CN101135333B - Connecting equipment - Google Patents
Connecting equipment Download PDFInfo
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- CN101135333B CN101135333B CN2006101127113A CN200610112711A CN101135333B CN 101135333 B CN101135333 B CN 101135333B CN 2006101127113 A CN2006101127113 A CN 2006101127113A CN 200610112711 A CN200610112711 A CN 200610112711A CN 101135333 B CN101135333 B CN 101135333B
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Abstract
The connection device is used for connecting window and spray nozzle, which comprises an expansion fastening mechanism fitted between the window and the spray nozzle assembly to make the window and the nozzle assembly have a trend of axial moving relatively. By axial expansion fastening the window and the nozzle assembly are connected. The nozzle assembly is mounted on the window and there is provided with a sealing member on the contact surface of the window and the nozzle assembly to realize good sealing between the window and the nozzle assembly. The invention can realize the connection between the nozzle assembly and the insulation window in inductance coupling plasma device that is not suitable to bolt etc. connection mode. Advantages: good sealing, simple structure and convenient operation.
Description
Technical field
The present invention relates to a kind of mechanical structure connection set, relate in particular to the connection set that in a kind of inductance coupled plasma device nozzle assembly is connected with forms.
Background technique
At present, along with the high speed development of electronic technology, people are more and more higher to the level of integration requirement of intergrated circuit, and the working ability of semiconductor wafer constantly improves in this enterprise that will seek survival the product intergrated circuit.Plasma device is widely used in the manufacturing process of making intergrated circuit (IC) or MEMS device.Wherein inductance coupled plasma device (ICP) is widely used in the technologies such as etching.Under low pressure, reaction gas is under the exciting of radio-frequency power, produce ionization and form plasma, the atom, molecule and the free radicals isoreactivity particle that contain a large amount of electronics, ion, excited state in the plasma, various physics and chemical reaction take place and form volatile resultant in these active reactive groups and the material surface that is etched, thereby the material surface performance is changed.
Semiconductor machining comprises the such deposition processes of chemical vapor deposition (CVD) of metal, dielectric and semi-conducting material, the etching of these layers, polishing of photoresist mask layer or the like.In the situation of etching, plasma etching is generally used for etching metal, dielectric and semi-conducting material.The plasma reactor of parallel plate type typically comprises the air chamber that contains one or more baffle plate, allows etching gas by its upper electrode, silicon wafer is supported on the support of bottom electrode radio-frequency power supply and be used for providing to air chamber the gas jet source of gas.Gas is formed plasma by electrode ionization.Plasma etching is supported in the wafer below the upper electrode.Usually suitable mask is set on wafer, during the plasma etching process, makes gas ionization to form plasma by add lot of energy to the gas that is in lower pressure.By regulating the current potential of wafer, charged sample can be directed to so that vertically collide on the wafer in the plasma, makes that the material of no masked areas is removed on the wafer.
The reaction chamber structure of common inductance coupled plasma device as shown in Figure 1, by electrically insulating material forms 2, chamber wall 3, electrostatic chuck (perhaps mechanical chuck) 7 is formed an enclosed space 9, relief opening 6 is connected with vacuum system (dried pump etc.), space 9 is manufactured vacuum environment, discharge the residual substance of reaction, process gas is by central air induction mouth 4 (or peripheral inlet port 5, perhaps the two combination) enter this space, the coil 1 of forms 2 tops passes to RF energy, by forms 2 couplings, in space 9, form plasma, the wafer on the chuck 78 is carried out etching.
Owing to what play a major role in the etching process is that gas is formed plasma by electrode ionization, so the gas distribution design that enters is even more important.Usually need a nozzle assembly be set at central air induction mouth 4, nozzle assembly is connected with forms 2, and because forms 2 are not suitable for mode such as bolt connects for the material of insulating window (quartz etc.).
At the problems referred to above, a kind of simple and practical connection set need be provided, with being connected of nozzle assembly and forms 2, and realize better seal.
Summary of the invention
In view of above-mentioned existing in prior technology problem, the purpose of this invention is to provide a kind of connection set, realize the connection of the insulating window that the nozzle assembly in the inductance coupled plasma device is connected with modes such as being not suitable for bolt, and can realize better seal, and simple in structure, use easy to operate.
The objective of the invention is to be achieved through the following technical solutions:
A kind of connection set is used to realize the connection of two inter-modules, comprises expansion mechanism, and expansion mechanism is located at two inter-modules, makes two assemblies have the trend of motion to axial, by the mode of axial swelling two assemblies is docked, and realizes connecting.
