CN101968658B - Nano static locking positioning method based on heterodyne laser interferometer - Google Patents
Nano static locking positioning method based on heterodyne laser interferometer Download PDFInfo
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- CN101968658B CN101968658B CN2010102954552A CN201010295455A CN101968658B CN 101968658 B CN101968658 B CN 101968658B CN 2010102954552 A CN2010102954552 A CN 2010102954552A CN 201010295455 A CN201010295455 A CN 201010295455A CN 101968658 B CN101968658 B CN 101968658B
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Abstract
The invention relates to a nano static locking positioning method based on a heterodyne laser interferometer. The traditional positioning method has low accuracy. In the invention, a double-frequency laser outputs orthogonal line polarized light with the double-frequency difference of 10-30 MHZ and sends to an optical lens group to form a heterodyne double-frequency laser interferometer; the heterodyne double-frequency laser interferometer as a micrometric displacement monitoring unit monitors the displacement of the deviation locking position of a micro displacement worktable in real time and also outputs measurement light, the double-frequency laser outputs reference light, the measurement light and the reference light are subjected to photoelectric conversion and then enter a phase discrimination circuit, and the phase discrimination circuit discriminates phrases and then outputs an analog voltage as a control voltage driving the micro displacement worktable to move, wherein the analog voltage corresponds to phase difference. The invention omits a link of converting the phase difference into the displacement, reduces the error terms, enables a system device to be simple and easy to operate and greatly enhances the frequency response and the positioning accuracy of a system.
Description
Technical field
The invention belongs to the ultraprecise field of locating technology, relate to a kind of nanometer static locking localization method based on the heterodyne system laser interferometer.
Background technology
Precision positioning device is made up of two formants of displacement drive and monitoring as a closed-loop control system usually.Can realize that at present the driving element that the nanometer scale displacement takes place mainly contains piezo tube, piezoelectric ceramics, MEMS (Micro-E1ectro-Mechanical Systems; Micro Electro Mechanical System) driver, ultrasonic drivers, elastic actuator and magnetostrictive device etc.; Wherein piezoelectric ceramic actuator is because of having advantages such as high resolving power, high frequency sound and heating be low; And flexible hinge is a kind of novel elastic guide form; Have and do not have machinery friction, no gap, advantage such as autokinesis is high, processing is simple, especially suitable nanometer positioning technical field, then the ultraprecise displacement drive unit that constitutes of piezoelectric ceramics and flexible hinge has obtained application widely.Nanometer scale displacement monitoring unit mainly contains capacitive transducer, grating sensor, laser interferometer etc.; Wherein but laser interferometer has characteristics such as wavelength traceability, antijamming capability are strong, displacement resolving power height, in the ultraprecise positioning system of nanometer scale, is widely used as the displacement monitoring unit.
The nanometer-level ultra-precise positioning system that laser interferometer, piezoelectric ceramic actuator and flexible hinge constitute; To be the displacement that records with laser interferometer realize the closed loop position control as the servocontrol parameter of piezoelectric ceramic actuator to the conventional positioning method; Because the laser interferometer ubiquity periodic nonlinearity erron, the ultraprecise positioning system of such scheme is difficult to improve bearing accuracy.
Summary of the invention
The objective of the invention is deficiency, a kind of nanometer static locking localization method based on the heterodyne system laser interferometer is provided to prior art.This method is a kind of reference signal of heterodyne system laser interferometer and the phase differential between measuring-signal is realized the closed loop position control as the servocontrol parameter of micrometric displacement generation driver one dimension static locking nanometer positioning method utilized.
The concrete steps of the inventive method are:
Step (1) two-frequency laser output frequency difference is the orhtogonal linear polarizaiton light of 10～30MHZ, beam incident optical mirror group, and two-frequency laser and optical frames group constitute the heterodyne system laser interferometer;
Step (2) heterodyne system laser interferometer is monitored the displacement that micro displacement workbench offset-lock position is taken place in real time as the micrometric displacement monitoring means, the measuring light of heterodyne system laser interferometer output simultaneously; Described micro displacement workbench is provided with second level crossing in the optical frames group;
Step (3) two-frequency laser output reference light is converted into first electric signal behind first photelectric receiver, first electric signal is input to an input end of phase discriminator; Heterodyne system laser interferometer output measuring light is converted into second electric signal behind second photelectric receiver, second electric signal is input to another input end of phase discriminator;
Step (4) phase discriminator carries out exporting and the corresponding aanalogvoltage of phase differential behind the phase demodulation to first electric signal and second electric signal;
The aanalogvoltage of step (5) phase discriminator output is delivered to the control end of micrometric displacement generation driving power, as control Control of Voltage micrometric displacement generation driving power;
Step (6) micrometric displacement generation driving power drives micro displacement workbench according to the size of control voltage, makes micro displacement workbench produce corresponding displacement, realizes the static locking location of micro displacement workbench.
