CN207703245U - A kind of multi-functional overturning check machine of automatic photo-mask - Google Patents
A kind of multi-functional overturning check machine of automatic photo-mask Download PDFInfo
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- CN207703245U CN207703245U CN201721311194.2U CN201721311194U CN207703245U CN 207703245 U CN207703245 U CN 207703245U CN 201721311194 U CN201721311194 U CN 201721311194U CN 207703245 U CN207703245 U CN 207703245U
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- check machine
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Abstract
The utility model discloses a kind of multi-functional overturning check machines of automatic photo-mask, including check machine main body and bigeminy part, the upper end of the check machine main body is provided with symmetrical FFU air filters, and the FFU air filters are tightly fastened with check machine main body, the top of the FFU air filters is equipped with FFU controllers, and the bottom of the FFU controllers is contacted with the surface of FFU air filters, by the air source tupe and check machine main body that combine traditional bigeminy part, the equipment operation condition of object can be detected, processing conditions, defect, the work of shape and size etc., the overturning of 360 ° of workpiece can also be carried out to workpiece using roll-over table, improve detection zone cleaniliness classs；Processing safety is improved, when safe pull rope ensures equipment operation, personnel cannot enter in equipment, and when safe pull rope ensures equipment operation, personnel cannot enter in equipment, once someone, which moves drawstring, leads to equipment emergency stop, ensure the safety of operating personnel.
Description
Technical field
The utility model is related to overturn check machine technical field, specially a kind of multi-functional overturning of automatic photo-mask checks
Machine.
Background technology
Nowadays the multi-functional overturning check machine of automatic photo-mask is economical and the epoch of science and technology all high speed developments, with machinery
The constantly improve of the fast development of manufacturing, product quality and the accuracy of manufacture and raising, the requirement to bigeminy part and equipment
It is higher and higher.The research for reinforcing detection technique in automated machine manufacture system, it is rapid real for ensureing the quality of machine-building
The automation of existing detection device, can not only eliminate the error caused by some human factors, but also enable to detect as possible
Result more stablize, obtain higher confidence level, constantly promoted labor productivity all have very important significance.
But the existing multi-functional overturning check machine of automatic photo-mask, automatic detection only merely detect part to be processed
Parameter, but the shape and size of detected work condition are not very accurate, and overturning wire body delivery platform cannot be into
The overturning that 360 ° of row, at present using overturning by hand, as product size is increasing, manual operations has been unable to meet actual production
It is required that while hand-manipulated easy to glass substrate generation damage.
So how the multi-functional overturning check machine of design automation light shield, becoming us will currently solve the problems, such as.
Invention content
The purpose of this utility model is to provide the multi-functional overturning check machines of automatic photo-mask, to solve above-mentioned background technology
Middle proposition is at present using overturning by hand, and as product size is increasing, manual operations has been unable to meet actual production requirement, together
When manual operations be easy damage is led to the problem of to glass substrate.
To achieve the above object, the utility model provides the following technical solutions：A kind of multi-functional overturning inspection of automatic photo-mask
Machine, including check machine main body and bigeminy part are looked into, the upper end of the check machine main body is provided with symmetrical FFU air filters, and
The FFU air filters are tightly fastened with check machine main body, and the top of the FFU air filters is equipped with FFU controllers, and
The bottom of the FFU controllers is contacted with the surface of FFU air filters, and the lower end of the FFU air filters is provided with
One balance crane and lifting platform, and first balance crane and lifting platform are flexibly connected with the inner wall of check machine main body, described
The downside of one balance crane is equipped with the first shield, and first shield is embedding is set in check machine main body, first shield
Bottom righthand side be equipped with surface inspection shot-light power supply, be provided with operation panel on the upside of the surface inspection shot-light power supply, and described
Operation panel is electrically connected with check machine main body, and toilet, and the toilet and inspection are equipped on the outside of the operation panel
It looks into owner's body to be fixed by screws, the upper end of the toilet is provided with the first shield and the first frame, and described first
Shield is contacted with the outer wall of check machine main body, and first frame insertion be arranged in toilet, the toilet it is interior
Portion is provided with roll-over table, and the inner wall in check machine main body, the right end of the roll-over table is arranged in the both ends insertion of the roll-over table
Equipped with safety rope pull rod and bigeminy part, the upside of the bigeminy part is equipped with repair shield, and the repair shield and inspection owner
Body closely connects, and one end of the repair shield is provided with Case cover plate supports, and the Case cover plate supports and repair
Shield is flexibly connected, and the right side of the Case cover plate supports is equipped with Case, and the upper right side of the Case is equipped with roll-over table pillar,
And the roll-over table pillar is closely connect with check machine main body, one end of the roll-over table pillar is equipped with the second shield.
