CN207398075U - Nozzle holder, processing chamber and semiconductor processing equipment - Google Patents
Nozzle holder, processing chamber and semiconductor processing equipment Download PDFInfo
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- CN207398075U CN207398075U CN201721018277.2U CN201721018277U CN207398075U CN 207398075 U CN207398075 U CN 207398075U CN 201721018277 U CN201721018277 U CN 201721018277U CN 207398075 U CN207398075 U CN 207398075U
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- nozzle holder
- head cover
- auxiliary section
- nozzle
- screw
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Abstract
The utility model discloses a kind of nozzle holder, a kind of processing chamber and a kind of semiconductor processing equipments.Nozzle holder is used to nozzle being fixed on head cover, including body, mounting hole is provided on the body, the mounting hole is used to place nozzle, it is provided on head cover and at least one screws mating groove, nozzle holder further includes from body at least one of direction protrusion away from mounting hole and screws auxiliary section, this is screwed, and auxiliary section is corresponding with screwing mating groove, and nozzle holder has lock position and removed position with respect to head cover；It when nozzle holder is in lock position, screws auxiliary section and screws in mating groove, when nozzle holder is in removed position, screws auxiliary section and screw mating groove.Phenomena such as nozzle holder of the structure coordinates correspondingly head cover, can realize the fast assembling-disassembling of nozzle holder and head cover, and can effectively protect head cover and nozzle holder, avoid the occurrence of damage occurs, and increases economic efficiency.
Description
Technical field
The utility model is related to technical field of manufacturing semiconductors, and in particular to a kind of nozzle holder, one kind include the nozzle
The processing chamber of stent and a kind of semiconductor processing equipment including the processing chamber.
Background technology
At present, plasma device is widely used in manufacturing integrated circuit (IC, Integrate dCircuit) or microcomputer
In the manufacturing process of electric system (MEMS, Micro-Electro-Mechanical System) device.Wherein inductive coupling etc. from
Daughter device (ICP, Inductive Coupled Plasma Emission Spectrometer) is widely used in etching
Etc. in techniques, principle is：Under low pressure, reaction gas generates ionization and forms plasma under the excitation of radio-frequency power.Deng
Gas ions are made of charged electronics and ion, and the gas in reaction chamber is under the shock of electronics, except being transformed into ion
Outside, moreover it is possible to absorb energy and form substantial amounts of active reactive group.Active reactive group and the material surface that is etched form chemistry
It reacts and forms volatile reaction product.Reaction product departs from the material surface that is etched, and extracts chamber out by vacuum system
Body.
As shown in Figure 1, the structure diagram for traditional processing chamber 200.The processing chamber 200 mainly includes cavity
210th, lid is located at the head cover 220 on 210 top of cavity, is arranged on head cover 220 and connected with the inside of cavity 210 nozzle 230, position
Coil 240 above head cover 220, radio frequency (RF, the Radio Frequency) power supply being electrically connected with coil 240 and bias plasma
Source.The processing chamber 200 works according to the following procedure：Process gas is entered by pipeline by the nozzle 230 being fixed on head cover 220
In cavity 210, in the case where being applied with the excitation of coil 240 of radio-frequency power supply, process gas is ionized into plasma (Plasma) A,
Plasma A carries out deposition-etch under the driving of grid bias power supply, to the chip (Wafer) 260 being fixed on chuck 250, carves
Product after erosion is taken away by molecular pump (Turbo Pump) 270.
Wherein, the nozzle 230 in above-mentioned processing chamber 200 is that gas can be even into one inside cavity 210
The performance of a air inlet, sealing and dismounting link also directly influences the maintainability of entire processing chamber 200.
As shown in Fig. 2, shown by the structure of the nozzle holder 100 for the fixed nozzle 230 taken in above-mentioned processing chamber 200
It is intended to.As shown in Fig. 2, nozzle 230 is mounted in head cover 220 made of quartz, there are sealing ring 280, engineering plastics between the two
100 lower part of nozzle holder of material is stuck in using grab 150 in the annular groove 226 of head cover 220, nozzle pressure ring there are three grab 150
290 push down nozzle 230 and link into an integrated entity with nozzle holder 100, ensure that sealing ring 280 has enough decrements, it is ensured that spray
The installation and sealing of mouth 230 and head cover 220.
