JP4968179B2

JP4968179B2 - Temperature sensor integrated pressure sensor device

Info

Publication number: JP4968179B2
Application number: JP2008135280A
Authority: JP
Inventors: 伸生瀬川
Original assignee: Denso Corp
Current assignee: Denso Corp
Priority date: 2008-05-23
Filing date: 2008-05-23
Publication date: 2012-07-04
Anticipated expiration: 2028-05-23
Also published as: JP2009281915A

Description

本発明は、圧力検出素子および温度検出素子を備える温度センサ一体型圧力センサ装置に関するものである。 The present invention relates to a pressure sensor device including a pressure detection element and a temperature detection element.

従来より、例えば、特許文献１において、圧力検出素子と温度検出素子とを備えた温度センサ一体型圧力センサ装置が開示されている。具体的には、このような温度センサ一体型圧力センサ装置では、ケースにターミナルがインサート成形されていると共に凹部が形成されている。そして、この凹部に測定媒体の圧力検出を行う圧力検出素子がターミナルと電気的に接続された状態で配置されている。また、ケースには、凹部を覆うようにケースと反対側に突出したポート部が備えられている。 Conventionally, for example, Patent Document 1 discloses a temperature sensor integrated pressure sensor device including a pressure detection element and a temperature detection element. Specifically, in such a temperature sensor integrated pressure sensor device, a terminal is insert-molded in the case and a recess is formed. And the pressure detection element which detects the pressure of a measurement medium is arrange | positioned in this recessed part in the state electrically connected with the terminal. Further, the case is provided with a port portion that protrudes on the opposite side to the case so as to cover the recess.

ポート部には、圧力検出素子へ測定媒体を導入する圧力導入孔が形成されていると共に、測定媒体の温度を検出する温度検出素子が備えられている。この温度検出素子はリードを備えており、リードを介してターミナルと電気的に接続されていると共に、測定媒体に曝されるようにポート部に備えられている。 In the port portion, a pressure introduction hole for introducing the measurement medium into the pressure detection element is formed, and a temperature detection element for detecting the temperature of the measurement medium is provided. The temperature detecting element includes a lead, and is electrically connected to the terminal through the lead and is provided in the port portion so as to be exposed to the measurement medium.

このような温度センサ一体型圧力センサ装置は、例えば、自動車のインテークマニホールドの圧力および吸気温度の測定に用いられる。
特開２００６−１９４６８３号公報 Such a temperature sensor-integrated pressure sensor device is used, for example, for measuring an intake manifold pressure and intake air temperature of an automobile.
JP 2006-194683 A

上記のような温度センサ一体型圧力センサ装置では、温度検出素子が測定媒体に曝される構成とされているため、温度検出素子は測定媒体に対して流動抵抗となる。このため、温度検出素子の測定媒体に対する耐流速性や温度検出素子に測定媒体の流速が印加された場合の耐振動性を向上させるためには、温度検出素子の大きさを小さくして測定媒体から印加される流速の影響を減少させることが必要であると考えられる。 In the temperature sensor integrated pressure sensor device as described above, since the temperature detection element is exposed to the measurement medium, the temperature detection element has a flow resistance with respect to the measurement medium. For this reason, in order to improve the flow resistance of the temperature detection element with respect to the measurement medium and the vibration resistance when the flow speed of the measurement medium is applied to the temperature detection element, the size of the temperature detection element is reduced. It is considered necessary to reduce the influence of the flow velocity applied from

しかしながら、温度検出素子を小さくした場合には、リードを温度検出素子の大きさと一致するように細くしなければ温度検出素子に接続することができない。また、温度検出素子を小さくして耐流速性および耐振動性を向上させる場合には、リードが細くなるために断線が起きる可能性があり、リードにかかる負荷を軽減する必要がある。この場合、リードの断線を防止するために、測定媒体に曝されるリードを短くして圧力検出素子とポート部とを近づけることになる。 However, when the temperature detecting element is made small, the lead cannot be connected to the temperature detecting element unless the lead is made thin so as to coincide with the size of the temperature detecting element. Further, when the temperature detecting element is made small to improve flow resistance and vibration resistance, the lead is thinned, so that disconnection may occur, and it is necessary to reduce the load on the lead. In this case, in order to prevent disconnection of the lead, the lead exposed to the measurement medium is shortened to bring the pressure detecting element and the port portion closer to each other.

また、このような温度センサ一体型圧力センサ装置では、ポート部が圧力検出素子よりも熱伝導率の低い樹脂で構成されている。このため、測定媒体が温度変化をした場合、温度検出素子よりもポート部は測定媒体の温度変化に対する温度応答性が悪くなる。 In such a temperature sensor integrated pressure sensor device, the port portion is made of a resin having a lower thermal conductivity than the pressure detection element. For this reason, when the measurement medium undergoes a temperature change, the temperature response of the port portion to the temperature change of the measurement medium becomes worse than the temperature detection element.

例えば、測定媒体の温度が上昇すると、温度検出素子では測定媒体の温度変化に伴って温度上昇するが、ポート部は熱伝導率が低い材料で構成されているため測定媒体の温度変化に伴って温度上昇することができず、ポート部と温度検出素子との間で温度差が生じる。この場合、温度検出素子の耐流速性や耐振動性を向上させるために温度検出素子を小さくしてポート部と温度検出素子とを近接して配置すると、ポート部の温度が温度検出素子の温度より低いため、温度検出素子の熱がポート部に放熱されやすくなり、温度検出素子の温度応答性が悪くなるという問題がある。 For example, when the temperature of the measurement medium rises, the temperature detection element rises with a change in the temperature of the measurement medium, but the port portion is made of a material having low thermal conductivity, so that the temperature change of the measurement medium occurs. The temperature cannot be increased, and a temperature difference occurs between the port portion and the temperature detection element. In this case, if the temperature detection element is made small and the port part and the temperature detection element are arranged close to each other in order to improve the flow resistance and vibration resistance of the temperature detection element, the temperature of the port part becomes the temperature of the temperature detection element. Therefore, there is a problem that the heat of the temperature detecting element is easily radiated to the port portion, and the temperature responsiveness of the temperature detecting element is deteriorated.

本発明は上記点に鑑みて、耐流速性や耐振動性を備えた温度検出素子の温度応答性を向上させることができる温度センサ一体型圧力センサ装置を提供することを目的とする。 In view of the above points, an object of the present invention is to provide a temperature sensor integrated pressure sensor device capable of improving the temperature responsiveness of a temperature detecting element having flow resistance and vibration resistance.

