CN207423434U - A kind of pressure assembly and pressure sensor - Google Patents
A kind of pressure assembly and pressure sensor Download PDFInfo
- Publication number
- CN207423434U CN207423434U CN201721626071.8U CN201721626071U CN207423434U CN 207423434 U CN207423434 U CN 207423434U CN 201721626071 U CN201721626071 U CN 201721626071U CN 207423434 U CN207423434 U CN 207423434U
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- pressure
- membrane
- chamber
- sensing chip
- housing
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Abstract
The utility model discloses a kind of pressure assembly and pressure sensor,The pressure assembly includes housing,Pressure-sensing chip and membrane,Housing has installation cavity and the relief hole through the installation cavity bottom and for entering for working media,Pressure-sensing chip is mounted in the installation cavity and lower part has impression portion,Membrane is mounted in the installation cavity,The lower end of the membrane and the pressure-sensing chip,The inner wall of the housing limits the encapsulating chamber and pressure chamber of closing respectively,The encapsulating chamber is connected with the impression portion,The pressure chamber is connected with the relief hole,Wherein,The encapsulating intracavitary is filled with transfer medium,It through relief hole and is filled in working media in the pressure chamber and when squeezing the membrane,Pressure is transferred by the transfer medium so that the pressure-sensing chip experiences the pressure of the working media.
Description
Technical field
The utility model is related to sensor technical field, more particularly to a kind of pressure assembly and pressure sensor.
Background technology
Pressure sensor (Pressure Transducer) can experience pressure signal, and can will be pressed according to certain rule
Force signal is converted into the device or device of the electric signal of available output.Pressure assembly is to be used to experience pressure in pressure sensor
Vital part.When sensing pressure, working media is directly entered on pressure-sensing chip pressure assembly of the prior art
Impression portion and contacted directly with pressure-sensing chip, if working media be with corrosive liquid with certain corrosivity or
During pollution, corrosion or pollution are easily generated to pressure-sensing chip, the long easy generation qualitative change of corrosion and damage pressure-sensing
Chip is so long easily to make pressure-sensing chip lose normal function..
Utility model content
The main purpose of the utility model is to propose a kind of pressure assembly and pressure sensor, it is desirable to provide it is a kind of can be
On the premise of not influencing pressure-sensing result, working media is effectively obstructed, pressure-sensing chip is avoided to corrode and make pressure-sensing
Chip keeps the pressure assembly of permanently effective working condition.
To achieve the above object, the utility model proposes a kind of pressure assembly, including：
Housing has installation cavity and the relief hole through the installation cavity bottom and for entering for working media；
Pressure-sensing chip, in the installation cavity and lower part has impression portion, the pressure-sensing chip and institute
State the lower chamber that installation cavity is formed between the bottom of housing；And
The membrane of flexible material, the membrane are set and in the tubular of upper end opening in the lower chamber, it is described every
The top edge of film and the inner wall of the lower chamber are fixed, and the lower chamber is separated into the encapsulating chamber and pressure chamber of closing, institute
It states encapsulating chamber to be connected with the impression portion, the pressure chamber is connected with the relief hole；
Wherein, the encapsulating intracavitary through relief hole and is filled to the pressure filled with transfer medium in working media
Intracavitary and when squeezing the membrane, transfers pressure so that the pressure-sensing chip experiences the work by the transfer medium
Make the pressure of medium.
Preferably, the pressure-sensing chip is installed on circuit boards, the upper end of the outer peripheral edge of the membrane and the electricity
The lower end of road plate is tightly connected, to form the encapsulating chamber between the circuit board and the membrane；Or,
The upper end of the outer peripheral edge of the membrane and the lower end of the pressure-sensing chip are tightly connected, in the feeling of stress
It surveys between chip and the membrane and forms the encapsulating chamber.
Preferably, the side wall of the housing is set compared with the housing upper in contract, in the housing
The junction of wall and the madial wall of the housing upper forms upward annular step；
The lower end of the outer peripheral edge of the membrane is tightly connected with the annular step, to form the pressure chamber.
Preferably, the thickness of the membrane is at 10 microns to 100 microns.
Preferably, the bottom of the membrane is recessed to form the recessed portion for the pressure being subject to for reducing transfer medium upwards.
Preferably, the recessed portion includes multiple concave annular recess upwards, and the multiple annular recess is in inner and outer ring
It is arranged at intervals.
Preferably, the material of the membrane is polyimides；And/or the membrane by sealing ring be crimped on it is described under
It is fixed on the inner wall of cavity.
Preferably, the transfer medium is silicone oil.
Preferably, the material of the housing is metal.