But since the product after etching can be deposited on head cover 220, therefore head cover 220 needs frequent maintaining, by
This nozzle 230 needs often to dismount, structure as shown in Figure 2, and dismounting nozzle 230 is very inconvenient, and when dismounting wants constricting nozzle branch
Three grabs 150 of 100 lower part of frame, and nozzle 230 is nearby additionally provided with coil 240 and admission line etc., space is limited, it is difficult to
Operation.
Secondly, when install nozzle 230, the grab 150 of nozzle holder 100 pressure in the annular groove 226 of entrance head cover 220
It disappears, it is quick to spring back, easily damage not only crisp but also hard head cover 220.
In addition, nozzle holder 100 is engineering plastics, and it is easy to aging in spite of certain elasticity, but in high temperature environments, it loses
It is broken during elastic compression, head cover 220 is the higher component of cost, and the service life directly affects the consumables cost of board.
Therefore, a kind of nozzle holder of new structure how is designed, becomes this field skill urgently to be resolved hurrily in order to dismantle
Art problem.
Utility model content
The utility model is intended at least solve one of technical problem in the prior art, it is proposed that a kind of nozzle branch
Frame, a kind of processing chamber including the nozzle holder and a kind of semiconductor processing equipment including the processing chamber.
To achieve these goals, the utility model in a first aspect, a kind of nozzle holder is provided, for nozzle to be fixed
On head cover, the nozzle holder includes body, and mounting hole is provided on the body, and the mounting hole is used to place the spray
Mouth, be provided on the head cover it is at least one screw mating groove, the nozzle holder is further included from the body to away from described
At least one of direction protrusion of mounting hole screws auxiliary section, and the auxiliary section that screws is corresponding with the mating groove that screws, institute
The relatively described head cover of nozzle holder is stated with lock position and removed position；When the nozzle holder is in the lock position,
Described screw is screwed described in the screw-in of auxiliary section in mating groove, and when the nozzle holder is in the removed position, described screw is matched somebody with somebody
Conjunction portion screws mating groove described in screwing out.
Preferably, it is symmetrical arranged on the body and screws auxiliary section there are two described, correspondingly, is symmetrically set on the head cover
It puts and screws mating groove there are two described.
Preferably, the end for screwing auxiliary section is additionally provided with limiting section, and the nozzle holder is in the locking position
When putting, screwed described in the limiting section prevention described in the disengaging of auxiliary section and screw mating groove.
Preferably, the body is in the form of a column, and the body include the first fixed part and with first fixed part one
The second fixed part of connection is held, the diameter of first fixed part is more than the diameter of second fixed part, and described second fixes
Auxiliary section is screwed described in being provided in portion, the mounting hole runs through first fixed part and second fixed part.
Preferably, it is described to screw the length of the circumferential direction along second fixed part of auxiliary section and the diameter of the mounting hole
The ratio between be 1/2:1~2/3:1.
Preferably, the thickness of the axis direction along the mounting hole for screwing auxiliary section is 5-8mm.
The second aspect of the utility model, provides a kind of processing chamber, and the processing chamber is located at described including cavity, lid
Head cover, nozzle and the nozzle holder of cavity top end, the nozzle holder includes the nozzle holder recorded above, described
Nozzle is arranged in the mounting hole, be provided on the head cover it is at least one screw mating groove, the nozzle holder is in institute
When stating lock position, described screw is screwed described in the screw-in of auxiliary section in mating groove, so that the nozzle is fixed on the head cover
On, when the nozzle holder is in the removed position, described screw screws mating groove described in the back-out of auxiliary section, so that described
Nozzle departs from the head cover.
Preferably, the head cover includes and the first mounting surface that the cavity contacts and opposite with first mounting surface
The second mounting surface, be provided on second mounting surface and be recessed from the described second installation towards the direction of first mounting surface
Groove, from the bottom of the groove towards the step surface of protrusion inside the head cover and from the top of the groove to described
The inside of head cover and at least one protrusion of the lower part of head cover protrusion, have between the protrusion and the step surface
There is interval, mating groove is screwed described in the interval formation, it is described to screw cooperation when the nozzle holder is in the lock position
Portion is arranged in the interval, and the upper surface for screwing auxiliary section is bonded with the lower surface of the protrusion, described to screw
The lower surface of auxiliary section is bonded with the step surface.
Preferably, the distance between first mounting surface and second mounting surface are 6-12mm.
The third aspect of the utility model, provides a kind of semiconductor processing equipment, and the semiconductor processing equipment includes work
Skill chamber, the processing chamber include the processing chamber recorded above.
