CN219015233U - Automatic length detector for monocrystalline silicon rod - Google Patents

Abstract

The utility model discloses an automatic detector for the length of a monocrystalline silicon rod, and relates to the technical field of silicon rod production. The utility model comprises a detection table, a fixing component and a detection component, wherein the fixing component comprises a clamping plate, an inner rod and a loop bar which are arranged on the back surface of the clamping plate; the detection assembly comprises electric push rods arranged on two sides of the detection table, a retaining plate arranged at the output end of the electric push rods and a plurality of groups of infrared ranging sensors arranged on the retaining plate. According to the utility model, through the arrangement of the fixing assembly, the clamping plate is driven to move by the inner rod and the loop bar in the fixing assembly, and the single crystal silicon rod is clamped and fixed by the clamping plate, so that the single crystal silicon rod is fixed, the problem that the single crystal silicon rod is inconvenient to fix in the prior art is solved, through the arrangement of the detecting assembly, the positions between the abutting plates are detected by the plurality of groups of infrared ranging sensors in the detecting assembly, the average value of the plurality of groups of data is taken, the detecting accuracy is improved, and the problem of lower accuracy in the prior art is solved.

Description

Automatic length detector for monocrystalline silicon rod

Technical Field

The utility model belongs to the technical field of silicon rod production, and particularly relates to an automatic detector for the length of a monocrystalline silicon rod.

Background

The single crystal silicon rod is a silicon single crystal rod formed by shaping or pulling in a hearth through a zone melting or Czochralski process, can be used for manufacturing semiconductor equipment, solar cells and the like, has the production flow of crystal pulling, machining, polishing and the like, and needs to be detected after the single crystal silicon rod is produced, and the length of the single crystal silicon rod is detected through an automatic detector, but the following defects still exist in actual use:

1. when the existing automatic detector for the length of the monocrystalline silicon rod is used, the monocrystalline silicon rod is installed in a manual fixing or direct placing mode, and the phenomenon that the monocrystalline silicon rod moves possibly occurs in the detection process, so that the error of measured data is large, and the monocrystalline silicon rod is inconvenient to fix, so that the automatic detector is inconvenient to use;

2. when the existing automatic detector for the length of the monocrystalline silicon rod is used, the two ends of the monocrystalline silicon rod are uneven, so that detected data errors are large, the accuracy of detection is poor, and the automatic detector is inconvenient to use.

Therefore, the existing automatic detector for the length of the silicon single crystal rod cannot meet the requirements in practical use, so that an improved technology is urgently needed in the market to solve the above problems.

Disclosure of Invention

The utility model aims to provide an automatic monocrystalline silicon rod length detector, which is characterized in that through the arrangement of a fixing component, an inner rod and a loop bar in the fixing component are utilized to drive a clamping plate to move, and the monocrystalline silicon rod is clamped and fixed through the clamping plate, so that the monocrystalline silicon rod is fixed, the problem that the monocrystalline silicon rod is inconvenient to fix in the prior art is solved, meanwhile, through the arrangement of the detecting component, the positions between the abutting plates are detected by utilizing a plurality of groups of infrared distance measuring sensors in the detecting component, and the average value of a plurality of groups of data is taken, thereby improving the detection accuracy and solving the problem of lower accuracy in the prior art.

In order to solve the technical problems, the utility model is realized by the following technical scheme:

the utility model relates to an automatic detector for the length of a monocrystalline silicon rod, which comprises a detection table, a fixing assembly and a detection assembly, wherein the fixing assembly comprises a clamping plate, an inner rod and a loop rod, and the inner rod and the loop rod are arranged on the back surface of the clamping plate;

the detection assembly comprises electric push rods arranged on two sides of the detection table, a retaining plate arranged at the output end of the electric push rods and a plurality of groups of infrared ranging sensors arranged on the retaining plate.

Further, the front end and the rear end of the top of the detection table are fixedly connected with first mounting plates, one end of the inner rod is rotationally connected to the back surface of the clamping plate, the other end of the inner rod is in threaded connection with the inner side of the loop bar, one end of the loop bar penetrates through the first mounting plates and is fixedly connected with a hand wheel, the loop bar is mounted through the first mounting plates, and the hand wheel is convenient to rotate.

Further, the clamping plate is fixedly connected with a limiting rod on two sides of the back surface, the other end of the limiting rod penetrates through the first mounting plate and is sleeved with a limiting nut, and specifically, the limiting rod and the limiting nut are arranged to limit movement of the clamping plate.