上記目的を達成するため、請求項１に記載の発明では、圧力検出素子（２０）を搭載すると共に、圧力導入孔（３４）が形成されたポート部（３０）を備え、ポート部（３０）のうち先端部が一方向に突出しているケース（１００）と、ポート部（３０）と被取り付け部材との間で測定媒体を封止するシール部材（３１）と、ポート部（３０）のうちシール部材（３１）よりも先端部側に備えられていると共に、リード（５１）が引き出されている温度検出素子（５０）と、を備え、温度検出素子（５０）およびリード（５１）の一部を測定媒体に曝されるようにポート部（３０）に対して配置した温度センサ一体型圧力センサ装置であって、ケース（１００）を樹脂を含む材料にて構成し、ポート部（３０）を、シール部材（３１）を配置する部分から先端部までの間において、ケース（１００）を構成する樹脂よりも熱伝導率の高い高熱伝導率部材（３３、３９）を含んで構成し、ポート部（３０）にシール部材（３１）が配置される部分から先端部側に窪み部（３７）を備え、リード（５１）とターミナル（３６）とを窪み部（３７）内で接続し、ケース（１００）を構成する材料よりも熱伝導率が高い材料で構成されたフィン部材（４０）を窪み部（３７）内に配置されているリード（５１）およびターミナル（３６）に接触するように窪み部（３７）に配置していることを特徴とする。
また、請求項２に記載の発明では、ポート部（３０）にシール部材（３１）が配置される部分から先端部側に窪み部（３７）を備え、リード（５１）とターミナル（３６）とを窪み部（３７）内で接続し、窪み部（３７）に保護部材（３８）を配置し、窪み部（３７）内に配置されているリード（５１）およびターミナル（３６）を保護部材（３８）にて覆い、保護部材（３８）のうち窪み部（３７）の底面側と反対側の部分をフィン形状としていることを特徴としている。 In order to achieve the above object, according to the first aspect of the present invention, the pressure detecting element (20) is mounted, and the port portion (30) in which the pressure introducing hole (34) is formed is provided. Out of the case (100) with the tip protruding in one direction, the seal member (31) for sealing the measurement medium between the port portion (30) and the attached member, and the port portion (30) A temperature detection element (50) provided on the distal end side of the seal member (31) and from which the lead (51) is drawn, and one of the temperature detection element (50) and the lead (51). A temperature sensor-integrated pressure sensor device arranged with respect to the port portion (30) so that the portion is exposed to the measurement medium, wherein the case (100) is made of a material containing resin, and the port portion (30) Place the sealing member (31) In between the portion to the tip that was configured to include a case (100) high thermal conductivity member having heat conductivity than the resin constituting the (33 and 39), the port portion (30) to the sealing member (31 ) Is disposed on the tip side from the portion where the lead is disposed, the lead (51) and the terminal (36) are connected in the recess (37), and the material constituting the case (100) A fin member (40) made of a material having high thermal conductivity is disposed in the recess (37) so as to contact the lead (51) and the terminal (36) disposed in the recess (37). It is characterized by being.
In the invention according to claim 2, the port portion (30) is provided with a recess (37) from the portion where the seal member (31) is disposed to the tip portion side, and the lead (51), the terminal (36), Are connected in the recess (37), the protective member (38) is disposed in the recess (37), and the lead (51) and the terminal (36) disposed in the recess (37) are connected to the protective member ( 38), and a portion of the protective member (38) on the side opposite to the bottom surface side of the recess (37) is formed in a fin shape.

これらのような温度センサ一体型圧力センサ装置によれば、ポート部（３０）は、シール部材（３１）が配置される部分から先端部までの間の部分において、ケース（１００）を構成する樹脂よりも熱伝導率の高い材料で構成された高熱伝導率部材（３３、３９）を含んで構成されているため、従来の温度センサ一体型圧力センサ装置よりも測定媒体に対するポート部（３０）の温度応答性を向上させることができる。このため、温度検出素子（５０）を小さくすることで耐流速性や耐振動性を向上させた場合でも温度検出素子（２０）の熱がポート部（３０）に放熱されることを抑制することができ、温度検出素子（２０）の測定媒体に対する温度応答性を向上させることができる。 According to pressure sensor device such as these, the port portion (30), in the portion between the portion where the seal member (31) is arranged to the tip, constituting a case (100) Since the high thermal conductivity members (33, 39) made of a material having a higher thermal conductivity than the resin to be used are included, the port portion (30 for the measurement medium) is more than the conventional temperature sensor integrated pressure sensor device. ) Temperature responsiveness can be improved. For this reason, even when flow resistance and vibration resistance are improved by reducing the temperature detection element (50), the heat of the temperature detection element (20) is suppressed from being radiated to the port part (30). The temperature responsiveness of the temperature detection element (20) to the measurement medium can be improved.

例えば、請求項３に記載の発明のように、高熱伝導率部材をコーティング部材（３３）とし、ポート部（３０）のうちシール部材（３１）が配置される部分から先端部までの間の外周壁をコーティング部材（３３）で構成することができる。 For example, as in the invention described in claim 3 , the outer periphery between the portion where the seal member (31) is arranged in the port portion (30) and the tip portion is used as the coating member (33) as the high thermal conductivity member. The wall can be composed of a coating member (33).

また、請求項４に記載の発明のように、高熱伝導率部材を添加部材（３９）とし、添加部材（３９）を樹脂の内部に含んでポート部（３０）を構成することができる。 Further, as in the invention described in claim 4 , the high thermal conductivity member can be used as the additive member (39), and the additive member (39) can be included in the resin to constitute the port portion (30).

さらに、請求項５ないし請求項７に記載の発明のように、ポート部（３０）の外周壁のうちシール部材（３１）が配置される部分から先端部までの間をフィン形状としてもよい。 Further, as in the inventions according to claims 5 to 7 , the portion from the portion where the seal member (31) is arranged to the tip portion of the outer peripheral wall of the port portion (30) may be formed in a fin shape.

このような温度センサ一体型圧力センサ装置によれば、ポート部（３０）の外周壁をフィン形状としたことにより、ポート部（３０）と測定媒体との接触面積を増加させることができ、ポート部（３０）の温度応答性を向上させることができる。 According to such a temperature sensor integrated pressure sensor device, since the outer peripheral wall of the port portion (30) has a fin shape, the contact area between the port portion (30) and the measurement medium can be increased. The temperature responsiveness of the part (30) can be improved.

なお、この欄および特許請求の範囲で記載した各手段の括弧内の符号は、後述する実施形態に記載の具体的手段との対応関係を示すものである。 In addition, the code | symbol in the bracket | parenthesis of each means described in this column and the claim shows the correspondence with the specific means as described in embodiment mentioned later.

（第１実施形態）
本発明の第１実施形態について説明する。図１は本実施形態の温度センサ一体型圧力センサ装置の断面構成を示す図であり、この図に基づいて説明する。なお、本実施形態の温度センサ一体型圧力センサ装置は、例えば、車両のインテークマニホールドに取り付けられ、インテークマニホールドの圧力および吸気温度の測定に適用される。 (First embodiment)
A first embodiment of the present invention will be described. FIG. 1 is a diagram showing a cross-sectional configuration of the temperature sensor integrated pressure sensor device of the present embodiment, which will be described based on this drawing. Note that the temperature sensor integrated pressure sensor device of the present embodiment is attached to, for example, an intake manifold of a vehicle, and is applied to the measurement of intake manifold pressure and intake air temperature.

