CN207695842U - Ultra-short pulse laser process equipment for hard brittle material - Google Patents
Ultra-short pulse laser process equipment for hard brittle material Download PDFInfo
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- CN207695842U CN207695842U CN201721875336.8U CN201721875336U CN207695842U CN 207695842 U CN207695842 U CN 207695842U CN 201721875336 U CN201721875336 U CN 201721875336U CN 207695842 U CN207695842 U CN 207695842U
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Abstract
A kind of ultra-short pulse laser process equipment for hard brittle material, including rack, workbench, fixture, laser assembly and relative to workbench in a first direction, second direction and third direction movement three-dimensional motion mechanism, first direction, second direction and third direction are vertical two-by-two, workbench is mounted in rack, fixture is mounted on three-dimensional motion mechanism, laser assembly includes ultrafast laser, optics module, galvanometer and field lens, ultrafast laser, optics module are mounted in rack, and galvanometer and field lens are mounted on three-dimensional motion mechanism.It is poor to improve hard brittle material surface quality in traditional processing, the serious problem of chipping；Optimization processing technology reduces subsequent manufacturing procedure in traditional processing, energy saving, saves occupation area of equipment, reduces the processes such as grinding in traditional processing, has reached environment protecting.
Description
Technical field
The utility model is related to ultra-short pulse laser application fields, in particular to a kind of for the super of hard brittle material
Short-pulse laser process equipment.
Background technology
Ultra-short pulse laser belongs to cold laser processing, does not generate heat in process and avoids the molten of machined material
Melt, ensure machined surface quality and dimensional accuracy, can settle at one go, less subsequent processing process, save process time, improves and add
Work efficiency rate.In addition, because machining tool is light, it is a kind of processing method not worn, therefore without because of tool
The processing effect variation for decaying and causing.In contrast, in some mechanical micro Process modes, thermal damage and tool wear, and
Slower pulse laser machining technology limits the precision that processing can obtain, and will also need to costly, time-consuming follow-up place
Science and engineering is made.
Utility model content
The purpose of this utility model is to provide a kind of ultra-short pulse laser process equipments for hard brittle material, to improve
Traditional hard brittle material is processed using cutter leads to that machining accuracy is low, low-quality problem.
What the embodiments of the present invention were realized in：
Based on above-mentioned purpose, the utility model provides a kind of ultra-short pulse laser process equipment for hard brittle material,
Including rack, workbench, fixture, laser assembly and relative to the workbench in a first direction, second direction and third
The three-dimensional motion mechanism of direction movement, the first direction, second direction and third direction are vertical two-by-two, the workbench installation
In the rack, the fixture is mounted on the three-dimensional motion mechanism, and the laser assembly includes ultrafast laser, light
Module, galvanometer and field lens are learned, the ultrafast laser, the optics module are mounted in the rack, the galvanometer and institute
Field lens is stated on the three-dimensional motion mechanism.
In the utility model preferred embodiment, the rack includes main frame body, support leg and gantry frame, described
Support leg is mounted on the bottom of the main frame body, and the gantry frame is mounted on the main frame body, the ultrafast laser, institute
Optics module is stated on the gantry frame.
In the utility model preferred embodiment, the support leg is stretching structure.
In the utility model preferred embodiment, the support leg includes the first leg, the second leg and adjusting rotation
Button, first leg are plugged in second leg, and first leg is relative to second leg along described second
The length direction of leg reciprocatingly slides, and the adjusting knob is screwed onto on second leg, the end energy of the adjusting knob
It is enough pushed against on the peripheral surface of first leg.
In the utility model preferred embodiment, the workbench is granite slab.
In the utility model preferred embodiment, the three-dimensional motion mechanism includes moved along the first direction
One motion platform, the second motion platform moved along the second direction, the third motion platform moved along the third direction,
The first direction is perpendicular to the up and down motion direction of the workbench, and the second direction is to be parallel to the workbench
Side-to-side movement direction, the third direction are the direction that moves forward and backward for being parallel to the workbench, the galvanometer and the field lens
On first motion platform, second motion platform is mounted on the workbench, the third motion platform
On second motion platform, the fixture is mounted on the third motion platform.
In the utility model preferred embodiment, the process equipment further includes micro- camera, the micro- camera peace
On first motion platform.