Based on same inventive concept, the utility model also provides a kind of pressure sensor, including pressure assembly, the pressure
Power component includes：
Housing has installation cavity and the relief hole through the installation cavity bottom and for entering for working media；
Pressure-sensing chip, in the installation cavity and lower part has impression portion；
Membrane, in the installation cavity, the lower end of the membrane and the pressure-sensing chip, the housing it is interior
Wall limits the encapsulating chamber and pressure chamber of closing respectively, and the encapsulating chamber is connected with the impression portion, the pressure chamber with it is described
Relief hole connects；
Wherein, the encapsulating intracavitary through relief hole and fills the pressure chamber filled with transfer medium in working media
It is interior and when squeezing the membrane, pressure is transferred by the transfer medium so that the pressure-sensing chip experiences the work
The pressure of medium.
The utility model in the lower end of pressure-sensing chip by setting membrane, the top edge of membrane and the inner wall of lower chamber
It is fixed, lower chamber is separated into the encapsulating chamber and pressure chamber of closing, encapsulating intracavitary is filled with transfer medium, in this way, in pressure
When component measures working medium pressure, working media enters pressure chamber through relief hole, applies pressure to membrane in pressure chamber,
And then transferring pressure by transfer medium makes pressure-sensing chip experience the pressure of working media.When measuring working medium pressure,
Working media is not directly contacted with pressure-sensing chip, so as to which pressure-sensing chip be avoided to be corroded be subject to working media.Except
Above-mentioned raising it is possible to prevente effectively from corrosion of the machine oil to pressure-sensing chip, while be also possible to prevent acid-alkali salt and other and have corruption
Corrosion of the fluid of corrosion to pressure-sensing chip improves the scope of application of pressure assembly.
Description of the drawings
It in order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, other attached drawings can also be obtained according to the structure shown in these attached drawings.
Fig. 1 is the diagrammatic cross-section of an embodiment of pressure assembly provided by the utility model；
Fig. 2 is the stereoscopic schematic diagram at a visual angle of an embodiment of Fig. 1 septations；
Fig. 3 is the stereoscopic schematic diagram at the another visual angle of Fig. 2 septations；
Fig. 4 is the stereoscopic schematic diagram of an embodiment of Fig. 1 middle casings.
Drawing reference numeral explanation：
The embodiments will be further described with reference to the accompanying drawings for the realization, functional characteristics and advantage of the utility model aim.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
It clearly and completely describes, it is clear that described embodiment is only the part of the embodiment rather than whole of the utility model
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making creative work premise
Lower all other embodiments obtained, shall fall within the protection scope of the present invention.
If it is to be appreciated that related in the utility model embodiment directionality instruction (such as upper and lower, left and right, it is preceding,
Afterwards ...), then directionality instruction be only used for explain it is opposite between each component under a certain particular pose (as shown in drawings)
Position relationship, motion conditions etc., if the particular pose changes, directionality instruction also correspondingly changes correspondingly.
It if, should " first ", " the in addition, relate to the description of " first ", " second " etc. in the utility model embodiment
Two " etc. description is only used for description purpose, and it is not intended that instruction or implying its relative importance or implicit indicating meaning
The quantity of the technical characteristic shown." first " is defined as a result, the feature of " second " can express or implicitly include at least one
A this feature.In addition, the technical solution between each embodiment can be combined with each other, but must be with ordinary skill
Personnel can be implemented as basis, and this technical side is will be understood that when the combination appearance of technical solution is conflicting or can not realize
The combination of case is not present, also not within the protection domain of the requires of the utility model.
The utility model provides a kind of pressure sensor, which includes pressure assembly.It please refers to Fig.1 and Fig. 4,
In an embodiment of pressure assembly provided by the utility model, the pressure assembly 2 include housing 21, pressure-sensing chip 22 with
And membrane 23.Housing 21 has installation cavity 211 and the relief hole through 211 bottom of installation cavity and for entering for working media
212；Pressure-sensing chip 22 is mounted in installation cavity 211 and lower part has impression portion 221, pressure-sensing chip 22 and housing 21
Bottom between formed installation cavity 211 lower chamber；Fig. 2 and Fig. 3 are referred to, 23 membrane of membrane of flexible material is in upper end opening
Tubular set and in the lower chamber, the top edge of membrane 23 and the inner wall of lower chamber are fixed, and lower chamber is separated into envelope
The encapsulating chamber 24 and pressure chamber 25 closed, encapsulating chamber 24 are connected with impression portion 221, and pressure chamber 25 is connected with relief hole 212；Wherein,
It encapsulates in chamber 24 filled with transfer medium 26, is passed through in working media in relief hole 212 and filling to pressure chamber 25 and to membrane
During 23 extruding, pressure is transferred so that pressure-sensing chip 22 experiences the pressure of working media by transfer medium 26.