図１に示されるように、本実施形態の温度センサ一体型圧力センサ装置には、コネクタケース１０が備えられており、このコネクタケース１０は、例えば、ＰＰＳ（ポリフェニレンサルファイド）やＰＢＴ（ポリブチレンテレフタレート）等の樹脂を型成形することにより製造されている。そして、コネクタケース１０のうち後述するポート部３０が接続される面には第１の凹部１１が形成されている。 As shown in FIG. 1, the temperature sensor integrated pressure sensor device of the present embodiment is provided with a connector case 10, which is, for example, PPS (polyphenylene sulfide) or PBT (polybutylene terephthalate). ) And the like are molded by molding. And the 1st recessed part 11 is formed in the surface to which the port part 30 mentioned later of the connector case 10 is connected.

また、コネクタケース１０には外部と接続される複数本の第１のターミナル１２が備えられている。この第１のターミナル１２はインサート成型により一体的に成形されることでコネクタケース１０内に保持されている。なお、この第１のターミナル１２は銅等の導電材料で構成されている。 The connector case 10 includes a plurality of first terminals 12 connected to the outside. The first terminal 12 is held in the connector case 10 by being integrally formed by insert molding. The first terminal 12 is made of a conductive material such as copper.

複数本の第１のターミナル１２のうち一部の第１のターミナル１２は一端部が第１の凹部１１内にて露出した状態となるようにコネクタケース１０内に備えられている。なお、この一部の第１のターミナル１２における第１の凹部１１内にて露出している部分には、金メッキなどが施されることにより、ボンディングパッドとして機能するように構成されている。また、第１のターミナル１２のうちコネクタケース１０における開口部１３において露出する他端部は、図示しない外部機器（外部の配線部材等）に接続可能となっている。 Some of the first terminals 12 of the plurality of first terminals 12 are provided in the connector case 10 so that one end thereof is exposed in the first recess 11. In addition, the part exposed in the 1st recessed part 11 in this one part 1st terminal 12 is comprised so that it may function as a bonding pad by giving gold plating etc. The other end of the first terminal 12 exposed at the opening 13 in the connector case 10 can be connected to an external device (external wiring member or the like) not shown.

また、コネクタケース１０に形成された第１の凹部１１には、測定媒体の圧力を検出する圧力検出素子２０が備えられている。この圧力検出素子２０はセンサチップおよび台座を有して構成されており、これらセンサチップと台座とは陽極接合されている。また、センサチップにはダイヤフラムが形成されており、ダイヤフラムには図示しないブリッジ回路を構成するように形成されたゲージ抵抗が備えられている。つまり、このセンサチップは、ダイヤフラムに圧力が印加されるとゲージ抵抗の抵抗値が変化してブリッジ回路の電圧が変化し、この電圧の変化に応じてセンサ出力信号を出力する半導体ダイヤフラム式のものである。そして、圧力検出素子２０は、第１の凹部１１の底面と台座との間に、シリコーンゴム等の図示しない接着剤を介在させた状態でダイボンディングされている。また、圧力検出素子２０は第１のターミナル１２の上記ボンディングパッドに対しアルミニウム等で構成されたボンディングワイヤ１４を介して電気的に接続されている。 The first recess 11 formed in the connector case 10 is provided with a pressure detection element 20 that detects the pressure of the measurement medium. The pressure detection element 20 includes a sensor chip and a pedestal, and the sensor chip and the pedestal are anodically bonded. A diaphragm is formed in the sensor chip, and the diaphragm is provided with a gauge resistor formed so as to constitute a bridge circuit (not shown). In other words, this sensor chip is a semiconductor diaphragm type that changes the resistance value of the gauge resistance when the pressure is applied to the diaphragm and changes the voltage of the bridge circuit, and outputs a sensor output signal in accordance with the change of this voltage. It is. The pressure detection element 20 is die-bonded between the bottom surface of the first recess 11 and the pedestal with an adhesive (not shown) such as silicone rubber interposed. The pressure detection element 20 is electrically connected to the bonding pad of the first terminal 12 through a bonding wire 14 made of aluminum or the like.

さらに、コネクタケース１０の第１の凹部１１内には、電気絶縁性および耐薬品性に優れたフッ素ゲルやフッ素ゴム等で構成された保護部材１５が充填されており、この保護部材１５によって、コネクタケース１０と第１のターミナル１２との界面、圧力検出素子およびボンディングワイヤ１４等が封止されて保護されている。 Furthermore, the first recess 11 of the connector case 10 is filled with a protective member 15 made of fluorine gel, fluorine rubber or the like having excellent electrical insulation and chemical resistance. The interface between the connector case 10 and the first terminal 12, the pressure detection element, the bonding wire 14 and the like are sealed and protected.

また、この保護部材１５により圧力検出素子２０、第１のターミナル１２、ボンディングワイヤ１４、圧力検出素子２０とボンディングワイヤ１４との接続部、および第１のターミナル１２とボンディングワイヤ１４との接続部が被覆され、薬品からの保護、電気的な絶縁性の確保および防食等が図られている。 In addition, the protective member 15 allows the pressure detection element 20, the first terminal 12, the bonding wire 14, the connection between the pressure detection element 20 and the bonding wire 14, and the connection between the first terminal 12 and the bonding wire 14. Covered to protect from chemicals, ensure electrical insulation and prevent corrosion.

また、コネクタケース１０には第１の凹部１１を覆うようにポート部３０が配置されており、コネクタケース１０とポート部３０とが連結されている。そして、このポート部３０は、コネクタケース１０に対してハードエポキシ樹脂等の耐薬品性に優れ、かつ高弾性である接着材１７により接続されている。これにより、コネクタケース１０とポート部３０とが一体とされているケース１００が構成され、このケース１００内に圧力検出素子２０が搭載された構成とされている。 Further, the connector case 10 is provided with a port portion 30 so as to cover the first recess 11, and the connector case 10 and the port portion 30 are connected to each other. The port portion 30 is connected to the connector case 10 by an adhesive 17 having excellent chemical resistance such as hard epoxy resin and having high elasticity. Thereby, the case 100 in which the connector case 10 and the port portion 30 are integrated is configured, and the pressure detection element 20 is mounted in the case 100.

また、ポート部３０には、本発明のシール部材に相当するＯリング３１が外周部を一周するように備えられており、ケース１００の取り付け対象となる被取り付け部材とポート部３０との間で測定媒体を封止することが可能となっている。 Further, the port portion 30 is provided with an O-ring 31 corresponding to the seal member of the present invention so as to go around the outer peripheral portion, and between the attached member to be attached to the case 100 and the port portion 30. It is possible to seal the measurement medium.

また、ポート部３０は、Ｏリング３１が配置される部分から先端部までの間において、ＰＰＳやＰＰＴ等の樹脂により構成された樹脂部３２と、樹脂部３２を構成する樹脂よりも熱伝導率の高い高熱伝導率部材としてのコーティング部材３３とを有して構成されている。具体的には、ポート部３０は、Ｏリング３１が配置される部分から先端部までの間において、樹脂部３２の外周壁面がコーティング部材３３にて覆われた構造とされている。なお、コーティング部材３３として、例えば、アルミニウムや銅等を用いることができる。 Further, the port portion 30 has a resin portion 32 made of a resin such as PPS or PPT and a thermal conductivity higher than that of the resin constituting the resin portion 32 between the portion where the O-ring 31 is disposed and the tip portion. And a coating member 33 as a high thermal conductivity member. Specifically, the port portion 30 has a structure in which the outer peripheral wall surface of the resin portion 32 is covered with the coating member 33 between the portion where the O-ring 31 is disposed and the tip portion. As the coating member 33, for example, aluminum or copper can be used.

