JP4973126B2 - Pressure sensor - Google Patents

Description

  The present invention relates to a pressure sensor in which a pressure detection unit is housed in a case formed by bonding a first case member and a second case member.

  Conventionally, as this type of pressure sensor, a first case member and a second case member are bonded to each other and a measurement pressure is introduced into the case, and the measurement pressure stored in the case is measured. There has been proposed a pressure sensor including a pressure detection unit that detects the above (see, for example, Patent Document 1).

In such a pressure sensor, as described in Patent Document 1, the pressure detection unit is installed in the opening of the first case member, the pressure introduction port is provided in the second case member, The opening edge part of the case member 1 and the opening edge part of the pressure introduction port in the second case member were made to coincide with each other, and the coincident part was adhered by an adhesive made of epoxy resin or the like over the entire circumference.
JP 2005-326338 A

  Incidentally, some pressure sensors are used for detecting air pressure in an intake manifold of a vehicle. Such a pressure sensor is required in the intake manifold due to a demand for high airtightness of the pressure sensor due to legal regulations, an increase in intake air pressure accompanying an increase in engine output, and an increase in the EGR rate of the exhaust gas recirculation (Exhaust Gas Recirculation) system. From the standpoint of deterioration of pressure medium contamination, etc., the first case member and the second case member are required to be bonded with an adhesive structure excellent in airtightness, adhesive strength, and stain resistance. .

  In recent years, resin materials with poor adhesion, such as PPS (polyphenylene sulfide), are sometimes used as materials for the first and second case members because of demands such as heat resistance and hydrolysis resistance. And the port portion are required to be bonded by an bonding method having excellent bonding strength.

  However, the conventional pressure sensor has a bonding structure in which the first and second case members are bonded by one type of adhesive, and it is difficult to satisfy all of airtightness, bonding strength, and dirt resistance. It has become.

  The pressure sensor described in Patent Document 1 is intended to protect the sensor chip from acidic or corrosive pressure media that cause deterioration, and an adhesion method that satisfies airtightness, adhesion strength, and dirt resistance. The case and the port part are not bonded.

  The present invention has been made in view of the above points, and an object of the present invention is to bond a first case member and a second case member while ensuring airtightness, adhesive strength, and stain resistance.

The first feature of the present invention is that the first case member (20) and the second case member (30) are bonded to each other, and the case (10) in which the measurement pressure medium is introduced. A pressure sensor (100) that is housed in the case (10) and detects the measurement pressure, and a bonding region between the first case member and the second case member is: A first adhesive region (71) that is a first adhesive (61) that secures stain resistance and adhesive strength, and in which an adhesive made of a hard epoxy resin is disposed, and a second adhesive that secures airtightness The adhesive (62) is composed of a second adhesive region (72) in which one kind of adhesive selected from soft epoxy resin, silicon rubber and fluorine rubber is disposed. The first adhesion region is a measurement pressure medium in the case (10). Is disposed in a portion in contact with, the adhesive surface of the one case member recess (71a) is formed, can be inserted protrusions into the recess (71a) on the adhesive surface of the other case member (71b) is formed, The bottom surface of the recess (71a) is a satin finish .

In such a configuration, the adhesive region between the first case member and the second case member is a first adhesive that secures dirt resistance and adhesive strength, and an adhesive made of a hard epoxy resin is disposed. The first adhesive region thus formed and the second adhesive for ensuring airtightness , which is selected from soft epoxy resin, silicon rubber and fluorine rubber, are disposed. Since the first adhesive region is disposed at a portion in contact with the measurement pressure medium in the case, the first adhesive region is secured with airtightness, adhesive strength, and dirt resistance. The case member and the second case member can be bonded. In addition, the first adhesive made of hard epoxy resin ensures stain resistance and adhesive strength, and the second adhesive made of one type selected from soft epoxy resin, silicon rubber and fluorine rubber. Airtightness can be ensured by the agent. Moreover, since the satin finish is given to the bottom face of a recessed part, the surface roughness of the bottom face of a recessed part can be enlarged, and the applicability | paintability of a 1st adhesive agent can be improved.

Further, the second invention features, a first adhesive region (71) is formed on the bottom side of the concave portion (71a), the convex portion of the opening side of the recess (71a) in the outer peripheral side of (71b) The second adhesive region (72) is formed in the region.

