CN207231406U - A kind of device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt - Google Patents
A kind of device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt Download PDFInfo
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- CN207231406U CN207231406U CN201720993326.8U CN201720993326U CN207231406U CN 207231406 U CN207231406 U CN 207231406U CN 201720993326 U CN201720993326 U CN 201720993326U CN 207231406 U CN207231406 U CN 207231406U
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Abstract
The utility model belongs to the automatic detection field of silicon single crystal rod, and in particular to a kind of device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt.The utility model provides a kind of device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt, including supporting rack, centering and natural measurement of tilt component, linear measure longimetry component；Silicon single crystal rod is moved to the device width position center by centering and natural measurement of tilt component, and centering while measures the gradient of monocrystalline silicon round rod end face using obliquity sensor, then measures the length of crystal bar by laser-correlation by linear measure longimetry component；The utility model can realize diameterThe length and natural measurement of tilt of length 80mm~800mm monocrystalline silicon round rod.The utility model instead of traditional artificial detection by way of automatic measurement, solve that current manual detection work efficiency is low, labor intensity is big, there are the problems such as security risk.
Description
Technical field
The utility model belongs to the automatic detection field of silicon single crystal rod, and in particular to one kind is used for silicon single crystal rod automatic inspection line
The device of length and natural measurement of tilt.
Background technology
With being surging forward for photovoltaic industry and semicon industry, monocrystalline silicon is as most important semiconductor and photovoltaic material
Material, its throughput requirements are also constantly being lifted.Monocrystalline silicon needs to continue series of processes after the completion of preparing, and includes and cuts
The processes such as disconnected, detection, flat surface grinding, cylindricalo grinding；Finally, then the silicon single crystal rod processed is sent into special multi-thread line to cut into slices
Machine, processes the silicon chip available for cell piece production or semiconductor substrate.Wherein, the detection of silicon single crystal rod is a detection monocrystalline
The important step of silicon rod quality.Its detection content mainly includes weight detecting, diameter detection, length detection, gradient detection, conduction
Type, resistivity, minority carrier life time and appearance detection.At present, length and the end face of silicon single crystal rod are mainly measured manually
Gradient, work efficiency is low, labor intensity is big, there are the problems such as security risk.
Utility model content
For problems of the prior art, the utility model provides the length and gradient that can accurately measure crystal bar,
And improve a kind of device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt of work efficiency.
A kind of device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt, including supporting rack and centering and gradient
Measurement assembly, the centering and natural measurement of tilt component include horizontal guide rail seat, lead screw motor, screw, paw, paw sliding block peace
Fill seat, obliquity sensor, horizontal motor seat；The supporting rack is equipped with the horizontal guide rail seat being fixedly connected, and the level is led
Guide rail and horizontal motor seat are respectively fixed with below rail chair, lead screw motor is installed on the horizontal motor seat；The guide rail both ends
Sliding block with matching is filled respectively, and the paw sliding block mounting base that is fixedly connected with a slide block and being fixed with paw sliding block mounting base connects
The paw connect, the paw are upper and lower adjustable mechanism, can clamp the different monocrystalline silicon round rod of centering size by adjusting；It is described
Sliding block is slided relative to guide rail；Obliquity sensor is housed, which is used to be bonded under the drive of paw to treat on paw
The crystal bar end face of measurement；The lead screw motor is connected with the paw sliding block mounting base at guide rail both ends respectively by screw, the hand
Screw between pawl sliding block mounting base is equipped with shaft coupling, which is used to make the screw direction of rotation of its both sides opposite；
Support frame as described above both sides are respectively provided with the linear measure longimetry component, and the linear measure longimetry component includes electric rotating machine,
Adjustable mounting assembly and laser range sensor；The adjustable mounting assembly is installed on supporting rack, and adjustable mounting assembly is opposite
In supporting rack can up and down adjustment, be fixedly connected with electric rotating machine, the laser range sensor in the adjustable mounting assembly
It is connected by shaft coupling with electric rotating machine, which drives laser range sensor synchronous rotary；Passed by rotary laser
Sensor can choose several points to measure the length of crystal bar on crystal bar periphery, and component is installed in mirror symmetry, by laser-correlation
Convert boule length.
The screw includes left clamping screw and right clamping screw, passes through connection between left clamping screw and right clamping screw
Axis device connects, and when the lead screw motor being connected with the screw works, left clamping screw and right clamping screw are realized by shaft coupling
Reversely rotate, may be such that left and right paw synchronization reverse direction operation, safety action is symmetrically consistent, so that it is guaranteed that center during centering
It is constant.
