CN207524587U - A kind of carrying mechanism for being integrated with cover board grasping mechanism - Google Patents
A kind of carrying mechanism for being integrated with cover board grasping mechanism Download PDFInfo
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- CN207524587U CN207524587U CN201720980025.1U CN201720980025U CN207524587U CN 207524587 U CN207524587 U CN 207524587U CN 201720980025 U CN201720980025 U CN 201720980025U CN 207524587 U CN207524587 U CN 207524587U
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- Prior art keywords
- cover board
- grasping mechanism
- target object
- carrying
- integrated
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Abstract
The utility model discloses a kind of carrying mechanism for being integrated with cover board grasping mechanism, carrying mechanism is characterized in that：Target object grasping mechanism and cover board grasping mechanism are provided in the carrying mechanism, the cover board grasping mechanism is used to that when carrying mechanism carries target object, the cover board on the target object to be grabbed from the target object.Compared to the device that picks and places cover board is separately provided, it is this by the mechanism for picking and placeing cover board be integrated into carrying mechanism set-up mode is simplified, compact integral device, save space, cover board can recycle, and the time for taking, putting cover board can be reduced, improve whole work efficiency.
Description
Technical field
The utility model is related to a kind of carrying mechanisms for being integrated with cover board grasping mechanism, belong to automation equipment field.
Background technology
In automation equipment field, for there is the situation of lid above the object of required carrying, usually set in a device
One lid grasping mechanism is taken away lid using lid grasping mechanism, will need the object transport carried to target using carrying mechanism
Position, this so that integral device duty is big, complicated.
Specifically, such as, in the mechanism to ALD reaction chamber loading and unloading, carrying mechanism needs will be plated out of reaction chamber
The silicon chip that film finishes is carried to target location, and the silicon chip that will carry out plated film is carried to reaction chamber, and silicon chip is reacting
It during chamber plated film, needs to set cover board above silicon chip carrier, then in the handling process, need that the silicon finished from plated film will be covered
It is removed on piece carrier（The process to be carried out does not allow have cover board above silicon chip carrier after silicon chip）If it is separately provided one to take
Lid mechanism, the increase of this cap taking mechanism can complicate integral device, and itself occupy certain space, the placement position covered
Certain space can also be occupied by putting.
Invention content
The purpose of this utility model is for the deficiencies in the prior art, provides one kind and is integrated with cover board grasping mechanism
Carrying mechanism, the mechanism compared to be independently arranged the situation compact overall structure of lid grasping mechanism, take up space it is small.It is carrying
Mechanism is to target object（Silicon chip carrier）While carrying, cover board is grabbed using the cover board grasping mechanism being integrated on carrying mechanism
It takes, is allowed to detach from silicon chip carrier, after silicon chip carrier is carried to target location by carrying mechanism, being loaded in carrying will plated film
Silicon chip silicon chip carrier when, can be recycled by cover plate lid on silicon chip carrier in this way, cover board realizes, meanwhile, pick and place
The lid time is compact, rhythm of production is fast.
Being integrated in the carrying mechanism of cover board grasping mechanism for the utility model is provided with target object grasping mechanism and lid
Plate grasping mechanism, the cover board grasping mechanism are used for when carrying mechanism carries target object, will be on the target object
Cover board grab from the target object.
Further, mobile mechanism is provided in the carrying mechanism, the mobile mechanism drives institute by a connecting plate
It states cover board grasping mechanism and the target object grasping mechanism moves between each operating position；The cover board grasping mechanism and institute
It states target object grasping mechanism to be arranged on the connecting plate, the crawl brachium of the target object grasping mechanism is grabbed with cover board
The difference of the crawl brachium of mechanism is taken to be more than the distance of target object crawl position and cover board crawl position.
Further, the cover board grasping mechanism includes two handgrips and two handgrip driving devices, described two to grab
Hand structure is identical, front and rear to be symmetrical arranged, and is respectively used to the front and rear side of crawl cover board, and described two handgrip driving devices respectively drive
Described two handgrips move in the longitudinal direction.
