CN107900512A - Ultra-short pulse laser process equipment for hard brittle material - Google Patents
Ultra-short pulse laser process equipment for hard brittle material Download PDFInfo
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- CN107900512A CN107900512A CN201711456945.4A CN201711456945A CN107900512A CN 107900512 A CN107900512 A CN 107900512A CN 201711456945 A CN201711456945 A CN 201711456945A CN 107900512 A CN107900512 A CN 107900512A
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- Prior art keywords
- leg
- workbench
- ultra
- brittle material
- short pulse
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
A kind of ultra-short pulse laser process equipment for hard brittle material, including rack, workbench, fixture, laser assembly and relative to workbench in a first direction, second direction and third direction movement three-dimensional motion mechanism, first direction, second direction and third direction are vertical two-by-two, workbench is installed in rack, fixture is installed on three-dimensional motion mechanism, laser assembly includes ultrafast laser, optics module, galvanometer and field lens, ultrafast laser, optics module are installed in rack, and galvanometer and field lens are installed on three-dimensional motion mechanism.Improve the problem of hard brittle material surface quality in traditional processing is poor, and chipping is serious；Optimization processing technology, reduces manufacturing procedure follow-up in traditional processing, saves the energy, saves occupation area of equipment, reduces the process such as grinding in traditional processing, has reached environment protecting.
Description
Technical field
The present invention relates to ultra-short pulse laser application field, in particular to a kind of ultrashort arteries and veins for hard brittle material
Rush laser process equipment.
Background technology
Ultra-short pulse laser belongs to cold laser processing, does not produce heat in process and avoids the molten of machined material
Melt, ensure machined surface quality and dimensional accuracy, can settle at one go, less subsequent treatment process, save process time, improve and add
Work efficiency rate.In addition, because machining tool is light, it is a kind of processing method without abrasion, therefore without because instrument
The processing effect change for decaying and triggering.In contrast, in some mechanical micro Process modes, fire damage and tool wear, and
Slower pulse laser machining technology, limits the precision that processing can obtain, and will also need to costly, time-consuming follow-up place
Science and engineering is made.
The content of the invention
It is an object of the invention to provide a kind of ultra-short pulse laser process equipment for hard brittle material, to improve tradition
Hard brittle material be processed using cutter and cause that machining accuracy is low, low-quality problem.
What the embodiment of the present invention was realized in：
Based on above-mentioned purpose, the present invention provides a kind of ultra-short pulse laser process equipment for hard brittle material, including
Rack, workbench, fixture, laser assembly and relative to the workbench in a first direction, second direction and third direction
The three-dimensional motion mechanism of movement, the first direction, second direction and third direction are vertical two-by-two, and the workbench is installed on institute
State in rack, the fixture is installed on the three-dimensional motion mechanism, and the laser assembly includes ultrafast laser, optical mode
Group, galvanometer and field lens, the ultrafast laser, the optics module are installed in the rack, the galvanometer and the field
Mirror is installed on the three-dimensional motion mechanism.
In preferred embodiments of the present invention, the rack includes main frame body, support leg and gantry frame, the support
Leg is installed on the bottom of the main frame body, and the gantry frame is installed on the main frame body, the ultrafast laser, the light
Module is learned to be installed on the gantry frame.
In preferred embodiments of the present invention, the support leg is stretching structure.
In preferred embodiments of the present invention, the support leg includes the first leg, the second leg and adjusting knob, institute
State the first leg to be plugged in second leg, first leg is relative to second leg along second leg
Length direction reciprocatingly slides, and the adjusting knob is screwed onto on second leg, and the end of the adjusting knob can push against
On the outer circumferential surface of first leg.
In preferred embodiments of the present invention, the workbench is granite slab.
In preferred embodiments of the present invention, the three-dimensional motion mechanism includes the first fortune moved along the first direction
Moving platform, the second motion platform moved along second direction of motion, the 3rd motion platform moved along the third direction,
The first direction is perpendicular to the up and down motion direction of the workbench, and the second direction is parallel to the workbench
Side-to-side movement direction, the third direction are the direction that moves forward and backward parallel to the workbench, the galvanometer and the field lens
On first motion platform, second motion platform is installed on the workbench, the 3rd motion platform
On second motion platform, the fixture is installed on the 3rd motion platform.
In preferred embodiments of the present invention, the process equipment further includes micro- camera, and the micro- camera is installed on
On first motion platform.