The paw is connected by two level hinge with the obliquity sensor, can make the obliquity sensor around X-axis
Rotated with Y-axis, during with crystal bar to be detected in paw pair, two level hinge can make obliquity sensor and crystal bar end face complete
Full fitting, so as to measure end face gradient.That is, by up and down adjustment paw, obliquity sensor can be made to be bonded various sizes of circle
Cylindricality crystal bar end face.
Described device is suitable for diameterThe length of length 80mm~800mm monocrystalline silicon round rod and tiltedly
Degree measurement.
The utility model provides a kind of device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt, including support
Frame, centering and natural measurement of tilt component, linear measure longimetry component；It is wide that silicon single crystal rod is moved to the device by centering and natural measurement of tilt component
Place-centric is spent, centering while, measures the gradient of monocrystalline silicon round rod end face using obliquity sensor, then by linear measure longimetry group
Part measures the length of crystal bar by laser-correlation；The utility model can realize diameterLength 80mm~
The length and natural measurement of tilt of 800mm monocrystalline silicon round rod.The utility model instead of traditional artificial inspection by way of automatic measurement
Survey, solve that current manual detection work efficiency is low, labor intensity is big, there are the problems such as security risk.The present apparatus realizes monocrystalline
The automatic measurement of silicon rod length and end face gradient, can make the measurement efficiency higher of silicon single crystal rod, precision more by automated control
Height, reduces labour cost while improving work efficiency.
Brief description of the drawings
Fig. 1 is the schematic three dimensional views in the utility model embodiment 1.
Fig. 2 is the front view in the utility model embodiment 1.
Fig. 3 is the lateral plan in the utility model embodiment 1.
Reference numeral in figure is：1 supporting rack；2 silicon single crystal rods；3 pallets；4 chain making machines；5 horizontal guide rail seats；6 screws electricity
Machine；7 horizontal motor seats；8 sliding blocks；9 paw sliding block mounting bases；10 guide rails；11 screws；12 paws；13 obliquity sensors；14 shaft couplings
Device；15 laser range sensors；16 adjustable mounting assemblies；17 electric rotating machines.
Embodiment
A kind of device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt, including supporting rack 1, centering and gradient
Measurement assembly, linear measure longimetry component；The centering and natural measurement of tilt component are used to silicon single crystal rod being moved to the device width bits
Put center, centering while measures the gradient of monocrystalline silicon round rod end face using obliquity sensor, then is led to by linear measure longimetry component
Cross the length that laser-correlation measures crystal bar；
The centering and natural measurement of tilt component include horizontal guide rail seat 5, lead screw motor 6, screw 11, paw 12, paw
Sliding block mounting base 9, obliquity sensor 13, horizontal motor seat 7；Horizontal guide rail seat 5 is fixedly connected with the supporting rack 1, it is described
5 lower section both sides of horizontal guide rail seat are fixedly connected with guide rail 10 and horizontal motor seat 7 respectively by screw along its length, the water
Lead screw motor 6 is installed on ordinary telegram engine base 7；10 both ends of guide rail are respectively provided with sliding block 8 with matching, solid with sliding block 8
Surely the paw sliding block mounting base 9 connected and the paw 12 being fixedly connected with paw sliding block mounting base 9 by screw, the sliding block 8
Can 10 translation gliding of opposite rail；
The screw 11 includes left clamping screw and right clamping screw, passes through between left clamping screw and right clamping screw
Shaft coupling 14 connects, so as to form screw 11；The lead screw motor 6 passes through the paw sliding block with 10 both ends of guide rail respectively of screw 11
Mounting base 9 connects, because screw 11 is equipped with shaft coupling 14, when the lead screw motor 6 being connected with the screw 11 works, and left clamping
Screw and it is right clamping screw by shaft coupling realize reversely rotate, drive the paw sliding block mounting base 9 at both ends to move so that
The synchronous reverse direction operation of paw 12 at 10 both ends of guide rail, safety action is symmetrically consistent, so that it is guaranteed that center during paw centering is not
Become.
The paw 12 is connected by two level hinge and the obliquity sensor 13, can make the obliquity sensor 13
Rotated around X-axis and Y-axis, during with crystal bar to be detected in 12 pairs of paw, two level hinge can make obliquity sensor 13 with
Crystal bar end face is bonded completely, so as to measure end face gradient；The paw 12 is upper-lower position on device, can be clamped by adjusting
The different monocrystalline silicon round rod of centering size；
1 both sides of support frame as described above are respectively provided with the linear measure longimetry component, and the linear measure longimetry component includes electric rotating machine
17, adjustable mounting assembly 16 and laser range sensor 15；The adjustable mounting assembly 16 is installed on supporting rack 1, described
Electric rotating machine 17 is fixedly connected with adjustable mounting assembly 16, the laser range sensor 15 passes through shaft coupling and electric rotating machine
17 connections, the electric rotating machine 17 of 1 both sides of supporting rack drive 15 synchronous rotary of laser range sensor respectively；Pass through rotary laser
Sensor can choose several points to measure the length of crystal bar on crystal bar periphery, and component is installed in mirror symmetry, by laser pair
Penetrate conversion boule length.