The nozzle holder of the utility model is provided with and screws auxiliary section, is correspondingly provided on head cover and is screwed with this
What auxiliary section was adapted screws mating groove, when will screw auxiliary section and screwing in mating groove, can realize nozzle holder and top
Lid is fixedly connected.On the contrary, when needing to dismantle nozzle holder from head cover, it is only necessary to auxiliary section will be screwed and screw cooperation
Slot.Therefore, the nozzle holder of the structure coordinates correspondingly head cover, can realize the fast assembling-disassembling of nozzle holder and head cover,
And then can realize the fast assembling-disassembling of nozzle and head cover, and during dismounting, head cover and nozzle holder can be effectively protected,
Phenomena such as avoiding the occurrence of damage occurs, and increases economic efficiency.
The processing chamber of the utility model has the structure for the nozzle holder recorded above and is mutually fitted with the nozzle holder
The head cover matched somebody with somebody, it is thereby achieved that the fast assembling-disassembling of nozzle holder and head cover, and then can realize that nozzle and the quick of head cover are torn open
Dress, and during dismounting, phenomena such as can effectively protecting head cover and nozzle holder, avoiding the occurrence of damage, occurs, and improves warp
Ji benefit.
The semiconductor processing equipment of the utility model has the structure for the processing chamber recorded above, processing chamber tool
There is the structure for the nozzle holder recorded above.It is thereby achieved that the fast assembling-disassembling of nozzle holder and head cover, and then can realize
The fast assembling-disassembling of nozzle and head cover, and during dismounting, head cover and nozzle holder can be effectively protected, avoid the occurrence of damage
Phenomena such as occur, increase economic efficiency.
Description of the drawings
Attached drawing is to be used to provide a further understanding of the present invention, and a part for constitution instruction, and following
Specific embodiment together for explaining the utility model, but do not form the limitation to the utility model.In the accompanying drawings：
Fig. 1 is the structure diagram of processing chamber in the prior art one；
Fig. 2 is the structure diagram of nozzle holder in the prior art one；
Fig. 3 is the structure diagram of nozzle holder in the utility model；
Fig. 4 is the structure diagram of head cover in the utility model.
Reference sign
100：Nozzle holder；
110：Body；
111：First fixed part；
112：Second fixed part；
120：Mounting hole；
130：Screw auxiliary section；
140：Limiting section；
150：Grab；
200：Processing chamber；
210：Cavity；
220：Head cover；
221：Screw mating groove；
222：Second mounting surface；
223：Groove；
224：Step surface；
225：Protrusion；
226：Annular groove；
230：Nozzle；
240：Coil；
250：Chuck：
260：Chip；
270：Molecular pump；
280：Sealing ring；
290：Nozzle pressure ring.
Specific embodiment
Specific embodiment of the present utility model is described in detail below in conjunction with attached drawing.It should be appreciated that herein
Described specific embodiment is only used for describing and explaining the present invention, and is not intended to limit the utility model.
As shown in Figure 3 and Figure 4, the utility model in a first aspect, being related to a kind of nozzle holder 100.The nozzle holder 100
It is mainly used for nozzle 230 being fixed on head cover 220.Wherein, which includes body 110, is set on body 110
There is a mounting hole 120, mounting hole 120 is provided on head cover 220 and at least one screws mating groove 221, spray for placing nozzle 230
Mouth stent 100 further includes from body 110 at least one of direction protrusion away from mounting hole 120 and screws auxiliary section 130, screws
Auxiliary section 130 is corresponding with screwing mating groove 221, and nozzle holder 100 has lock position and removed position with respect to head cover 220.
When above-mentioned nozzle holder 100 is in lock position, the above-mentioned auxiliary section 130 that screws screws mating groove 221
In, that is to say, that auxiliary section 130 will be screwed along direction (such as clockwise direction) is screwed and screw mating groove 221, at this point,
Nozzle holder 100 is fixedly connected with head cover 220, so as to which indirectly nozzle 230 is fixed on head cover 220.
When needing to dismantle nozzle 230, during to clear up head cover 220, it is only necessary in the opposite direction (for example, inverse
Clockwise) it auxiliary section 130 will be screwed screws mating groove 221, that is to say, that at this point, nozzle holder 100 and head cover
220 depart from, in removable position.