In preferred embodiments of the present invention, the fixture includes loading plate and at least three clamping parts, each described
At least three sliding grooves are provided with loading plate, at least three clamping parts, which correspond, is connected at least three slips
In groove, the clamping part is slidably arranged in the sliding groove, and is had between the clamping part and the loading plate and be used to limit
The position limiting structure of the position of the clamping part is made, at least three clamping parts surround clamping space.
In preferred embodiments of the present invention, the clamping part includes base portion and clamping portion, and the clamping portion rotates and sets
Put on the base portion, the clamping portion and the pivot center of the base portion are slided and set perpendicular to the workbench, the base portion
Put in the sliding groove, the base portion is bolted with the loading plate.
In preferred embodiments of the present invention, cushion is installed in the clamping portion.
The beneficial effect of the embodiment of the present invention is：
In conclusion an embodiment of the present invention provides a kind of ultra-short pulse laser process equipment for hard brittle material, its
It is simple and reasonable, easy to manufacture processing, installation with easy to use, meanwhile, the ultra-short pulse laser process equipment is can be real
Existing highly-efficient processing, high precision machining, improves the problem of hard brittle material surface quality in traditional processing is poor, and chipping is serious；It is excellent
Change processing technology, reduce manufacturing procedure follow-up in traditional processing, save the energy, save occupation area of equipment, reduce biography
The process such as grinding, has reached environment protecting in system processing.It is specific as follows：
Ultra-short pulse laser process equipment provided in this embodiment for hard brittle material, it includes organic frame, is arranged on
Workbench in rack, has further included laser assembly, fixture, three-dimensional motion mechanism, and fixture is installed on three-dimensional motion mechanism.
Laser assembly includes ultrafast laser, optics module, galvanometer and field lens, and ultrafast laser and optics module are installed on rack
On, galvanometer and field lens are installed on three-dimensional motion mechanism.Ultrafast laser sends laser, enters galvanometer by optics module, into
The scanning of row machining path, then machining beams are formed by field lens and are transferred on workbench, part is processed.This equipment
It can realize highly-efficient processing, high precision machining improves that hard brittle material surface quality in traditional processing is poor, and chipping is serious asks
Topic；Optimization processing technology, reduces manufacturing procedure follow-up in traditional processing, saves the energy, saves occupation area of equipment, reduces
The process such as grinding, has reached environment protecting in traditional processing.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, therefore be not construed as pair
The restriction of scope, for those of ordinary skill in the art, without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the schematic diagram of the ultra-short pulse laser process equipment for hard brittle material of the embodiment of the present invention；
Fig. 2 is the schematic diagram of the fixture of the ultra-short pulse laser process equipment for hard brittle material of the embodiment of the present invention；
Fig. 3 is a clamping part of the ultra-short pulse laser process equipment for hard brittle material of the embodiment of the present invention with holding
The schematic diagram that support plate coordinates；
Fig. 4 is the application signal of the fixture of the ultra-short pulse laser process equipment for hard brittle material of the embodiment of the present invention
Figure.
Icon：100- racks；110- main frame bodies；120- support legs；130- gantry frames；200- workbench；
300- fixtures；310- clamping parts；311- base portions；312- clampings portion；313- fastening bolts；314- adjusting screws；320-
Loading plate；321- sliding grooves；400- laser assemblies；410- ultrafast lasers；420- optics modules；430- galvanometers；
440- field lenses；450- optical substrates；The micro- cameras of 460-；500- three-dimensional motion mechanisms；The first motion platforms of 510-；
The second motion platforms of 520-；The 3rd motion platforms of 530-.
Embodiment
At present, in some mechanical micro Process modes of hard brittle material, fire damage and tool wear, and slower arteries and veins
Laser processing technology is rushed, limits the precision that processing can obtain, and will also need to costly, time-consuming subsequent treatment work
In consideration of it, inventor devises a kind of ultra-short pulse laser process equipment for hard brittle material, the ultrashort pulse
Laser process equipment can realize highly-efficient processing, and high precision machining, improves hard brittle material surface quality in traditional processing
The problem of difference, chipping is serious；Optimization processing technology, reduces manufacturing procedure follow-up in traditional processing, saves the energy, and saving is set
Standby floor space, reduces the process such as grinding in traditional processing, has reached environment protecting.
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, the technical solution in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
Part of the embodiment of the present invention, instead of all the embodiments.The present invention implementation being usually described and illustrated herein in the accompanying drawings
The component of example can be arranged and designed with a variety of configurations.