また、コネクタケース１０とポート部３０との間には圧力検出室１６が構成されている。そしてポート部３０は、ケース１００から一方向に突出するように構成されている。具体的には、ポート部３０は、コネクタケース１０とは反対側の方向へ突出しており、ポート部３０の内部にはポート部３０のうち突出している方向の先端部から圧力検出室１６に通じる圧力導入孔３４が形成されている。 A pressure detection chamber 16 is formed between the connector case 10 and the port portion 30. The port portion 30 is configured to protrude from the case 100 in one direction. Specifically, the port portion 30 protrudes in the direction opposite to the connector case 10, and the port portion 30 communicates with the pressure detection chamber 16 from the distal end portion of the port portion 30 in the protruding direction. A pressure introducing hole 34 is formed.

さらに、コネクタケース１０には、第１の凹部１１とは異なる部位に第２の凹部１８が形成されている。そして、この第２の凹部１８により、コネクタケース１０とポート部３０との間において接続部設置室１９が開口部１３と連通するように形成されている。この接続部設置室１９は、ポート部３０における圧力導入孔３４を仕切る壁部３５が接着剤１７によりコネクタケース１０に接着されることにより、圧力導入孔３４および圧力検出室１６とは隔離された空間とされている。 Further, the connector case 10 is formed with a second recess 18 at a site different from the first recess 11. The second recess 18 forms a connection portion installation chamber 19 between the connector case 10 and the port portion 30 so as to communicate with the opening portion 13. The connection portion installation chamber 19 is isolated from the pressure introduction hole 34 and the pressure detection chamber 16 by bonding the wall portion 35 that partitions the pressure introduction hole 34 in the port portion 30 to the connector case 10 with the adhesive 17. It is a space.

また、ポート部３０には、第２のターミナル３６が備えられていると共に、外周部に窪み部３７が形成されている。第２のターミナル３６は、一端部３６ａが接続部設置室にて露出されると共に、他端部３６ｂが窪み部３７内にて露出されるようにインサート成形されることでポート部３０内に保持されている。 Further, the port portion 30 is provided with a second terminal 36 and a recess portion 37 is formed on the outer peripheral portion. The second terminal 36 is held in the port portion 30 by insert molding so that the one end portion 36 a is exposed in the connection portion installation chamber and the other end portion 36 b is exposed in the recess portion 37. Has been.

また、複数の第１のターミナル１２のうち、一部の第１のターミナル１２が接続部設置室１９にて露出されるようにコネクタケース１０に備えられている。そして、この接続部設置室１９にて露出される第１のターミナル１２に対して、第２のターミナル３６の一端部３６ａが、開口部１３からレーザ溶接等が行われることにより電気的、機械的に接続されている。 Further, the connector case 10 is provided so that a part of the first terminals 12 among the plurality of first terminals 12 are exposed in the connection portion installation chamber 19. Then, one end 36a of the second terminal 36 is electrically and mechanically applied to the first terminal 12 exposed in the connecting portion installation chamber 19 from the opening 13 by laser welding or the like. It is connected to the.

また、第２のターミナル３６の他端部３６ｂには温度検出素子５０が電気的に接続されている。具体的には、温度検出素子５０のリード５１がポート部３０の窪み部３７内に引き伸ばされており、温度検出素子５０およびリード５１の一部がポート部３０の先端部にて測定媒体に曝されるように、窪み部３７内で第２のターミナル３６の他端部３６ｂと温度検出素子５０のリード５１とが半田や溶接等により接合されている。これにより、温度検出素子５０はリード５１および第２のターミナル３６を介して第１のターミナル１２と電気的に接続されることになる。 Further, the temperature detection element 50 is electrically connected to the other end 36 b of the second terminal 36. Specifically, the lead 51 of the temperature detection element 50 is extended into the recess 37 of the port portion 30, and the temperature detection element 50 and a part of the lead 51 are exposed to the measurement medium at the tip of the port portion 30. As described above, the other end portion 36 b of the second terminal 36 and the lead 51 of the temperature detection element 50 are joined in the hollow portion 37 by soldering, welding, or the like. As a result, the temperature detection element 50 is electrically connected to the first terminal 12 via the lead 51 and the second terminal 36.

さらに、この窪み部３７には保護部材３８が充填されており、第２のターミナル３６の他端部３６ｂと温度検出素子５０のリード５１との接合部分がこの保護部材３８によって完全に覆われ、測定媒体に曝されない状態になっている。このような保護部材３８としては、例えば耐汚れ、腐食性に優れたフッ素ゴムやフロロシリコン等が採用される。 Further, the recess 37 is filled with a protective member 38, and the joint portion between the other end 36b of the second terminal 36 and the lead 51 of the temperature detecting element 50 is completely covered by the protective member 38, It is not exposed to the measurement medium. As such a protective member 38, for example, fluororubber or fluorosilicone having excellent resistance to dirt and corrosion is used.

このような温度センサ一体型圧力センサ装置は、ポート部３０のうちＯリング３１が配置される部分から先端部までの間の外周壁をコーティング部材３３で構成すること以外に関しては、従来の温度センサ一体型圧力センサ装置（例えば、特開２００６−１９４６８３号公報参照）と同様にして製造される。ポート部３０は、コネクタケース１０とポート部３０とを接続する前に、ポート部３０のうちＯリング３１が配置される部分から先端部までの間の部分に蒸着等を行い、外周壁をコーティング部材３３で構成することにより製造される。 Such a temperature sensor integrated pressure sensor device is the same as the conventional temperature sensor except that the outer peripheral wall between the portion where the O-ring 31 is arranged in the port portion 30 and the tip portion is constituted by the coating member 33. Manufactured in the same manner as an integrated pressure sensor device (see, for example, JP-A-2006-194683). Before connecting the connector case 10 and the port part 30, the port part 30 performs vapor deposition or the like on the part from the part where the O-ring 31 is arranged to the tip part of the port part 30 to coat the outer peripheral wall. It is manufactured by constituting with the member 33.

さらに、このような温度センサ一体型圧力センサ装置は、測定媒体を含有する空間を構成する壁面に形成されている開口部に、ポート部３０の先端部が差し込まれ、開口部の壁面とＯリング３１とにより測定媒体が空間に封止された状態とされて用いられている。この場合、ポート部３０のうちＯリング３１が配置される部分から先端部までの間の外周壁が測定媒体に曝された状態とされている。本実施形態の温度センサ一体型圧力センサ装置は、例えば、インテークマニホールドの空間とポート部３０の圧力導入孔３４とが連通された状態で自動車に搭載されて用いられる。 Furthermore, in such a pressure sensor device integrated with a temperature sensor, the distal end portion of the port portion 30 is inserted into the opening portion formed in the wall surface constituting the space containing the measurement medium, and the wall surface of the opening portion and the O-ring 31, the measurement medium is used in a state of being sealed in a space. In this case, the outer peripheral wall from the portion where the O-ring 31 is arranged to the tip portion of the port portion 30 is exposed to the measurement medium. The temperature sensor integrated pressure sensor device of the present embodiment is used by being mounted on an automobile in a state where the space of the intake manifold and the pressure introduction hole 34 of the port portion 30 are in communication, for example.