Further, the handgrip includes the handgrip arm of upper flat plate, lower tablet and the connection upper and lower tablet, it is described on
The downside of tablet is slidably arranged in along the longitudinal direction on the connecting plate, and the handgrip driving device is fixed on the connecting plate
Downside, and its output terminal connects the handgrip arm.
Further, on the handgrip set cover board capture testing agency, for detect cover board whether picked up and/
Or, target object is set to capture testing agency in the target object grasping mechanism, for detecting whether target object is grabbed
It rises.
Further, the target object grasping mechanism is identical with the cover board grasping mechanism structure.
Further, the mobile mechanism includes longitudinal motion mechanism and vertical and straight movement mechanism, the longitudinal motion mechanism
Mainly include longitudinal driving device, transmission shaft, belt wheel, belt；The power of the longitudinal driving device is distinguished after deceleration transfer
It drives and is located at longitudinal driving device left and right sides transmission shaft, the transmission shaft is being equipped with belt wheel, band far from longitudinal driving device end
Wheel is located at belt described in winding on the idle pulley of the belt wheel rear end with one；It is set in the support plate being fixedly connected with the belt
There is vertical and straight movement mechanism, the vertical and straight movement mechanism mainly includes vertical driving device, leading screw, nut；The vertical driving dress
The upper end for being fixed on the support plate is put, output terminal connection is rotatably arranged on the leading screw in the support plate vertically, and screw thread is matched
The nut closed on the leading screw is fixedly connected with the connecting plate.
The beneficial effects of the utility model are：It is 1. this to pick and place cover board compared to the device that picks and places cover board is separately provided
Mechanism be integrated into carrying mechanism（Overhead traveling crane）Set-up mode is simplified, compact integral device, meanwhile, using individually picking and placeing lid
Panel assembly lifts cover board, and the working method occupied space for setting aside and then sending back to again is big, and the mechanism for picking and placeing cover board is collected
Into after on overhead traveling crane, eliminate and individually pick and place the installation position of cover board arrangement and cover board placement location；
2. cover board can recycle, and while cover board recycles, the time for taking, putting cover board can be reduced, is improved
Whole work efficiency.
Description of the drawings
Fig. 1 is the schematic front view of the utility model mechanism.
Fig. 2 is the schematic diagram of longitudinal motion mechanism（It is left view relative to Fig. 1）.
Fig. 3 is the schematic diagram of cover board grasping mechanism（It is left view relative to Fig. 1）.
Fig. 4 is the schematic diagram of silicon chip carrier grasping mechanism（It is left view relative to Fig. 1）.
In figure：Longitudinal driving device 100, transmission shaft 101, belt 102, belt wheel 103, belt wheel support plate 104, belt wheel support
Bottom plate 105, leather belt buckle 200, the first connecting plate 201, the second connecting plate 202, third connecting plate 203, the 4th connecting plate
204th, vertical driving device 300, leading screw 301, nut 302, cover board grasping mechanism 4, upper flat plate 401, lower tablet 402, handgrip arm
403rd, handgrip driving device 404,405 sensor 406 of lever, silicon chip carrier grasping mechanism 5, cover board 6, silicon chip carrier 7, crawl are convex
Platform 71.
Specific embodiment
In the following, the embodiment of the utility model is described in detail with reference to attached drawing.
Middle coordinate is described below to use：The vertical direction of paper inwards is after using in Fig. 1, otherwise before being, front-rear direction
For longitudinal direction.
The carrying mechanism for being integrated with cover board grasping mechanism mainly includes stent（It is not showed that in figure）, longitudinal movement machine
Structure, vertical and straight movement mechanism, silicon chip carrier grasping mechanism and cover board grasping mechanism.
Wherein longitudinal motion mechanism mainly includes longitudinal driving device 100, transmission shaft 101, belt 102, belt wheel 103, band
Take turns support plate 104, belt wheel support baseboard 105.