When sensing pressure, working media is directly entered on pressure-sensing chip 22 pressure assembly 2 of the prior art
Impression portion 221 and contacted directly with pressure-sensing chip 22, if working media is when having corrosive liquid, easily to pressure
Sensor chip 22 corrodes, and has corroded long and has been easily damaged pressure-sensing chip 22.Such as the common working media machine oil of automobile industry
There is larger corrosion to pressure-sensing chip 22, the measurement accuracy of pressure assembly 2 can be reduced over time, even damaged
Pressure assembly 2.In addition, also have in the prior art by impression portion 221 silica gel being used to block, to separate work by silica gel
Medium avoids working media from directly being contacted directly with pressure-sensing chip 22.However, well known to those skilled in the art, work is situated between
Matter (such as machine oil) is also to have certain corrosiveness to silica gel, can also occur qualitative change over time, and difficult prospect plays pair
The protection of pressure-sensing chip 22.Impression portion 221 can be exposed on pressure-sensing chip 22 or in pressure-sensing
The through hole that 22 lower end of chip is set, impression portion set and are connected with through hole, so that transfer medium 26 enters after through hole to impression portion 221
Transfer pressure.The specific location and setting form in the impression portion of pressure-sensing chip 22 are not limited herein, according to the pressure of selection
Depending on the model of power sensor chip 22, as long as transfer medium 26 can be contacted with impression portion 221 transfers pressure.
And the utility model is by the way that in the lower end of pressure-sensing chip 22 setting membrane 23, membrane 23 divides the lower chamber
The encapsulating chamber 24 of closing and pressure chamber 25 are divided into, transfer medium 26 is filled in encapsulating chamber 24, in this way, being measured in pressure assembly 2
During working medium pressure, working media enters pressure chamber 25 through relief hole 212, and membrane 23 is applied in pressure chamber 25 and is pressed
Power, and then the pressure that pressure makes pressure-sensing chip 22 experience working media is transferred by transfer medium 26.In measurement working media
During pressure, working media is not directly contacted with pressure-sensing chip 22, so as to which pressure-sensing chip 22 be avoided to be subject to working media
Corrosion.Except above-mentioned raising is it is possible to prevente effectively from corrosion of the machine oil to pressure-sensing chip 22, while it is also possible to prevent acid
Alkali salt and other corrosion of mordant fluid to pressure-sensing chip 22 improve the scope of application of pressure assembly 2.It needs
Illustrating, pressure-sensing chip 22 can be conventional pressure-sensing chip 22, therefore, it is not particularly limited herein.
The material needs of isolation working media can isolate working media and the impression pressure of pressure-sensing chip 22
The size of power, therefore the membrane 23 that the utility model uses.Although working media can be isolated according to rigid membrane, while also can
The size of working medium pressure should actually be experienced by influencing pressure-sensing chip 22.In the present embodiment, the material of membrane 23 is poly-
It is better during acid imide.Membrane 23 is crimped on the inner wall of lower chamber by sealing ring and fixed, and makes sealing-in effect more preferable.
In general, pressure-sensing chip 22 is mounted on circuit board 27, and the mounting means of membrane 23 or a variety of.It examines
Consider the craftsmanship of assembling and production, the mounting means of membrane 23 uses two ways, in an embodiment of the utility model,
The upper end of the outer peripheral edge of membrane 23 is tightly connected with the lower end of circuit board 27, is encapsulated with being formed between circuit board 27 and membrane 23
Chamber 24.In this way, good manufacturability, is easily installed.
In the another embodiment of the utility model, the upper end of the outer peripheral edge of membrane 23 and the lower end of pressure-sensing chip 22
It is tightly connected, to form encapsulating chamber 24 between pressure-sensing chip 22 and membrane 23.The embodiment compared to previous embodiment,
The material of membrane can be saved.
A pressure chamber 25 is formed due to being needed between membrane 23 between the inner wall of housing 21, for the ease of installation, at this
In embodiment, the side wall of housing 21 is set compared with 21 top of housing in contract, on the inner wall of housing 21 and housing 21
The junction of the madial wall in portion forms upward annular step 131；The lower end of the outer peripheral edge of membrane 23 and annular step 131
It is tightly connected, to form pressure chamber 25.In this way, facilitate the installation of membrane and form pressure chamber 25.Due to the spy of 23 material of membrane
Different property, gasket may be employed to be sealed with annular step 131 in the lower end of the outer peripheral edge of membrane 23, in this way, can drop
To the destruction of membrane 23 during low sealing.
The thickness of membrane 23 is too thin to be easily broken, and the thickness of membrane 23 is too thick and can influence to transfer working media actual pressure
Size, in the present embodiment, the thickness of membrane 23 is better at 10 microns to 100 microns.
