CN207675938U - A kind of FM-CW laser ranging device of integrated reference path systems stabilisation - Google Patents

A kind of FM-CW laser ranging device of integrated reference path systems stabilisation Download PDF

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CN207675938U
CN207675938U CN201721444409.8U CN201721444409U CN207675938U CN 207675938 U CN207675938 U CN 207675938U CN 201721444409 U CN201721444409 U CN 201721444409U CN 207675938 U CN207675938 U CN 207675938U
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laser
coupler
roads
photodetector
way
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范绪银
时光
郑磊珏
王文
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Hangzhou Dianzi University
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Hangzhou Dianzi University
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Abstract

The utility model discloses a kind of FM-CW laser ranging devices of integrated reference path systems stabilisation.Existing FM-CW laser ranging system ranging benchmark is easy to be influenced by extraneous vibration.The utility model includes external-cavity tunable laser, measurement interference system, He-Ne laser and auxiliary interference system;External-cavity tunable laser generates the continuous laser of 1540nm~1550nm;He-Ne laser generates the single-mode laser of 632nm;It includes the second coupler, first annular device, the first collimation lens, the first photodetector and third coupler to measure interference system;The feedback control system of a set of optical path difference compensation, including acousto-optic modulator, frequency modulation signal source, phase detector, photodetector, piezoelectric micromotion platform, piezo controller, servo controller and plane mirror are set in auxiliary interference system.The utility model, which is used to eliminate time delay optical fiber length to be changed by extraneous vibration, to be influenced, to improve range accuracy.

