CN209014544U - A kind of silicon single crystal rod crystal orientation detection device - Google Patents
A kind of silicon single crystal rod crystal orientation detection device Download PDFInfo
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- CN209014544U CN209014544U CN201821553625.0U CN201821553625U CN209014544U CN 209014544 U CN209014544 U CN 209014544U CN 201821553625 U CN201821553625 U CN 201821553625U CN 209014544 U CN209014544 U CN 209014544U
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- crystal bar
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Abstract
The utility model discloses a kind of silicon single crystal rod crystal orientation detection device, including intermediate station, the mobile terminal collet for being mounted on intermediate station and being slided up and down on intermediate station, at the relative position of mobile terminal collet and the fixing end collet that is mounted on intermediate station；A pair of crystal bar rib measurement component for measuring crystal bar crest line is also equipped on intermediate station, this pair of of crystal bar rib measurement component is used to be adjacent to the side at crystal bar both ends respectively in the detection of crystal bar crest line；Fixing end collet does 360 ° of rotations by rotating mechanism drive, so that the crystal bar on fixing end collet be driven to rotate.This practical mobile terminal collet being equipped with using it and fixing end collet are clamped silicon rod, and the universal chuck mechanism by being each provided with freely adjusts by a small margin within the scope of 360 °, to adapt to the crystal bar of clamping end face out-of-flatness, to guarantee the vertical clamping of crystal bar, eliminate influence of the environmental factor to measurement result, testing result is relatively reliable, improves working efficiency.
Description
Technical field
The utility model belongs to single silicon field more particularly to a kind of silicon single crystal rod crystal orientation detection device, can be quickly
Accurately detect crystal bar crest line.
Background technique
With the raising of national environmental consciousness, photovoltaic industry is firmly got consumer with its pollution-free low consumption and is trusted, and monocrystalline
Silicon is praised highly as solar battery raw material because of its photoelectric conversion efficiency height extensively.
The processes such as truncation, evolution, grinding, slice need to be undergone when processing to silicon single crystal rod, and evolution quality is good
Can subsequent handling badly directly affected go on smoothly, and the height of crystal orientation detection accuracy then directly affects the quality of evolution.
It is mostly optical fiber type laser sensor that crystal orientation, which detects sensor used, at present, although sensor detection accuracy is high, is quick on the draw for this,
But requirement of the sensor to external environment be high and its higher cost, is not appropriate for under conditions of complicated and changeable, to understand
Certainly this problem we devise the displacement detector of a contact, the device due to being to be mounted directly on crystal bar surface,
Eliminate influence of the environmental factor to measurement result, therefore this measurement method more high efficient and reliable.
Utility model content
Not by such environmental effects, detection mode when the technical issues of the utility model solves is to provide a kind of detection crystal bar
A kind of reliable silicon single crystal rod crystal orientation detection device.
The utility model includes the brilliant line detector for detecting silicon rod crystalline substance line position, and the crystalline substance line detector includes
For fixing the clamping station of silicon rod, the silicon rod rotating mechanism for driving silicon rod to rotate along silicon rod axis and for detecting brilliant line
Detecting element.Detecting element uses mechanical contact detecting element, and in silicon rod rotary course, detecting element measures four brilliant lines
Position in a section, is calculated by mathematics model analysis, silicon rod is rotated in the state being uniformly aligned.
A kind of silicon single crystal rod crystal orientation detection device, including intermediate station, be mounted on intermediate station and on intermediate station up and down
The mobile terminal collet of sliding, at the relative position of mobile terminal collet and the fixing end collet that is mounted on intermediate station；It is described
A pair of crystal bar rib measurement component for measuring crystal bar crest line is also equipped on intermediate station, this pair of of crystal bar rib measurement component is used for
It is adjacent to the side at crystal bar both ends respectively in the detection of crystal bar crest line；The fixing end collet does 360 ° of rotations by rotating mechanism drive
Turn, to drive the rotation of the crystal bar on fixing end collet.
Further, a pair of of crystal bar rib measurement component is respectively connect with a sliding desk type cylinder, so as to crystal bar dress
It will not generate and collide in clip process, when the crystal bar rib measurement component is used to measure crystal bar crest line under the promotion of sliding desk type cylinder
It is adjacent to the side of crystal bar to be measured.
Further, one of crystal bar rib measurement component and sliding desk type cylinder are mounted on the collet of mobile terminal, with shifting
The up and down motion of moved end collet and move.