Longitudinal driving device 100（Servo motor is selected in embodiment）By retarder deceleration transfer after the left and right sides point
A transmission shaft 101, the outer end of two transmission shafts 101 are not connected（One end far from device）It is rotatably supported in belt wheel support plate 104
On, 104 downside of belt wheel support plate is fixed on belt wheel support baseboard 105, and belt wheel support baseboard 105 is fixedly supported on stent,
101 outer end of rotation axis is fixed with belt wheel 103, the rear side of belt wheel support baseboard 105 is provided with idle pulley, in idle pulley and belt wheel 103
Upper winding belt 102, belt 102 selects synchronous belt in embodiment.The power that longitudinal driving device 100 exports is after deceleration transfer
The transmission shaft 101 of the left and right sides is driven to rotate, two transmission shafts 101 drive belt wheel 103 thereon to rotate, and then drive belt 102
Movement.
Belt 102 connects the first connecting plate 201 by leather belt buckle 200, being capable of synchronous drive the when belt 102 moves
One connecting plate 201 moves, and the first connecting plate 201 is fixedly connected with the second connecting plate 202 being vertically arranged, longitudinal driving device
During 100 action, can first, second connecting plate be driven by belt 102 and be fixedly attached to the component of first, second connecting plate
Longitudinal movement in order to which the longitudinal movement is given to be oriented to, is provided with sliding rail, the sliding block coordinated with it is consolidated on belt wheel support baseboard 105
Determine to leather belt buckle 200.
The top of second connecting plate 202 is fixedly installed the vertical driving device 300 in vertical and straight movement mechanism, in embodiment
Driving device 300 selects servo motor, the output terminal power connector leading screw 301 of driving device 300, the upper and lower ends of leading screw 301
It is rotatably supported in behind the second connecting plate 202, nut 302 is equipped on leading screw 301, nut 302 is connect with third
Plate 203 is fixedly connected, and the downside of third connecting plate 203 is fixedly connected with the 4th connecting plate 204.Vertical driving device 300 rotates, band
Dynamic leading screw 301 rotates, and so as to which nut 302 be driven to move up and down, and then drives the third connecting plate being fixedly connected with nut 302
203rd, the 4th connecting plate 204 moves up and down.
The left and right sides of horizontally disposed 4th connecting plate 204 is both provided with a set of cover board grasping mechanism 4 and a set of silicon chip
Carrier grasping mechanism 5.
As shown in figure 3, cover board grasping mechanism 4 mainly includes former and later two handgrips 40, two 40 structures of handgrip are identical, front and rear
It is symmetrical arranged, is respectively used to the front and rear side of crawl cover board 6.The upper end longitudinal sliding motion of handgrip 40 is arranged on the 4th connecting plate 204,
The lower end setting lift of handgrip takes the tablet of lid.
In embodiment, handgrip is mainly made of the handgrip arm 403 of both upper flat plate 401, lower tablet 402 and connection.4th
204 upside of connecting plate is provided with guide rail along the longitudinal direction, and setting sliding block is slided on guide rail, the upper of handgrip is fixedly connected on the upside of sliding block
Tablet 401, the downside of the 4th connecting plate 204 set that there are two handgrip driving devices 404 along the longitudinal direction（It is used in embodiment
It is cylinder）, the handgrip that two handgrip driving devices respectively drive front and rear side carries out movement in the front-back direction.
In addition, testing agency is also provided in handgrip to detect whether lid is picked up, and as shown in Figure 3, testing agency
Mainly include the lever 405 being rotatably arranged under handgrip on tablet 402, be set as U-shaped in embodiment, when handgrip lifts cover board
When, cover board pushes montant of the U-shaped bar close to cover board side, and montant of the U-shaped bar far from cover board side is rotated counterclockwise into sensor
406 detection range so as to send out the signal for lifting cover board, is easily infered, and lever 405 may be set to be other shapes,
Such as " √ ".