Described optical frames group comprises polarization splitting prism, first quarter wave plate, second quarter wave plate, prism of corner cube, first level crossing, second level crossing and fiber optic receiver.
Described micro displacement workbench is the ultraprecise displacement drive unit that is constituted by bipolarity telescopic piezoelectric ceramic and flexible hinge.
Described two-frequency laser is connected through optical fiber with first photelectric receiver.
Described phase discriminator adopts CPLD as Logical processing unit.
Described micrometric displacement generation driving power comprises biasing circuit, sample circuit, error amplifying circuit and charging and discharging circuit; The input end of biasing circuit is connected with phase discriminator output as the control end of micrometric displacement generation driving power; The output terminal of biasing circuit is connected with an input end of error amplifying circuit, and the output terminal of sample circuit is connected with another input end of error amplifying circuit; The output terminal of error amplifying circuit is connected with the input end of charging and discharging circuit, and the output terminal of charging and discharging circuit is connected with the input end of sample circuit, the scalable pressure piezoelectric ceramics of bipolarity in the micro displacement workbench respectively.
The phase differential that the present invention records with laser interferometer is the mode of displacement drive unit servocontrol parameter; Save the link that a phase differential converts displacement into; Reduce error term, made system and device simple, and improved the frequency response and the bearing accuracy of system greatly.
Description of drawings
Fig. 1 is a system chart of the present invention;
Fig. 2 is heterodyne system laser interferometer index path among the present invention;
Fig. 3 is phase discriminator theory diagram among the present invention;
Fig. 4 is micrometric displacement generation driving power circuit block diagram among the present invention.
Embodiment
Below in conjunction with accompanying drawing the present invention is described further.
As shown in Figure 1.Two-frequency laser 1 output two frequency differences are the orhtogonal linear polarizaiton light of 20MHZ, incide optical frames group 2, constitute the heterodyne system two-frequency laser interferometer.Two-frequency laser interferometer is as the micrometric displacement monitoring means; Monitor the displacement that micro displacement workbench 3 offset-lock positions are taken place in real time; The measuring light of two-frequency laser interferometer output simultaneously; This measuring light is converted into second electric signal after importing second photelectric receiver 5, and two-frequency laser output reference light is converted into first electric signal after Optical Fiber Transmission is imported first photelectric receiver 4.First electric signal is input to an input end of phase discriminator, and second electric signal is input to another input end of phase discriminator.6 pairs first electric signal of phase discriminator and second electric signal carry out exporting and the corresponding aanalogvoltage of phase differential behind the phase demodulation; This aanalogvoltage is delivered to the control end of micrometric displacement generation driving power 7; As control Control of Voltage micrometric displacement generation driving power; Thereby moving of control micro displacement workbench realized closed loop position control lock in place.