Further, the left end of first shield is provided with overturning driving, and overturning driving is driven with the overturning
Dynamic left side is in contact.
Further, switch gate is provided on the outside of the toilet, and the switch gate runs through setting in the cleaning
The surface of room.
Further, the lower right side of the FFU air filters is equipped with power control cabinet, and power control cabinet insertion is arranged in institute
It states in check machine main body.
Further, the upper end of the roll-over table is equipped with the second frame, and second frame and roll-over table phase from.
Further, the lower-left end of the repair shield is provided with the second balance crane, and second balance crane with it is described
Toilet closely connects.
Further, the lower left side of the roll-over table pillar is provided with connector, and the connector and the check machine
Main body is connected.
Further, the downside of the check machine main body is equipped with Power Base, and the Power Base and check machine
Main body is fixedly connected.
Further, the right end of second shield is equipped with turnover driving mechanism, and the turnover driving mechanism and second
Shield is in close contact.
Compared with prior art, the utility model has the beneficial effects that：The multi-functional overturning check machine of this kind of automatic photo-mask,
Reduce the probability that human factor causes damaged products；Realize 360 ° of overturnings；Improve detection zone cleaniliness classs；Improve operation peace
Quan Xing, when safe pull rope ensures equipment operation, personnel cannot enter in equipment, and when safe pull rope ensures equipment operation, personnel are not
It can enter in equipment, once someone, which moves drawstring, leads to equipment emergency stop, ensure the safety of operating personnel.
Description of the drawings
Fig. 1 is the overall structure diagram of the utility model；
Fig. 2 is the partial structural diagram of the utility model check machine main body；
Fig. 3 is the partial structural diagram of the utility model bigeminy part；
Fig. 4 is the partial structural diagram of the utility model repair shield；
Fig. 5 is the partial structural diagram of the utility model Case cover plate supports；
Fig. 6 is the partial structural diagram of the second shield of the utility model；
In figure：1- check machine main bodys；2- operation panels；3- power control cabinets；4- surface inspection shot-light power supplys；5- first is balanced
It hangs；6- lifting platforms；7- overturning drivings；8-FFU air filters；The first shields of 9-；10-FFU controllers；11- switch gates；12-
Toilet；The first frames of 13-；14- safety rope pull rods；15- bigeminy parts；16- roll-over tables；The second frames of 17-；18- repair shields
Cover；The second balance cranes of 19-；20-Case；21-Case cover plate supports；22- roll-over table pillars；23- connectors；24-Power
Base；The second shields of 25-；26- turnover driving mechanisms.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
The every other embodiment obtained, shall fall within the protection scope of the present invention.
- 6 are please referred to Fig.1, the utility model provides a kind of technical solution：A kind of multi-functional overturning inspection of automatic photo-mask
The upper end of machine, including check machine main body 1 and bigeminy part 15, check machine main body 1 is provided with symmetrical FFU air filters 8, and
FFU air filters 8 are tightly fastened with check machine main body 1, and the top of FFU air filters 8 is equipped with FFU controllers 10, and FFU
The bottom of controller 10 is contacted with the surface of FFU air filters 8, and the lower end of FFU air filters 8 is provided with the first balance crane
5 and lifting platform 6, and the first balance crane 5 and lifting platform 6 are flexibly connected with the inner wall of check machine main body 1, the first balance crane 5
Downside is equipped with the first shield 9, and the first shield 9 is embedding is set in check machine main body 1, and the bottom righthand side of the first shield 9 is equipped with table
Face checks that shot-light power supply 4, the upside of surface inspection shot-light power supply 4 are provided with operation panel 2, and operation panel 2 and inspection owner
Body 1 is electrically connected, and the outside of operation panel 2 is equipped with toilet 12, and toilet 12 is screwed with check machine main body 1
Connection, the upper end of toilet 12 are provided with the first shield 9 and the first frame 13, and the first shield 9 and check machine main body 1 is outer
Wall contacts, and the insertion of the first frame 13 is arranged in toilet 12, and toilet 12 is internally provided with roll-over table 16, and overturns
The inner wall in check machine main body 1 is arranged in the both ends insertion of platform 16, and the right end of roll-over table 16 is equipped with safety rope pull rod 14 and bigeminy part
15, the upside of bigeminy part 15 is equipped with repair shield 18, and repairs shield 18 and closely connect with check machine main body 1, repairs shield 18
One end be provided with Case cover plate supports 21, and Case cover plate supports 21 are flexibly connected with repair shield 18, Case cover boards
The right side of support element 21 is equipped with Case20, and the upper right side of Case20 is equipped with roll-over table pillar 22, and roll-over table pillar 22 and inspection
Owner's body 1 closely connects, and one end of roll-over table pillar 22 is equipped with the second shield 25.