Therefore, below the detailed description of the embodiment of the present invention to providing in the accompanying drawings be not intended to limit it is claimed
The scope of the present invention, but be merely representative of the present invention selected embodiment.Based on the embodiments of the present invention, this area is common
Technical staff's all other embodiments obtained without creative efforts, belong to the model that the present invention protects
Enclose.
It should be noted that：Similar label and letter represents similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent attached drawing in a attached drawing.
In the description of the present invention, it is necessary to which explanation, the orientation or position relationship of the instruction such as term " interior ", " outer " are base
In orientation shown in the drawings or position relationship, or the invention product using when the orientation usually put or position relationship, only
It is to be described for the ease of description is of the invention with simplified, rather than the device or element of instruction or hint meaning must be with specifically
Orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.In addition, term " first ", " the
Two ", " 3rd " etc. is only used for distinguishing description, and it is not intended that instruction or hint relative importance.
In the description of the present invention, it is also necessary to explanation, unless otherwise clearly defined and limited, term " setting ",
" installation ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or integratedly be connected
Connect；Can mechanically connect or be electrically connected；It can be directly connected, can also be indirectly connected by intermediary, can
To be the connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood with concrete condition
Concrete meaning in the present invention.
It should be noted that in the case where there is no conflict, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.
Embodiment
- Fig. 4 is please referred to Fig.1, present embodiments provides a kind of ultra-short pulse laser process equipment for hard brittle material.
In the present embodiment, which includes organic frame 100, workbench 200, fixture 300, optics
Substrate 450, laser assembly 400, three-dimensional motion mechanism 500 and Electric Appliance Cabinet.Workbench 200, optical substrate 450 and laser
The subelement of component 400 is installed in rack 100, and the subelement of fixture 300 and laser assembly 400 is installed on three maintenance and operations
On motivation structure 500, fixture 300 is installed on three-dimensional motion mechanism 500.
Rack 100 provided in this embodiment, it includes main frame body 110, support leg 120 and gantry frame 130, support leg
120 are installed on the bottom of main frame body 110, and the quantity of support leg 120 is set on demand, realize and stablize support.Gantry frame 130
On main frame body 110.
Further, main frame body 110 is made of more mental section welding, and the sound construction of main frame body 110 is reliable, is not easy
Deformation, the positional precision of the component on main frame body 110 are high, it is possible to increase processing quality.Optionally, main frame body 110
It is simple in structure for rectangular frame structure, easy to manufacture processing.
Workbench 200 is installed on main frame body 110, and workbench 200 and gantry frame 130 are located at the same of main frame body 110
Side.In the present embodiment, workbench 200 could be provided as granite slab.It is not easy to deform because of the change of temperature, is not easy to influence to add
Working medium amount.
Optionally, support leg 120 is arranged to stretching structure, the length of every support leg 120 can be adjusted on demand, and then
The flatness of workbench 200 is adjusted, improves the quality of processing.
In the present embodiment, support leg 120 includes the first leg, the second leg and adjusting knob, the first leg grafting
In the second leg, the first leg reciprocatingly slides relative to the second leg along the length direction of the second leg, and adjusting knob is spirally connected
On the second leg, the end of adjusting knob can be pushed against on the outer circumferential surface of the first leg.Need the height of adjustment support leg 120
When spending, adjusting knob is operated, outer circumferential surface of the adjusting knob away from the first leg, at this time, slides the first leg and the second leg on demand
Portion, adjusting knob is tightened after sliding into suitable position again.For the ease of adjusting height, scale is provided with the first leg
Line, is provided with graduation mark on every first leg, can understand the distance that quickly judge to adjust, improve and adjust efficiency.Into one
Step, connected, can limited between the first leg and the second leg by concaveconvex structure between the first leg and the second leg
Rotate.
Laser assembly 400 includes ultrafast laser 410, optics module 420, galvanometer 430, field lens 440, micro- camera
460, ultrafast laser 410, optics module 420 are installed in rack 100, and galvanometer 430, field lens 440 and micro- camera 460 are installed
On three-dimensional motion mechanism 500.Ultrafast laser 410 sends ultrashort pulse by optics module 420, galvanometer 430, field lens 440
After be transferred on workpiece to be processed workpiece be processed.Micro- camera 460 is debugged for early period, and convenient part of observing is processed
The quality on surface.