When for silicon single crystal rod automatic inspection line length and natural measurement of tilt, specific workflow is the present apparatus：Leading
The lower section of rail 10 and screw 11 is provided with chain making machine 4, and chain making machine is equipped with pallet 3, silicon single crystal rod 2 is placed on pallet 3, by
Both are moved to the measurement station specified by chain making machine 4.After in place, the rotation of lead screw motor 6 drives screw 11 to rotate, then guide rail
The paw sliding block mounting base 9 at 10 both ends with movable slider 8 and paw 12 from both ends to centre position synchronizing moving, slowly close to crystal bar
2 end face.While paw 12 is close to crystal bar 2, obliquity sensor 13 is slowly bonded end face, until being bonded end face paw completely
Stop motion, at this time crystal bar 2 centre position is centering to by paw 12, the end face gradient of crystal bar 2 can be measured at this time.Then, both ends
Electric rotating machine 17 drives 15 synchronous rotary of laser range sensor one week, by the length that 2 multiple spot of crystal bar is measured to the mode of penetrating.It is long
After degree and gradient are all measured, paw 12 moves under the drive of lead screw motor 6 to both ends unclamps crystal bar 2.Finally, 2 He of crystal bar
Pallet 3 removes measurement station under the effect of chain making machine 4.
Above-described is only the embodiment of the utility model, and the general knowledge such as known concrete structure and characteristic is herein in scheme
Do not describe excessively.It should be pointed out that for those skilled in the art, the premise of the utility model structure is not being departed from
Under, several modifications and improvements can also be made, these should also be considered as the scope of protection of the utility model.
Claims (4)
- A kind of 1. device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt, it is characterised in that：Including supporting rack (1) With centering and natural measurement of tilt component, the centering and natural measurement of tilt component include horizontal guide rail seat (5), lead screw motor (6), silk Bar (11), paw (12), paw sliding block mounting base (9), obliquity sensor (13), horizontal motor seat (7)；The supporting rack (1) horizontal guide rail seat (5) is fixedly connected with, both sides are respectively fixed with guide rail (10) and level below the horizontal guide rail seat (5) Motor cabinet (7), is provided with lead screw motor (6) on the horizontal motor seat (7)；Guide rail (10) both ends are respectively provided with to match therewith The sliding block (8) of conjunction, the paw sliding block mounting base (9) being fixedly connected with sliding block (8) and is fixedly connected with paw sliding block mounting base (9) Paw (12), the paw (12) is upper and lower adjustable mechanism, and obliquity sensor (13) is housed on paw (12), inclination angle sensing Device (13) is used to be bonded crystal bar end face to be measured under the drive of paw (12)；The lead screw motor (6) passes through screw (11) The paw sliding block mounting base (9) with guide rail (10) both ends is connected respectively, the screw (11) between the paw sliding block mounting base (9) Shaft coupling (14) is equipped with, which is used to make screw (11) direction of rotation of its both sides opposite.
- 2. according to claim 1 exist for silicon single crystal rod automatic inspection line length and the device of natural measurement of tilt, its feature In：Support frame as described above (1) both sides are respectively provided with linear measure longimetry component, and the linear measure longimetry component includes electric rotating machine (17), can Adjust mounting assembly (16) and laser range sensor (15)；The adjustable mounting assembly (16) is installed on supporting rack (1), adjustable peace Arrangement (16) relative to supporting rack (1) can up and down adjustment, be fixedly connected with electric rotating in the adjustable mounting assembly (16) Machine (17), the laser range sensor (15) are connected by shaft coupling with electric rotating machine (17), which drives Laser range sensor (15) synchronous rotary, the laser range sensor (15) are used for the length for measuring crystal bar.
- 3. a kind of device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt according to claim 1 or 2, its It is characterized in that：The screw (11) includes left clamping screw and right clamping screw, between left clamping screw and right clamping screw Connected by shaft coupling (14), when the lead screw motor (6) being connected with the screw (11) works, left clamping screw and right clamping silk Bar is realized by shaft coupling and reversely rotated.