Silicon chip carrier grasping mechanism 5, as shown in Fig. 1,4, structure and set-up mode are similar to cover board grasping mechanism, handgrip
Silicon chip carrier is lifted by the crawl boss 71 for being fixed on side before and after silicon chip carrier 7, and, handgrip arm and cover board grasping mechanism
Handgrip arm arm length difference away from more than crawl boss and cover board between spacing, i.e., carrying mechanism is when carrying silicon chip carrier, cover board
Grasping mechanism contacts cover board and is lifted up cover board in advance so that and cover board is detached with silicon chip carrier, then, the crawl of silicon chip carrier
Silicon chip carrier is just lifted by the handgrip of mechanism by capturing boss 71.
Working condition：Vertical and straight movement mechanism action drives cover board to grab by 203 and the 4th connecting plate 204 of third connecting plate
Mechanism 4 and silicon chip carrier grasping mechanism 5 is taken to move downward, after moving to target location, cover board grasping mechanism 4 and silicon chip carrier are grabbed
Take the handgrip driving device 404 in mechanism 5 that handgrip 40 will be driven to be moved to the direction close to cover board/silicon chip, vertical and straight movement mechanism
It moves upwards, the handgrip in cover board grasping mechanism 4 first touches cover board 6, and cover board 6 is lifted away from silicon chip carrier 7（Cover board pushes U
Type bar, sensor send cover board and lift signal）, later, the handgrip of silicon chip carrier grasping mechanism 5 moves to crawl boss 71
It puts, and silicon chip carrier 7 is lifted, then, vertical and straight movement mechanism and longitudinal motion mechanism interoperation, silicon chip carrier 7 is transported
To target location, the handgrip driving device in silicon chip carrier grasping mechanism 5 acts, and handgrip moves outward, then, vertical and straight movement
Mechanism and longitudinal motion mechanism interoperation, cover board is transported at the silicon chip carrier for needing to be capped, and cover board is reused.
Easily infer, for only needing the situation of blanking, cover board is captured it by the cover board grasping mechanism in the carrying mechanism
After can be placed on cover board deposit position, preferably cover board is placed on the silicon chip carrier that discharging finishes.
Although the preferred embodiment of the utility model is described above in conjunction with attached drawing, the utility model not office
It is limited to above-mentioned specific embodiment, above-mentioned specific embodiment is only schematical, is not restricted, this field
Those of ordinary skill under the enlightenment of the utility model, do not departing from the utility model aims and protective scope of the claims
In the case of, the specific transformation of many forms can also be made, these are belonged within the scope of protection of the utility model.
Claims (8)
1. a kind of carrying mechanism for being integrated with cover board grasping mechanism, it is characterised in that：Object is provided in the carrying mechanism
Body grasping mechanism and cover board grasping mechanism, the cover board grasping mechanism are used for when carrying mechanism carries target object, will
Cover board on the target object is grabbed from the target object.
2. a kind of carrying mechanism for being integrated with cover board grasping mechanism according to claim 1, it is characterised in that：The carrying
Mobile mechanism is provided in mechanism, the mobile mechanism drives the cover board grasping mechanism and the object by a connecting plate
Body grasping mechanism moves between each operating position；The cover board grasping mechanism and the target object grasping mechanism are arranged at
On the connecting plate, the difference of the crawl brachium of the target object grasping mechanism and the crawl brachium of cover board grasping mechanism is more than mesh
Mark the distance of grasping body position and cover board crawl position.
3. a kind of carrying mechanism for being integrated with cover board grasping mechanism according to claim 1 or 2, it is characterised in that：It is described
Cover board grasping mechanism include two handgrips（40）With two handgrip driving devices（404）, described two handgrips（40）Structure phase
Together, the front and rear front and rear side for being symmetrical arranged, being respectively used to crawl cover board, described two handgrip driving devices（404）Respectively drive institute
State two handgrips（40）It moves in the longitudinal direction.
