CN207344353U - A kind of Ultra-precision Double Polishing Machine for chip processing - Google Patents
A kind of Ultra-precision Double Polishing Machine for chip processing Download PDFInfo
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- CN207344353U CN207344353U CN201721377287.5U CN201721377287U CN207344353U CN 207344353 U CN207344353 U CN 207344353U CN 201721377287 U CN201721377287 U CN 201721377287U CN 207344353 U CN207344353 U CN 207344353U
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- gear
- driven gear
- driving gear
- adjustable frequency
- frequency motor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model discloses a kind of Ultra-precision Double Polishing Machine for chip processing, the cylinder is installed on the top surface of crossbeam, terminal pad is installed on by bulb bearing on the piston rod of cylinder, upper polishing disk is installed in terminal pad, first driven gear is engaged with the first driving gear, second driving gear is installed on the output shaft of the second adjustable frequency motor, second driven gear is engaged with the second driving gear, centre wheel is installed in interior axle, 3rd driven gear is engaged with the 3rd driving gear, 4th driving gear is installed on the output shaft of the 4th adjustable frequency motor, 4th driven gear is engaged with the 4th driving gear, outer shaft both ends are separately mounted in static pressure support and the support of lower static pressure, workbench is installed on the top surface of lathe bed, lower polishing disk is installed on the top surface of axis.The utility model structure has high kinematic accuracy and stability, accurate can control loading procedure and have controllable workpiece motion s track.
Description
Technical field
The utility model belongs to a kind of polishing machine technical field, and in particular to a kind of ultraprecise for chip processing is two-sided
Polishing machine.
Background technology
While twin polishing processing is that workpiece planet wheels do planetary rotation, upper and lower surface is applied by upper and lower polishing disk
Pressure, the fine a kind of precision machining method for removing surfacing by the scratching effect of minute abrasive in polishing fluid.Tradition
Twp-sided polishing machine due to machine tool structure and the imperfection of control system, make that the wafer flatness of processing is poor, and processing efficiency is low, reach
Less than the machining accuracy and surface quality requirements of photoelectron material chip harshness.
Utility model content
Technical problem to be solved in the utility model is to provide one kind in view of the above shortcomings of the prior art to be used for chip
The Ultra-precision Double Polishing Machine of processing, it accurate can control loading procedure and have controllable with high kinematic accuracy and stability
Workpiece motion s track.
To realize above-mentioned technical purpose, the technical solution that the utility model is taken is：
A kind of Ultra-precision Double Polishing Machine for chip processing, wherein：Including cylinder, bulb bearing, terminal pad, horizontal stroke
Beam, column, upper polishing disk, planetary gear, ring gear, outer shaft, the support of upper static pressure, hydraulic cylinder, the first adjustable frequency motor, the second frequency conversion
Motor, right motor mount, the second driving gear, the first driving gear, the 3rd driven gear, the second driven gear, first
Driven gear, adjustable supports, left motor mount, the 3rd driving gear, interior axle, the 3rd adjustable frequency motor, axis, lower static pressure branch
Support, lathe bed, the 4th adjustable frequency motor, the 4th driven gear, workbench, the 4th driving gear, lower polishing disk, workpiece, centre wheel
And major axis, the cylinder are installed on the top surface of crossbeam, the crossbeam is fixedly mounted on column, and the column is fixed
On the top surface of lathe bed, the terminal pad is installed on by bulb bearing on the piston rod of cylinder, the upper polishing
Disk is installed in terminal pad, and first adjustable frequency motor and the second adjustable frequency motor are fixedly arranged at right motor mount
On, the right motor mount is installed in lathe bed and right motor mount is close to the right flank of lathe bed, the described first master
Moving gear is installed on the output shaft of the first adjustable frequency motor, and first driven gear engages and the with the first driving gear
One driven gear is installed in interior axle, and second driving gear is installed on the output shaft of the second adjustable frequency motor, described
The second driven gear engaged with the second driving gear and the second driven gear be installed on major axis on, the major axis passes through bearing
In lathe bed, the centre wheel is installed in interior axle, and the 3rd adjustable frequency motor and the 4th adjustable frequency motor are all
It is fixedly mounted on left motor mount, the left motor mount is installed in lathe bed and left motor mount is close to lathe bed
Left surface, the 3rd driving gear be installed on the 3rd adjustable frequency motor output shaft on, the 3rd driven gear
Engaged with the 3rd driving gear and the 3rd driven gear is installed on outer shaft, the 4th driving gear is installed on the 4th frequency conversion
On the output shaft of motor, the 4th driven gear is engaged with the 4th driving gear and the 4th driven gear is installed on outer shaft
On, the outer shaft both ends are separately mounted in static pressure support and the support of lower static pressure, upper static pressure support and lower static pressure
Support is all installed in lathe bed, and the ring gear is installed on outer shaft, and the workbench is installed on the top surface of lathe bed, institute
The lower polishing disk stated is installed on the top surface of axis, and the planetary gear is installed on the top surface of lower polishing disk, the workpiece
On the top surface of lower polishing disk and workpiece is between ring gear and planetary gear, and the hydraulic cylinder is installed in lathe bed,
The support of upper static pressure and the support of lower static pressure is all connected by pipeline with hydraulic cylinder.
