CN207780483U - A kind of lithographic multiple exposure device - Google Patents
A kind of lithographic multiple exposure device Download PDFInfo
- Publication number
- CN207780483U CN207780483U CN201820136478.0U CN201820136478U CN207780483U CN 207780483 U CN207780483 U CN 207780483U CN 201820136478 U CN201820136478 U CN 201820136478U CN 207780483 U CN207780483 U CN 207780483U
- Authority
- CN
- China
- Prior art keywords
- link block
- exposure device
- manipulator
- slide way
- cross slide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The utility model discloses a kind of lithographic multiple exposure devices, including platform, glue spreading apparatus and etching device, the centre of platform upper end is equipped with exposure device, platform is left, right end is respectively equipped with first, second link block, it is equipped with first cross slide way between on the right side of first link block and on the left of exposure device, it is equipped with the second cross slide way between on the left of second link block and on the right side of exposure device, first, it is connected with first between second cross slide way, second electronic sliding shoe, the upper end of two electronic sliding shoes is respectively equipped with first, second clamping bench, the right side of first link block and the left side of the second link block, pass through first respectively, second manipulator is equipped with glue spreading apparatus and etching device；Meanwhile first, second is equipped with one between link block and can emit the light-emitting device of yellow light downwards；The utility model uses manipulator automated exchanged cutter, gluing, etching device, exposure device and yellow light structure, carries out a gluing combination multiple exposure and processing, greatly reduces production cost, improve processing efficiency.
Description
Technical field
The utility model is related to a kind of exposure device more particularly to a kind of lithographic multiple exposure devices, belong to semiconductor light
Lithography field.
Background technology
With the development of semiconductor technology, photoetching technique transmits graph technology and has become indispensable technology,
The reduction of photoetching cost has very important meaning to semiconductor production；But conventional exposure, which is all a photoetching, to be added once
Development, corresponding one-time process processing are such to be disadvantageous in that：Efficiency is low, of high cost；After improvement, first having invented can
In the environment of yellow light area, to carry out a gluing combination multiple exposure and processing, greatly reduce production cost, improves and add
Work efficiency rate.But the equipment of profession is also lacked to carry out the invention running.
Invention content
The utility model proposes a kind of lithographic multiple exposure device, lithographic multiple exposure dress aiming at the above problem
It sets and is greatly improved processing efficiency, reduce production cost.
In order to solve the above technical problems, a kind of lithographic multiple exposure device provided by the utility model, including a platform, one
Glue spreading apparatus and an etching device, the mesa base are equipped with vacuum cup, and the centre of the platform upper end is equipped with exposure and fills
It sets, the platform sinistral end and right end are respectively equipped in vertical the first link block and the second link block, and first link block is right
It is equipped with first cross slide way between on the left of side and exposure device, is equipped between exposure device right side on the left of second link block
Second cross slide way slidably connects between the first cross slide way and the second cross slide way respectively based on servo-controlled
The upper end of one electronic sliding shoe and the second electronic sliding shoe, the first electronic sliding shoe and the second electronic sliding shoe is respectively equipped with
First clamping bench and the second clamping bench, the right side of first link block and the left side of the second link block, are respectively equipped with and are based on
Servo-controlled first manipulator and the second manipulator, the movable end of first manipulator are equipped with glue spreading apparatus, and described
The movable end of two manipulators is equipped with etching device；Meanwhile be equipped with one between first link block and the second link block can be to
The light-emitting device of lower transmitting yellow light.
Preferably as the utility model, the light-emitting device includes that a LED flat lamp and a brightness adjust dress
It sets, the brightness regulating device is installed on the outside of the second link block, and the brightness regulating device and LED flat lamp
Driving be electrically connected.
The utility model uses manipulator automated exchanged cutter, gluing, etching device, exposure device and yellow light structure,
A gluing combination multiple exposure and processing are carried out, production cost is greatly reduced, improves processing efficiency.
Description of the drawings
Shown in FIG. 1 is the appearance assumption diagram of the utility model；
Wherein：1, platform；2, glue spreading apparatus；3, etching device；4, vacuum cup；5, exposure device；6, the first link block；
7, the second link block；8, first cross slide way；9, the second cross slide way；10, the first electronic sliding shoe；11, the second electronic sliding
Block；12, the first clamping bench；13, the second clamping bench；14, the first manipulator；15, the second manipulator；16, LED flat lamp；17, light
Brightness regulating apparatus.
Specific implementation mode
The utility model is described in more detail with reference to the accompanying drawings and detailed description.
As shown in Figure 1, a kind of lithographic multiple exposure device, including a platform 1, a glue spreading apparatus 2 and an etching device
3, it is equipped with vacuum cup 4 in 1 bottom of platform, exposure device 5, the left end and right end point of platform 1 are equipped in the centre of platform upper end
It She You be in the first link block 6 and the second link block 7 vertically, be equipped between 6 right side of the first link block and 5 left side of exposure device
First cross slide way 8,7 left side of the second link block and exposure device are equipped with the second cross slide way 9 between 5 right side, and first laterally leads
It is slidably connected respectively between rail 8 and the second cross slide way 9 electronic based on the servo-controlled first electronic sliding shoe 10 and second
Sliding shoe 11 is respectively equipped with the first clamping bench 12 and second in the upper end of the first electronic sliding shoe 10 and the second electronic sliding shoe 11
Clamping bench 13 is respectively equipped in the right side of the first link block 6 and the left side of the second link block 7 based on servo-controlled first
The movable end of manipulator 14 and the second manipulator 15, the first manipulator 14 is equipped with glue spreading apparatus 2, the activity of the second manipulator 15
End is equipped with etching device 3；Meanwhile a hair that can emit yellow light downwards is equipped between the first link block 6 and the second link block 7
Electro-optical device.