When membrane 23 transfers the pressure of working media, working media is upward from relief hole 212 into being generated to membrane 23
Extruding force, in order to avoid membrane 23 generates pressure when being subject to the upward extruding force of working media and influences the pressure value transferred,
The bottom of membrane 23 is recessed to form the recessed portion 231 for the pressure being subject to for reducing transfer medium upwards.In this way, can reduce every
Film 23 generates pressure (i.e. downward active force) to working media, and further improves the precision for transferring pressure.In the present embodiment
In, recessed portion 231 includes multiple concave annular recess upwards, and multiple annular recess are arranged at intervals in inner and outer ring.In this way, can be with
Effectively improve the active force uniformity that working media is transferred on transfer medium 26.
Transfer medium 26 needs can be accurately by the pressure transmission of working media to pressure-sensing chip 22, while again cannot be right
Pressure-sensing chip 22 generates corrosion, and in the present embodiment, transfer medium 26 is silicone oil.Silicone oil performance is relatively stablized, and with exhausted
Edge and the good characteristic of hydrophobicity, therefore, pressure-sensing chip 22 can be effectively improved as transfer medium 26 using silicone oil and experience pressure
Accuracy, while without interference with pressure-sensing chip 22.
In the present embodiment, the material of housing 21 is metal, by the housing 21 of metal material by pressure-sensing chip 22
Inside is encapsulated in, can effectively protect internal element, passes through shaping easy to process.In addition, the upper limb fold inward of housing 21, it can
To be crimped in housing 21 circuit board 27 and internal other parts, prevent from coming off.
It these are only the preferred embodiment of the utility model, it does not limit the scope of the patent of the present invention, every
Under the utility model design of the utility model, equivalent structure made based on the specification and figures of the utility model becomes
It changes or directly/is used in other related technical areas indirectly and is included in the scope of patent protection of the utility model.
Claims (10)
1. a kind of pressure assembly, which is characterized in that including：
Housing has installation cavity and the relief hole through the installation cavity bottom and for entering for working media；
Pressure-sensing chip, in the installation cavity and lower part has impression portion, the pressure-sensing chip and the shell
The lower chamber of installation cavity is formed between the bottom of body；And
The membrane of flexible material, the membrane set in the tubular of upper end opening and in the lower chambers, the membrane
The inner wall of top edge and the lower chamber is fixed, and the lower chamber is separated into the encapsulating chamber and pressure chamber of closing, the bag
Envelope chamber is connected with the impression portion, and the pressure chamber is connected with the relief hole；
Wherein, the encapsulating intracavitary through relief hole and is filled to the pressure chamber filled with transfer medium in working media
And when squeezing the membrane, pressure is transferred by the transfer medium so that the pressure-sensing chip experiences the work and is situated between
The pressure of matter.
2. pressure assembly as described in claim 1, which is characterized in that the pressure-sensing chip is installed on circuit boards, institute
It states the upper end of the outer peripheral edge of membrane to be tightly connected with the lower end of the circuit board, with the shape between the circuit board and the membrane
Into the encapsulating chamber；Or,
The upper end of the outer peripheral edge of the membrane and the lower end of the pressure-sensing chip are tightly connected, in the pressure-sensing core
The encapsulating chamber is formed between piece and the membrane.
3. pressure assembly as claimed in claim 1 or 2, which is characterized in that the side wall of the housing is compared on the housing
Portion is set in contract, to form upward annular in the junction of the inner wall of the housing and the madial wall of the housing upper
Stage portion；
The lower end of the outer peripheral edge of the membrane is tightly connected with the annular step, to form the pressure chamber.
4. pressure assembly as described in claim 1, which is characterized in that the thickness of the membrane is at 10 microns to 100 microns.
5. pressure assembly as described in claim 1, which is characterized in that the bottom of the membrane be recessed upwards to be formed for reducing
The recessed portion for the pressure that transfer medium is subject to.
6. pressure assembly as claimed in claim 5, which is characterized in that it is recessed that the recessed portion includes multiple concave annulars upwards
Portion, the multiple annular recess are arranged at intervals in inner and outer ring.
7. pressure assembly as described in claim 1, which is characterized in that the material of the membrane is polyimides；And/or institute
It states membrane and fixation on the inner wall of the lower chamber is crimped on by sealing ring.
8. pressure assembly as described in claim 1, which is characterized in that the transfer medium is silicone oil.
9. pressure assembly as described in claim 1, which is characterized in that the material of the housing is metal.
10. a kind of pressure sensor, which is characterized in that including the pressure assembly as described in claim 1 to 9 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721626071.8U CN207423434U (en) | 2017-11-27 | 2017-11-27 | A kind of pressure assembly and pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721626071.8U CN207423434U (en) | 2017-11-27 | 2017-11-27 | A kind of pressure assembly and pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207423434U true CN207423434U (en) | 2018-05-29 |
Family
ID=62396358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721626071.8U Active CN207423434U (en) | 2017-11-27 | 2017-11-27 | A kind of pressure assembly and pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207423434U (en) |
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2017
- 2017-11-27 CN CN201721626071.8U patent/CN207423434U/en active Active
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