Described two assemblies comprise first assembly and second assembly, first assembly is provided with mounting hole, second assembly is provided with installation base and compresses boss, and second assembly passes mounting hole laterally by the inboard of first assembly, and the side of installation base contacts with the inner side surface of first assembly; The expansion mechanism two ends contact the outer side surface of first assembly respectively and compress boss, make two assemblies have the trend of motion to axial.
Described expansion mechanism comprises first coupling, second coupling and hold-down mechanism, and first coupling is connected with second coupling is nested, and is placed in outside second assembly;
The outer end of first coupling contacts with the outer side surface of first assembly, the outer end of second coupling with compress boss and contact;
Hold-down mechanism connects the inner of first coupling and second coupling, and makes first coupling and second coupling have the trend of motion to axial.
Described first coupling comprises first stop sleeve, and first stop sleeve the inner is provided with first inner flange, and along being circumferentially with chute; Described second coupling comprises second stop sleeve, and second stop sleeve the inner is provided with second inner flange, and the second stop sleeve outer end is along being circumferentially with one or more claws; Described claw intercalation is gone in the chute, and the first stop sleeve outer end contacts with the outer side surface of first assembly, the outer end of claw with compress boss and contact;
Perhaps,
Described first coupling comprises second stop sleeve, and second stop sleeve the inner is provided with second inner flange, and the second stop sleeve outer end is along being circumferentially with one or more claws; Described second coupling comprises first stop sleeve, and first stop sleeve the inner is provided with first inner flange, and along being circumferentially with chute; Described claw intercalation is gone in the chute, and the outer end of claw contacts with the outer side surface of first assembly, the first stop sleeve outer end with compress boss and contact.
The described first stop sleeve outer end is provided with pivot flange, the outer side surface of pivot flange and first assembly or compress boss and contact;
Perhaps,
Described first inner flange is respectively equipped with one group of corresponding attachment hole with second inner flange, and described attachment hole is unthreaded hole or tapped hole.
Described first coupling or second coupling are integral piece;
Perhaps,
Described first coupling or second coupling are respectively many lobes and form.
Described first coupling or second coupling are made up of two lobes or three lobes, and every lobe is provided with one or more claws or chute.
Described hold-down mechanism comprises the group that is threaded, and connects the inner of first coupling and second coupling; The described group that is threaded is connected first coupling and second coupling by first coupling with the inner flange of second coupling the inner; Pretightening force by the group that is threaded makes first coupling and second coupling have the trend of motion to axial;
The described group that is threaded is bolt connection, is connected first coupling and second coupling by the unthreaded hole on the inner flange of first coupling and second coupling the inner; Make first coupling and second coupling have the trend of motion to axial by bolted pretightening force;
Perhaps,
The described group that is threaded is screw connection, is connected first coupling and second coupling by the unthreaded hole on the inner flange of first coupling and second coupling the inner with tapped hole on another flange; The pretightening force that connects by screw makes first coupling and second coupling have the trend of motion to axial;
Perhaps,
The described group that is threaded is stud connection, and two thread section thread rotary orientations of stud are opposite, and the tapped hole opposite by the thread rotary orientation on the inner flange of first coupling and second coupling the inner connects first coupling and second coupling; The pretightening force that connects by stud makes first coupling and second coupling have the trend of motion to axial.
Described first assembly and second inter-module are provided with Sealing; Described Sealing is located at the side of installation base of second assembly and the inner side surface contacting point of first assembly.
First coupling of described expansion mechanism, second coupling and/or hold-down mechanism are made by metallic material;
Perhaps,
First coupling of described expansion mechanism, second coupling and/or hold-down mechanism are made by nonmetallic material.
As seen from the above technical solution provided by the invention, connection set of the present invention is used to realize being connected of forms and nozzle assembly, described connection set comprises expansion mechanism, expansion mechanism is located between forms and nozzle assembly, make forms and nozzle assembly have the trend of motion to axial, mode by axial swelling is connected forms with nozzle assembly, nozzle assembly is installed on the forms, and is provided with Sealing at the surface of contact of forms and nozzle assembly; Realize the excellent sealing between forms and nozzle assembly.Realize the connection of the insulating window that the nozzle assembly in the inductance coupled plasma device is connected with modes such as being not suitable for bolt, and can realize better seal, and simple in structure, use easy to operate.