Further, all offered the arc wall on the face in opposite directions of splint, the inboard bonding of arc wall has the rubber pad, and specific, the setting of arc wall has realized carrying out the joint to monocrystalline silicon stick, and the setting of rubber pad avoids appearing the clamp mark on the monocrystalline silicon stick.

Further, the equal fixedly connected with second mounting panel in top both sides of detecting the platform, electric putter is fixed connection respectively on the outer wall of one side of second mounting panel, and electric putter's output runs through the second mounting panel and fixed connection is on the back of the board of keeping out, and specifically, electric putter has been realized installing in the setting of second mounting panel.

Further, the slide groove is all seted up to the front and back end of detecting bench top central point put, and the inboard of slide groove all clearance connection has the slider, and the top of slider runs through the slide groove and respectively fixed connection in the front and back end of the lower surface of keeping out the board, and specifically, the setting up of slide groove and slider makes the motion of keeping out the board more stable.

Further, all around of testing table top central point put all fixedly connected with installation pole, the top fixedly connected with layer board of installation pole, specific, the setting of installation pole has realized installing the layer board, and the setting of layer board has realized supporting monocrystalline silicon stick.

Further, all around the bottom of detecting the platform all fixedly connected with bracing piece, the top and the below of bracing piece face in opposite directions all fixedly connected with horizontal pole, specifically, the setting of bracing piece has realized supporting the detecting the platform, and the setting of horizontal pole has strengthened the intensity of bracing piece.

The utility model has the following beneficial effects:

1. according to the utility model, through the arrangement of the fixing component, the hand wheel is rotated positively, the hand wheel drives the loop bar to rotate synchronously, and the inner bar is driven to move towards the outer side of the loop bar through the forward rotation of the loop bar, so that the inner bar drives the clamping plate to move towards each other, thereby realizing the clamping of the monocrystalline silicon rod, facilitating the fixing of the monocrystalline silicon rods with different sizes, and solving the problem that the existing monocrystalline silicon rod is inconvenient to fix.

2. According to the utility model, through the arrangement of the detection assembly, the electric push rod is started, the output end of the electric push rod applies external force to the abutting plate, so that the abutting plate moves towards the two ends of the monocrystalline silicon rod, the electric push rod is closed when the abutting plate is respectively in abutting connection with the two ends of the monocrystalline silicon rod, the infrared ranging sensors are started, the relative positions between the abutting plates are detected through the plurality of groups of infrared ranging sensors, the average value is obtained, namely the length of the monocrystalline silicon rod, the detection accuracy is improved, and the problem that the existing accuracy is not high is solved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a single crystal silicon rod length automatic detector;

FIG. 2 is a schematic view of the structure of the inspection station;

FIG. 3 is a schematic structural view of a fixing assembly;

FIG. 4 is a disassembled view of the splint;

fig. 5 is a schematic structural diagram of the detection assembly.

In the drawings, the list of components represented by the various numbers is as follows:

1. a detection table; 11. a chute; 12. a mounting rod; 13. a supporting plate; 14. a support rod; 15. a cross bar; 2. a fixing assembly; 21. a clamping plate; 22. an inner rod; 23. a loop bar; 24. a first mounting plate; 25. a hand wheel; 26. a limit rod; 27. a limit nut; 28. an arc-shaped groove; 29. a rubber pad; 3. a detection assembly; 31. an electric push rod; 32. a retaining plate; 33. an infrared ranging sensor; 34. a second mounting plate; 35. a sliding block.

Detailed Description

The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.

Referring to fig. 1-5, the utility model discloses an automatic detector for the length of a single crystal silicon rod, which comprises a detection table 1, a fixing component 2 and a detection component 3, wherein the fixing component 2 comprises a clamping plate 21, an inner rod 22 and a loop rod 23 which are arranged on the back surface of the clamping plate 21;

the detection assembly 3 comprises electric push rods 31 arranged on two sides of the detection table 1, a retaining plate 32 arranged at the output end of the electric push rods 31 and a plurality of groups of infrared ranging sensors 33 arranged on the retaining plate 32;

specifically, the infrared ranging sensors 33 are provided with four groups, and are respectively installed on the two groups of the retaining plates 32, and meanwhile, the installation positions of the infrared ranging sensors 33 on the two groups of the retaining plates 32 are different and are distributed in a staggered manner;