Therefore, the nozzle holder 100 of the present embodiment structure is provided on nozzle holder 100 and screws auxiliary section 130, accordingly
It is provided on ground head cover 220 and screws mating groove 221 with what this screwed that auxiliary section 130 is adapted, auxiliary section 130 will be screwed and screwed in
When in tight fit slot 221, being fixedly connected for nozzle holder 100 and head cover 220 can be realized.On the contrary, when needs are from head cover 220
When dismantling nozzle holder 100, it is only necessary to auxiliary section 130 will be screwed and screw mating groove 221.Therefore, the spray of the structure
Mouth stent 100 coordinates correspondingly head cover 220, can realize the fast assembling-disassembling of nozzle holder 100 and head cover 220, and then can be real
The fast assembling-disassembling of existing nozzle 230 and head cover 220, and during dismounting, can effectively protect head cover 220 and nozzle holder
100, phenomena such as avoiding the occurrence of damage, occurs, and increases economic efficiency.
It should be noted that do not make rising limit for the specific quantity for screwing auxiliary section 130 in nozzle holder 100
It is fixed, in specific application, for example, with reference to fixing intensity, it can dismantle that situations such as whether facilitating is integrated according to actual needs
Consider, determine the required quantity for actually screwing auxiliary section 130.In addition, do not have for the concrete structure for screwing auxiliary section 130 yet
It defines, still, this screws auxiliary section 130, should be adapted with screwing mating groove 221.
Preferably, as shown in Figure 3 and Figure 4, in order to further such that nozzle holder 100 convenient for being dismounted with head cover 220, it is above-mentioned
It is symmetrical arranged on body 110 there are two auxiliary section 130 is screwed, correspondingly, arranged symmetrically on head cover 220 there are two screw mating groove
221。
The nozzle holder 100 of the present embodiment structure is symmetrical arranged there are two auxiliary section 130 is screwed, accordingly along body 110
Ground, with the 100 matched head cover 220 of nozzle holder.In this way, it is screwed in respectively in contrast screwing auxiliary section 130 by two
Answer when screwing mating groove 221, can so that structure is more firm, that is to say, that can cause nozzle holder 100 and head cover
220 connection is more firm.When disassembly is desired, while two are unscrewed screw auxiliary section 130, it can be easily from screwing cooperation
It is screwed out in slot 221, removal efficiency can be improved.Simultaneously, additionally it is possible to further effectively protection head cover 220 and nozzle holder 100,
Phenomena such as avoiding the occurrence of damage occurs, and increases economic efficiency.
It should be noted that it is gone back on nozzle holder 100 except that can be symmetrical arranged there are two in addition to screwing auxiliary section 130
Three or more can be evenly arranged with along the circumferential direction of nozzle holder 100 screw auxiliary section 130 etc..
Preferably, the above-mentioned end for screwing auxiliary section 130 is additionally provided with limiting section 140.Wherein, said nozzle stent 100
During in lock position, which, which can prevent to screw auxiliary section 130 and depart from, screws mating groove 221.
That is, when needing nozzle holder 100 being fixed on head cover 220 with matching, it is necessary to by nozzle
The auxiliary section 130 that screws on stent 100 screws in screwing accordingly in mating groove 221 for head cover 220, and the anglec of rotation is spent in order to prevent
Greatly, cause to screw auxiliary section 130 from screwing in mating groove 221, can be provided in the end for screwing auxiliary section 130 above-mentioned
Limiting section 140, this way it is possible to avoid because rotation angle is excessive or firmly excessive, cause to screw auxiliary section 130 from screwing cooperation
That deviates from slot 221 happens.Therefore, further effectively protection head cover 220 and nozzle holder 100, avoid the occurrence of damage
Phenomena such as occur, increase economic efficiency.
Preferably, as shown in figure 3, in order to further such that nozzle holder 100 convenient for being dismounted with head cover 220, above-mentioned body
110 are in the form of a column, and body 110 includes the first fixed part 111 and the second fixed part being connected with one end of the first fixed part 111
112, the diameter of the first fixed part 111 is more than the diameter of the second fixed part 112, and above-mentioned rotation is provided on the second fixed part 112
Tight fit portion 130, above-mentioned mounting hole 120 run through the first fixed part 111 and the second fixed part 112.
Preferably, in order to further such that nozzle holder 100 convenient for being dismounted with head cover 220, the above-mentioned auxiliary section 130 that screws
The diameter ratio of circumferential length and mounting hole 120 along the second fixed part 112 is 1/2:1~2/3:1.
Preferably, in order to further such that nozzle holder 100 convenient for being dismounted with head cover 220, the above-mentioned auxiliary section 130 that screws
Thickness along the axis direction of mounting hole 120 is 5-8mm.