In the utility model preferred embodiment, the fixture includes loading plate and at least three clamping parts, each
At least three sliding grooves are provided on the loading plate, at least three clamping part one-to-one correspondence are connected at least described in three
In sliding groove, the clamping part is slidably arranged in the sliding groove, and is had between the clamping part and the loading plate and used
Position limiting structure in the position for limiting the clamping part, at least three clamping parts surround clamping space.
In the utility model preferred embodiment, the clamping part includes base portion and clamping portion, and the clamping portion turns
On the base portion, the pivot center of the clamping portion and the base portion perpendicular to the workbench, slide by the base portion for dynamic setting
Dynamic to be arranged in the sliding groove, the base portion is bolted with the loading plate.
In the utility model preferred embodiment, buffer layer is installed in the clamping portion.
The advantageous effect of the utility model embodiment is：
It is set in conclusion the utility model embodiment provides a kind of ultra-short pulse laser processing for hard brittle material
It is standby, it is simple and reasonable, convenient for manufacture processing, installation with it is easy to use, meanwhile, the ultra-short pulse laser process equipment is can
To realize highly-efficient processing, high precision machining improves that hard brittle material surface quality in traditional processing is poor, and chipping is serious asks
Topic；Optimization processing technology reduces subsequent manufacturing procedure in traditional processing, energy saving, saves occupation area of equipment, reduces
It the processes such as is ground in traditional processing, has reached environment protecting.It is specific as follows：
Ultra-short pulse laser process equipment provided in this embodiment for hard brittle material comprising organic frame, setting exist
Workbench in rack further includes having laser assembly, fixture, three-dimensional motion mechanism, and fixture is mounted on three-dimensional motion mechanism.
Laser assembly includes ultrafast laser, optics module, galvanometer and field lens, and ultrafast laser and optics module are mounted on rack
On, galvanometer and field lens are mounted on three-dimensional motion mechanism.Ultrafast laser sends out laser, enters galvanometer by optics module, into
The scanning of row machining path, then machining beams are formed by field lens and are transferred on workbench, part is processed.This equipment
It may be implemented highly-efficient processing, high precision machining improves that hard brittle material surface quality in traditional processing is poor, and chipping is serious asks
Topic；Optimization processing technology reduces subsequent manufacturing procedure in traditional processing, energy saving, saves occupation area of equipment, reduces
It the processes such as is ground in traditional processing, has reached environment protecting.
Description of the drawings
It, below will be to required use in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
Attached drawing be briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not be by
Regard the restriction to range as, for those of ordinary skill in the art, without creative efforts, may be used also
To obtain other relevant attached drawings according to these attached drawings.
Fig. 1 is the schematic diagram of the ultra-short pulse laser process equipment for hard brittle material of the utility model embodiment；
Fig. 2 is the signal of the fixture of the ultra-short pulse laser process equipment for hard brittle material of the utility model embodiment
Figure；
Fig. 3 is a clamping part of the ultra-short pulse laser process equipment for hard brittle material of the utility model embodiment
With the schematic diagram of loading plate cooperation；
Fig. 4 is the application of the fixture of the ultra-short pulse laser process equipment for hard brittle material of the utility model embodiment
Schematic diagram.
Icon：100- racks；110- main frame bodies；120- support legs；130- gantry frames；200- workbench；
300- fixtures；310- clamping parts；311- base portions；312- clampings portion；313- fastening bolts；314- adjusting screws；320-
Loading plate；321- sliding grooves；330- bolts；400- laser assemblies；410- ultrafast lasers；420- optics modules；
430- galvanometers；440- field lenses；450- optical substrates；The micro- cameras of 460-；500- three-dimensional motion mechanisms；510- first is transported
Moving platform；The second motion platforms of 520-；530- third motion platforms.
Specific implementation mode
Currently, in some mechanical micro Process modes of hard brittle material, thermal damage and tool wear, and slower arteries and veins
Laser processing technology is rushed, the precision that processing can obtain is limited, and will also need to costly, time-consuming subsequent processing work
In consideration of it, inventor devises a kind of ultra-short pulse laser process equipment for hard brittle material, the ultrashort pulse
Laser process equipment improves hard brittle material surface quality in traditional processing highly-efficient processing, high precision machining may be implemented
Difference, the serious problem of chipping；Optimization processing technology reduces subsequent manufacturing procedure in traditional processing, and energy saving, saving is set
Standby floor space reduces the processes such as grinding in traditional processing, has reached environment protecting.
It is new below in conjunction with this practicality to keep the purpose, technical scheme and advantage of the utility model embodiment clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Usually here described in attached drawing and
The component of the utility model embodiment shown can be arranged and be designed with a variety of different configurations.
