised in that described data are adopted
The data analysis of collection module is integrated into a multifunctional data acquisition card with processing module.
4. non-contact electric eddy calibrating device for sensors according to claim 3, it is characterised in that described is multi-functional
Data collecting card is equipped with control system in the industrial control computer, in the industrial control computer, described control
System is used for controlling multifunctional data acquisition card.
5. non-contact electric eddy calibrating device for sensors according to claim 1, it is characterised in that described inductive disks
The axis for having multiple, all inductive disks is disposed in parallel relation to one another.
6. the automatic calibrating method of non-contact electric eddy pick up calibration described in any one of claim 1-5, it is characterised in that
Making induced field to be formed between inductive disks and tested current vortex sensor measuring head, displacement commands is sent by control system, is driven
Electric cylinders are moved, and drive the inductive disks movement being rigidly attached on electric cylinders moving parts, and control system gathers the actual bit of inductive disks
Shifting amount and the induced voltage of tested current vortex sensor, and then analyze variation delta u of displacement variable Δ L and induced voltage
Relation whether meet requirement.
7. automatic calibrating method according to claim 6, which comprises the following steps that：
1) axis of the axis of tested current vortex sensor measuring head and corresponding inductive disks is made on same straight line, tested electricity whirlpool
Flow sensor measuring head be located end face parallel with the surface of inductive disks, make inductive disks and tested current vortex sensor measuring head it
Between formed induced field；
2) control system, record initial voltage and initial relative position are started；
3) control system sends displacement commands according to setting value, drives the moving parts of electric cylinders, so as to drive inductive disks to move,
After mobile end, the actual displacement amount of inductive disks is gathered by magnetostrictive displacement sensor, while the tested current vortex of collection is passed
Sensor induced voltage；
4) actual displacement amount to collection and the variable quantity of induced voltage are analyzed and record, and are subsequent sensor test result
Judgement provide foundation；
5) repeat step 3) and 4) mobile 10 points, complete the test of the 1st stroke；
6) reverse movement electric cylinders and inductive disks, set actual displacement amount and the faradism of 11 points of re-test according to control system
Pressure；
7) repeat step 3) to 4), complete 3 altogether and move back and forth；
8) according to 3 test results for moving back and forth, using method of least square, the demarcation to tested sensor is completed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611057773.9A CN106441407A (en) | 2016-11-23 | 2016-11-23 | Non-contact eddy current sensor calibration device and automatic calibration method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611057773.9A CN106441407A (en) | 2016-11-23 | 2016-11-23 | Non-contact eddy current sensor calibration device and automatic calibration method thereof |
Publications (1)
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Family
ID=58218576
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107121055A (en) * | 2017-06-05 | 2017-09-01 | 大连理工大学 | A kind of three-dimensional scaling method of eddy current displacement sensor array |
| CN107621220A (en) * | 2017-08-03 | 2018-01-23 | 大连理工大学 | A kind of space geometry scaling method of eddy current displacement sensor display |
| CN109975632A (en) * | 2019-03-01 | 2019-07-05 | 南京维格无损检测有限公司 | A kind of device detecting eddy current testing instrument extent of deterioration |
| CN111120015A (en) * | 2019-12-27 | 2020-05-08 | 浙江浙能技术研究院有限公司 | Real-time monitoring system and monitoring method for eccentric swing of 50MW steam turbine cylinder body |
| CN113074768A (en) * | 2021-03-30 | 2021-07-06 | 宁夏计量质量检验检测研究院 | Dynamic and static continuous calibration method for eddy current sensor |
| CN113074767A (en) * | 2021-03-30 | 2021-07-06 | 宁夏计量质量检验检测研究院 | Eddy current sensor dynamic and static integrated calibrating device |
| CN113074769A (en) * | 2021-03-30 | 2021-07-06 | 宁夏计量质量检验检测研究院 | Control system for detecting dynamic and static indexes of eddy current sensor |
| CN113405584A (en) * | 2021-05-17 | 2021-09-17 | 上海德意达电子电器设备有限公司 | Testing method and device for performance test of speed vibration combined sensor |
| CN116046045A (en) * | 2023-01-28 | 2023-05-02 | 宜科(天津)电子有限公司 | Calibration method of inductive sensor |
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| DE10054740A1 (en) * | 2000-11-04 | 2002-05-16 | Rheintacho Messtechnik Gmbh | Circuit arrangement for operating a magnetic field and or eddy current transducer with which the transducer can be switched between programmable mode and measurement mode to reduce the requirement for sensor connections |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109975632A (en) * | 2019-03-01 | 2019-07-05 | 南京维格无损检测有限公司 | A kind of device detecting eddy current testing instrument extent of deterioration |
| CN111120015A (en) * | 2019-12-27 | 2020-05-08 | 浙江浙能技术研究院有限公司 | Real-time monitoring system and monitoring method for eccentric swing of 50MW steam turbine cylinder body |
| CN111120015B (en) * | 2019-12-27 | 2022-04-29 | 浙江浙能技术研究院有限公司 | Real-time monitoring system and monitoring method for eccentric swing of 50MW steam turbine cylinder body |
| CN113074768A (en) * | 2021-03-30 | 2021-07-06 | 宁夏计量质量检验检测研究院 | Dynamic and static continuous calibration method for eddy current sensor |
| CN113074767A (en) * | 2021-03-30 | 2021-07-06 | 宁夏计量质量检验检测研究院 | Eddy current sensor dynamic and static integrated calibrating device |
| CN113074769A (en) * | 2021-03-30 | 2021-07-06 | 宁夏计量质量检验检测研究院 | Control system for detecting dynamic and static indexes of eddy current sensor |
| CN113074769B (en) * | 2021-03-30 | 2022-05-03 | 宁夏计量质量检验检测研究院 | Control system for detecting dynamic and static indexes of eddy current sensor |
| CN113405584A (en) * | 2021-05-17 | 2021-09-17 | 上海德意达电子电器设备有限公司 | Testing method and device for performance test of speed vibration combined sensor |
| CN116046045A (en) * | 2023-01-28 | 2023-05-02 | 宜科(天津)电子有限公司 | Calibration method of inductive sensor |
| CN116046045B (en) * | 2023-01-28 | 2023-06-13 | 宜科(天津)电子有限公司 | Calibration method of inductive sensor |
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