when the single crystal silicon rod clamping device is used, firstly, a single crystal silicon rod to be detected is placed on a supporting plate 13, a hand wheel 25 is rotated positively, the hand wheel 25 drives a loop bar 23 to rotate synchronously, and an inner bar 22 is driven to move towards the outer side of the loop bar 23 through the forward rotation of the loop bar 23, so that the inner bar 22 drives a clamping plate 21 to move towards each other, and the single crystal silicon rod is clamped;

then, starting the electric push rod 31, wherein the output end of the electric push rod 31 applies an external force to the abutting plate 32, so that the abutting plate 32 moves towards the two ends of the monocrystalline silicon rod, closing the electric push rod 31 when the abutting plate 32 is respectively in abutting connection with the two ends of the monocrystalline silicon rod, starting the infrared ranging sensors 33, detecting the relative positions among the abutting plates 32 through a plurality of groups of infrared ranging sensors 33, and taking an average value, namely the length of the monocrystalline silicon rod;

finally, the hand wheel 25 is reversed, so that the clamping plate 21 is separated from the single crystal silicon rod, and the single crystal silicon rod after the inspection is removed from the supporting plate 13.

As shown in fig. 3, the front end and the rear end of the top of the detection table 1 are fixedly connected with a first mounting plate 24, one end of an inner rod 22 is rotatably connected to the back surface of the clamping plate 21, the other end of the inner rod 22 is in threaded connection with the inner side of a loop rod 23, and one end of the loop rod 23 penetrates through the first mounting plate 24 and is fixedly connected with a hand wheel 25;

specifically, be the through-hole setting on the terminal surface of first mounting panel 24, and the through-hole inboard of first mounting panel 24 terminal surface is provided with the bearing, is shown in the figure, and the loop bar 23 cup joints the inboard at the bearing, and the loop bar 23 is hollow form, and is the internal thread setting on the inner wall of loop bar 23, is the external screw thread setting on the outer wall of interior pole 22, cup joints through the screw thread spin between loop bar 23 and the interior pole 22, has realized installing loop bar 23 through the setting of first mounting panel 24, and is convenient for rotate loop bar 23 through the setting of hand wheel 25.

As shown in fig. 3, two sides of the back surface of the clamping plate 21 are fixedly connected with a limiting rod 26, and the other end of the limiting rod 26 penetrates through the first mounting plate 24 and is sleeved with a limiting nut 27;

specifically, one side is the external screw thread setting on the outer wall of gag lever post 26, and connects through the screw thread spin between gag lever post 26 and the limit nut 27, and the setting of gag lever post 26 makes splint 21 can only carry out the linear motion on the fore-and-aft direction, and limit nut 27's setting has played spacing effect to the motion distance of gag lever post 26, and then has played spacing effect to the motion distance of splint 21.

As shown in fig. 4, the opposite surfaces of the clamping plate 21 are provided with arc grooves 28, and rubber pads 29 are adhered to the inner sides of the arc grooves 28;

specifically, the arc-shaped groove 28 is used for clamping the front end and the rear end of the monocrystalline silicon rod, and the rubber pad 29 is used for preventing the external surface of the monocrystalline silicon rod from being scratched in the clamping process.

As shown in fig. 5, the two sides of the top of the detection platform 1 are fixedly connected with a second mounting plate 34, the electric push rods 31 are respectively and fixedly connected to the outer wall of one side of the second mounting plate 34, and the output ends of the electric push rods 31 penetrate through the second mounting plate 34 and are fixedly connected to the back surface of the retaining plate 32;

specifically, the lower surface of the second mounting plate 34 is respectively mounted on two sides of the top of the detection table 1 through bolts, and the electric push rod 31 is mounted on the back surface of the second mounting plate 34 through bolts, so that the electric push rod 31 is mounted through the arrangement of the second mounting plate 34.

As shown in fig. 2 and 5, the front and rear ends of the center position of the top of the detection platform 1 are respectively provided with a sliding groove 11, the inner sides of the sliding grooves 11 are respectively and intermittently connected with a sliding block 35, and the top of the sliding block 35 penetrates through the sliding groove 11 and is respectively and fixedly connected with the front and rear ends of the lower surface of the retaining plate 32;

specifically, when the sliding block 35 slides inside the chute 11 along with the movement of the abutment plate 32, a friction force is generated due to the relative movement between the inner wall of the chute 11 and the outer wall of the sliding block 35, and the movement of the sliding block 35 is blocked under the action of the friction force, so that the movement of the abutment plate 32 is more stable.