Therefore, the detailed description of the embodiments of the present invention to providing in the accompanying drawings is not intended to limit requirement below
The scope of the utility model of protection, but it is merely representative of the selected embodiment of the utility model.Based in the utility model
Embodiment, the every other embodiment that those of ordinary skill in the art are obtained without creative efforts, all
Belong to the range of the utility model protection.
It should be noted that：Similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent attached drawing in a attached drawing.
In the description of the present invention, it should be noted that the orientation or positional relationship of the instructions such as term "inner", "outside"
For be based on the orientation or positional relationship shown in the drawings or the utility model product using when the orientation or position usually put
Relationship is merely for convenience of describing the present invention and simplifying the description, and does not indicate or imply the indicated device or element must
There must be specific orientation, with specific azimuth configuration and operation, therefore should not be understood as limiting the present invention.This
Outside, term " first ", " second ", " third " etc. are only used for distinguishing description, are not understood to indicate or imply relative importance.
In the description of the present invention, it should also be noted that, unless otherwise clearly defined and limited, term " is set
Set ", " installation ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, can also be electrical connection；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, it can understand above-mentioned art with concrete condition
The concrete meaning of language in the present invention.
It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can
To be combined with each other.
Embodiment
- Fig. 4 is please referred to Fig.1, a kind of ultra-short pulse laser process equipment for hard brittle material is present embodiments provided.
In the present embodiment, which includes organic frame 100, workbench 200, fixture 300, optics
Substrate 450, laser assembly 400, three-dimensional motion mechanism 500 and Electric Appliance Cabinet.Workbench 200, optical substrate 450 and laser
The subelement of component 400 is mounted in rack 100, and the subelement of fixture 300 and laser assembly 400 is mounted on three maintenance and operations
On motivation structure 500, fixture 300 is mounted on three-dimensional motion mechanism 500.
Rack 100 provided in this embodiment comprising have main frame body 110, support leg 120 and gantry frame 130, support leg
120 are mounted on the bottom of main frame body 110, and the quantity of support leg 120 is arranged on demand, realize and stablize support.Gantry frame 130
On main frame body 110.
Further, main frame body 110 is made of more mental section welding, and the sound construction of main frame body 110 is reliable, is not easy
Deformation, the positional precision for being mounted on the component on main frame body 110 is high, can improve processing quality.Optionally, main frame body 110
It is simple in structure for rectangular frame structure, convenient for manufacture processing.
Workbench 200 is mounted on main frame body 110, and workbench 200 and gantry frame 130 are located at the same of main frame body 110
Side.In the present embodiment, workbench 200 could be provided as granite slab.It is not easy to deform because of the variation of temperature, is not easy to influence to add
Working medium amount.
Optionally, it sets support leg 120 to stretching structure, the length of every support leg 120 can be adjusted on demand, in turn
The flatness for adjusting workbench 200, improves the quality of processing.
In the present embodiment, support leg 120 includes the first leg, the second leg and adjusting knob, the first leg grafting
In the second leg, length direction of first leg relative to the second leg along the second leg reciprocatingly slides, and adjusting knob is spirally connected
On the second leg, the end of adjusting knob can be pushed against on the peripheral surface of the first leg.Need the height of adjustment support leg 120
When spending, adjusting knob, peripheral surface of the adjusting knob far from the first leg, at this point, the first leg of sliding and the second leg on demand are operated
Adjusting knob is tightened again after sliding into suitable position by portion.For the ease of adjusting height, scale is provided on the first leg
Line is provided with graduation mark on every first leg, can understand the distance that quickly judge to adjust, improve and adjust efficiency.Into one
Step, it is connected, can be limited between the first leg and the second leg by concaveconvex structure between the first leg and the second leg
Rotation.
Laser assembly 400 includes ultrafast laser 410, optics module 420, galvanometer 430, field lens 440, micro- camera
460, ultrafast laser 410, optics module 420 are mounted in rack 100, and galvanometer 430, field lens 440 and micro- camera 460 are installed
On three-dimensional motion mechanism 500.Ultrafast laser 410 sends out ultrashort pulse by optics module 420, galvanometer 430, field lens 440
After be transferred on workpiece to be processed workpiece be processed.Micro- camera 460 is debugged for early period, and observation part is facilitated to be processed
The quality on surface.