  In this way, the first adhesion region can be formed on the bottom side of the recess, and the second adhesion region can be formed on the opening side of the recess on the outer peripheral side of the projection.

The third feature of the present invention is that the first case member (20) and the second case member (30) are bonded to each other, and the measurement pressure medium is introduced (10). ) And a detection unit (40) housed in the case (10) and detecting the measurement pressure, and a bonding region between the first case member and the second case member Is a first adhesive region (71) that is a first adhesive (61) that secures stain resistance and adhesive strength and in which an adhesive made of a hard epoxy resin is disposed, and airtightness and stain resistance. And a second adhesive region (72) in which an adhesive made of fluorine-based rubber is disposed, and a concave portion is formed on the adhesive surface of one case member. (71a) is formed, and a concave portion (71a) is formed on the bonding surface of the other case member. Insertable protrusions (71b) are formed, the bottom surface of the recess (71a) is that the satin finish is applied.

In such a configuration, the adhesive region between the first case member and the second case member is a first adhesive that secures dirt resistance and adhesive strength, and an adhesive made of a hard epoxy resin is disposed. And a second adhesive region, which is a second adhesive that secures airtightness and dirt resistance, and in which an adhesive made of fluorine-based rubber is disposed , A concave portion (71a) is formed on the adhesive surface of the case member, and a convex portion (71b) that can be inserted into the concave portion (71a) is formed on the adhesive surface of the other case member, and the bottom surface of the concave portion (71a). Since the satin finish is applied , the first case member and the second case member can be bonded while ensuring airtightness, adhesive strength and stain resistance.

The fourth aspect of the present invention, one of the first adhesive region (71) and a second adhesive region (72) is formed on the bottom side of the concave portion (71a), opening of the recess (71a) That is, the other of the first adhesive region (71) and the second adhesive region (72) is formed on the side.

  In this way, one of the first adhesive region and the second adhesive region is formed on the bottom side of the recess, and the other of the first adhesive region and the second adhesive region is formed on the opening side of the recess. it can.

The fifth feature of the present invention is that irregularities are formed on the side surfaces of the recesses (71a).

  Thus, since the unevenness | corrugation is formed in the side surface of a recessed part, the adhesion area in the side surface of a recessed part becomes large, and adhesive strength can be improved.

Moreover, the 6th characteristic of this invention is that the unevenness | corrugation is formed in the side wall of a convex part (71b).

  Thus, since the unevenness | corrugation is formed in the side wall of a convex part, the adhesion area in the side wall of a convex part becomes wide, and it can improve adhesive strength.

  In addition, the code | symbol in the bracket | parenthesis of each said means shows the correspondence with the specific means as described in embodiment mentioned later.

  FIG. 1 shows an overall schematic cross-sectional configuration of the pressure sensor according to the first embodiment of the present invention. This pressure sensor 100 is attached to an intake manifold of an automobile and is used as a sensor used for measuring the pressure in the intake manifold.

[Configuration]
The case 10 defines the main body of the pressure sensor 100, and is formed by bonding the first case member 20 and the second case member 30 together. Details of this adhesion structure will be described later.

  The first case member 20 is formed, for example, by molding a resin material such as PPS (polyphenylene sulfide), PBT (polybutylene terephthalate), or an epoxy resin using a mold. An opening 21 for mounting the pressure detection element 40 is formed on the lower end surface of the first case member 20.

  The first case member 20 is integrally provided with a plurality of terminals 22 made of copper, 42 alloy or the like connected to the outside by insert molding. One end of some of the terminals 22 is disposed so as to be exposed in the opening 21.

  Moreover, the edge part exposed in the opening part 23 by the side of the right end part in the 1st case member 20 among each terminal 22 is connectable with the external apparatus (external wiring member etc.) which is not shown in figure. That is, the right end portion of the first case member 20 is configured as a connector portion in the pressure sensor 100 together with the end portion of each terminal 22 located in the opening portion 23.

  The pressure detection element 40 is a pressure detection unit that detects a measurement pressure. Specifically, the pressure detection element 40 detects a pressure and generates an electric signal having a level corresponding to the detected value. The pressure detection element 40 is constituted by, for example, a sensor chip made of a semiconductor and a glass pedestal that holds the sensor chip.