As shown in fig. 2, the periphery of the center position of the top of the detection table 1 is fixedly connected with a mounting rod 12, and the top end of the mounting rod 12 is fixedly connected with a supporting plate 13;

specifically, both ends of the mounting rod 12 are respectively mounted on the detection table 1 and the supporting plate 13 through bolts, the supporting plate 13 is mounted through the arrangement of the mounting rod 12, and the monocrystalline silicon rod is supported through the arrangement of the supporting plate 13.

As shown in fig. 2, the periphery of the bottom of the detection table 1 is fixedly connected with a support rod 14, and the upper part and the lower part of the opposite surfaces of the support rod 14 are fixedly connected with cross rods 15;

specifically, the top of bracing piece 14 passes through the bolt fastening around the bottom of detecting platform 1, and the both ends of horizontal pole 15 weld respectively on the face in opposite directions of bracing piece 14, have realized supporting detecting platform 1 through the setting of bracing piece 14, and have strengthened the stability of bracing piece 14 through the setting of horizontal pole 15.

The foregoing is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, and any modification, equivalent replacement, and improvement of some of the technical features described in the foregoing embodiments are all within the scope of the present utility model.

Claims (8)

1. The utility model provides a monocrystalline silicon stick length automated inspection machine, includes detection platform (1), fixed subassembly (2) and detection component (3), its characterized in that: the fixing assembly (2) comprises a clamping plate (21), an inner rod (22) and a loop rod (23), wherein the inner rod (22) and the loop rod are arranged on the back surface of the clamping plate (21);

the detection assembly (3) comprises electric push rods (31) arranged on two sides of the detection table (1), a retaining plate (32) arranged at the output end of the electric push rods (31) and a plurality of groups of infrared ranging sensors (33) arranged on the retaining plate (32).

2. The automatic detector for the length of a silicon single crystal rod according to claim 1, wherein: the detection bench is characterized in that the front end and the rear end of the top of the detection bench (1) are fixedly connected with a first mounting plate (24), one end of an inner rod (22) is rotatably connected to the back surface of the clamping plate (21), the other end of the inner rod (22) is in threaded connection with the inner side of a sleeve rod (23), and one end of the sleeve rod (23) penetrates through the first mounting plate (24) and is fixedly connected with a hand wheel (25).

3. The automatic detector for the length of a silicon single crystal rod according to claim 2, wherein: both sides of the back surface of the clamping plate (21) are fixedly connected with limiting rods (26), and the other ends of the limiting rods (26) penetrate through the first mounting plate (24) and are sleeved with limiting nuts (27).

4. A single crystal silicon rod length automatic detector according to claim 3, wherein: arc grooves (28) are formed in the opposite surfaces of the clamping plates (21), and rubber pads (29) are bonded on the inner sides of the arc grooves (28).

5. The automatic detector for the length of a silicon single crystal rod according to claim 1, wherein: the detection table is characterized in that the second mounting plates (34) are fixedly connected to the two sides of the top of the detection table (1), the electric push rods (31) are respectively and fixedly connected to the outer wall of one side of each second mounting plate (34), and the output ends of the electric push rods (31) penetrate through the second mounting plates (34) and are fixedly connected to the back surfaces of the retaining plates (32).

6. The automatic detector for length of silicon single crystal rod according to claim 5, wherein: the front end and the rear end of the center position of the top of the detection table (1) are respectively provided with a sliding groove (11), the inner sides of the sliding grooves (11) are respectively and intermittently connected with a sliding block (35), and the top of the sliding block (35) penetrates through the sliding grooves (11) and is respectively and fixedly connected with the front end and the rear end of the lower surface of the resisting plate (32).

7. The automatic detector for the length of a silicon single crystal rod according to claim 1, wherein: the periphery of the center position of the top of the detection table (1) is fixedly connected with a mounting rod (12), and the top end of the mounting rod (12) is fixedly connected with a supporting plate (13).

8. The automatic detector for length of silicon single crystal rod according to claim 7, wherein: the bottom of detecting bench (1) all is fixedly connected with bracing piece (14) all around, the top and the below of bracing piece (14) face in opposite directions all are fixedly connected with horizontal pole (15).

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