測定媒体の圧力の検出は、圧力導入孔３４を介してコネクタケース１０内の圧力検出素子２０まで測定媒体が導入されると、圧力検出素子２０は測定媒体の圧力に応じた電気信号を出力し、この電気信号がボンディングワイヤ１４および第１のターミナル１２を介して外部へと伝達されることで行われる。 In detecting the pressure of the measurement medium, when the measurement medium is introduced to the pressure detection element 20 in the connector case 10 through the pressure introduction hole 34, the pressure detection element 20 outputs an electrical signal corresponding to the pressure of the measurement medium. The electrical signal is transmitted to the outside through the bonding wire 14 and the first terminal 12.

また、測定媒体の温度の検出は、ポート部３０の先端部にて測定媒体に曝されるように配置されている温度検出素子５０によって温度に応じた電気信号が出力され、この電気信号がリード５１、第２のターミナル３６および第１のターミナル１２を介して外部へと伝達されることで行われる。 In addition, the temperature of the measurement medium is detected by outputting an electric signal corresponding to the temperature by the temperature detection element 50 arranged so as to be exposed to the measurement medium at the tip of the port portion 30, and this electric signal is read. 51, and transmitted to the outside through the second terminal 36 and the first terminal 12.

このような温度センサ一体型圧力センサ装置によれば、ポート部３０のうちＯリング３１が配置される部分から先端部までの間の外周壁が測定媒体に曝された状態とされているが、本実施形態ではこの外周壁の部分がポート部３０を構成する樹脂よりも熱伝導率が高い材料で構成されたコーティング部材３３で構成されているため、従来の温度センサ一体型圧力センサ装置よりも測定媒体の温度がポート部３０に伝達されやすくなる。このため、従来の温度センサ一体型圧力センサ装置と比較して、ポート部３０の測定媒体に対する温度応答性を向上させることができ、温度検出素子５０を小さくすることで温度検出素子５０の耐流速性や耐振動性を向上させた場合においても、温度検出素子５０の熱がポート部３０に放熱されることを抑制することができる。したがって、温度検出素子５０の測定媒体に対する温度応答性を向上させることができる。 According to such a temperature sensor integrated pressure sensor device, the outer peripheral wall between the portion where the O-ring 31 is arranged in the port portion 30 and the tip portion is exposed to the measurement medium. In this embodiment, the outer peripheral wall portion is composed of the coating member 33 made of a material having a higher thermal conductivity than the resin constituting the port portion 30, so that it is more than a conventional temperature sensor integrated pressure sensor device. The temperature of the measurement medium is easily transmitted to the port unit 30. For this reason, compared with the conventional temperature sensor integrated pressure sensor apparatus, the temperature responsiveness with respect to the measurement medium of the port part 30 can be improved, and the flow velocity resistance of the temperature detection element 50 is made small by making the temperature detection element 50 small. Even when the performance and vibration resistance are improved, the heat of the temperature detection element 50 can be prevented from being radiated to the port portion 30. Therefore, the temperature responsiveness of the temperature detection element 50 to the measurement medium can be improved.

（第２実施形態）
本発明の第２実施形態について説明する。本実施形態の温度センサ一体型圧力センサ装置は、第１実施形態に対して高熱伝導率部材を変更したものであり、その他に関しては第１実施形態と同様であるのでここでは説明を省略する。図２は、本実施形態の温度センサ一体型圧力センサ装置の断面構成を示す図である。 (Second Embodiment)
A second embodiment of the present invention will be described. The temperature sensor integrated pressure sensor device of the present embodiment is obtained by changing the high thermal conductivity member with respect to the first embodiment, and the other parts are the same as those of the first embodiment, and thus description thereof is omitted here. FIG. 2 is a diagram showing a cross-sectional configuration of the temperature sensor integrated pressure sensor device of the present embodiment.

図２に示されるように、本実施形態の温度センサ一体型圧力センサ装置では、ポート部３０は、樹脂部３２と、高熱伝導率部材としての添加部材３９とを有して構成されている。具体的には、ポート部３０はＯリング３１が配置される部分から先端部までの間において、添加部材３９を樹脂部３２の内部に含んだ構成とされている。なお、添加部材３９としては、例えば、銅で構成されたビーズを用いることができる。 As shown in FIG. 2, in the temperature sensor integrated pressure sensor device of the present embodiment, the port portion 30 includes a resin portion 32 and an additive member 39 as a high thermal conductivity member. Specifically, the port portion 30 is configured to include the additive member 39 in the resin portion 32 between the portion where the O-ring 31 is disposed and the tip portion. As the additive member 39, for example, beads made of copper can be used.

このような温度センサ一体型圧力センサ装置によれば、ポート部３０は、ポート部３０を構成する樹脂よりも熱伝導率の高い材料で構成された添加部材３９を樹脂部３２に含んで構成されているので、従来の温度センサ一体型圧力センサ装置よりもポート部３０の測定媒体に対する温度応答性を向上させることができ、上記第１実施形態と同様の効果を得ることができる。なお、このような温度センサ一体型圧力センサ装置は、第２のターミナル３６と同様に添加部材３９をインサート成形することで製造される。 According to such a temperature sensor integrated pressure sensor device, the port part 30 includes the resin member 32 including the addition member 39 made of a material having a higher thermal conductivity than the resin constituting the port part 30. Therefore, the temperature responsiveness with respect to the measurement medium of the port unit 30 can be improved as compared with the conventional temperature sensor integrated pressure sensor device, and the same effect as in the first embodiment can be obtained. Note that such a temperature sensor integrated pressure sensor device is manufactured by insert molding the additive member 39 in the same manner as the second terminal 36.

（第３実施形態）
本発明の第３実施形態について説明する。本実施形態の温度センサ一体型圧力センサ装置は、第１実施形態に対してポート部３０の外周壁の形状を変更したものであり、その他に関しては第１実施形態と同様であるためここでは説明を省略する。図３は本実施形態にかかる温度センサ一体型圧力センサ装置の断面構成を示す図である。 (Third embodiment)
A third embodiment of the present invention will be described. The temperature sensor integrated pressure sensor device of the present embodiment is obtained by changing the shape of the outer peripheral wall of the port portion 30 with respect to the first embodiment, and is otherwise described here because it is the same as the first embodiment. Is omitted. FIG. 3 is a diagram showing a cross-sectional configuration of the temperature sensor integrated pressure sensor device according to the present embodiment.