- 4. a kind of device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt according to claim 1 or 2, its It is characterized in that：The paw (12) is connected by two level hinge and the obliquity sensor (13), can pass the inclination angle Sensor (13) is rotated around X-axis and Y-axis, and during with paw (12) centering crystal bar to be detected, two level hinge can make inclination angle Sensor (13) is bonded completely with crystal bar end face, measures end face gradient.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720993326.8U CN207231406U (en) | 2017-08-09 | 2017-08-09 | A kind of device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720993326.8U CN207231406U (en) | 2017-08-09 | 2017-08-09 | A kind of device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt |
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| CN207231406U true CN207231406U (en) | 2018-04-13 |
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| CN201720993326.8U Active CN207231406U (en) | 2017-08-09 | 2017-08-09 | A kind of device for being used for silicon single crystal rod automatic inspection line length and natural measurement of tilt |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107764188A (en) * | 2017-09-20 | 2018-03-06 | 杭州慧翔电液技术开发有限公司 | A kind of silicon single crystal rod length and gradient detection means and its detection method |
| CN109406982A (en) * | 2018-10-29 | 2019-03-01 | 杭州中为光电技术有限公司 | Silicon single crystal rod parameter automatic detection apparatus |
| CN109405748A (en) * | 2018-11-07 | 2019-03-01 | 天津中环领先材料技术有限公司 | A kind of crystal self-checking device and method |
| CN110500961A (en) * | 2019-07-24 | 2019-11-26 | 西南交通大学 | A kind of EMU car body length rapid measurement device and measurement method |
| CN114047383A (en) * | 2021-11-02 | 2022-02-15 | 中环领先半导体材料有限公司 | Automatic testing equipment and method for resistivity of single crystal silicon rod |
| CN116026264A (en) * | 2023-01-05 | 2023-04-28 | 扬州晶樱光电科技有限公司 | Single polycrystalline silicon rod detection device |
| CN116379920A (en) * | 2023-03-28 | 2023-07-04 | 曲靖阳光新能源股份有限公司 | Crystal silicon finished product square bar detection equipment |
-
2017
- 2017-08-09 CN CN201720993326.8U patent/CN207231406U/en active Active
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107764188A (en) * | 2017-09-20 | 2018-03-06 | 杭州慧翔电液技术开发有限公司 | A kind of silicon single crystal rod length and gradient detection means and its detection method |
| CN107764188B (en) * | 2017-09-20 | 2020-02-18 | 杭州慧翔电液技术开发有限公司 | Device and method for detecting length and inclination of single crystal silicon rod |
| CN109406982A (en) * | 2018-10-29 | 2019-03-01 | 杭州中为光电技术有限公司 | Silicon single crystal rod parameter automatic detection apparatus |
| CN109405748A (en) * | 2018-11-07 | 2019-03-01 | 天津中环领先材料技术有限公司 | A kind of crystal self-checking device and method |
| CN110500961A (en) * | 2019-07-24 | 2019-11-26 | 西南交通大学 | A kind of EMU car body length rapid measurement device and measurement method |
| CN110500961B (en) * | 2019-07-24 | 2020-04-28 | 西南交通大学 | Rapid measuring device and measuring method for length of train body of motor train unit |
| CN114047383A (en) * | 2021-11-02 | 2022-02-15 | 中环领先半导体材料有限公司 | Automatic testing equipment and method for resistivity of single crystal silicon rod |
| CN116026264A (en) * | 2023-01-05 | 2023-04-28 | 扬州晶樱光电科技有限公司 | Single polycrystalline silicon rod detection device |
| CN116026264B (en) * | 2023-01-05 | 2023-09-26 | 扬州晶樱光电科技有限公司 | Single polycrystalline silicon rod detection device |
| CN116379920A (en) * | 2023-03-28 | 2023-07-04 | 曲靖阳光新能源股份有限公司 | Crystal silicon finished product square bar detection equipment |
| CN116379920B (en) * | 2023-03-28 | 2024-02-02 | 曲靖阳光新能源股份有限公司 | Crystal silicon finished product square bar detection equipment |
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Effective date of registration: 20181008 Address after: 311100 No. 96, Dragon Boat Road, Qianjiang Economic Development Zone, Yuhang District, Hangzhou, Zhejiang Patentee after: Hangzhou Zhongwei Photoelectricity Co., Ltd. Address before: 310030 4, 5 building, 16 West Garden Road, West Lake science and Technology Park, three pier Town, Xihu District, Hangzhou, Zhejiang. Patentee before: Hangzhou Huixiang Electrohydraulic Technology Development Co., Ltd. |