Further, the described crystal bar measurement component includes mounting plate, magnetic scale on a mounting board is fixedly mounted, is mounted on
The Mageneto-sensitive type displacement sensor and Mageneto-sensitive type displacement sensing moved forward and backward using magnetic scale as sliding rail on mounting plate and relative to mounting plate
Device connects and is used to be adjacent to the sliding bar of crystal bar side, and wherein sliding bar is that independent part is connect with Mageneto-sensitive type displacement sensor.
The mounting plate of crystal bar measurement component is connect with the output end of sliding desk type cylinder.
Further, the mobile terminal collet and fixing end collet pass through the universal chuck mechanism folder being each provided with respectively
Tight crystal bar；The universal chuck mechanism includes that spherical surface determines block, is determined on block and and spherical surface by holding screw setting in spherical surface
The contact surface for determining block is the spherical surface motion block of spherical surface, and the spherical surface motion block is equipped with and holds out against spring, the spherical surface motion block and spherical surface
Determine to be arranged with Universal clamp head bellows outside block；The spherical surface motion block can be determined on block free to slide by a small margin within the scope of 360 ° in spherical surface
To compensate the flatness in crystal bar section, to guarantee the vertical clamping of crystal bar, holding screw and spring collective effect is held out against, guaranteed
Universal chuck mechanism can automatically reset.
Further, the rotating mechanism include the synchronous pulley mechanism being mounted on intermediate station and with synchronous pulley mechanism
The projecting shaft of the rotating electric machine of connection, the fixing end collet is connect with synchronous pulley mechanism, specifically, the rotating electric machine
Output shaft be fixedly connected with a runner of synchronous pulley mechanism, the projecting shaft of fixing end collet is another with synchronous pulley mechanism
One runner is fixedly connected.
Further, it is also equipped with crest line indicateing arm on the intermediate station, judges crystal bar rib for operator's naked eyes
Whether measurement component is working normally.
As an improvement the crystal bar installation way uses vertical clamping, installation space is not only saved, is also reduced
The size of clamping force.
The Mageneto-sensitive type displacement sensor that the crystalline substance line measurement sensor uses, passes through our homemade a set of flexible dresses
Set the conversion to realize displacement.
The artificial detection crystalline substance line of the utility model low efficiency different from the past, the mobile terminal that the utility model utilizes it to be equipped with
Collet and fixing end collet clamp silicon rod, and the universal chuck mechanism by being each provided with is free by a small margin within the scope of 360 °
Adjustment, to adapt to the crystal bar of clamping end face out-of-flatness, to guarantee the vertical clamping of crystal bar, crystal bar rib measures component can be direct
It is attached to the side of crystal bar, eliminates influence of the environmental factor to measurement result, testing result is relatively reliable, working efficiency is improved,
The brilliant line position of 6 inches to 8 inches of crystal bar can be fast and accurately detected using high-precision tangent displacement sensor.
Detailed description of the invention
Fig. 1 is the three-dimensional shaft side figure of the utility model.
Fig. 2 is the main view of the utility model.
Fig. 3 is the lateral plan that the utility model is equipped with 8 inches of poles.
Fig. 4 is the bottom view of the utility model.
Fig. 5 is the cross-sectional view of the universal chuck mechanism of the utility model.
Fig. 6 is schematic diagram when the utility model crystal bar rib measures component measurement crystal bar.
Appended drawing reference in figure are as follows: 1. intermediate stations；2. mobile terminal collet；3. universal chuck mechanism；4. crystal bar rib measurement group
Part；5. sliding desk type cylinder；6. crest line indicateing arm；7 fixing end collets；8. clamping cylinder；9. rotating electric machine；10. synchronous belt turbine
Structure；11. holding out against spring；12. spherical surface motion block；13. holding screw；14. spherical surface determines block；15. sliding bar；16. mounting plate；17. magnetic
Sensitive displacement sensor；18. magnetic scale
Specific embodiment
The utility model is further described with specific embodiment with reference to the accompanying drawing:
As shown in figures 1 to 6, a kind of silicon single crystal rod crystal orientation detection device, including intermediate station 1, the intermediate station are vertical structure,
It is fixed with clamping cylinder 8 on the intermediate station 1, mobile terminal collet 2 is installed on the intermediate station 1, mobile terminal collet 2 passes through clamping
Cylinder 8 drives and then moves up and down on intermediate station 1；It is equipped with and is mounted at the lower section relative position of the mobile terminal collet 2
Fixing end collet 7 on intermediate station 1.