図３に示されるように、本実施形態の温度センサ一体型圧力センサ装置では、ポート部３０のうちＯリング３１が配置される部分から先端部までの間の外周壁が凹凸を有するフィン形状とされている。このような温度センサ一体型圧力センサ装置によればポート部３０のうちＯリング３１が配置される部分から先端部までの間の外周壁がフィン形状とされているので、従来の温度センサ一体型圧力センサ装置よりもポート部３０と測定媒体との接触する面積を増加させることができる。このため、ポート部３０の測定媒体に対する温度応答性を向上させることができ、上記第１実施形態と同様の効果を得ることができる。 As shown in FIG. 3, in the temperature sensor integrated pressure sensor device of the present embodiment, the outer peripheral wall between the portion where the O-ring 31 is arranged in the port portion 30 and the tip portion has a concave and convex shape. Has been. According to such a temperature sensor integrated pressure sensor device, since the outer peripheral wall from the portion where the O-ring 31 is disposed to the tip end portion of the port portion 30 is formed in a fin shape, the conventional temperature sensor integrated type It is possible to increase the contact area between the port unit 30 and the measurement medium as compared with the pressure sensor device. For this reason, the temperature responsiveness with respect to the measurement medium of the port part 30 can be improved, and the effect similar to the said 1st Embodiment can be acquired.

（第４実施形態）
本発明の第４実施形態について説明する。本実施形態の温度センサ一体型圧力センサ装置は、第１実施形態に対してコーティング部材３３を配置する代わりに窪み部３７にフィン部材を追加したものであり、その他に関しては第１実施形態と同様であるためここでは説明を省略する。図４は本実施形態にかかる温度センサ一体型圧力センサ装置の断面構成を示す図である。 (Fourth embodiment)
A fourth embodiment of the present invention will be described. The temperature sensor integrated pressure sensor device of the present embodiment is obtained by adding a fin member to the hollow portion 37 instead of disposing the coating member 33 with respect to the first embodiment, and is otherwise the same as the first embodiment. Therefore, the description is omitted here. FIG. 4 is a diagram showing a cross-sectional configuration of the temperature sensor integrated pressure sensor device according to the present embodiment.

図４に示されるように、本実施形態の温度センサ一体型圧力センサ装置では、ポート部３０に形成されている窪み部３７に、凹凸を有し、樹脂部３２を構成する樹脂よりも熱伝導率の高い材料、例えば、アルミニウムや銅等で構成されたフィン部材４０が配置されている。具体的には、このフィン部材４０は窪み部３７に、窪み部３７内に配置されているリード５１および第２のターミナル３６に接触するように備えられていると共に、窪み部３７内に充填されている保護部材３８からフィン部材４０のうち凸部が突出するように備えられている。 As shown in FIG. 4, in the temperature sensor integrated pressure sensor device according to the present embodiment, the recess 37 formed in the port portion 30 has irregularities and conducts heat more than the resin constituting the resin portion 32. A fin member 40 made of a material having a high rate, such as aluminum or copper, is disposed. Specifically, the fin member 40 is provided in the hollow portion 37 so as to contact the lead 51 and the second terminal 36 disposed in the hollow portion 37 and is filled in the hollow portion 37. The protrusions of the fin member 40 are provided so as to protrude from the protective member 38.

このような温度センサ一体型圧力センサ装置によれば、リード５１に接触しているフィン部材４０により、リード５１の測定媒体に対する温度応答性を向上させることができると共に、ポート部３０の温度応答性を向上させることができ、上記第１実施形態と同様の効果を得ることができる。 According to such a temperature sensor integrated pressure sensor device, the fin member 40 in contact with the lead 51 can improve the temperature responsiveness of the lead 51 to the measurement medium, and the temperature responsiveness of the port portion 30. And the same effects as those of the first embodiment can be obtained.

（第５実施形態）
本発明の第５実施形態について説明する。本実施形態の温度センサ一体型圧力センサ装置は、第４実施形態に対してフィン部材４０を配置する変わりに保護部材３８の形状を変更したものであり、その他に関しては第４実施形態と同様であるためここでは説明を省略する。図５は本実施形態にかかる温度センサ一体型圧力センサ装置の断面構成を示す図である。 (Fifth embodiment)
A fifth embodiment of the present invention will be described. The temperature sensor integrated pressure sensor device of the present embodiment is obtained by changing the shape of the protective member 38 in place of disposing the fin member 40 with respect to the fourth embodiment, and is otherwise the same as the fourth embodiment. Therefore, the description is omitted here. FIG. 5 is a diagram showing a cross-sectional configuration of the temperature sensor integrated pressure sensor device according to the present embodiment.

図５に示されるように、本実施形態の温度センサ一体型圧力センサ装置では、窪み部３７に配置される保護部材３８のうち窪み部３７の底面側と反対側の部分が凹凸を有するフィン形状とされている。 As shown in FIG. 5, in the temperature sensor-integrated pressure sensor device of the present embodiment, a fin shape in which a portion of the protective member 38 arranged in the depression 37 on the side opposite to the bottom surface side of the depression 37 has irregularities. It is said that.

このような温度センサ一体型圧力センサ装置としても、保護部材３８と測定媒体との接触面積を増加させることができ、ポート部３０の測定媒体に対する温度応答性を向上させることができるので、上記第１実施形態と同様の効果を得ることができる。なお、このような温度センサ一体型圧力センサ装置は、保護部材３８を窪み部３７に配置したときに、例えば、凹凸を有する型を保護部材３８に設置し、保護部材３８が硬化した後にこの型を取り外すことで製造される。 Also in such a temperature sensor integrated pressure sensor device, the contact area between the protection member 38 and the measurement medium can be increased, and the temperature responsiveness of the port portion 30 to the measurement medium can be improved. The same effect as that of the first embodiment can be obtained. Such a temperature sensor-integrated pressure sensor device is configured such that, for example, when the protective member 38 is disposed in the recess 37, a mold having unevenness is placed on the protective member 38 and the protective member 38 is cured. It is manufactured by removing.

（第６実施形態）
本発明の第６実施形態について説明する。本実施形態の温度センサ一体型圧力センサ装置は、第４実施形態に対してフィン部材４０を配置する変わりに断熱部材を配置したものであり、その他に関しては第４実施形態と同様であるためここでは説明を省略する。図６は本実施形態にかかる温度センサ一体型圧力センサ装置の断面構成を示す図である。 (Sixth embodiment)
A sixth embodiment of the present invention will be described. The temperature sensor integrated pressure sensor device of the present embodiment is the one in which a heat insulating member is disposed instead of disposing the fin member 40 with respect to the fourth embodiment. Then, explanation is omitted. FIG. 6 is a diagram showing a cross-sectional configuration of the temperature sensor integrated pressure sensor device according to the present embodiment.

図６に示されるように、本実施形態の温度センサ一体型圧力センサ装置では、リード５１とポート部３０との間に、例えば、発泡性の樹脂やガラス等で構成される断熱部材４１が備えられており、リード５１とポート部３０とが接触しないようにされている。 As shown in FIG. 6, in the temperature sensor integrated pressure sensor device of the present embodiment, a heat insulating member 41 made of, for example, foamable resin or glass is provided between the lead 51 and the port portion 30. The lead 51 and the port portion 30 are prevented from contacting each other.

