CN207834257U - Wafer pickling tank systems - Google Patents
Wafer pickling tank systems Download PDFInfo
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- CN207834257U CN207834257U CN201721088756.1U CN201721088756U CN207834257U CN 207834257 U CN207834257 U CN 207834257U CN 201721088756 U CN201721088756 U CN 201721088756U CN 207834257 U CN207834257 U CN 207834257U
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- descaling bath
- acid solution
- spiral
- pipe
- double
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Abstract
A kind of wafer pickling tank systems, quartzy supporting plate is equipped in descaling bath, the cleaning gaily decorated basket is placed on the quartzy supporting plate, the cleaning gaily decorated basket is for carrying wafer, the bottom of descaling bath is equipped with spray tube, the outlet end of heating pipe of the curved connection one with heating system under spray tube, the input end of heating pipe is for inputting acid solution, the bottom surface of descaling bath is rendered as skewed, the side wall that flows to of acid solution is equipped with the first waste pipe, the double-deck quartzy cylinder of one, top housing of descaling bath, the double-deck quartz cylinder is used to accept the acid solution of descaling bath spilling, the bottom of the double-deck quartz cylinder connects the second waste pipe, first waste pipe and the second exhaust manifold have been connected to the entrance of the spiral waste liquid bottle of cooling effect after connecing, the outer wall of spiral waste liquid bottle is close to be equipped with spiral quartz ampoule, recycling of the outlet of spiral waste liquid bottle for acid solution.
Description
Technical field
The utility model belongs to technical field of semiconductors, more particularly to a kind of wafer pickling tank systems.
Background technology
It is mentioned in the patent document of Publication No. CN1338771, it is " most frequent in the technique of integrated circuit package
Step is exactly that chip is cleaned.The clean purpose of chip is miscellaneous in order to remove the organic compound being attached in wafer surface, metal
The pollutants such as matter or particle.And influence of these pollutants for product subsequent process steps is very big.The pollution of metal impurities
Can cause p-n electric leakage, reduction minority carrier lifetime, reduce grid oxic horizon breakdown voltage.The attachment of particle then can shadow
Ring the authenticity of lithography process pattern transfer, or even cause circuit structure short-circuit ", it is seen that cleaning be for wafer manufacturing process and
Its is important.But this document does not provide the design scheme of descaling bath in cleaning process.In existing disclosed file, close
Lack ripe system schema in the structure of wafer descaling bath.
Utility model content
The utility model provides a kind of wafer pickling tank systems.
A kind of wafer pickling tank systems, descaling bath is interior to be equipped with quartzy supporting plate, and the cleaning gaily decorated basket is placed on the quartzy supporting plate, clearly
The gaily decorated basket is washed to be used to carry wafer,
The bottom of descaling bath is equipped with spray tube, the outlet end of heating pipe of the curved connection one with heating system under spray tube,
The input end of heating pipe is used to input acid solution,
The bottom surface of descaling bath be rendered as it is skewed, acid solution flow to side wall be equipped with the first waste pipe,
The double-deck quartzy cylinder of one, top housing of descaling bath, the double-deck quartz cylinder are used to accept the acid solution of descaling bath spilling,
The bottom of the double-deck quartz cylinder connects the second waste pipe,
First waste pipe and the second exhaust manifold have been connected to the entrance of the spiral waste liquid bottle of cooling effect, spiral waste liquid after connecing
The outer wall of bottle is close to be equipped with spiral quartz ampoule, and the outlet of spiral waste liquid bottle is used for the recycling of acid solution.
The open edge of descaling bath is covered with overflow launder.
The wafer pickling tank systems of the utility model provide a kind of wafer pickling system that can heat cleaning acid solution, spiral shell
Waste liquid bottle on-line cooling drain is revolved, cooling efficiency is accelerated, meets the needs of wafer pickling.
Description of the drawings
Detailed description below is read by reference to attached drawing, the utility model illustrative embodiments above-mentioned and other
Objects, features and advantages will become prone to understand.In the accompanying drawings, show that this practicality is new by way of example rather than limitation
Several embodiments of type, wherein：
The composition schematic diagram of Fig. 1 the utility model.