Description

A kind of FM-CW laser ranging device of integrated reference path systems stabilisation
Technical field
The utility model belongs to optical technical field, and in particular to a kind of frequency modulation of integrated reference path systems stabilisation is continuous Wave laser ranging system.
Background technology
In large scale field of precision measurement, the measuring instrument based on laser technology is widely used.Range is arrived at more than ten meters The Models of Absolute Distance Measurement Based technology of tens meters of ranges is the research hotspot and difficult point in current laser measurement field.FM-CW laser ranging With high-precision, non-blind area, without cooperative target, it can be achieved that the advantages that absolute distance measurement, particularly suitable for industrial large scale Models of Absolute Distance Measurement Based field.
Increase optical fiber mach in FM-CW laser ranging system and increase Dare interference system as auxiliary interference system, utilizes Equal optical frequency intervals resampling method can be eliminated since what range accuracy caused by tunable laser Modulation and Nonlinear declined asks Topic, tens microns are increased to by resolution of ranging.However the range-measurement system is dry by two in optical fiber mach increasing Dare interference system The optical path difference of arm is related to as ranging benchmark, length is easy to be influenced by extraneous vibration, influences final range accuracy.
Invention content
The purpose of the utility model is to overcome existing FM-CW laser ranging system ranging benchmark to be easy by outer The shortcomings that boundary's vibration effect and deficiency provide a kind of FM-CW laser ranging device of integrated reference path systems stabilisation. The utility model effectively can inhibit extraneous vibration to influence, and improve ranging resolving power.
The utility model includes external-cavity tunable laser, measurement interference system, He-Ne laser and auxiliary interference system System;The external-cavity tunable laser generation wavelength modulation range is the continuous laser of 1540nm~1550nm;Described He-Ne laser generation wavelength is the single-mode laser of 632nm;The laser of external-cavity tunable laser transmitting is by the first coupling Device is divided into A, B two-way;The measurement interference system includes the second coupler, first annular device, the first collimation lens, the first light Electric explorer and third coupler;The roads A laser is divided into two-way light by the second coupler, and light passes through first annular device successively all the way Simultaneously backtracking enters first annular device with target prism is got to after the first collimation lens, then from the injection of first annular device and separately Outer light all the way converges into a branch of into third coupler;Third coupler project laser beam by laser acquisition ranging from 1540nm~ The first photodetector of 1550nm detects, and is interfered in the first photodetector surfaces.
The auxiliary interference system includes the 4th coupler, the 5th coupler, low-pass filter, phase detector, the Three photodetectors, acousto-optic modulator, the second collimation lens, plane mirror, piezoelectric micromotion platform, piezo controller and servo Controller;The roads B laser and the single-mode laser of He-Ne laser transmitting converge into the 4th coupler of a branch of entrance, then through the 5th coupling Device is divided into C, D two-way, and the roads C laser enters time delay optical fiber, and the roads D laser is beaten after sequentially entering the second circulator and the second collimation lens To plane mirror, and backtracking enters the second circulator, is then passed through the acousto-optic modulator driven by frequency modulation signal source, produces The raw frequency displacement with frequency modulation signal source equal frequencies so that the 632nm laser in C, D two-way generates fixed frequency difference.Time delay optical fiber goes out The roads the C laser come converges with the roads the D laser that acousto-optic modulator comes out is further divided into E, F two-way light to be a branch of into the 6th coupler.E Filtered of road light, then detected by the second photodetector of laser acquisition ranging from 1540nm~1550nm, the roads E light The laser of middle 1540nm~1550nm wavelength is interfered in the second photodetector surfaces;The roads F light is by laser acquisition wavelength The third photodetector of 632nm is detected, and the two-way difference frequency laser in 632nm laser beams is in third photodetector surfaces It interferes, generates beat signal.Phase detector is to the beat signal of 632nm laser and the original signal two of frequency modulation signal source The phase of person is compared, then the signal after comparison is input to servo controller by low-pass filter, passes through SERVO CONTROL Device controls piezo controller and drives piezoelectric micromotion platform, piezoelectric micromotion platform that plane mirror is driven to change and the second collimation lens Distance, to change the light path size of the roads D laser, the optical path difference variation of compensation C, D two-way is eliminated because time delay optical fiber length becomes Change the influence for the optical path difference variation for causing to assist interference system.
The acquisition system receives the beat signal on the first photodetector for measuring interference system, and receives the roads B Assist the beat signal on the second photodetector of interference system.
The external-cavity tunable laser and He-Ne laser is by controller control start and stop simultaneously.
Compared with prior art, the effect of the utility model is:
On the basis of conventional FM-CW laser ranging system, the utility model increases Dare interference system to optical fiber mach In optical path difference, that is, ranging benchmark of two interfere arms carried out feedback control.The length of time delay optical fiber is influenced to send out by extraneous vibration Changing, this can change ranging benchmark to influence range accuracy, and the utility model effectively can inhibit extraneous vibration to influence, and be formed Closed-loop stabilization system achievees the purpose that improve range accuracy.
Description of the drawings
Fig. 1 is the light path principle figure of the utility model;
In figure:1, external-cavity tunable laser, the 2, first coupler, the 3, second coupler, 4, first annular device, 5, Collimating lens, 6, target prism, 7, acquisition system, the 8, first photodetector, 9, third coupler, the 10, the 4th coupler, 11, He-Ne laser, the 12, the 5th coupler, 13, time delay optical fiber, the 14, the 6th coupler, 15, filter plate, the 16, second photoelectricity is visited Survey device, 17, low-pass filter, 18, phase detector, 19, third photodetector, 20, frequency modulation signal source, 21, acousto-optic modulation Device, the 22, second circulator, the 23, second collimation lens, 24, power supply, 25, plane mirror, 26, piezoelectric micromotion platform, 27, pressure Electric controller, 28, servo controller, 29, PC, 30, controller.
Specific implementation mode
Technical solutions of the utility model are described in further detail below in conjunction with the accompanying drawings.
As shown in Figure 1, a kind of FM-CW laser ranging device of integrated reference path systems stabilisation, including external cavity type Tunable laser 1 measures interference system, He-Ne laser 11 and auxiliary interference system;External-cavity tunable laser 1 and helium Neon laser 11 is by the control of controller 30 start and stop simultaneously;He-Ne laser 11 is powered by power supply 24;External-cavity tunable laser 1, for the continuous laser that generation wavelength modulation range is 1540nm~1550nm;He-Ne laser 11 is for generation wavelength The single-mode laser of 632nm;The laser that external-cavity tunable laser 1 emits divides by the first coupler 2 for A, B two-way;Swash on the roads A Light enters measurement interference system, and it includes the second coupler 3, first annular device 4, the first collimation lens 5, first to measure interference system Photodetector 8 and third coupler 9;The roads A laser divides by the second coupler 3 for two-way light, and light passes through first successively all the way Got to after circulator 4 and the first collimation lens 5 target prism 6 and former road (first through the first collimation lens 5, after return to it is first annular Device 4) first annular device 4 is backed into, then converging into a branch of third that enters with other light all the way from the injection of first annular device 4 couples Device 9;The laser beam that third coupler 9 projects is visited by the first photodetector 8 of laser acquisition ranging from 1540nm~1550nm It surveys, and is interfered on 8 surface of the first photodetector.
The roads B laser enters auxiliary interference system, and auxiliary interference system includes the 4th coupler 10, the 5th coupler 12, low Bandpass filter 17, phase detector 18, third photodetector 19, acousto-optic modulator 21, the second collimation lens 23, plane reflection Mirror 25, piezoelectric micromotion platform 26, piezo controller 27 and servo controller 28;The list that the roads B laser emits with He-Ne laser 11 Mould laser converges into the 4th coupler 10 of a branch of entrance, is then divided into C, D two-way through the 5th coupler 12, and the wherein roads C laser enters Time delay optical fiber 13, the roads D laser get to plane mirror 25 after sequentially entering the second circulator 22 and the second collimation lens 23, and former Road (first through the second collimation lens 23, then return to the second circulator 22) backs into the second circulator 22, is then passed through by frequency modulation The acousto-optic modulator 21 that signal source 20 drives generates the frequency displacement with 20 equal frequencies of frequency modulation signal source, this makes in C, D two-way 632nm laser produces fixed frequency difference.The roads the D laser that the roads the C laser that time delay optical fiber 13 comes out comes out with acousto-optic modulator 21 Converge and is further divided into E, F two-way light into the 6th coupler 14 to be a branch of.The roads E light filtered 15, then by laser acquisition range It is detected for the second photodetector 16 of 1540nm~1550nm, the laser of 1540nm~1550nm wavelength exists in the light of the roads E Second photodetector, 16 surface interferes;The roads F light is carried out by the third photodetector 19 that laser acquisition wavelength is 632nm It detects, the two-way difference frequency laser in 632nm laser beams interferes on 19 surface of third photodetector, generates beat signal. When the variation affected by vibration of 13 length of time delay optical fiber in the roads C, the beat frequency of laser is interfered 632nm by phase detector 18 Signal is compared with the phase of both original signals of frequency modulation signal source 20, then the signal after comparison is passed through low-pass filter 17 are input to servo controller 28, and controlling piezo controller 27 by servo controller 28 drives piezoelectric micromotion platform 26, piezoelectricity Micromotion platform 26 drives plane mirror 25 to change at a distance from the second collimation lens 23, to which the light path for changing the roads D laser is big Small, the optical path difference for compensating C, D two-way changes, to eliminate because the variation of 13 length of time delay optical fiber causes to assist interference system The influence of optical path difference variation, improves range accuracy.
Acquisition system 7 receives the beat signal CH1 on the first photodetector 8 for measuring interference system, and it is auxiliary to receive the roads B The beat signal CH2 on the second photodetector 16 of interference system is helped, the optical frequency intervals resampling technique such as utilizes on PC29 The two beat signals are handled, by the way that treated, beat signal progress Fourier transformation obtains range data.
Although the utility model is described above in conjunction with attached drawing, the utility model is not limited to above-mentioned Specific implementation mode, the above mentioned embodiment is only schematical, rather than restrictive, the ordinary skill of this field Personnel are under the enlightenment of the utility model, in the case where not departing from the utility model aims, can also make many variations, this It belongs within the protection of the utility model a bit.