  Here, although the sensor chip is not limited, for example, it has a well-known structure using a piezoresistive effect made of a silicon semiconductor chip or the like, and is formed by a diaphragm and a diffused resistor which are distorted by pressure on its upper surface. The configuration includes a bridge circuit and the like.

  The pressure detection element 40 is die-bonded between a bottom surface of the opening 21 on the lower end side of the first case member 20 and the glass pedestal with an adhesive (not shown) such as silicon rubber interposed therebetween. ing.

  Each input / output terminal (not shown) of the pressure detection element 40 is electrically connected to the bonding pad of the terminal 22 via a bonding wire 24 such as gold or aluminum.

  The opening 21 on the lower end side of the first case member 20 is filled with a protective member 25 made of fluorine-based gel or fluorine-based rubber having excellent electrical insulation and chemical resistance. The protective member 25 seals and protects the interface between the terminal 22 and the first case member 20, the pressure detection element 40, the bonding wire 24, and the like.

  The second case member 30 is connected to and integrated with the first case member 20 so as to cover the opening 21 on the lower end side of the first case member 20, and the case 10 of the pressure sensor 100. Is configured. A pressure detection chamber 26 is formed between the first case member 20 and the second case member 30.

  The second case member 30 is configured as a pressure introduction port into which a measurement pressure is introduced. For example, like the first case member 20, the second case member 30 is made of a heat-resistant resin material such as PBT or PPS. This resin material is molded using a mold.

  The second case member 30 protrudes in the direction opposite to the first case member 20, and a pressure introduction hole 31 that communicates with the pressure detection chamber 26 from the protruding tip is formed in the second case member 30.

  Further, an O-ring 33 is provided on the outer peripheral portion of the second case member 30, and the pressure sensor 100 can be airtightly attached to a sensor attachment portion (not shown) via the O-ring 33. .

  Here, in the present pressure sensor 100, the second case member 30 and the first case member 20 are at the opening edge portion on the first case member 20 side in the pressure introduction hole 31 of the second case member 30. The case 10 is integrated by the first and second adhesives 61 and 62. The configuration of the bonding portion will be described more specifically with reference to FIGS.

  FIG. 2 is a schematic plan view showing an adhesive surface in the first case member 20 in FIG. FIG. 3 is an enlarged view of a portion A surrounded by a circle in FIG. As shown in FIG. 2, a concave portion 71a is formed on the adhesive surface of the first case member 20, and a convex portion 71b that can be inserted into the concave portion 71a is formed on the adhesive surface of the second case member 30 opposite thereto. Is formed.

  The bottom surface of the recess 71a is subjected to a satin finish for increasing the surface roughness.

  Moreover, the unevenness | corrugation for making a bonding area wide is formed in the side surface of the recessed part 71a, and each side surface of the inner peripheral side and outer peripheral side of the convex part 71b. Specifically, irregularities are formed such that the cross section of each side surface has a gather shape as shown in FIG.

  In the present embodiment, the first and second case members 20 and 30 are bonded to the first bonding region 71 in which the first adhesive that secures the stain resistance and the bonding strength is disposed, It is comprised by the 2nd adhesion area | region 72 in which the 2nd adhesive agent which ensures airtightness is arrange | positioned.

  Specifically, the first adhesive region 71 is formed by the first adhesive 61 on the bottom surface side of the concave portion 71a formed in the first case member 20, and the opening portion of the concave portion 71a on the outer peripheral side of the convex portion 71b. A second adhesive region 72 is formed in the side region.

  FIG. 5 shows a comparative example of the adhesive material and performance. As shown in the figure, an adhesive made of a hard epoxy resin is inferior in airtightness but excellent in stain resistance and adhesive strength. In addition, an adhesive made of soft epoxy resin and silicon rubber is excellent in airtightness but inferior in dirt resistance and adhesive strength. In addition, an adhesive made of a fluorinated rubber is excellent in airtightness and stain resistance, but has poor adhesive strength.

  In the present embodiment, an adhesive made of a hard epoxy resin is used as the first adhesive 61, and the second adhesive 62 is selected from a soft epoxy resin, a silicon rubber, and a fluorine rubber. One kind of adhesive is used.

  That is, as a two-layer adhesive structure by the first adhesive 61 and the second adhesive 62, the first adhesive 61 made of hard epoxy resin assures stain resistance and adhesive strength, and the soft epoxy resin The second adhesive 62 made of any one of silicon rubber and fluorine rubber ensures airtightness.