The second aspect of the utility model, is related to a kind of processing chamber 200, and the concrete structure of the processing chamber 200 can be with
With reference to figure 1 and together with reference to figure 3 and Fig. 4.The processing chamber 200 includes cavity 210, lid is located at the head cover on 210 top of cavity
220th, nozzle 230 and nozzle holder 100, nozzle holder 100 include the nozzle holder 100 recorded above.Nozzle 230 is set
In mounting hole 120, be provided on head cover 220 it is at least one it is above-mentioned screw mating groove 221, nozzle holder 100 is in locking
During position, screw auxiliary section 130 and screw in mating groove 221, so that nozzle 230 is fixed on head cover 220, nozzle holder
100 be in removed position when, screw auxiliary section 130 and screw mating groove 221, so that nozzle 230 departs from head cover 220.
The processing chamber 200 of the present embodiment structure, have the structure of nozzle holder 100 recorded above and with the nozzle
The head cover 220 that stent 100 is adapted, therefore, the nozzle holder 100 of the structure coordinates correspondingly head cover 220, can realize spray
The fast assembling-disassembling of mouth stent 100 and head cover 220, and then can realize the fast assembling-disassembling of nozzle 230 and head cover 220, and dismounting
During, phenomena such as can effectively protecting head cover 220 and nozzle holder 100, avoiding the occurrence of damage, occurs, and improves economic effect
Benefit.
Preferably, as shown in figure 4, in order to further such that nozzle holder 100 convenient for being dismounted with head cover 220, above-mentioned head cover
220 include installing with the first mounting surface (not showing that in figure) that cavity 210 contact and opposite with the first mounting surface second
Face 222 is provided on second mounting surface from the concave groove 223 in the direction of the second mounting surface 222 to the first mounting surface, from groove
223 bottom towards the step surface 224 of the inside of head cover 220 protrusion and from the top of groove 223 to the inside of head cover 220 and
At least one protrusion 225 of the lower part protrusion of head cover 220, has interval, is spaced shape between protrusion 225 and step surface 224
Mating groove 221 is screwed into above-mentioned, when nozzle holder 100 is in lock position, auxiliary section 130 is screwed and is arranged in interval, and
The upper surface for screwing auxiliary section 130 is bonded with the lower surface of protrusion 225, screws lower surface and the step surface of auxiliary section 130
224 fittings, that is to say, that screw auxiliary section 130 and be folded between step surface 224 and protrusion 225.
Preferably, in order to further such that nozzle holder 100 convenient for being dismounted with head cover 220, above-mentioned first mounting surface and the
The distance between two mounting surfaces 222 are 6-12mm.
The third aspect of the utility model is related to a kind of semiconductor processing equipment (not showed that in figure), semiconductor processes
Equipment includes processing chamber 200, and processing chamber 200 includes the processing chamber 200 recorded above.
The semiconductor processing equipment of the present embodiment structure has the structure for the processing chamber 200 recorded above, the process cavity
Room 200 has the structure for the nozzle holder 100 recorded above.Therefore, the nozzle holder 100 of the structure coordinates correspondingly head cover
220, it can realize the fast assembling-disassembling of nozzle holder 100 and head cover 220, and then can realize the quick of nozzle 230 and head cover 220
Dismounting, and during dismounting, phenomena such as can effectively protecting head cover 220 and nozzle holder 100, avoiding the occurrence of damage, is sent out
It is raw, it increases economic efficiency.
It is understood that embodiment of above is merely to illustrate that the principle of the utility model and uses exemplary
Embodiment, however the utility model is not limited thereto.For those skilled in the art, this is not being departed from
In the case of the spirit and essence of utility model, various changes and modifications can be made therein, these variations and modifications are also considered as this reality
With new protection domain.
Claims (10)
1. a kind of nozzle holder, for nozzle to be fixed on head cover, the nozzle holder includes body, is set on the body
There is mounting hole, the mounting hole is used to place the nozzle, which is characterized in that at least one screw is provided on the head cover and is matched somebody with somebody
Slot is closed, the nozzle holder further includes from the body at least one of direction protrusion away from the mounting hole and screws cooperation
Portion, the auxiliary section that screws is corresponding with the mating groove that screws, and the relatively described head cover of the nozzle holder has lock position
And removed position；When the nozzle holder is in the lock position, described screw is screwed described in the screw-in of auxiliary section in mating groove,
When the nozzle holder is in the removed position, described screw screws mating groove described in the back-out of auxiliary section.
2. nozzle holder according to claim 1, which is characterized in that be symmetrical arranged on the body and screwed there are two described
Auxiliary section correspondingly, on the head cover is symmetrical arranged and screws mating groove there are two described.