Claims (2)

1. a kind of FM-CW laser ranging device of integrated reference path systems stabilisation, including external cavity type tunable laser Device measures interference system, He-Ne laser and auxiliary interference system, it is characterised in that:The external-cavity tunable laser Generation wavelength modulation range is the continuous laser of 1540nm~1550nm;The He-Ne laser generation wavelength is 632nm's Single-mode laser;The laser of external-cavity tunable laser transmitting is divided into A, B two-way by the first coupler;The measurement interference System includes the second coupler, first annular device, the first collimation lens, the first photodetector and third coupler;The roads A laser It is divided into two-way light by the second coupler, light gets to target prism after first annular device and the first collimation lens successively all the way And backtracking enters first annular device, then converging into a branch of third that enters with other light all the way from the injection of first annular device couples Device;The laser beam that third coupler projects is detected by the first photodetector of laser acquisition ranging from 1540nm~1550nm, And it is interfered in the first photodetector surfaces;
The auxiliary interference system includes the 4th coupler, the 5th coupler, low-pass filter, phase detector, third light Electric explorer, acousto-optic modulator, the second collimation lens, plane mirror, piezoelectric micromotion platform, piezo controller and SERVO CONTROL Device;The roads B laser and the single-mode laser of He-Ne laser transmitting converge into the 4th coupler of a branch of entrance, then through the 5th coupler point At C, D two-way, the roads C laser enters time delay optical fiber, the roads D laser sequentially enter get to after the second circulator and the second collimation lens it is flat Face speculum, and backtracking enters the second circulator, is then passed through acousto-optic modulator drive by frequency modulation signal source, generate and The frequency displacement of frequency modulation signal source equal frequencies so that the 632nm laser in C, D two-way generates fixed frequency difference;The C that time delay optical fiber comes out Road laser converges with the roads the D laser that acousto-optic modulator comes out is further divided into E, F two-way light to be a branch of into the 6th coupler;The roads E light Filtered, then detected by the second photodetector of laser acquisition ranging from 1540nm~1550nm, in the light of the roads E The laser of 1540nm~1550nm wavelength is interfered in the second photodetector surfaces;The roads F light is by laser acquisition wavelength The third photodetector of 632nm is detected, and the two-way difference frequency laser in 632nm laser beams is in third photodetector surfaces It interferes, generates beat signal;Phase detector is to the beat signal of 632nm laser and the original signal two of frequency modulation signal source The phase of person is compared, then the signal after comparison is input to servo controller, servo controller control by low-pass filter Piezo controller processed drives piezoelectric micromotion platform, piezoelectric micromotion platform drive plane mirror change with the second collimation lens away from From to change the light path size of the roads D laser, the optical path difference variation of compensation C, D two-way;
Acquisition system receives the beat signal on the first photodetector for measuring interference system, and receives the roads B auxiliary interference system Beat signal on second photodetector of system.
2. a kind of FM-CW laser ranging device of integrated reference path systems stabilisation according to claim 1, It is characterized in that:The external-cavity tunable laser and He-Ne laser is by controller control start and stop simultaneously.
CN201721444409.8U 2017-11-02 2017-11-02 A kind of FM-CW laser ranging device of integrated reference path systems stabilisation Active CN207675938U (en)

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