  In addition, the 1st adhesion area | region 71 in which the 1st adhesive agent 61 is arrange | positioned is arrange | positioned in the part which contacts the measurement pressure medium in the case 10, in order to ensure dirt resistance.

[Manufacturing method]
The manufacturing method of this pressure sensor 100 is as follows, for example. First, the first case member 20 and the second case member 30 in which the terminal 22 is insert-molded are prepared.

  Next, in order to improve the hydrophilicity of the adhesive, the plasma cleaning is performed on the concave portion 71 a formed on the bonding surface of the first case member 20 and the convex portion 71 b formed on the second case member 30. Pre-treatment such as treatment or degreasing using a primer is performed.

  Next, after the first adhesive 61 is applied to the recess 71 a formed on the bonding surface of the first case member 20, the second case member 30 is formed on the recess 71 a of the first case member 20. The convex portion 71b is inserted, and the first adhesive 61 is cured.

  When the first adhesive 61 is cured, the second adhesive 62 is then dropped from the outside of the first case member 20 into the gap between the concave portion 71a and the convex portion 71b to cure the second adhesive 62. .

  And when the 2nd adhesive agent 62 hardens | cures, the adhesion | attachment by the 1st, 2nd adhesive agents 61 and 62 will be completed, both case members 20 and 30 will be fixed, and the case 10 will be completed.

  When the sensor device 100 is applied to the above-described intake pressure sensor, for example, the intake manifold and the pressure introduction hole 31 in the automobile are in communication with each other, and the intake pressure (negative pressure) is detected by the pressure detection element 40. It can be attached to the car as you can.

  Thereby, when pressure is applied in the direction of the white arrow shown in FIG. 1, the pressure is transmitted to the pressure receiving surface of the pressure detecting element 40 in the case 10 through the pressure introducing hole 31 a of the second case member 30. The

  The pressure detection element 40 detects this pressure and generates an electric signal of a level corresponding to the detected value, and the electric signal is output from the bonding wire 24 to the outside through the terminal 22.

[Effects]
According to the configuration described above, the adhesion region between the first case member and the second case member is the same as the first adhesion region in which the first adhesive that ensures the stain resistance and the adhesion strength is disposed, and the airtightness. The second adhesive region in which the second adhesive that secures the property is disposed, and the first adhesive region is disposed at a portion in contact with the measurement pressure medium in the case, so that airtightness is achieved. The first case member and the second case member can be bonded while securing the adhesive strength and stain resistance.

  The first adhesive made of hard epoxy resin ensures stain resistance and adhesive strength, and the second adhesive made of one type selected from soft epoxy resin, silicon rubber and fluorine rubber. Airtightness can be ensured by the agent.

  Moreover, a 1st adhesion area | region can be formed in the bottom part side of a recessed part, and a 2nd adhesion area | region can be formed in the area | region of the opening part side of a recessed part in the outer peripheral side of a convex part.

  Moreover, since the satin finish is given to the bottom face of the recessed part formed in the adhesive surface of a 1st case member, the surface roughness of the bottom face of a recessed part can be enlarged, and the applicability | paintability of a 1st adhesive agent can be increased. Can be improved.

  Moreover, since the unevenness | corrugation is formed in the side surface of the recessed part formed in the adhesion surface of the 1st case member, the adhesion area in the side surface of a recessed part becomes large, and it can improve adhesive strength.

  Moreover, since the unevenness | corrugation is formed in the side wall of the convex part formed in the adhesion surface of the 2nd case member, the adhesion area in the side wall of a convex part becomes large, and it can improve adhesive strength.

(Second Embodiment)
FIG. 6 shows an overall schematic cross-sectional configuration of the pressure sensor according to the second embodiment of the present invention. FIG. 7 is an enlarged view of a portion A surrounded by a circle in FIG. In the present embodiment, the portions other than the bonding portion between the first case member 20 and the second case member 30 are the same as those in the first embodiment.

  In the said 1st Embodiment, the 1st adhesion area | region by the 1st adhesive agent 61 which ensures stain resistance and adhesive strength is formed in the bottom face side of the recessed part 71a of the 1st case member 20, and the convex part 71b A second adhesive region 72 made of a second adhesive 62 that ensures airtightness is formed in a region on the opening side of the recess 71a on the outer peripheral side.