Three-dimensional motion mechanism 500 includes the first motion platform 510, the second motion platform 520 and the 3rd motion platform 530,
First motion platform 510 moves in a first direction relative to workbench 200, and first direction is relative to the upper of workbench 200
First motion platform 510, can be defined as z-axis motion platform, the second motion platform 520 is relative to workbench 200 by lower direction
Moved in second direction, second direction is the left and right directions relative to workbench 200, can define the second motion platform 520
For x-axis motion platform, the 3rd motion platform 530 is moved relative to workbench 200 in third direction, and third direction is relative to work
Make the anteroposterior direction of platform 200, the 3rd motion platform 530 can be defined as y-axis motion platform.During installation, the first motion platform
510 are installed on workbench 200 positioned at the top of workbench 200, the second motion platform 520, and the 3rd motion platform 530 is installed on the
On two motion platforms 520, fixture 300 is installed on the 3rd motion platform 530, and galvanometer 430, field lens 440 and micro- camera 460 are pacified
On the second motion platform 520.
Ultra-short pulse laser process equipment provided in this embodiment, its course of work are that ultrafast laser 410 sends sharp
Light, enters galvanometer 430 by optics module 420, is processed the scanning in path, then form machining beams by field lens 440 and pass
It is defeated on workbench, part is processed.This equipment can realize highly-efficient processing, and high precision machining, improves hard crisp material
The problem of material surface quality in traditional processing is poor, and chipping is serious；Optimization processing technology, reduces follow-up in traditional processing add
Work process, saves the energy, saves occupation area of equipment, reduces the process such as grinding in traditional processing, has reached environment protecting.
It should be noted that ultrafast laser 410 is one kind of existing laser, such as it can be picosecond laser.Tool
There is the features such as picosecond ultrashort pulsewidth, repetition rate are adjustable, pulse energy is high.
Embodiment
- Fig. 4 is please referred to Fig.1, present embodiments provides a kind of ultra-short pulse laser process equipment for hard brittle material.
In the present embodiment, which includes organic frame 100, workbench 200, fixture 300, optics
Substrate 450, laser assembly 400, three-dimensional motion mechanism 500 and Electric Appliance Cabinet.Workbench 200, optical substrate 450 and laser
The subelement of component 400 is installed in rack 100, and the subelement of fixture 300 and laser assembly 400 is installed on three maintenance and operations
On motivation structure 500, fixture 300 is installed on three-dimensional motion mechanism 500.
Rack 100 provided in this embodiment, it includes main frame body 110, support leg 120 and gantry frame 130, support leg
120 are installed on the bottom of main frame body 110, and the quantity of support leg 120 is set on demand, realize and stablize support.Gantry frame 130
On main frame body 110.
Further, main frame body 110 is made of more mental section welding, and the sound construction of main frame body 110 is reliable, is not easy
Deformation, the positional precision of the component on main frame body 110 are high, it is possible to increase processing quality.Optionally, main frame body 110
It is simple in structure for rectangular frame structure, easy to manufacture processing.
Workbench 200 is installed on main frame body 110, and workbench 200 and gantry frame 130 are located at the same of main frame body 110
Side.In the present embodiment, workbench 200 could be provided as granite slab.It is not easy to deform because of the change of temperature, is not easy to influence to add
Working medium amount.
Optionally, support leg 120 is arranged to stretching structure, the length of every support leg 120 can be adjusted on demand, and then
The flatness of workbench 200 is adjusted, improves the quality of processing.
In the present embodiment, support leg 120 includes the first leg, the second leg and adjusting knob, the first leg grafting
In the second leg, the first leg reciprocatingly slides relative to the second leg along the length direction of the second leg, and adjusting knob is spirally connected
On the second leg, the end of adjusting knob can be pushed against on the outer circumferential surface of the first leg.Need the height of adjustment support leg 120
When spending, adjusting knob is operated, outer circumferential surface of the adjusting knob away from the first leg, at this time, slides the first leg and the second leg on demand
Portion, adjusting knob is tightened after sliding into suitable position again.For the ease of adjusting height, scale is provided with the first leg
Line, is provided with graduation mark on every first leg, can understand the distance that quickly judge to adjust, improve and adjust efficiency.Into one
Step, connected, can limited between the first leg and the second leg by concaveconvex structure between the first leg and the second leg
Rotate.