Description of drawings
Fig. 1 is the inductance coupled plasma device structural representation of prior art;
Fig. 2 is applied to connect in the inductance coupled plasma device partial structurtes schematic representation of forms and nozzle assembly for described connection set of the present invention;
Fig. 3 looks the sectional structure schematic representation for the master of first coupling in the described connection set of the present invention;
Fig. 4 overlooks the sectional structure schematic representation for first coupling in the described connection set of the present invention;
Fig. 5 looks the sectional structure schematic representation for the master of second coupling in the described connection set of the present invention;
Fig. 6 overlooks the sectional structure schematic representation for second coupling in the described connection set of the present invention.
Embodiment
Its embodiment of a kind of connection set of the present invention is as shown in Figure 2:
Described connection set is used to realize the connection of two inter-modules, be used for connecting two assemblies of inductance coupled plasma device reaction chamber in the present embodiment---forms 2 and nozzle assembly 10, described connection set comprises expansion mechanism, expansion mechanism is located at 10 of forms 2 and nozzle assemblies, make forms 2 and nozzle assembly 10 have the trend of motion to axial, mode by axial swelling is connected forms 2 with nozzle assembly 10, nozzle assembly 10 is installed on the forms 2, and is provided with Sealing 13 at the surface of contact of forms 2 and nozzle assembly 10; Realize the excellent sealing of 10 of forms 2 and nozzle assemblies.
In order to discuss conveniently, first assembly is made as forms 2, the second assemblies and is made as nozzle assembly 10 in the present embodiment.
Concrete structure is provided with mounting hole at forms 2, and the seal request in order satisfy to install reduces working surface simultaneously, is provided with big counterbore below mounting hole, and the attachment face that forms forms 2 is the inner side surface of forms 2 just; Be provided with installation base 13 in the installation position of nozzle assembly 10 and compress boss 14, nozzle assembly 10 passes mounting hole laterally by the inboard of forms 2, the side of installation base 13 is the attachment face of installation base 13 just shown in Fig. 2, and the attachment face of installation base 13 contacts with the attachment face that forms forms 2; Previously described Sealing 13 just is located at this surface of contact, realizes the excellent sealing of 10 of forms 2 and nozzle assemblies.
Described installation base 13 should with nozzle assembly 10 one, help realizing sealing like this; Described compress boss 14 can with nozzle assembly 10 one, easy to process like this, be preferable scheme, certainly the described boss 14 that compresses also can be independent part, as the collar, in needed position, even can only just can realize compressing the function of boss 14 by screw with several screws.
What described expansion mechanism two ends contacted the outer side surface of forms 2 and nozzle assembly 10 respectively compresses boss 14, makes forms 2 and nozzle assembly 10 have the trend of motion to axial.Be specially:
Described expansion mechanism comprises first coupling 11, second coupling 12 and the hold-down mechanism, first coupling 11 and 12 nested connections of second coupling, and be placed in outside the nozzle assembly 10;
As shown in Figure 3 and Figure 4, described first coupling 11 comprises that first stop sleeve, 21, the first stop sleevees, 21 the inners are provided with first inner flange 22, and along being circumferentially with chute 16; First stop sleeve 21 in this example is cylindric, and corresponding first inner flange 22 also is round flange certainly.For location and the installation that realizes nozzle assembly 10 better, just also can be provided with pivot flange 23 in the lower end of first coupling 11 in the outer end of first stop sleeve 21, the outer side surface of pivot flange 23 and forms 2 just above or compress boss 14 and contact;
As Fig. 5 and shown in Figure 6, described second coupling 12 comprises that second stop sleeve, 31, the second stop sleevees, 31 the inners are provided with second inner flange, 32, the second stop sleevees, 31 outer ends along being circumferentially with one or more claws 18; Described claw 18 intercalations are gone in the chute 16, claw 33 with the outer side surface of forms 2 just above or compress boss 14 and contact.