In the present invention, preferred light-emitting device includes a LED flat lamp 16 and a brightness regulating device
17, brightness regulating device 17 is installed on the outside of the second link block 7, and brightness regulating device 17 and LED flat lamp 16
Driving be electrically connected.
What above structure specifically used in this way：Photoetching material is first placed on the first clamping bench 12 and the second clamping bench 13
And fix, it is then turned on LED flat lamp 16, and brightness is regulated by brightness regulating device 17, then passes through the first machine
The movement of tool hand 14 and the second manipulator 15, after carrying out gluing and etching, gluing and etching to photoetching material, by photoetching material
Material, which is put into exposure device 5, carries out multiple exposure.
Generally speaking, the utility model uses manipulator automated exchanged cutter, gluing, etching device, exposure device and yellow light
Irradiating structure carries out a gluing combination multiple exposure and processing, greatly reduces production cost, improve processing efficiency.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
For art personnel, without deviating from the technical principle of the utility model, several improvements and modifications can also be made, these change
The scope of protection of the utility model is also should be regarded as into modification.
Claims (2)
1. a kind of lithographic multiple exposure device, including a platform, a glue spreading apparatus and an etching device, the mesa base are set
There are vacuum cup, the centre of the platform upper end to be equipped with exposure device, it is in vertical that the platform sinistral end and right end, which are respectively equipped with,
First link block and the second link block are equipped with first cross slide way between the first link block right side and exposure device left side,
The second cross slide way, the first cross slide way and the second cross are equipped between on the left of second link block and on the right side of exposure device
It is slidably connected respectively between direction guiding rail based on the servo-controlled first electronic sliding shoe and the second electronic sliding shoe, described first
The upper end of electronic sliding shoe and the second electronic sliding shoe is respectively equipped with the first clamping bench and the second clamping bench, which is characterized in that institute
The right side of the first link block and the left side of the second link block are stated, is respectively equipped with based on servo-controlled first manipulator and second
The movable end of manipulator, first manipulator is equipped with glue spreading apparatus, and the movable end of second manipulator is equipped with etching
Device；Meanwhile a light-emitting device that can emit yellow light downwards is equipped between first link block and the second link block.
2. lithographic multiple exposure device as described in claim 1, which is characterized in that the light-emitting device includes a LED flat plate
Lamp and a brightness regulating device, the brightness regulating device are installed on the outside of the second link block, and the light
The driving of degree regulating device and LED flat lamp is electrically connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820136478.0U CN207780483U (en) | 2018-01-26 | 2018-01-26 | A kind of lithographic multiple exposure device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820136478.0U CN207780483U (en) | 2018-01-26 | 2018-01-26 | A kind of lithographic multiple exposure device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207780483U true CN207780483U (en) | 2018-08-28 |
Family
ID=63211812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820136478.0U Active CN207780483U (en) | 2018-01-26 | 2018-01-26 | A kind of lithographic multiple exposure device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207780483U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113141718A (en) * | 2021-04-21 | 2021-07-20 | 广东科视光学技术股份有限公司 | Method for forming connection line on glass substrate through single photoetching head |
-
2018
- 2018-01-26 CN CN201820136478.0U patent/CN207780483U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113141718A (en) * | 2021-04-21 | 2021-07-20 | 广东科视光学技术股份有限公司 | Method for forming connection line on glass substrate through single photoetching head |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207780483U (en) | A kind of lithographic multiple exposure device | |
| CN204748805U (en) | Plank over -and -under type closing device | |
| CN206201011U (en) | A kind of multifunctional product conveying robot | |
| CN106738123A (en) | Intelligent numerical control pin implanter | |
| CN105522571A (en) | Automatic stamping mechanical arm | |
| CN107877535A (en) | A kind of jaw formula manipulator | |
| ATE200193T1 (en) | ASSEMBLY MACHINE FOR THE TOP AND SOLE OF A SHOE | |
| CN203764513U (en) | Automatic clamping device for shoe sole glue sprayer | |
| CN104665124A (en) | Automatic shoe material delivery mechanism | |
| CN204519559U (en) | Mechanism sent to by a kind of automation footwear material | |
| CN205464852U (en) | Positioning tooling | |
| CN107671879A (en) | A kind of multi-functional grate robot clamp | |
| CN208317124U (en) | PIN is in the device of one on a kind of mono- doubling plate of PCB and multi-layer board | |
| CN204094318U (en) | Laser scribing positioner | |
| CN103978521B (en) | Milling machine is used in the processing of stall bars chord code | |
| CN206551251U (en) | A kind of marking press | |
| CN204602532U (en) | Full-automatic injecting rubber coating | |
| CN103331405B (en) | Automatic riveting rivet fixture | |
| CN206717764U (en) | A kind of nozzle ball assembly tool | |
| CN202222473U (en) | Fixing device for mask ear cords | |
| CN205944043U (en) | LED gold thread detection device | |
| CN205368677U (en) | Meshbelt sewing machine | |
| CN203919234U (en) | Stall bars chord code processing milling machine | |
| CN204777863U (en) | Be applied to magic area and tailor feeding mechanism of usefulness | |
| CN109454435A (en) | A kind of clamping of tension spring and positioning device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |