CN204807036U - Looks interferometer is moved to feedback control formula - Google Patents
Looks interferometer is moved to feedback control formula Download PDFInfo
- Publication number
- CN204807036U CN204807036U CN201520271453.8U CN201520271453U CN204807036U CN 204807036 U CN204807036 U CN 204807036U CN 201520271453 U CN201520271453 U CN 201520271453U CN 204807036 U CN204807036 U CN 204807036U
- Authority
- CN
- China
- Prior art keywords
- beam splitter
- feedback control
- piezoelectric ceramic
- signal transmitter
- control type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The utility model relates to a looks interferometer is moved to feedback control formula, by laser instrument (1), beam expanding lens (2), first beam splitter (3), second beam splitter (4), imaging system (5), CCD (6), photoelectric detector (7), reference mirror (8), piezoceramics driver (9) and feedback signal transmitter (12) constitution, first beam splitter (3) set up at beam expanding lens (2) rear side, refer to mirror (8) and set up between piezoceramics driver (9) and first beam splitter (3), set up between photoelectric detector (7) and piezoceramics driver (9) feedback signal transmitter (12). The utility model discloses a change of the optical path difference that the pairing vibration caused is surveyed to utilize the method such as light source wavelength change in addition real -time feedback compensation, make the interference pattern remain stable, thereby eliminate the influence of vibration.
Description
Technical field
The utility model relates to the interferometer of a kind of detector detection move of stripe of causing of extraneous vibration or light intensity change, particularly relates to a kind of feedback control type phase-shifting interferometer, belongs to interferometer field.
Background technology
Shift-phase interferometry is the non-contact measuring technology in units of optical wavelength, has high measuring accuracy and sensitivity, is considered to one of most exact technical detecting precision element.Before more than 200 years, people just notice the interference of light of knowing clearly, and start planned control interference.But until the succeeding in developing of nineteen sixty first ruby laser, interference just starts to be widely used in fields of measurement.Traditional interfere measurement technique is mainly by take a picture or human eye directly observes interference fringe, and the mode of hand computation measurement result is carried out, and inefficiency, subjective error is larger.Phase detection technology in communication field is incorporated in optical measurement by the people such as Bruning in 1974 first, makes classical interfere measurement technique stride into nanoscale from micron order, realizes the important breakthrough of Optical metrology and measurement.Since the eighties, along with the progressively application of technology in optic test such as laser technology, detecting technique, computer technology, image processing techniques and precision optical machineries, Phase-Shifting Interferometry is further developed, achieve in real time, fast, multiparameter, robotization measurement.
The usual time phase-shifting method of traditional movable phase interfere, utilizes the piezoelectric property of PZT to promote phase shifting component and at the uniform velocity moves, realize the phase shift at equal intervals of interferogram.During this period, the factor such as ambient vibration, air turbulence all can affect the precision of phase shift step-length, reduces the measuring accuracy of phase-shifting interferometer.Under prevailing experimental conditions, interferometer is positioned on optical table usually, and now its natural frequency is lower, the amplitude com parison that the ambient vibration of low frequency is corresponding is large, the vibration of these low frequency large amplitudes can make interference image fuzzy, has a strong impact on the contrast of interferogram, the measuring accuracy of obvious reduction system.
Utility model content
In order to overcome the deficiencies in the prior art, resolving the problem of prior art, making up the deficiency of existing existing product in the market.
The utility model provides a kind of feedback control type phase-shifting interferometer, by laser instrument, beam expanding lens, first beam splitter, second beam splitter, imaging system, CCD, photodetector, reference mirror, piezoelectric ceramic actuator and feedback signal transmitter are formed, described first beam splitter is arranged on rear side of beam expanding lens, corresponding first beam splitter of second beam splitter is arranged, photodetector is provided with between piezoelectric ceramic actuator and the second beam splitter, reference mirror is arranged between piezoelectric ceramic actuator and the first beam splitter, feedback signal transmitter is set between photodetector and piezoelectric ceramic actuator.
Preferably, the imaging system that imaging len is formed is provided with between above-mentioned second beam splitter and CCD.
Preferably, above-mentioned piezoelectric ceramic actuator is equipped with Piezoelectric Ceramic controller.
Preferably, above-mentioned feedback signal transmitter is equipped with modulating oscillator and DC level.
Preferably, measured piece is arranged on rear side of the first beam splitter.
The feedback control type phase-shifting interferometer that the utility model provides is by detecting vibrating the change of optical path difference caused, and the feedback compensation utilizing the methods such as optical source wavelength change in addition real-time, make interferogram keep stable, thus eliminate the impact of vibration.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Reference numeral: 1-laser instrument; 2-beam expanding lens; 3-first beam splitter; 4-second beam splitter; 5-imaging system; 6-CCD; 7-photodetector; 8-reference mirror; 9-piezoelectric ceramic actuator; 10-Piezoelectric Ceramic controller; 11-measured piece; 12-feedback signal transmitter; 13-modulating oscillator; 14-DC level.
Embodiment
Understand for the ease of those of ordinary skill in the art and implement the utility model, below in conjunction with the drawings and the specific embodiments, the utility model being described in further detail.
As shown in Figure 1, the feedback control type phase-shifting interferometer that the utility model provides, by laser instrument 1, beam expanding lens 2, first beam splitter 3, second beam splitter 4, imaging system 5, CCD6, photodetector 7, reference mirror 8, piezoelectric ceramic actuator 9 and feedback signal transmitter 12 are formed, first beam splitter 3 is arranged on rear side of beam expanding lens 2, corresponding first beam splitter 3 of second beam splitter 4 is arranged, photodetector 7 is provided with between piezoelectric ceramic actuator 9 and the second beam splitter 4, reference mirror 8 is arranged between piezoelectric ceramic actuator 9 and the first beam splitter 3, feedback signal transmitter 12 is set between photodetector 7 and piezoelectric ceramic actuator 9.
The imaging system 5 that imaging len is formed is provided with between second beam splitter 4 and CCD6.Piezoelectric ceramic actuator 9 is equipped with Piezoelectric Ceramic controller 10.Feedback signal transmitter 12 is equipped with modulating oscillator 13 and DC level 14.Measured piece 11 is arranged on rear side of the first beam splitter 3.
The feedback control type phase-shifting interferometer that the utility model provides, the move of stripe caused with detector detection extraneous vibration or light intensity change, i.e. acquisition environment vibration; Process vibration signal, converts thereof into the voltage signal corresponded and feeds back on PZT driver, utilize the piezoelectric property of PZT to compensate vibration.In this mechanical type optical phase modulating system, PZT is phase shift mechanism, and be again phase-modulation compensator, this just proposes higher requirement to the frequency characteristic of PZT.
The embodiment of the above is better embodiment of the present utility model; not limit concrete practical range of the present utility model with this; scope of the present utility model comprises and is not limited to this embodiment, and the equivalence change that all shapes according to the utility model, structure are done is all in protection domain of the present utility model.
Claims (5)
1. a feedback control type phase-shifting interferometer, it is characterized in that: described feedback control type phase-shifting interferometer is by laser instrument (1), beam expanding lens (2), first beam splitter (3), second beam splitter (4), imaging system (5), CCD (6), photodetector (7), reference mirror (8), piezoelectric ceramic actuator (9) and feedback signal transmitter (12) are formed, described first beam splitter (3) is arranged on beam expanding lens (2) rear side, corresponding first beam splitter (3) of second beam splitter (4) is arranged, photodetector (7) is provided with between piezoelectric ceramic actuator (9) and the second beam splitter (4), reference mirror (8) is arranged between piezoelectric ceramic actuator (9) and the first beam splitter (3), feedback signal transmitter (12) is set between photodetector (7) and piezoelectric ceramic actuator (9).
2. feedback control type phase-shifting interferometer according to claim 1, is characterized in that: be provided with the imaging system (5) that imaging len is formed between described second beam splitter (4) and CCD (6).
3. feedback control type phase-shifting interferometer according to claim 1, is characterized in that: described piezoelectric ceramic actuator (9) is equipped with Piezoelectric Ceramic controller (10).
4. feedback control type phase-shifting interferometer according to claim 1, is characterized in that: described feedback signal transmitter (12) is equipped with modulating oscillator (13) and DC level (14).
5. feedback control type phase-shifting interferometer according to claim 1, is characterized in that: measured piece (11) is arranged on the first beam splitter (3) rear side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520271453.8U CN204807036U (en) | 2015-04-27 | 2015-04-27 | Looks interferometer is moved to feedback control formula |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520271453.8U CN204807036U (en) | 2015-04-27 | 2015-04-27 | Looks interferometer is moved to feedback control formula |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204807036U true CN204807036U (en) | 2015-11-25 |
Family
ID=54591846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520271453.8U Expired - Fee Related CN204807036U (en) | 2015-04-27 | 2015-04-27 | Looks interferometer is moved to feedback control formula |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204807036U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105953725A (en) * | 2016-05-06 | 2016-09-21 | 哈尔滨工程大学 | Phase carrier type laser interference signal closed-loop demodulation method |
-
2015
- 2015-04-27 CN CN201520271453.8U patent/CN204807036U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105953725A (en) * | 2016-05-06 | 2016-09-21 | 哈尔滨工程大学 | Phase carrier type laser interference signal closed-loop demodulation method |
| CN105953725B (en) * | 2016-05-06 | 2018-05-18 | 哈尔滨工程大学 | A kind of phase carrier formula laser interference signal closed loop demodulation method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107728134B (en) | Frequency modulation continuous wave laser ranging device of integrated reference light path stabilizing system | |
| Norgia et al. | Self-mixing instrument for simultaneous distance and speed measurement | |
| CN102944169B (en) | A kind of synchronous polarization phase-shifting interferometer | |
| CN104614064A (en) | High speed multi-dimensional vibration measuring device and method based on stripe target | |
| Shao et al. | Dynamic clearance measurement using fiber-optic frequency-swept and frequency-fixed interferometry | |
| CN103471533B (en) | Surface appearance anti-vibration interferometry system | |
| CN102538986A (en) | Three-window based common-path interference detecting method and device | |
| CN101949685A (en) | Fiber laser self-mixing interferometer and measurement method thereof | |
| CN110470378B (en) | Three-wavelength-demodulation-type optical fiber acoustic sensing system and method with quadrature phase maintaining function | |
| CN106197310A (en) | A kind of wide spectrum micro-nano structure three-dimensional appearance testing method based on modulation degree | |
| CN103727901A (en) | Wavelength phase-shifting method based inter-planar parallelism detection method | |
| CN106342174B (en) | Laser gyro loss of resonator measurement mechanism and method | |
| CN102353520B (en) | Delay amount measuring method applied for fiber delay line measuring system and realization apparatus thereof | |
| JP2018059789A (en) | Distance measuring apparatus and distance measuring method | |
| CN105911605B (en) | A kind of closed signal acquisition method in optical interference formula gravimeter | |
| CN104237696A (en) | Optical detection set and method for detecting dynamic frequency response of piezoelectric ceramic | |
| CN204807036U (en) | Looks interferometer is moved to feedback control formula | |
| CN110617890A (en) | Frequency domain F-P type speed measurement system with strong anti-interference capability and speed measurement method thereof | |
| CN101738167A (en) | Resonant cavity frequency stabilization-based absolute distance measurement system and implementing method thereof | |
| CN205066684U (en) | System is interfered mutually to harmonious moving of computer control | |
| JP5704150B2 (en) | White interference device and position and displacement measuring method of white interference device | |
| CN103712553A (en) | Interference method with phase method and vertical scanning method compatible | |
| CN205066680U (en) | Computer intelligent control moves looks interferometer | |
| CN201548201U (en) | Vibration-resistant dynamic interferometer | |
| CN104897076A (en) | Three dimensional shape measurement method for micro nanoscale |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151125 Termination date: 20160427 |