Described first inner flange 22 is provided with one group of first attachment hole, 15, the second inner flanges 32 and is respectively equipped with one group of second corresponding attachment hole 17, and described first attachment hole 15 and second attachment hole 17 are unthreaded hole or tapped hole.Described hold-down mechanism is the group that is threaded, and the concrete form that is threaded that adopts is relevant with the form in the hole of first attachment hole 15 and second attachment hole 17:
First kind of form: first attachment hole 15 and second attachment hole 17 are unthreaded hole; The described group that is threaded connects for bolt, and bolt is connected first coupling 11 and second coupling 12 by first attachment hole 15 with second attachment hole 17; Make first coupling 11 and second coupling 12 have the trend of motion to axial by bolted pretightening force;
Second kind of form: first attachment hole 15 and second attachment hole, 17 one unthreaded holes, another tapped hole; The described group that is threaded connects for screw, and screw is connected first coupling 11 and second coupling 12 by first attachment hole 15 with unthreaded hole screw-in tapped hole in second attachment hole 17; The pretightening force that connects by screw makes first coupling 11 and second coupling 12 have the trend of motion to axial;
The third form: first attachment hole 15 and second attachment hole 17 are tapped hole, and rotation direction is opposite; The described group that is threaded connects for stud, and two thread section thread rotary orientations of stud are opposite, screw in first attachment hole 15 and are connected first coupling 11 and second coupling 12 with the tapped hole of second attachment hole 17; The pretightening force that connects by stud makes first coupling 11 and second coupling 12 have the trend of motion to axial.
Present embodiment it is also to be noted that in application, installs for convenience and is connected, and the cross section of the upper end of nozzle assembly 10 is less than the cross section of lower end, and passing from the below of forms 2 that mounting hole installs is preferred implementation.
For the sealing after better realization connects, the axis of first coupling 11 and second coupling 12 should be perpendicular to inside and outside (upper and lower) surface of contact and the surface of contact that compresses boss 14 of forms 2 simultaneously.
The above; only for the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (13)
1. a connection set is used to realize the connection of two inter-modules, it is characterized in that, comprise expansion mechanism, expansion mechanism is located at two inter-modules, makes two assemblies have the trend of motion to axial, mode by axial swelling is docked two assemblies, realizes connecting;
Described two assemblies comprise first assembly and second assembly, first assembly is provided with mounting hole, second assembly is provided with installation base and compresses boss, and second assembly passes mounting hole laterally by the inboard of first assembly, and the side of installation base contacts with the inner side surface of first assembly; The expansion mechanism two ends contact the outer side surface of first assembly respectively and compress boss, make two assemblies have the trend of motion to axial;
Described expansion mechanism comprises first coupling, second coupling and hold-down mechanism, and first coupling is connected with second coupling is nested, is placed in jointly afterwards outside second assembly;
The outer end of first coupling contacts with the outer side surface of first assembly, the outer end of second coupling with compress boss and contact;
Hold-down mechanism connects the inner of first coupling and second coupling, and makes first coupling and second coupling have the trend of motion to axial.
2. connection set according to claim 1 is characterized in that:
Described first coupling comprises first stop sleeve, and first stop sleeve the inner is provided with first inner flange, and described first inner flange is along being circumferentially with chute; Described second coupling comprises second stop sleeve, and second stop sleeve the inner is provided with second inner flange, and the second stop sleeve outer end is along being circumferentially with one or more claws; Described claw intercalation is gone in the described chute, and the first stop sleeve outer end contacts with the outer side surface of first assembly, the outer end of claw with compress boss and contact.
3. connection set according to claim 1 is characterized in that:
Described first coupling comprises second stop sleeve, and second stop sleeve the inner is provided with second inner flange, and the second stop sleeve outer end is along being circumferentially with one or more claws; Described second coupling comprises first stop sleeve, and first stop sleeve the inner is provided with first inner flange, and described first inner flange is along being circumferentially with chute; Described claw intercalation is gone in the described chute, and the outer end of claw contacts with the outer side surface of first assembly, the first stop sleeve outer end with compress boss and contact.
4. connection set according to claim 2 is characterized in that:
The described first stop sleeve outer end is provided with pivot flange, and pivot flange contacts with the outer side surface of first assembly.
5. connection set according to claim 3 is characterized in that:
The described first stop sleeve outer end is provided with pivot flange, pivot flange with compress boss and contact.
6. according to claim 2 or 3 described connection sets, it is characterized in that:
Described first inner flange is respectively equipped with one group of corresponding attachment hole with second inner flange, and described attachment hole is unthreaded hole or tapped hole.
7. according to claim 2 or 3 described connection sets, it is characterized in that:
Described first coupling or second coupling are integral piece; Perhaps, described first coupling or second coupling are respectively many lobes compositions.