Three-dimensional motion mechanism 500 includes the first motion platform 510, the second motion platform 520 and third motion platform 530,
First motion platform 510 moves in a first direction relative to workbench 200, and first direction is relative to the upper of workbench 200
First motion platform 510 can be defined as z-axis motion platform by lower direction, and the second motion platform 520 is relative to workbench 200
It is moved in second direction, second direction is the left and right directions relative to workbench 200, can define the second motion platform 520
For x-axis motion platform, third motion platform 530 is moved relative to workbench 200 in third direction, and third direction is relative to work
Make the front-rear direction of platform 200, third motion platform 530 can be defined as y-axis motion platform.When installation, the first motion platform
510 are located at the top of workbench 200, and the second motion platform 520 is mounted on workbench 200, and third motion platform 530 is mounted on the
On two motion platforms 520, fixture 300 is mounted on third motion platform 530, and galvanometer 430, field lens 440 and micro- camera 460 are pacified
On the second motion platform 520.
Ultra-short pulse laser process equipment provided in this embodiment, the course of work are that ultrafast laser 410 sends out sharp
Light enters galvanometer 430 by optics module 420, is processed the scanning in path, then form machining beams by field lens 440 and pass
It is defeated on workbench, part is processed.Highly-efficient processing may be implemented in this equipment, and high precision machining improves hard crisp material
Material surface quality in traditional processing is poor, the serious problem of chipping；Optimization processing technology reduces subsequent in traditional processing add
Work process, it is energy saving, occupation area of equipment is saved, reduces the processes such as grinding in traditional processing, has reached environment protecting.
It should be noted that ultrafast laser 410 is one kind of existing laser, such as it can be picosecond laser.Tool
There is the features such as picosecond ultrashort pulsewidth, repetition rate are adjustable, pulse energy is high.
Embodiment
- Fig. 4 is please referred to Fig.1, a kind of ultra-short pulse laser process equipment for hard brittle material is present embodiments provided.
In the present embodiment, which includes organic frame 100, workbench 200, fixture 300, optics
Substrate 450, laser assembly 400, three-dimensional motion mechanism 500 and Electric Appliance Cabinet.Workbench 200, optical substrate 450 and laser
The subelement of component 400 is mounted in rack 100, and the subelement of fixture 300 and laser assembly 400 is mounted on three maintenance and operations
On motivation structure 500, fixture 300 is mounted on three-dimensional motion mechanism 500.
Rack 100 provided in this embodiment comprising have main frame body 110, support leg 120 and gantry frame 130, support leg
120 are mounted on the bottom of main frame body 110, and the quantity of support leg 120 is arranged on demand, realize and stablize support.Gantry frame 130
On main frame body 110.
Further, main frame body 110 is made of more mental section welding, and the sound construction of main frame body 110 is reliable, is not easy
Deformation, the positional precision for being mounted on the component on main frame body 110 is high, can improve processing quality.Optionally, main frame body 110
It is simple in structure for rectangular frame structure, convenient for manufacture processing.
Workbench 200 is mounted on main frame body 110, and workbench 200 and gantry frame 130 are located at the same of main frame body 110
Side.In the present embodiment, workbench 200 could be provided as granite slab.It is not easy to deform because of the variation of temperature, is not easy to influence to add
Working medium amount.
Optionally, it sets support leg 120 to stretching structure, the length of every support leg 120 can be adjusted on demand, in turn
The flatness for adjusting workbench 200, improves the quality of processing.
In the present embodiment, support leg 120 includes the first leg, the second leg and adjusting knob, the first leg grafting
In the second leg, length direction of first leg relative to the second leg along the second leg reciprocatingly slides, and adjusting knob is spirally connected
On the second leg, the end of adjusting knob can be pushed against on the peripheral surface of the first leg.Need the height of adjustment support leg 120
When spending, adjusting knob, peripheral surface of the adjusting knob far from the first leg, at this point, the first leg of sliding and the second leg on demand are operated
Adjusting knob is tightened again after sliding into suitable position by portion.For the ease of adjusting height, scale is provided on the first leg
Line is provided with graduation mark on every first leg, can understand the distance that quickly judge to adjust, improve and adjust efficiency.Into one
Step, it is connected, can be limited between the first leg and the second leg by concaveconvex structure between the first leg and the second leg
Rotation.