このような温度センサ一体型圧力センサ装置によれば、温度検出素子５０やリード５１の温度変化がポート部３０へ影響することを抑制することができ、温度検出素子５０の測定媒体に対する温度応答性が低下することを防止することができる。 According to such a temperature sensor integrated pressure sensor device, it is possible to suppress the temperature change of the temperature detection element 50 and the lead 51 from affecting the port portion 30, and the temperature response of the temperature detection element 50 to the measurement medium. Can be prevented from decreasing.

（他の実施形態）
上記第２実施形態においては、添加部材３９としてビーズを例に挙げて説明したが、もちろん他のものでもよく、例えば、ポート部３０を構成する樹脂よりも熱伝導率が高い材料で構成された巻線を樹脂に含んでポート部３０を構成してもよい。 (Other embodiments)
In the second embodiment, the bead is used as an example of the additive member 39, but other materials may be used. For example, the additive member 39 is made of a material having a higher thermal conductivity than the resin constituting the port portion 30. The port portion 30 may be configured by including a winding in a resin.

また、上記第６実施形態では、リード５１とポート部３０との間に断熱部材４１が備えられているが、リード５１のうち第２のターミナル３６と接続される部分を除いた部分が断熱部材４１で覆われている構成とすることもできる。このようにリード５１を断熱部材で覆う場合には、インサート成形によりポート部３０と一体に成形することができる。 Moreover, in the said 6th Embodiment, although the heat insulation member 41 is provided between the lead 51 and the port part 30, the part except the part connected to the 2nd terminal 36 among the leads 51 is a heat insulation member. It can also be set as the structure covered with 41. FIG. Thus, when covering the lead | read | reed 51 with a heat insulation member, it can shape | mold integrally with the port part 30 by insert molding.

また、上記各実施形態を組み合わせて温度センサ一体型圧力センサ装置を構成してもよい。例えば、上記第１実施形態に上記第２実施形態を組み合わせて、ポート部３０は、Ｏリング３１が配置される部分から先端部までの間の外周壁がコーティング部材３８で構成されていると共に、添加部材３９が樹脂部３２の内部に含まれている構成としてもよい。さらに、上記第１実施形態に上記第３実施形態を組み合わせて、ポート部３０を、Ｏリング３１が配置される部分から先端部までの間の外周壁をフィン形状にすると共に、フィン形状とした部分にコーティング部材３３がフィン形状となるように配置して構成してもよい。 Moreover, you may comprise a temperature sensor integrated pressure sensor apparatus combining the said each embodiment. For example, by combining the first embodiment with the second embodiment, the port portion 30 has a coating member 38 on the outer peripheral wall from the portion where the O-ring 31 is disposed to the tip portion, The additive member 39 may be included in the resin portion 32. Furthermore, combining the said 3rd Embodiment with the said 1st Embodiment, the port part 30 was made into the fin shape while making the outer peripheral wall from the part by which the O-ring 31 is arrange | positioned to a front-end | tip part into a fin shape. The coating member 33 may be arranged in a portion so as to have a fin shape.

さらに、上記第２実施形態に上記第３実施形態を組み合わせて、樹脂部３２の内部に添加部材３９を含んだポート部３０において、Ｏリング３１が配置される部分から先端部までの間の外周壁をフィン形状としてもよい。また、上記第１実施形態に上記第２実施形態および上記第３実施形態を組み合わせて、ポート部３０を、Ｏリング３１が配置される部分から先端部までの間の外周壁をフィン形状にすると共に、フィン形状とした部分にコーティング部材３３がフィン形状となるように配置し、樹脂部３２の内部に添加部材３９を含んで構成してもよい。 Further, in the port portion 30 including the additive member 39 inside the resin portion 32 by combining the third embodiment with the second embodiment, the outer periphery from the portion where the O-ring 31 is disposed to the tip portion The wall may have a fin shape. In addition, the second embodiment and the third embodiment are combined with the first embodiment, and the port portion 30 and the outer peripheral wall from the portion where the O-ring 31 is arranged to the tip portion are formed in a fin shape. In addition, the coating member 33 may be disposed in the fin-shaped portion so as to have a fin shape, and the additive member 39 may be included in the resin portion 32.

また、上記第４実施形態、上記第５実施形態および上記第６実施形態に上記第１実施形態を組み合わせて、ポート部３０のうち、Ｏリング３１が配置される部分から先端部までの間の外周壁をコーティング部材３３で構成してもよい。さらに、上記第４実施形態、上記第５実施形態および上記第６実施形態に、上記第２実施形態を組み合わせて添加部材３９が樹脂部３２の内部に含まれている構成としてもよく、上記第３実施形態を組みあせてポート部３０のうちＯリング３１が配置される部分から先端部までの間の外周壁をフィン形状にしてもよい。 In addition, the first embodiment is combined with the fourth embodiment, the fifth embodiment, and the sixth embodiment, and the portion of the port portion 30 between the portion where the O-ring 31 is disposed and the tip portion. The outer peripheral wall may be constituted by the coating member 33. Further, the fourth embodiment, the fifth embodiment, and the sixth embodiment may be combined with the second embodiment to include the additive member 39 inside the resin portion 32. By combining the three embodiments, the outer peripheral wall between the portion of the port portion 30 where the O-ring 31 is disposed and the tip portion may be formed in a fin shape.

本発明の第１実施形態にかかる温度センサ一体型圧力センサ装置の断面構成を示す図である。It is a figure which shows the cross-sectional structure of the temperature sensor integrated pressure sensor apparatus concerning 1st Embodiment of this invention. 本発明の第２実施形態にかかる温度センサ一体型圧力センサ装置の断面構成を示す図である。It is a figure which shows the cross-sectional structure of the temperature sensor integrated pressure sensor apparatus concerning 2nd Embodiment of this invention. 本発明の第３実施形態にかかる温度センサ一体型圧力センサ装置の断面構成を示す図である。It is a figure which shows the cross-sectional structure of the temperature sensor integrated pressure sensor apparatus concerning 3rd Embodiment of this invention. 本発明の第４実施形態にかかる温度センサ一体型圧力センサ装置の断面構成を示す図である。It is a figure which shows the cross-sectional structure of the temperature sensor integrated pressure sensor apparatus concerning 4th Embodiment of this invention. 本発明の第５実施形態にかかる温度センサ一体型圧力センサ装置の断面構成を示す図である。It is a figure which shows the cross-sectional structure of the temperature sensor integrated pressure sensor apparatus concerning 5th Embodiment of this invention. 本発明の第６実施形態にかかる温度センサ一体型圧力センサ装置の断面構成を示す図である。It is a figure which shows the cross-sectional structure of the temperature sensor integrated pressure sensor apparatus concerning 6th Embodiment of this invention.