  In the present embodiment, as shown in FIG. 7, the first adhesive region 71 is formed on the bottom surface side of the concave portion 71 a of the first case member 20 by the first adhesive 61 that secures the adhesive strength. A second adhesive region 72 made of a second adhesive 62 that ensures airtightness and dirt resistance is formed on the opening side of the recess 71a of the case member 20 so as to be laminated. The first and second adhesion regions 71 and 72 are formed on both the inner peripheral side and the outer peripheral side of the convex portion 71b of the second case member, respectively.

  In the present embodiment, an adhesive made of hard epoxy resin is used as the first adhesive 61, and an adhesive made of fluorine rubber is used as the second adhesive 62.

  That is, as a two-layer adhesive structure composed of the first adhesive 61 and the second adhesive 62, the first adhesive 61 made of hard epoxy resin assures the adhesive strength, and the fluorine rubber is used as the material. The second adhesive 62 ensures airtightness and dirt resistance.

  In addition, the 2nd adhesion area | region 72 in which the 2nd adhesive agent 62 is arrange | positioned is arrange | positioned in the part which contacts the measurement pressure medium in the case 10, in order to ensure dirt resistance.

  According to the configuration described above, the adhesion region between the first case member and the second case member is the same as the first adhesion region in which the first adhesive that ensures the stain resistance and the adhesion strength is disposed, and the airtightness. Since the second adhesive region in which the second adhesive that secures the property and stain resistance is disposed, the first case member and the first case member are secured to ensure airtightness, adhesive strength, and stain resistance. Two case members can be bonded.

  In addition, dirt resistance and adhesive strength can be secured by the first adhesive made of hard epoxy resin, and airtightness and dirt resistance can be secured by the second adhesive made of fluorine-based rubber.

  In addition, one of the first adhesive region and the second adhesive region can be formed on the bottom side of the recess, and the other of the first adhesive region and the second adhesive region can be formed on the opening side of the recess.

(Other embodiments)
The present invention is not limited to a pressure sensor used for measuring the pressure in an intake manifold of an automobile. For example, the present invention is applied to an exhaust pressure sensor, various containers, or a pressure sensor that detects pressure in an atmosphere. Can do.

  In addition to the pressure detection element using the piezoresistance effect, the pressure detection unit may be, for example, a capacitive pressure detection element.

  Moreover, in the said 1st Embodiment, the 1st adhesion area | region where the 1st adhesive agent 61 consisting of a hard epoxy resin is arrange | positioned as a 2 layer adhesion structure by the 1st adhesive agent 61 and the 2nd adhesive agent 62 is used. A second adhesive 62 is formed on the bottom side of the recess 71a to ensure stain resistance and adhesive strength, and a second adhesive 62 made of one kind selected from soft epoxy resin, silicon rubber and fluororubber is disposed. In the above example, the airtightness is ensured by forming the adhesive region in the region on the opening portion side of the concave portion 71a on the outer peripheral side of the convex portion 71b. For example, a second adhesive made of fluororubber is disposed. 2 is formed on the bottom side of the concave portion 71a to ensure stain resistance and airtightness, and the first adhesive region 71 in which the first adhesive made of hard epoxy resin is arranged is the outer periphery of the convex portion 71b. Opening side of recess 71a on the side Formed in the region may be secured to adhesive strength.

  Moreover, in the said 2nd Embodiment, the 1st adhesion area | region where the 1st adhesive agent which consists of hard epoxy resin is arrange | positioned as a 2 layer adhesion structure by the 1st adhesive agent 61 and the 2nd adhesive agent 62 is used. Formed on the bottom side of the recess 71a to ensure adhesive strength, and a second adhesive region in which a second adhesive made of fluororubber is disposed is formed on the opening side of the recess 71a to provide airtightness and stain resistance. An example of securing the property has been shown. For example, a second adhesive region in which a second adhesive made of a fluorine-based rubber is disposed is formed on the bottom side of the recess 71a to ensure airtightness, and a hard epoxy system A first adhesive region where the first adhesive made of resin is disposed may be formed on the opening side of the recess 71a to ensure adhesive strength and stain resistance.