4. a kind of carrying mechanism for being integrated with cover board grasping mechanism according to claim 3, it is characterised in that：The handgrip
（40）Including upper flat plate（401）, lower tablet（402）With the handgrip arm for connecting the upper and lower tablet（403）, the upper flat plate
（401）Downside be slidably arranged in along the longitudinal direction on the connecting plate, the handgrip driving device（404）It is fixed on the company
The downside of fishplate bar, and its output terminal connects the handgrip arm（403）.
5. a kind of carrying mechanism for being integrated with cover board grasping mechanism according to claim 3, it is characterised in that：It is grabbed described
Hand（40）It is upper setting cover board capture testing agency, for detect cover board whether picked up and/or, the target object capture
Target object is set to capture testing agency in mechanism, for detecting whether target object is picked up.
6. a kind of carrying mechanism for being integrated with cover board grasping mechanism according to claim 1, it is characterised in that：The target
Grasping body mechanism is identical with the cover board grasping mechanism structure.
7. a kind of carrying mechanism for being integrated with cover board grasping mechanism according to claim 2, it is characterised in that：Mobile mechanism
Including longitudinal motion mechanism and vertical and straight movement mechanism；
The longitudinal motion mechanism mainly includes longitudinal driving device（100）, transmission shaft（101）, belt wheel（103）, belt
（102）, the longitudinal driving device（100）Power driven respectively positioned at longitudinal driving device left and right sides after deceleration transfer
Transmission shaft（101）, the transmission shaft（101）Belt wheel is being installed far from longitudinal driving device end（103）, in belt wheel（103）With
One is located at the belt wheel（103）Belt described in winding on the idle pulley of rear end（102）；
With the belt（102）Vertical and straight movement mechanism, the vertical and straight movement mechanism master are provided in the support plate being fixedly connected
To include vertical driving device（300）, leading screw（301）, nut（302）, the vertical driving device（300）It is fixed on the branch
The upper end of fagging, output terminal connection are rotatably arranged on the leading screw in the support plate vertically（301）, thread fitting is in the silk
Thick stick（301）On nut（302）It is fixedly connected with the connecting plate.
8. a kind of carrying mechanism for being integrated with cover board grasping mechanism according to claim 1, it is characterised in that：The carrying
Mechanism is applied in ALD charging ＆ discharging machines, and the target object is the silicon chip carrier for being loaded with the silicon chip that plated film finishes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720980025.1U CN207524587U (en) | 2017-08-08 | 2017-08-08 | A kind of carrying mechanism for being integrated with cover board grasping mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720980025.1U CN207524587U (en) | 2017-08-08 | 2017-08-08 | A kind of carrying mechanism for being integrated with cover board grasping mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207524587U true CN207524587U (en) | 2018-06-22 |
Family
ID=62576292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720980025.1U Expired - Fee Related CN207524587U (en) | 2017-08-08 | 2017-08-08 | A kind of carrying mechanism for being integrated with cover board grasping mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207524587U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107265119A (en) * | 2017-08-08 | 2017-10-20 | 无锡先导智能装备股份有限公司 | A kind of carrying mechanism and method for carrying for being integrated with cover plate grasping mechanism |
| CN115180398A (en) * | 2022-07-04 | 2022-10-14 | 苏州方普智能装备有限公司 | High-efficient plate planting machine |
-
2017
- 2017-08-08 CN CN201720980025.1U patent/CN207524587U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107265119A (en) * | 2017-08-08 | 2017-10-20 | 无锡先导智能装备股份有限公司 | A kind of carrying mechanism and method for carrying for being integrated with cover plate grasping mechanism |
| CN107265119B (en) * | 2017-08-08 | 2023-10-20 | 无锡先导智能装备股份有限公司 | Conveying mechanism integrated with cover plate grabbing mechanism and conveying method |
| CN115180398A (en) * | 2022-07-04 | 2022-10-14 | 苏州方普智能装备有限公司 | High-efficient plate planting machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180622 |