Explanation of symbols

１０コネクタケース
１２第１のターミナル
１６圧力検出室
１９接続部設置室
２０圧力検出素子
３０ポート部
３１Ｏリング
３２樹脂部
３３コーティング部材
３６第２のターミナル
３９添加部材
５０温度検出素子
５１リード
１００ケース DESCRIPTION OF SYMBOLS 10 Connector case 12 1st terminal 16 Pressure detection chamber 19 Connection part installation chamber 20 Pressure detection element 30 Port part 31 O-ring 32 Resin part 33 Coating member 36 2nd terminal 39 Addition member 50 Temperature detection element 51 Lead 100 Case

Claims

A pressure detection element (20) for detecting the pressure of the measurement medium;
The port portion (30) includes a port portion (30) in which the pressure detection element (20) is mounted and a pressure introduction hole (34) for introducing the measurement medium into the pressure detection element (20) is formed. A case (100) in which the tip of the projection protrudes in one direction;
A seal member (sealing member) that is provided so as to go around the outer periphery of the port portion (30) and seals the measurement medium between the attached member to be attached to the case (100) and the port portion (30). 31) and
A lead (51) is pulled out, and is provided on the distal end side of the port part (30) with respect to the seal member (31), and a temperature detection element (50) for detecting the temperature of the measurement medium; ,
The pressure detection element (20) is electrically connected to the temperature detection element (50) and the lead (51), and is provided in the case (100). And terminals (12, 36),
The temperature detecting element (50) and a part of the lead (51) are arranged with respect to the port part (30) so as to be exposed to the measurement medium,
The case (100) is made of a material containing resin, and the port portion (30) forms the case (100) between the portion where the seal member (31) is arranged and the tip portion. And a high thermal conductivity member (33, 39) having a higher thermal conductivity than the resin to be used,
The port portion (30) is provided with a recess (37) from the portion where the seal member (31) is disposed to the tip end side, and the lead (51) and the terminal (36) are connected to the recess. The fin member (40) which is connected in (37) and is made of a material having a higher thermal conductivity than the material constituting the case (100) is arranged in the recess (37). A temperature sensor-integrated pressure sensor device, wherein the pressure sensor device is disposed in the recess (37) so as to contact the lead (51) and the terminal (36) .

A pressure detection element (20) for detecting the pressure of the measurement medium;
The port portion (30) includes a port portion (30) in which the pressure detection element (20) is mounted and a pressure introduction hole (34) for introducing the measurement medium into the pressure detection element (20) is formed. A case (100) in which the tip of the projection protrudes in one direction;
A seal member (sealing member) that is provided so as to go around the outer periphery of the port portion (30) and seals the measurement medium between the attached member to be attached to the case (100) and the port portion (30). 31) and
A lead (51) is pulled out, and is provided on the distal end side of the port part (30) with respect to the seal member (31), and a temperature detection element (50) for detecting the temperature of the measurement medium; ,
The pressure detection element (20) is electrically connected to the temperature detection element (50) and the lead (51), and is provided in the case (100). And terminals (12, 36),
The temperature detecting element (50) and a part of the lead (51) are arranged with respect to the port part (30) so as to be exposed to the measurement medium,
The case (100) is made of a material containing resin, and the port portion (30) forms the case (100) between the portion where the seal member (31) is arranged and the tip portion. And a high thermal conductivity member (33, 39) having a higher thermal conductivity than the resin to be used,
The port portion (30) is provided with a recess (37) from the portion where the seal member (31) is disposed to the tip end side, and the lead (51) and the terminal (36) are connected to the recess. (37), a protective member (38) is arranged in the depression (37), and the lead (51) and the terminal (36) arranged in the depression (37). Is covered with the protective member (38), and a portion of the protective member (38) opposite to the bottom surface side of the recess (37) has a fin shape. Integrated pressure sensor device.

The high thermal conductivity member is a coating member (33), and an outer peripheral wall between a portion of the port portion (30) where the seal member (31) is disposed and the tip end portion is the coating member (33). in pressure sensor device according to claim 1 or 2, characterized in that it is configured.

Any said high thermal conductivity member is added member (39), said port portion (30) of claims 1 to 3, characterized in that it is configured to include the addition member (39) in the resin or pressure sensor device according to one.

Any of the portions where the sealing member (31) is disposed within the port portion (30) of claims 1 to 4 the outer peripheral wall of until the tip, characterized in that there is a fin-shaped 1 pressure sensor device according to One.

A pressure detection element (20) for detecting the pressure of the measurement medium;
The port portion (30) includes a port portion (30) in which the pressure detection element (20) is mounted and a pressure introduction hole (34) for introducing the measurement medium into the pressure detection element (20) is formed. A case (100) having a tip protruding in one direction,
A seal member (sealing member) that is provided so as to go around the outer periphery of the port portion (30) and seals the measurement medium between the attached member to be attached to the case (100) and the port portion (30). 31) and
A lead (51) is pulled out, and is provided on the distal end side of the port part (30) with respect to the seal member (31), and a temperature detection element (50) for detecting the temperature of the measurement medium; ,
The pressure detection element (20) is electrically connected to the temperature detection element (50) and the lead (51), and is provided in the case (100). And terminals (12, 36),
The temperature detecting element (50) and a part of the lead (51) are arranged with respect to the port part (30) so as to be exposed to the measurement medium,
Of the outer peripheral wall of the port portion (30), a portion between the portion where the seal member (31) is arranged and the tip end portion has a fin shape ,
The port portion (30) is provided with a recess (37) from the portion where the seal member (31) is disposed to the tip end side, and the lead (51) and the terminal (36) are connected to the recess. The fin member (40) which is connected in (37) and is made of a material having a higher thermal conductivity than the material constituting the case (100) is arranged in the recess (37). A temperature sensor-integrated pressure sensor device, wherein the pressure sensor device is disposed in the recess (37) so as to contact the lead (51) and the terminal (36) .

A pressure detection element (20) for detecting the pressure of the measurement medium;
The port portion (30) includes a port portion (30) in which the pressure detection element (20) is mounted and a pressure introduction hole (34) for introducing the measurement medium into the pressure detection element (20) is formed. A case (100) having a tip protruding in one direction,
A seal member (sealing member) that is provided so as to go around the outer periphery of the port portion (30) and seals the measurement medium between the attached member to be attached to the case (100) and the port portion (30). 31) and
A lead (51) is pulled out, and is provided on the distal end side of the port part (30) with respect to the seal member (31), and a temperature detection element (50) for detecting the temperature of the measurement medium; ,
The pressure detection element (20) is electrically connected to the temperature detection element (50) and the lead (51), and is provided in the case (100). And terminals (12, 36),
The temperature detecting element (50) and a part of the lead (51) are arranged with respect to the port part (30) so as to be exposed to the measurement medium,
Of the outer peripheral wall of the port portion (30), a portion between the portion where the seal member (31) is arranged and the tip end portion has a fin shape,
The port portion (30) is provided with a recess (37) from the portion where the seal member (31) is disposed to the tip end side, and the lead (51) and the terminal (36) are connected to the recess. (37), a protective member (38) is arranged in the depression (37), and the lead (51) and the terminal (36) arranged in the depression (37). Is covered with the protective member (38), and a portion of the protective member (38) opposite to the bottom surface side of the recess (37) has a fin shape. Integrated pressure sensor device.