Laser assembly 400 includes ultrafast laser 410, optics module 420, galvanometer 430, field lens 440, micro- camera
460, ultrafast laser 410, optics module 420 are installed on gantry frame 130, galvanometer 430, field lens 440 and micro- camera 460
On three-dimensional motion mechanism 500.Ultrafast laser 410 sends ultrashort pulse by optics module 420, galvanometer 430, field lens
It is transferred to after 440 on workpiece to be processed and workpiece is processed.Micro- camera 460 is debugged for early period, convenient to observe part quilt
The quality of finished surface.
Three-dimensional motion mechanism 500 includes the first motion platform 510, the second motion platform 520 and the 3rd motion platform 530,
First motion platform 510 moves in a first direction relative to workbench 200, and first direction is relative to the upper of workbench 200
First motion platform 510, can be defined as z-axis motion platform, the second motion platform 520 is relative to workbench 200 by lower direction
Moved in second direction, second direction is the left and right directions relative to workbench 200, can define the second motion platform 520
For x-axis motion platform, the 3rd motion platform 530 is moved relative to workbench 200 in third direction, and third direction is relative to work
Make the anteroposterior direction of platform 200, the 3rd motion platform 530 can be defined as y-axis motion platform.During installation, the first motion platform
510 are installed on workbench 200 positioned at the top of workbench 200, the second motion platform 520, and the 3rd motion platform 530 is installed on the
On two motion platforms 520, fixture 300 is installed on the 3rd motion platform 530, and galvanometer 430, field lens 440 and micro- camera 460 are pacified
On the second motion platform 520.
In the present embodiment, fixture 300 includes 320 and at least three clamping part 310 of loading plate, on each loading plate 320
At least three sliding grooves 321 are provided with, at least three clamping parts 310 are corresponded and are connected at least three sliding grooves 321, are filled
Folder 310 is slidably arranged in sliding groove 321, and is had between clamping part 310 and loading plate 320 and be used to limit clamping part 310
Position position limiting structure, at least three clamping parts 310 surround clamping space.Clamping part 310 includes base portion 311 and clamping portion
312, clamping portion 312 is rotatably arranged on base portion 311, the pivot center of clamping portion 312 and base portion 311 perpendicular to workbench 200,
Base portion 311 is slidably arranged in sliding groove 321, and base portion 311 is connected with loading plate 320 by fastening bolt 313.Clamping portion 312
On cushion is installed.Optionally, sliding groove 321 is T-slot, and base portion 311 has two slide protrusions, two slide protrusion cards
It is connected in T-slot, base portion 311 slides in sliding groove 321 along the length direction of sliding groove 321, and base portion 311 can not be opposite
Rotated in sliding groove 321, the slot bottom of sliding groove 321 is provided with strip gab, fastening bolt 313 is bolted with base portion 311, led to
Cross and turn fastening bolt 313 and base portion 311 is clamped on loading plate 320, it is necessary to when adjusting the position of clamping part 310, unscrew tight
Fixing bolt 313, screws fastening bolt 313 after the completion of adjustment.Further, rotation axis, base portion are provided with clamping portion 312
Threaded hole is provided with 311, adjusting screw 314 is bolted with threaded hole, can convenient and efficient adjustment clamping portion 312 and base portion
311 angle.
Further, clamping portion 312 is eccentric structure, i.e. shaft axis and clamping portion of the clamping portion 312 with base portion 311
312 centerline offsets of itself, the outer circumferential surface in clamping portion 312 are continuous cambered surface in a ring, the clamping face position in clamping portion 312
In on the outer circumferential surface in clamping portion 312, this structure design, clamping portion 312 is relative in 311 rotation process of base portion, clamping portion 312
The scope bigger that can adjust of clamping face, clamping effect is more preferable.
The structure design of fixture 300, according to the outer contour shape of workpiece to be processed come the corresponding position for adjusting clamping part 310
Put, clamping effect is good, and use scope is wide.And further realize that clamping portion 312 connects with the close of workpiece by rotating clamping portion 312
Touch, improve clamping effect.Cushion is provided with clamping portion 312, is hardly damaged workpiece.