3. nozzle holder according to claim 1, which is characterized in that the end for screwing auxiliary section is additionally provided with /V
Portion when the nozzle holder is in the lock position, screws to screw described in the disengaging of auxiliary section described in the limiting section prevention and match somebody with somebody
Close slot.
4. nozzle holder according to claim 1, which is characterized in that the body is in the form of a column, and the body includes the
One fixed part and the second fixed part being connected with one end of first fixed part, the diameter of first fixed part is more than described
The diameter of second fixed part, be provided on second fixed part it is described screw auxiliary section, the mounting hole runs through described first
Fixed part and second fixed part.
5. nozzle holder according to claim 4, which is characterized in that it is described screw auxiliary section along second fixed part
Circumferential length and the diameter ratio of the mounting hole be 1/2:1~2/3:1.
6. nozzle holder according to claim 1, which is characterized in that the axis along the mounting hole for screwing auxiliary section
The thickness in line direction is 5-8mm.
7. a kind of processing chamber, the processing chamber includes cavity, lid is located at the head cover, nozzle and nozzle of the cavity top end
Stent, which is characterized in that the nozzle holder includes the nozzle holder described in claim 1 to 6 any one, and the nozzle is set
Put in the mounting hole, be provided on the head cover it is at least one screw mating groove, the nozzle holder is in the locking
During position, described screw is screwed described in the screw-in of auxiliary section in mating groove, so that the nozzle is fixed on the head cover, it is described
When nozzle holder is in the removed position, it is described screw auxiliary section screw out described in screw mating groove so that the nozzle with
The head cover departs from.
8. processing chamber according to claim 7, which is characterized in that the head cover includes contacted with the cavity first
Mounting surface and second mounting surface opposite with first mounting surface are provided on second mounting surface from the described second peace
Fill the concave groove in direction towards first mounting surface, from the bottom of the groove towards the platform of head cover inside protrusion
Terrace and at least one protrusion protruded from the top of the groove to the inside of the head cover and the lower part of the head cover
Portion has interval, mating groove, the nozzle holder is screwed described in the interval formation between the protrusion and the step surface
During in the lock position, the auxiliary section that screws is arranged in the interval, and the upper surface for screwing auxiliary section with
The lower surface fitting of the protrusion, the lower surface for screwing auxiliary section is bonded with the step surface.
9. processing chamber according to claim 8, which is characterized in that first mounting surface and second mounting surface it
Between distance be 6-12mm.
10. a kind of semiconductor processing equipment, the semiconductor processing equipment includes processing chamber, which is characterized in that the technique
Chamber includes the processing chamber described in claim 7 to 9 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721018277.2U CN207398075U (en) | 2017-08-15 | 2017-08-15 | Nozzle holder, processing chamber and semiconductor processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721018277.2U CN207398075U (en) | 2017-08-15 | 2017-08-15 | Nozzle holder, processing chamber and semiconductor processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207398075U true CN207398075U (en) | 2018-05-22 |
Family
ID=62418171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721018277.2U Active CN207398075U (en) | 2017-08-15 | 2017-08-15 | Nozzle holder, processing chamber and semiconductor processing equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN207398075U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111613508A (en) * | 2019-02-25 | 2020-09-01 | 北京北方华创微电子装备有限公司 | Air inlet device and reaction chamber |
| CN112331544A (en) * | 2020-10-30 | 2021-02-05 | 北京北方华创微电子装备有限公司 | Dielectric window assembly for semiconductor device |
| CN116666276A (en) * | 2023-07-28 | 2023-08-29 | 江苏鲁汶仪器股份有限公司 | Nozzle fixing structure and plasma etching system |
-
2017
- 2017-08-15 CN CN201721018277.2U patent/CN207398075U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111613508A (en) * | 2019-02-25 | 2020-09-01 | 北京北方华创微电子装备有限公司 | Air inlet device and reaction chamber |
| CN112331544A (en) * | 2020-10-30 | 2021-02-05 | 北京北方华创微电子装备有限公司 | Dielectric window assembly for semiconductor device |
| CN112331544B (en) * | 2020-10-30 | 2024-05-17 | 北京北方华创微电子装备有限公司 | Dielectric window assembly for semiconductor equipment |
| CN116666276A (en) * | 2023-07-28 | 2023-08-29 | 江苏鲁汶仪器股份有限公司 | Nozzle fixing structure and plasma etching system |
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