A distinguishing feature of the nanometer static locking localization method that the present invention proposes is to have utilized the heterodyne system two-frequency laser interferometer of surveying long principle based on Doppler effect.Light path is as shown in Figure 2.Two-frequency laser 1 output two frequency differences are the orhtogonal linear polarizaiton light of 20MHZ, and the direction of propagation all is the laser emitting beam direction, but direction of vibration is different, and wherein light beam one direction of vibration is perpendicular to drawing, and light beam two direction of vibration are parallel to drawing.On the direction of propagation of two light beams, place a polarization splitting prism 2-1; Light beam one incides on the light splitting surface of polarization splitting prism 2-1 with light beam two simultaneously; Wherein light beam one is along upwards reflecting polarization splitting prism 2-1 perpendicular to the laser emitting beam direction; Incide the first quarter wave plate 2-2 and the first level crossing 2-3 successively; After the first level crossing 2-3 place is reflected, import the first quarter wave plate 2-2 once more, become the light splitting surface place that light that direction of vibration is parallel to drawing incides Amici prism 2-1 again then.Light beam two incides the second quarter wave plate 2-4 and the second level crossing 2-5 successively along the direction consistent with the laser emitting light beam simultaneously; The second level crossing 2-5 is installed in micro displacement workbench; Produce displacement X with micro displacement workbench; Be incident to the second quarter wave plate 2-4 once more after the second level crossing 2-5 place is reflected, become the light splitting surface place that direction of vibration incides Amici prism 2-1 after perpendicular to the light of drawing once more then.This moment is for Amici prism, and original light beam one has become transmitted light by reflected light, and original light beam two has become reflected light by transmitted light, and two light beams incide the prism of corner cube 2-7 that is positioned at the polarization splitting prism below simultaneously.Light beam is transmitted into the first quarter wave plate 2-2 and the first level crossing 2-3 again and again in the outgoing beam of prism of corner cube 2-7; Light beam two is reflected into the quarter wave plate 2-4 and the second level crossing 2-5; Two light beams reflect the back respectively and join at the light splitting surface place of Amici prism 2-1; 90 ° of the direction of propagation deflections of outgoing beam light behind corner prism 2-6 are received by fiber optic receiver 2-8 then and import second photelectric receiver 5 by Optical Fiber Transmission again.
In the nanometer static locking localization method based on the heterodyne system laser interferometer, phase discriminator differentiates that the phase differential precision between measuring-signal and reference signal seems particularly important, directly influences bearing accuracy.Phase discriminator adopts the digital phase detecting method of CPLD as Logical processing unit among the present invention, and circuit block diagram is as shown in Figure 3.Two-frequency laser output reference light is exported second electric signal that measuring light changes into first through first electric signal that changes into behind first photelectric receiver and laser interferometer behind second photelectric receiver be square-wave signal through the waveform transformation circuit conversion; Convert phase differential into corresponding analog voltage signal behind the input digit phase detector again, digital phase discriminator can be differentiated the size and Orientation that differs.In order to improve precision of phase discrimination, digital phase discriminator output signal carries out carrying out the difference amplification again behind the three rank LPFs.
The aanalogvoltage of phase discriminator output is delivered to the control end of micrometric displacement generation driving power, as control Control of Voltage micrometric displacement generation driving power.The control voltage range of micrometric displacement generation driving power is 0～5V, drive voltage range is-630V～+ 630V, the output displacement range is-6um～+ 6um, the least displacement resolving power is 10nm.As shown in Figure 4, micrometric displacement generation driving power comprises biasing circuit, sample circuit, error amplifying circuit and charging and discharging circuit four parts.The input end of biasing circuit is connected with phase discriminator output as the control end of micrometric displacement generation driving power; The output terminal of biasing circuit is connected with an input end of error amplifying circuit, and the output terminal of sample circuit is connected with another input end of error amplifying circuit; The output terminal of error amplifying circuit is connected with the input end of charging and discharging circuit, and the output terminal of charging and discharging circuit is connected with the input end of sample circuit, the scalable pressure piezoelectric ceramics of bipolarity in the micro displacement workbench respectively.Its principle of work is: the control voltage of phase discriminator output; Convert the control signal that satisfies actual needs into through biasing circuit; The sampling value that this control signal is amplified back and sample circuit through prime compares, and the error signal that obtains as control signal, is controlled the break-make of on-off element in the charging and discharging circuit after amplifying; Thereby reach control the discharging and recharging of piezoelectric ceramics, realize with the low-voltage of 0～5V control-630～+ the high-tension purpose of 630V.
Micrometric displacement generation driving power drives micro displacement workbench according to the size of control voltage, makes micro displacement workbench produce corresponding displacement, realizes the static locking location of micro displacement workbench.