Ultra-short pulse laser process equipment provided in this embodiment, its course of work are that ultrafast laser 410 sends sharp
Light, enters galvanometer 430 by optics module 420, is processed the scanning in path, then form machining beams by field lens 440 and pass
It is defeated on workbench, part is processed.This equipment can realize highly-efficient processing, and high precision machining, improves hard crisp material
The problem of material surface quality in traditional processing is poor, and chipping is serious；Optimization processing technology, reduces follow-up in traditional processing add
Work process, saves the energy, saves occupation area of equipment, reduces the process such as grinding in traditional processing, has reached environment protecting.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit the invention, for the skill of this area
For art personnel, the invention may be variously modified and varied.Within the spirit and principles of the invention, that is made any repaiies
Change, equivalent substitution, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
- A kind of 1. ultra-short pulse laser process equipment for hard brittle material, it is characterised in that including rack, workbench, fixture, Laser assembly and relative to the workbench in a first direction, second direction and third direction movement three-dimensional motion machine Structure, the first direction, second direction and third direction are vertical two-by-two, and the workbench is installed in the rack, the folder Tool is installed on the three-dimensional motion mechanism, and the laser assembly includes ultrafast laser, optics module, galvanometer and field Mirror, the ultrafast laser, the optics module are installed in the rack, and the galvanometer and the field lens are installed on described three Tie up on motion.
- 2. the ultra-short pulse laser process equipment according to claim 1 for hard brittle material, it is characterised in that the machine Frame includes main frame body, support leg and gantry frame, and the support leg is installed on the bottom of the main frame body, the gantry frame On the main frame body, the ultrafast laser, the optics module are installed on the gantry frame.
- 3. the ultra-short pulse laser process equipment according to claim 2 for hard brittle material, it is characterised in that the branch Support leg is stretching structure.
- 4. the ultra-short pulse laser process equipment according to claim 3 for hard brittle material, it is characterised in that the branch Support leg includes the first leg, the second leg and adjusting knob, and first leg is plugged in second leg, and described One leg reciprocatingly slides relative to second leg along the length direction of second leg, and the adjusting knob is screwed onto institute State on the second leg, the end of the adjusting knob can be pushed against on the outer circumferential surface of first leg.
- 5. the ultra-short pulse laser process equipment for hard brittle material according to any one of claim 1-4, its feature It is, the workbench is granite slab.
- 6. the ultra-short pulse laser process equipment for hard brittle material according to any one of claim 1-4, its feature It is, the first motion platform that the three-dimensional motion mechanism includes moving along the first direction, along second direction of motion Second motion platform of movement, the 3rd motion platform moved along the third direction, the first direction are perpendicular to described The up and down motion direction of workbench, the second direction be parallel to the workbench side-to-side movement direction, the third party First motion platform is installed on to for the direction that moves forward and backward parallel to the workbench, the galvanometer and the field lens On, second motion platform is installed on the workbench, and the 3rd motion platform is installed on second motion platform On, the fixture is installed on the 3rd motion platform.
- 7. the ultra-short pulse laser process equipment according to claim 6 for hard brittle material, it is characterised in that described to add Construction equipment further includes micro- camera, and the micro- camera is installed on first motion platform.
- 8. the ultra-short pulse laser process equipment according to claim 6 for hard brittle material, it is characterised in that the folder Tool includes loading plate and at least three clamping parts, is each provided with least three sliding grooves on the loading plate, and at least three The clamping part is corresponded and is connected at least three sliding grooves, and the clamping part is slidably arranged in the sliding groove It is interior, and there is the position limiting structure for the position for being used to limit the clamping part between the clamping part and the loading plate, at least three A clamping part surrounds clamping space.
- 9. the ultra-short pulse laser process equipment according to claim 8 for hard brittle material, it is characterised in that the dress Folder includes base portion and clamping portion, and the clamping portion is rotatably arranged on the base portion, the clamping portion and the base portion Pivot center is slidably arranged in the sliding groove perpendicular to the workbench, the base portion, the base portion and the loading plate It is bolted.
- 10. the ultra-short pulse laser process equipment according to claim 9 for hard brittle material, it is characterised in that described Clamping is provided with cushion in portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711456945.4A CN107900512A (en) | 2017-12-27 | 2017-12-27 | Ultra-short pulse laser process equipment for hard brittle material |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711456945.4A CN107900512A (en) | 2017-12-27 | 2017-12-27 | Ultra-short pulse laser process equipment for hard brittle material |
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| CN107900512A true CN107900512A (en) | 2018-04-13 |
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| CN201711456945.4A Pending CN107900512A (en) | 2017-12-27 | 2017-12-27 | Ultra-short pulse laser process equipment for hard brittle material |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN108723609B (en) * | 2018-07-24 | 2024-06-14 | 廊坊西波尔钻石技术有限公司 | Laser etching machine and superhard material processing method |
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