Further, the left end of the first shield 9 is provided with overturning driving 7, and overturns the left side of driving 7 and overturning driving 7
It is in contact, workpiece 360 deg overturning can be carried out with overturning driving 7.
Further, the outside of toilet 12 is provided with switch gate 11, and switch gate 11 is through being arranged in toilet 12
Surface can observe 1 operation conditions of check machine main body using switch gate 11.
Further, the lower right side of FFU air filters 8 is equipped with power control cabinet 3, and the insertion of power control cabinet 3 is arranged in check machine
In main body 1, the repair of check machine is carried out using power control cabinet 3.
Further, the upper end of roll-over table 16 is equipped with the second frame 17, and the second frame 17 and 16 phase of roll-over table are from sharp
The cleaning of sundries on the second frame 17 is carried out with roll-over table 16.
Further, the lower-left end of repair shield 18 is provided with the second balance crane 19, and the second balance crane 19 and toilet
12 close connections.It is convenient for the conveying of workpiece by repairing shield 18.
Further, the lower left side of roll-over table pillar 22 is provided with connector 23, and connector 23 and 1 phase of check machine main body
Even, by some automatic detection systems, relevant parameter is detected automatically.
Further, the downside of check machine main body 1 is equipped with Power Base24, and Power Base24 and check machine main body
1 is fixedly connected, and is convenient for the lifting of workpiece.
Further, the right end of the second shield 25 is equipped with turnover driving mechanism 26, and turnover driving mechanism 26 and second protects
Cover 25 is in close contact, and can be avoided extraneous intervention, can also be sought the simplification of process.
Operation principle：First, check machine main body 1 is powered on, operating personnel stand by operation panel 2；Pass through conveyance
Glass substrate is put into 6 position of lifting platform by equipment, and transport device exits；Glass substrate is raised to 16 height of roll-over table by lifting platform 6
Position, the first balance crane 5 accommodate glass substrate, and lifting platform 6 declines；Operating personnel control overturning by operation panel 2 and need to reach
The angle arrived；Flip angle is locked, opens safety rope pull rod 14, operator enters 16 side of roll-over table and checks glass substrate
And cleaning, turnover driving mechanism 26 drive roll-over table 16 to overturn workpiece.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is appreciated that can these embodiments be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaiied
Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.