Laser assembly 400 includes ultrafast laser 410, optics module 420, galvanometer 430, field lens 440, micro- camera
460, ultrafast laser 410, optics module 420 are mounted on gantry frame 130, galvanometer 430, field lens 440 and micro- camera 460
On three-dimensional motion mechanism 500.Ultrafast laser 410 sends out ultrashort pulse by optics module 420, galvanometer 430, field lens
It is transferred to after 440 on workpiece to be processed and workpiece is processed.Micro- camera 460 is debugged for early period, facilitates observation part quilt
The quality of finished surface.
Three-dimensional motion mechanism 500 includes the first motion platform 510, the second motion platform 520 and third motion platform 530,
First motion platform 510 moves in a first direction relative to workbench 200, and first direction is relative to the upper of workbench 200
First motion platform 510 can be defined as z-axis motion platform by lower direction, and the second motion platform 520 is relative to workbench 200
It is moved in second direction, second direction is the left and right directions relative to workbench 200, can define the second motion platform 520
For x-axis motion platform, third motion platform 530 is moved relative to workbench 200 in third direction, and third direction is relative to work
Make the front-rear direction of platform 200, third motion platform 530 can be defined as y-axis motion platform.When installation, the first motion platform
510 are located at the top of workbench 200, and the second motion platform 520 is mounted on workbench 200, and third motion platform 530 is mounted on the
On two motion platforms 520, fixture 300 is mounted on third motion platform 530, and galvanometer 430, field lens 440 and micro- camera 460 are pacified
On the second motion platform 520.
In the present embodiment, fixture 300 includes loading plate 320 and at least three clamping parts 310, on each loading plate 320
At least three sliding grooves 321 are provided with, at least three clamping parts 310 one-to-one correspondence is connected at least three sliding grooves 321, fills
Folder 310 is slidably arranged in sliding groove 321, and is had for limiting clamping part 310 between clamping part 310 and loading plate 320
Position position limiting structure, at least three clamping parts 310 surround clamping space.Clamping part 310 includes base portion 311 and clamping portion
312, clamping portion 312 is rotatably arranged on base portion 311, the pivot center of clamping portion 312 and base portion 311 perpendicular to workbench 200,
Base portion 311 is slidably arranged in sliding groove 321, and base portion 311 is connect with loading plate 320 by fastening bolt 330313.Clamping portion
Buffer layer is installed on 312.Optionally, sliding groove 321 is T-slot, and for the tool of base portion 311 there are two slide protrusion, two slidings are convex
It rises and is connected in T-slot, base portion 311 slides in sliding groove 321 along the length direction of sliding groove 321, and base portion 311 can not
It is rotated relative to sliding groove 321, the slot bottom of sliding groove 321 is provided with strip gab, fastening bolt is bolted on base portion 311
330313, so that base portion 311 is clamped on loading plate 320 by turning fastening bolt 330313, needs the position for adjusting clamping part 310
When setting, fastening bolt 330313 is unscrewed, fastening bolt 330313 is screwed after the completion of adjustment.Further, in clamping portion 312
It is provided with rotation axis, threaded hole is provided on base portion 311, adjusting screw 314 is bolted in threaded hole, convenient and efficient can be adjusted
The angle in clamping portion 312 and base portion 311.
Further, clamping portion 312 is eccentric structure, i.e. shaft axis and clamping portion of the clamping portion 312 with base portion 311
The peripheral surface of 312 centerline offsets of itself, clamping portion 312 is continuous cambered surface in a ring, the clamping face position in clamping portion 312
In on the peripheral surface in clamping portion 312, this structure design, clamping portion 312 is relative in 311 rotation process of base portion, clamping portion 312
The range bigger that can adjust of clamping face, clamping effect is more preferable.
The structure design of fixture 300, according to the outer contour shape of workpiece to be processed come the corresponding position for adjusting clamping part 310
It sets, clamping effect is good, and use scope is wide.And clamping portion 312 is further realized by rotation clamping portion 312 and is connect with the close of workpiece
It touches, improves clamping effect.It is provided with buffer layer in clamping portion 312, is hardly damaged workpiece.
Ultra-short pulse laser process equipment provided in this embodiment, the course of work are that ultrafast laser 410 sends out sharp
Light enters galvanometer 430 by optics module 420, is processed the scanning in path, then form machining beams by field lens 440 and pass
It is defeated on workbench, part is processed.Highly-efficient processing may be implemented in this equipment, and high precision machining improves hard crisp material
Material surface quality in traditional processing is poor, the serious problem of chipping；Optimization processing technology reduces subsequent in traditional processing add
Work process, it is energy saving, occupation area of equipment is saved, reduces the processes such as grinding in traditional processing, has reached environment protecting.