Be also equipped on the intermediate station 1 a pair of crystal bar rib measurement component 4 for measuring crystal bar crest line and respectively with crystalline substance
Stick rib measures the sliding desk type cylinder 5 that component 4 connects；The crystal bar rib measurement component 4 and sliding desk type cylinder 5 have collectively constituted crystal bar
Crest line detection unit, one of crystal bar rib measurement component 4 and sliding desk type cylinder 5 are mounted on the side of mobile terminal collet, and with
The up and down motion of mobile terminal collet 2 and move；Another crystal bar measures component 4 and the setting of sliding desk type cylinder 5 is pressed from both sides in fixing end
First 7 side, two crystal bar ribs measurement component 4 are located at the lateral location at crystal bar both ends to be measured in actual measurement
Place；The described crystal bar measurement component 4 include mounting plate 16, magnetic scale 18, be mounted on mounting plate 16 and relative to mounting plate 16 with
Magnetic scale 18 be sliding rail move forward and backward Mageneto-sensitive type displacement sensor 17, connect with Mageneto-sensitive type displacement sensor 17 and be used to be adjacent to crystalline substance
The sliding bar 15 of stick side, when work, the promotion of sliding bar 15 on the crystal bar rib measurement component 4 in sliding desk type cylinder 5
Under, sliding bar 15 is adjacent in crystal bar side, can generate small displacement when crystal bar is rotated to crest line position, this is small
Displacement, which will lead to, generates opposite front and back fortune between the Mageneto-sensitive type displacement sensor 17 being installed on mounting plate 16 and magnetic scale 18
It moves and is amplified and shown by sensor displacement and time relationship, thus can accurately measure the specific location of crystal bar crest line.
1 bottom of intermediate station is equipped with synchronous pulley mechanism 10, and the rotating electric machine connecting with synchronous pulley mechanism 10
9, the projecting shaft of the fixing end collet 7 is connect with synchronous pulley mechanism 10, and drives to make to fix by rotating electric machine 9
End collet 7 does 360 ° of rotations；The mobile terminal collet 2 and fixing end collet 7 is each provided with universal chuck mechanism 3, described
Universal chuck mechanism 3 includes that spherical surface determines block 14, determines to determine block 14 on block 14 and with spherical surface in spherical surface by the setting of holding screw 13
Contact surface be spherical surface spherical surface motion block 12, the spherical surface motion block 12 be equipped with hold out against spring 11,14 He of spherical surface motion block
Spherical surface is determined to be cased with Universal clamp head bellows outside block 12；When work, the spherical surface for the universal chuck mechanism 3 that fixing end collet 7 is equipped with is dynamic
Block 12 can determine on block 14 within the scope of 360 ° the flatness free to slide to compensate crystal bar section by a small margin in spherical surface, to guarantee ten thousand
The vertical clamping of crystal bar on chuck mechanism 3, and holding screw 13 and 11 collective effect of spring is held out against, guarantee universal collet
Mechanism 3 can automatically reset.
The crest line indicateing arm positioned at fixing end collet side is also equipped on the intermediate station 1, the crest line indicates mark
In the side of fixing end collet, judge whether crystal bar rib measurement component is working normally for operator's naked eyes；
The working principle of the utility model is described in detail:
The utility model can detect the crest line position of 6-8 cuns of crystal bars, in the concrete realization, is grabbed crystal bar by manipulator and is turned
1 axial location of intermediate station is moved to, manipulator slowly unclamps crystal bar, so that crystal bar lower surface is bonded with fixing end collet 7, it is same in this
When mobile terminal collet 2 upper surface of crystal bar is clamped under the drive of clamping cylinder 8, rotating electric machine 9 drives together after exiting manipulator
Step belt wheel mechanism 10 drives crystal bar to be rotated, and after stabilization of speed, sliding desk type cylinder 5 ejects crystal bar rib measurement component 4 simultaneously
So that the sliding bar 15 on crystal bar rib measurement component 4 is close to crystal bar surface, and when crystal bar is rotated to crest line position, 15 meeting of sliding bar
A biggish displacement is generated, and is amplified and is read by Mageneto-sensitive type displacement sensor 17, after crystal bar rotation is turned around, crystal bar
Four crest line positions can accurately measure, rotating electric machine 9 stops rotating at this time, manipulator clamp crystal bar simultaneously exited, examine
It surveys and completes.