1 --- spiral waste liquid bottle (plays cooling effect), and 2 --- the first waste pipe, 3 --- the double-deck quartz cylinder, 4 --- cleaning
The gaily decorated basket, 5 --- quartzy supporting plate, 6 --- descaling bath, 7 --- spray tube, 8 --- heating pipe (band heating system), 9 --- second
Waste pipe.
Specific implementation mode
As shown in Figure 1, a kind of wafer pickling tank systems, descaling bath is interior to be equipped with quartzy supporting plate, and the cleaning gaily decorated basket is placed on described
Quartzy supporting plate, the cleaning gaily decorated basket is for carrying wafer.
The bottom of descaling bath is equipped with spray tube, the outlet end of heating pipe of the curved connection one with heating system under spray tube,
The input end of heating pipe is for inputting acid solution.
The bottom surface of descaling bath is rendered as skewed, and the side wall that flows to of acid solution is equipped with the first waste pipe, outside the top of descaling bath
The double-deck quartzy cylinder of one, set, the double-deck quartz cylinder are used to accept the acid solution of descaling bath spilling, the bottom connection second of the double-deck quartz cylinder
Waste pipe.
First waste pipe and the second exhaust manifold have been connected to the entrance of the spiral waste liquid bottle of cooling effect, spiral waste liquid after connecing
The outer wall of bottle is close to be equipped with spiral quartz ampoule, and the outlet of spiral waste liquid bottle is used for the recycling of acid solution.The open edge of descaling bath
It is covered with overflow launder.
It is worth noting that being created although foregoing teachings describe the utility model by reference to several specific implementation modes
Spirit and principle, it should be appreciated that, it is not limited to the specific embodiments disclosed for the utility model, is drawn to various aspects
Divide and does not also mean that the feature in these aspects cannot combine, it is this to divide the convenience merely to statement.The utility model purport
Covering various modifications and equivalent arrangements included in spirit and scope of the appended claims.
Claims (2)
1. a kind of wafer pickling tank systems, which is characterized in that be equipped with quartzy supporting plate in descaling bath, the cleaning gaily decorated basket is placed on the stone
English supporting plate, the cleaning gaily decorated basket are used to carry wafer,
The bottom of descaling bath is equipped with spray tube, the outlet end of heating pipe of the curved connection one with heating system, heating under spray tube
The input end of pipe is used to input acid solution,
The bottom surface of descaling bath be rendered as it is skewed, acid solution flow to side wall be equipped with the first waste pipe,
The double-deck quartzy cylinder of one, top housing of descaling bath, the double-deck quartz cylinder are used to accept the acid solution of descaling bath spilling,
The bottom of the double-deck quartz cylinder connects the second waste pipe,
First waste pipe and the second exhaust manifold have been connected to the entrance of the spiral waste liquid bottle of cooling effect after connecing, spiral waste liquid bottle
Outer wall is close to be equipped with spiral quartz ampoule, and the outlet of spiral waste liquid bottle is used for the recycling of acid solution.
2. wafer pickling tank systems as described in claim 1, which is characterized in that the open edge of descaling bath is covered with overflow launder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721088756.1U CN207834257U (en) | 2017-08-29 | 2017-08-29 | Wafer pickling tank systems |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721088756.1U CN207834257U (en) | 2017-08-29 | 2017-08-29 | Wafer pickling tank systems |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207834257U true CN207834257U (en) | 2018-09-07 |
Family
ID=63384073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721088756.1U Active CN207834257U (en) | 2017-08-29 | 2017-08-29 | Wafer pickling tank systems |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207834257U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117457554A (en) * | 2023-12-25 | 2024-01-26 | 南轩（天津）科技有限公司 | Wafer pickling device |
-
2017
- 2017-08-29 CN CN201721088756.1U patent/CN207834257U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117457554A (en) * | 2023-12-25 | 2024-01-26 | 南轩（天津）科技有限公司 | Wafer pickling device |
| CN117457554B (en) * | 2023-12-25 | 2024-03-19 | 南轩（天津）科技有限公司 | Wafer pickling device |
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