8. connection set according to claim 7 is characterized in that:
Described first coupling or second coupling are made up of two lobes or three lobes, and every lobe is provided with one or more claws or chute.
9. according to claim 2 or 3 described connection sets, it is characterized in that:
Described hold-down mechanism comprises the group that is threaded, and connects the inner of first coupling and second coupling; The described group that is threaded is connected first coupling and second coupling by first coupling with the inner flange of second coupling the inner; Pretightening force by the group that is threaded makes first coupling and second coupling have the trend of motion to axial;
The described group that is threaded is bolt connection, is connected first coupling and second coupling by the unthreaded hole on the inner flange of first coupling and second coupling the inner; Make first coupling and second coupling have the trend of motion to axial by bolted pretightening force.
10. according to claim 2 or 3 described connection sets, it is characterized in that:
Described hold-down mechanism comprises the group that is threaded, and connects the inner of first coupling and second coupling; The described group that is threaded is connected first coupling and second coupling by first coupling with the inner flange of second coupling the inner; Pretightening force by the group that is threaded makes first coupling and second coupling have the trend of motion to axial;
The described group that is threaded is screw connection, is connected first coupling and second coupling by the unthreaded hole on the inner flange of first coupling and second coupling the inner with tapped hole on another inner flange; The pretightening force that connects by screw makes first coupling and second coupling have the trend of motion to axial.
11., it is characterized in that according to claim 2 or 3 described connection sets:
Described hold-down mechanism comprises the group that is threaded, and connects the inner of first coupling and second coupling; The described group that is threaded is connected first coupling and second coupling by first coupling with the inner flange of second coupling the inner; Pretightening force by the group that is threaded makes first coupling and second coupling have the trend of motion to axial;
The described group that is threaded is stud connection, and two thread section thread rotary orientations of stud are opposite, and the tapped hole opposite by the thread rotary orientation on the inner flange of first coupling and second coupling the inner connects first coupling and second coupling; The pretightening force that connects by stud makes first coupling and second coupling have the trend of motion to axial.
12. connection set according to claim 1 is characterized in that:
Described first assembly and second inter-module are provided with Sealing; Described Sealing is located at the side of installation base of second assembly and the inner side surface contacting point of first assembly.
13. connection set according to claim 1 is characterized in that:
First coupling of described expansion mechanism, second coupling and/or hold-down mechanism are made by metallic material;
Perhaps,
First coupling of described expansion mechanism, second coupling and/or hold-down mechanism are made by nonmetallic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2006101127113A CN101135333B (en) | 2006-08-30 | 2006-08-30 | Connecting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2006101127113A CN101135333B (en) | 2006-08-30 | 2006-08-30 | Connecting equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101135333A CN101135333A (en) | 2008-03-05 |
| CN101135333B true CN101135333B (en) | 2011-01-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006101127113A Active CN101135333B (en) | 2006-08-30 | 2006-08-30 | Connecting equipment |
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| Country | Link |
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| CN (1) | CN101135333B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2306855Y (en) * | 1997-08-22 | 1999-02-10 | 无锡市科兴铸造机械厂 | Spray nozzle of core shooter and shell core moulding machine |
| US5980769A (en) * | 1996-11-18 | 1999-11-09 | Speedfam Co., Ltd. | Plasma etching method |
| US6554205B1 (en) * | 1997-02-26 | 2003-04-29 | Ebara Corporation | Gas polishing method, gas polishing nozzle and polishing apparatus |
| CN2586849Y (en) * | 2002-10-11 | 2003-11-19 | 冯金龙 | Barometric pressure cylinder double relief valve |
-
2006
- 2006-08-30 CN CN2006101127113A patent/CN101135333B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5980769A (en) * | 1996-11-18 | 1999-11-09 | Speedfam Co., Ltd. | Plasma etching method |
| US6554205B1 (en) * | 1997-02-26 | 2003-04-29 | Ebara Corporation | Gas polishing method, gas polishing nozzle and polishing apparatus |
| CN2306855Y (en) * | 1997-08-22 | 1999-02-10 | 无锡市科兴铸造机械厂 | Spray nozzle of core shooter and shell core moulding machine |
| CN2586849Y (en) * | 2002-10-11 | 2003-11-19 | 冯金龙 | Barometric pressure cylinder double relief valve |
Non-Patent Citations (1)
| Title |
|---|
| JP特開平7-161688A 1995.06.23 |
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| CN101135333A (en) | 2008-03-05 |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016, building 2, block M5, No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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