Claims (7)
1. a kind of silicon single crystal rod crystal orientation detection device, it is characterised in that: including intermediate station, be mounted on intermediate station and in transfer
The mobile terminal collet that is slided up and down on platform, at the relative position of mobile terminal collet and the fixing end folder that is mounted on intermediate station
Head；A pair of crystal bar rib measurement component for measuring crystal bar crest line, this pair of of crystal bar rib measurement are also equipped on the intermediate station
Component is used to be adjacent to the side at crystal bar both ends respectively in the detection of crystal bar crest line；The fixing end collet is driven by rotating mechanism
360 ° of rotations are done, to drive the rotation of the crystal bar on fixing end collet.
2. a kind of silicon single crystal rod crystal orientation detection device according to claim 1, it is characterised in that: a pair of of crystal bar rib
Measurement component is respectively connect with a sliding desk type cylinder, is used to be adjacent under the promotion of sliding desk type cylinder when measuring crystal bar crest line
The side of crystal bar to be measured.
3. a kind of silicon single crystal rod crystal orientation detection device according to claim 2, it is characterised in that: one of crystal bar rib is surveyed
Amount component and sliding desk type cylinder are mounted on the collet of mobile terminal, are moved with the up and down motion of mobile terminal collet.
4. -3 a kind of silicon single crystal rod crystal orientation detection device described in any one according to claim 1, it is characterised in that: described
Crystal bar rib measurement component includes mounting plate, magnetic scale on a mounting board, installation is fixedly mounted on a mounting board and relative to installation
Mageneto-sensitive type displacement sensor that plate is moved forward and backward using magnetic scale as sliding rail connect with Mageneto-sensitive type displacement sensor and is used to be adjacent to crystal bar
The sliding bar of side.
5. -3 a kind of silicon single crystal rod crystal orientation detection device described in any one according to claim 1, it is characterised in that: described
Mobile terminal collet and fixing end collet pass through the universal collet gear grips crystal bar being each provided with respectively；The universal collet machine
Structure includes that spherical surface determines block, and the ball that the contact surface that spherical surface is determined to determine block on block and with spherical surface is spherical surface is arranged in by holding screw
Face motion block, the spherical surface motion block, which is equipped with, holds out against spring, and the spherical surface motion block and spherical surface are determined to be cased with Universal clamp head bellows outside block；
The spherical surface motion block can determine on block within the scope of 360 ° the flatness free to slide to compensate crystal bar section by a small margin in spherical surface, thus
The vertical clamping for guaranteeing crystal bar, holding screw and holds out against spring collective effect, guarantees that universal chuck mechanism can automatically reset.
6. -3 a kind of silicon single crystal rod crystal orientation detection device described in any one according to claim 1, it is characterised in that: the rotation
Rotation mechanism includes the synchronous pulley mechanism being mounted on intermediate station and the rotating electric machine connecting with synchronous pulley mechanism, the fixation
The projecting shaft of end collet is connect with synchronous pulley mechanism.
7. -3 a kind of silicon single crystal rod crystal orientation detection device described in any one according to claim 1, it is characterised in that: in described
Crest line indicateing arm is also equipped on turntable, the crest line indicateing arm is located at the side of fixing end collet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821553625.0U CN209014544U (en) | 2018-09-23 | 2018-09-23 | A kind of silicon single crystal rod crystal orientation detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821553625.0U CN209014544U (en) | 2018-09-23 | 2018-09-23 | A kind of silicon single crystal rod crystal orientation detection device |
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| Publication Number | Publication Date |
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| CN209014544U true CN209014544U (en) | 2019-06-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821553625.0U Active CN209014544U (en) | 2018-09-23 | 2018-09-23 | A kind of silicon single crystal rod crystal orientation detection device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112080795A (en) * | 2020-09-16 | 2020-12-15 | 浙江晶阳机电股份有限公司 | Crystal bar falling prevention operation method and crystal growth furnace with crystal bar falling prevention clamping device |
| CN114193643A (en) * | 2021-12-27 | 2022-03-18 | 烟台力凯数控科技有限公司 | Cutting device for squarer and crystal bar cutting method |
-
2018
- 2018-09-23 CN CN201821553625.0U patent/CN209014544U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112080795A (en) * | 2020-09-16 | 2020-12-15 | 浙江晶阳机电股份有限公司 | Crystal bar falling prevention operation method and crystal growth furnace with crystal bar falling prevention clamping device |
| CN114193643A (en) * | 2021-12-27 | 2022-03-18 | 烟台力凯数控科技有限公司 | Cutting device for squarer and crystal bar cutting method |
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