The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this
For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model
Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.
Claims (10)
1. a kind of ultra-short pulse laser process equipment for hard brittle material, which is characterized in that including rack, workbench, fixture,
Laser assembly and relative to the workbench in a first direction, second direction and third direction movement three-dimensional motion machine
Structure, the first direction, second direction and third direction are vertical two-by-two, and the workbench is mounted in the rack, the folder
Tool is mounted on the three-dimensional motion mechanism, and the laser assembly includes ultrafast laser, optics module, galvanometer and field
Mirror, the ultrafast laser, the optics module are mounted in the rack, and the galvanometer and the field lens are mounted on described three
It ties up on motion.
2. the ultra-short pulse laser process equipment according to claim 1 for hard brittle material, which is characterized in that the machine
Frame includes main frame body, support leg and gantry frame, and the support leg is mounted on the bottom of the main frame body, the gantry frame
On the main frame body, the ultrafast laser, the optics module are mounted on the gantry frame.
3. the ultra-short pulse laser process equipment according to claim 2 for hard brittle material, which is characterized in that the branch
Support leg is stretching structure.
4. the ultra-short pulse laser process equipment according to claim 3 for hard brittle material, which is characterized in that the branch
Support leg includes the first leg, the second leg and adjusting knob, and first leg is plugged in second leg, and described the
Length direction of one leg relative to second leg along second leg reciprocatingly slides, and the adjusting knob is screwed onto institute
It states on the second leg, the end of the adjusting knob can be pushed against on the peripheral surface of first leg.
5. the ultra-short pulse laser process equipment for hard brittle material according to any one of claim 1-4, feature
It is, the workbench is granite slab.
6. the ultra-short pulse laser process equipment for hard brittle material according to any one of claim 1-4, feature
It is, the three-dimensional motion mechanism includes the first motion platform moved along the first direction, moved along the second direction
The second motion platform, the third motion platform that is moved along the third direction, the first direction is perpendicular to the work
The up and down motion direction of platform, the second direction are to be parallel to the side-to-side movement direction of the workbench, and the third direction is
It is parallel to the direction that moves forward and backward of the workbench, the galvanometer and the field lens are mounted on first motion platform, institute
The second motion platform is stated on the workbench, the third motion platform is mounted on second motion platform, institute
Fixture is stated on the third motion platform.
7. the ultra-short pulse laser process equipment according to claim 6 for hard brittle material, which is characterized in that described to add
Construction equipment further includes micro- camera, and the micro- camera is mounted on first motion platform.
8. the ultra-short pulse laser process equipment according to claim 6 for hard brittle material, which is characterized in that the folder
Tool includes loading plate and at least three clamping parts, is each provided at least three sliding grooves on the loading plate, and at least three
The clamping part one-to-one correspondence is connected at least three sliding grooves, and the clamping part is slidably arranged in the sliding groove
It is interior, and there is the position limiting structure of the position for limiting the clamping part between the clamping part and the loading plate, at least three
A clamping part surrounds clamping space.
9. the ultra-short pulse laser process equipment according to claim 8 for hard brittle material, which is characterized in that the dress
Folder includes base portion and clamping portion, and the clamping portion is rotatably arranged on the base portion, the clamping portion and the base portion
Pivot center is slidably arranged in perpendicular to the workbench, the base portion in the sliding groove, the base portion and the loading plate
It is bolted.
10. the ultra-short pulse laser process equipment according to claim 9 for hard brittle material, which is characterized in that described
Clamping is equipped with buffer layer in portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721875336.8U CN207695842U (en) | 2017-12-27 | 2017-12-27 | Ultra-short pulse laser process equipment for hard brittle material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721875336.8U CN207695842U (en) | 2017-12-27 | 2017-12-27 | Ultra-short pulse laser process equipment for hard brittle material |
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| Publication Number | Publication Date |
|---|---|
| CN207695842U true CN207695842U (en) | 2018-08-07 |
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ID=63029552
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| Application Number | Title | Priority Date | Filing Date |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107900512A (en) * | 2017-12-27 | 2018-04-13 | 南京魔迪多维数码科技有限公司 | Ultra-short pulse laser process equipment for hard brittle material |
-
2017
- 2017-12-27 CN CN201721875336.8U patent/CN207695842U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107900512A (en) * | 2017-12-27 | 2018-04-13 | 南京魔迪多维数码科技有限公司 | Ultra-short pulse laser process equipment for hard brittle material |
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