Claims (6)
1. based on the nanometer static locking localization method of heterodyne system laser interferometer, it is characterized in that this method may further comprise the steps:
Step (1) two-frequency laser output frequency difference is the orhtogonal linear polarizaiton light of 10～30MHZ, beam incident optical mirror group; Two-frequency laser and optical frames group constitute the heterodyne system laser interferometer;
Step (2) heterodyne system laser interferometer is monitored the displacement that micro displacement workbench offset-lock position is taken place in real time as the micrometric displacement monitoring means, the measuring light of heterodyne system laser interferometer output simultaneously; Described micro displacement workbench is provided with second level crossing in the optical frames group;
Step (3) two-frequency laser output reference light is converted into first electric signal behind first photelectric receiver, first electric signal is input to an input end of phase discriminator; Heterodyne system laser interferometer output measuring light is converted into second electric signal behind second photelectric receiver, second electric signal is input to another input end of phase discriminator;
Step (4) phase discriminator carries out exporting and the corresponding aanalogvoltage of phase differential behind the phase demodulation to first electric signal and second electric signal;
The aanalogvoltage of step (5) phase discriminator output is delivered to the control end of micrometric displacement generation driving power, as control Control of Voltage micrometric displacement generation driving power;
Step (6) micrometric displacement generation driving power drives micro displacement workbench according to the size of control voltage, makes micro displacement workbench produce corresponding displacement, realizes the static locking location of micro displacement workbench.
2. the nanometer static locking localization method based on the heterodyne system laser interferometer according to claim 1, it is characterized in that: described optical frames group comprises polarization splitting prism, first quarter wave plate, second quarter wave plate, first level crossing, second level crossing, prism of corner cube, corner prism and fiber optic receiver.
3. the nanometer static locking localization method based on the heterodyne system laser interferometer according to claim 1 is characterized in that: described micro displacement workbench is the ultraprecise displacement drive unit that is constituted by bipolarity telescopic piezoelectric ceramic and flexible hinge.
4. the nanometer static locking localization method based on the heterodyne system laser interferometer according to claim 1, it is characterized in that: described two-frequency laser is connected through optical fiber with first photelectric receiver.
5. the nanometer static locking localization method based on the heterodyne system laser interferometer according to claim 1 is characterized in that: described phase discriminator adopts CPLD as Logical processing unit.
6. the nanometer static locking localization method based on the heterodyne system laser interferometer according to claim 1 is characterized in that: described micrometric displacement generation driving power comprises biasing circuit, sample circuit, error amplifying circuit and charging and discharging circuit; The input end of biasing circuit is connected with phase discriminator output as the control end of micrometric displacement generation driving power; The output terminal of biasing circuit is connected with an input end of error amplifying circuit, and the output terminal of sample circuit is connected with another input end of error amplifying circuit; The output terminal of error amplifying circuit is connected with the input end of charging and discharging circuit, and the output terminal of charging and discharging circuit is connected with the input end of sample circuit, bipolarity telescopic piezoelectric ceramic in the micro displacement workbench respectively.
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| CN110080622A (en) * | 2019-05-30 | 2019-08-02 | 西安建筑科技大学 | A kind of micro electronmechanical security password lock core and coded lock |
| CN113759770B (en) * | 2021-08-10 | 2023-11-14 | 华中科技大学 | Two-dimensional nanometer positioning platform control system |
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| CN1606235A (en) * | 2004-11-16 | 2005-04-13 | 四川大学 | He-Ne laser beat wave noise filtering equipment and noise filtering method |
| CN101413783A (en) * | 2008-07-23 | 2009-04-22 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Double-frequency laser interferometry apparatus |
| EP2108918A1 (en) * | 2008-04-07 | 2009-10-14 | Mitutoyo Corporation | Laser interferometer, measurement method and measurement program |
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| JP4995016B2 (en) * | 2007-09-14 | 2012-08-08 | キヤノン株式会社 | Absolute position measuring apparatus and measuring method |
| JP5480507B2 (en) * | 2009-01-13 | 2014-04-23 | 株式会社ミツトヨ | Laser interferometer |
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| CN1606235A (en) * | 2004-11-16 | 2005-04-13 | 四川大学 | He-Ne laser beat wave noise filtering equipment and noise filtering method |
| EP2108918A1 (en) * | 2008-04-07 | 2009-10-14 | Mitutoyo Corporation | Laser interferometer, measurement method and measurement program |
| CN101413783A (en) * | 2008-07-23 | 2009-04-22 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Double-frequency laser interferometry apparatus |
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| 许素安等."偏振激光干涉仪的纳米定位系统".<中国计量学院学报>.2009,第20卷(第2期), |
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