Claims (9)
1. a kind of multi-functional overturning check machine of automatic photo-mask, including check machine main body (1) and bigeminy part (15), feature exists
In：The upper end of the check machine main body (1) is provided with symmetrical FFU air filters (8), and the FFU air filters (8)
It is tightly fastened with check machine main body (1), the top of the FFU air filters (8) is equipped with FFU controllers (10), and the FFU
The bottom of controller (10) is contacted with the surface of FFU air filters (8), and the lower end of the FFU air filters (8) is provided with
First balance crane (5) and lifting platform (6), and first balance crane (5) and lifting platform (6) are interior with check machine main body (1)
Wall is flexibly connected, and the downside of first balance crane (5) is equipped with the first shield (9), and first shield (9) is embedding is set on
In check machine main body (1), the bottom righthand side of first shield (9) is equipped with surface inspection shot-light power supply (4), and the surface inspection is penetrated
Operation panel (2) is provided on the upside of lamp power supply (4), and the operation panel (2) is electrically connected with check machine main body (1), institute
It states and toilet (12) is installed on the outside of operation panel (2), and the toilet (12) and check machine main body (1) are solid by screw
Fixed connection, the upper end of the toilet (12) is provided with the first shield (9) and the first frame (13), and first shield (9)
It is contacted with the outer wall of check machine main body (1), and first frame (13) insertion is arranged on toilet (12), the cleaning
Room (12) is internally provided with roll-over table (16), and the both ends insertion of the roll-over table (16) is arranged in check machine main body (1)
The right end of inner wall, the roll-over table (16) is equipped with safety rope pull rod (14) and bigeminy part (15), the upside of the bigeminy part (15)
Equipped with repair shield (18), and the repair shield (18) closely connect with check machine main body (1), the repair shield (18)
One end is provided with Case cover plate supports (21), and the Case cover plate supports (21) are flexibly connected with repair shield (18),
The right side of the Case cover plate supports (21) is equipped with Case (20), and the upper right side of the Case (20) is equipped with roll-over table pillar
(22), and the roll-over table pillar (22) is closely connect with check machine main body (1), and one end of the roll-over table pillar (22) is equipped with
Second shield (25).
2. the multi-functional overturning check machine of a kind of automatic photo-mask according to claim 1, it is characterised in that：First shield
The left end of cover (9) is provided with overturning driving (7), and overturning driving (7) drives with the overturning and is in contact on the left of (7).
3. the multi-functional overturning check machine of a kind of automatic photo-mask according to claim 1, it is characterised in that：The toilet
(12) be provided with switch gate (11) on the outside of, and the switch gate (11) through setting the toilet (12) surface.
4. the multi-functional overturning check machine of a kind of automatic photo-mask according to claim 1, it is characterised in that：The FFU is empty
The lower right side of air filter (8) is equipped with power control cabinet (3), and the embedded setting of the power control cabinet (3) is in the check machine main body (1)
In.
5. the multi-functional overturning check machine of a kind of automatic photo-mask according to claim 1, it is characterised in that：The roll-over table
(16) upper end is equipped with the second frame (17), and second frame (17) and roll-over table (16) mutually from.
6. the multi-functional overturning check machine of a kind of automatic photo-mask according to claim 1, it is characterised in that：The repair shield
The lower-left end of cover (18) is provided with the second balance crane (19), and second balance crane (19) closely connects with the toilet (12)
It connects.
7. the multi-functional overturning check machine of a kind of automatic photo-mask according to claim 1, it is characterised in that：The roll-over table
The lower left side of pillar (22) is provided with connector (23), and the connector (23) is connected with the check machine main body (1).
8. the multi-functional overturning check machine of a kind of automatic photo-mask according to claim 1, it is characterised in that：The check machine
The downside of main body (1) is equipped with Power Base (24), and the Power Base (24) are fixedly connected with check machine main body (1).
9. the multi-functional overturning check machine of a kind of automatic photo-mask according to claim 1, it is characterised in that：Second shield
The right end for covering (25) is equipped with turnover driving mechanism (26), and the turnover driving mechanism (26) closely connects with the second shield (25)
It touches.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721311194.2U CN207703245U (en) | 2017-10-12 | 2017-10-12 | A kind of multi-functional overturning check machine of automatic photo-mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721311194.2U CN207703245U (en) | 2017-10-12 | 2017-10-12 | A kind of multi-functional overturning check machine of automatic photo-mask |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207703245U true CN207703245U (en) | 2018-08-07 |
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ID=63021280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721311194.2U Active CN207703245U (en) | 2017-10-12 | 2017-10-12 | A kind of multi-functional overturning check machine of automatic photo-mask |
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| Country | Link |
|---|---|
| CN (1) | CN207703245U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107560658A (en) * | 2017-10-12 | 2018-01-09 | 苏州慧桥自动化设备有限公司 | A kind of multi-functional upset check machine of automatic photo-mask |
-
2017
- 2017-10-12 CN CN201721311194.2U patent/CN207703245U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107560658A (en) * | 2017-10-12 | 2018-01-09 | 苏州慧桥自动化设备有限公司 | A kind of multi-functional upset check machine of automatic photo-mask |
| CN107560658B (en) * | 2017-10-12 | 2024-04-02 | 苏州慧桥自动化设备有限公司 | Automatic change multi-functional upset inspection machine of photomask |
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