  Moreover, in the said embodiment, after hardening the 1st adhesive agent 61 between the recessed part 71a of the 1st case member 20, and the convex part 71b of the 2nd case member 30, the 2nd adhesive agent 62 is used. Although the example which hangs from the outer side of the 1st case member 20 to the clearance gap between the recessed part 71a and the convex part 71b and hardens the 2nd adhesive agent 62 was shown, for example, the 1st adhesive agent 61 and the 2nd adhesive agent After stacking 62, the convex portion 71b of the second case member 30 is inserted into the concave portion 71a of the first case member 20, so that the first adhesive 61 and the second adhesive 62 are cured simultaneously. It may be.

  In the above-described embodiment, an example in which the concave portion 71 a is formed in the first case member 20 and the convex portion 71 b is formed in the second case member 30 has been described. For example, the convex portion 71 is convex in the first case member 20. A recess 71 a may be formed in the second case member 30.

It is a figure which shows the whole schematic sectional structure of the pressure sensor which concerns on 1st Embodiment of this invention. It is a schematic plan view which shows the adhesion surface in the 1st case member in FIG. FIG. 2 is an enlarged view of a portion A surrounded by a circle in FIG. 1. It is a figure which shows the uneven | corrugated shape formed in each side surface of the side surface of a recessed part and the inner peripheral side of a convex part, and an outer peripheral side. It is a figure for demonstrating the comparison of the material and performance of an adhesive agent. It is a figure which shows the whole schematic cross-sectional structure of the pressure sensor which concerns on 2nd Embodiment of this invention. FIG. 7 is an enlarged view of a portion A surrounded by a circle in FIG. 6.

Explanation of symbols

10 ... Case, 20 ... First case member, 22 ... Terminal,
24 ... bonding wire, 26 ... pressure detection chamber, 30 ... second case member,
40 ... pressure detecting element, 61 ... first adhesive, 62 ... second adhesive,
71 ... 1st adhesion field, 72 ... 2nd adhesion field, crevice ... 71a, convex part ... 71b,
100: Pressure sensor.

Claims (6)

A case (10) in which the first case member (20) and the second case member (30) are bonded to each other, and a measurement pressure medium is introduced;
A pressure sensor (100) comprising a detection unit (40) housed in the case (10) and detecting the measurement pressure,
The adhesion region between the first case member and the second case member is a first adhesive (61) that secures stain resistance and adhesion strength, and an adhesive made of a hard epoxy resin is disposed. A first adhesive region (71) and a second adhesive (62) for ensuring airtightness, which are made of one kind selected from soft epoxy resin, silicon rubber and fluorine rubber. The second adhesive region (72) where the agent is disposed,
The first adhesion region is disposed at a portion in contact with the measurement pressure medium in the case (10) ,
A concave portion (71a) is formed on the adhesive surface of one case member, and a convex portion (71b) that can be inserted into the concave portion (71a) is formed on the adhesive surface of the other case member.
A pressure sensor, wherein the bottom surface of the recess (71a) is textured . Before SL recess the the bottom side of (71a) the first adhesive region (71) is formed, the second adhesive to the region of the opening side of the recess at the outer side of the convex portion (71b) (71a) the pressure sensor of claim 1, wherein the region (72) is formed. A case (10) in which the first case member (20) and the second case member (30) are bonded to each other, and a measurement pressure medium is introduced;
A pressure sensor (100) comprising a detection unit (40) housed in the case (10) and detecting the measurement pressure,
The adhesion region between the first case member and the second case member is a first adhesive (61) that secures stain resistance and adhesion strength, and an adhesive made of a hard epoxy resin is disposed. The first adhesive region (71) and the second adhesive region (72) which is a second adhesive (62) for securing airtightness and stain resistance and in which an adhesive made of fluorine-based rubber is disposed. It is constituted by a,
A concave portion (71a) is formed on the adhesive surface of one case member, and a convex portion (71b) that can be inserted into the concave portion (71a) is formed on the adhesive surface of the other case member.
A pressure sensor, wherein the bottom surface of the recess (71a) is textured . Is one the formation of the said first bonding areas on the bottom side of the front Symbol recess (71a) (71) a second adhesive region (72), said first adhesive on the opening side of the recess (71a) The pressure sensor according to claim 3 , wherein the other of the region (71) and the second adhesion region (72) is formed. The pressure sensor according to any one of claims 1 to 4 , wherein unevenness is formed on a side surface of the recess (71a). Pressure sensor according to any one of claims 1 to 5, characterized in that the irregularities are formed on a side wall of the convex portion (71b).

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