To optimize above-mentioned technical proposal, the concrete measure taken further includes：
The axis of the axis of above-mentioned upper polishing disk and lower polishing disk is on same straight line.
Above-mentioned terminal pad uses flange plate structure form.
Above-mentioned workbench is made using granite material.
The utility model drags polishing disk, sun gear, ring gear up and down, stepless-adjustment respectively using four adjustable frequency motors
Speed, soft start, soft stop are stopped, and make processing steadily reliable, and impact is small；Using ultraprecise hydrodynamic journal liquid polymers rotary main shaft system and
Shorten driving-chain, improve the kinematic accuracy of lathe；Using bulb bearing floating connection and digital valve control pneumatic servo loading system
The upper dish structure of system, ensures loading uniformly and accurate control loading procedure, the dressing method for improving polishing disk improve machining accuracy；
Using granite work top and the body type structure of closed gantry box-shaped, the rigidity and stability of lathe are improved, improves machine
Bed working environment.
The utility model has the advantage of it is following some：With high kinematic accuracy and stability；There is controllable workpiece fortune
Dynamic rail mark, flexibility start, and stop；Can accurate control loading procedure；With automation Control System of Microcomputer；Realize the super of polishing disk
Precision plane is repaired.
Brief description of the drawings
Fig. 1 is the structure diagram of the utility model.
Reference numeral therein is：Cylinder 1, bulb bearing 2, terminal pad 3, crossbeam 4, column 5, upper polishing disk 6, planetary gear
7th, ring gear 8, outer shaft 9, upper static pressure support 10, hydraulic cylinder 11, the first adjustable frequency motor 12, the second adjustable frequency motor 13, right electricity
Machine mounting base 14, the second driving gear 15, the first driving gear 16, the 3rd driven gear 17, the second driven gear 18, first from
Moving gear 19, adjustable supports 20, left motor mount 21, the 3rd driving gear 22, interior axle 23, the 3rd adjustable frequency motor 24, in
Axis 25, lower static pressure support 26, lathe bed 27, the 4th adjustable frequency motor 28, the 4th driven gear 29, workbench 30, the 4th driving tooth
Wheel 31, lower polishing disk 32, workpiece 33, centre wheel 34, major axis 35.
Embodiment
Specific embodiment of the present utility model is further illustrated below in conjunction with the accompanying drawings：
A kind of Ultra-precision Double Polishing Machine for chip processing, wherein：Including cylinder 1, bulb bearing 2, terminal pad 3,
Crossbeam 4, column 5, upper polishing disk 6, planetary gear 7, ring gear 8, outer shaft 9, upper static pressure support 10, hydraulic cylinder 11, the first variable-frequency electric
Motivation 12, the second adjustable frequency motor 13, right motor mount 14, the second driving gear 15, the first driving gear the 16, the 3rd are driven
Gear 17, the second driven gear 18, the first driven gear 19, adjustable supports 20, left motor mount 21, the 3rd driving gear
22nd, interior axle 23, the 3rd adjustable frequency motor 24, axis 25, lower static pressure support 26, lathe bed 27, the 4th adjustable frequency motor the 28, the 4th from
Moving gear 29, workbench 30, the 4th driving gear 31, lower polishing disk 32, workpiece 33, centre wheel 34 and major axis 35, the gas
Cylinder 1 is installed on the top surface of crossbeam 4, and the crossbeam 4 is fixedly mounted on column 5, and the column 5 is fixedly mounted on lathe bed
On 27 top surface, the terminal pad 3 is installed on by bulb bearing 2 on the piston rod of cylinder 1, and the upper polishing disk 6 is pacified
In terminal pad 3, first adjustable frequency motor 12 and the second adjustable frequency motor 13 are fixedly arranged at right motor installation
On seat 14, the right motor mount 14 be installed in lathe bed 27 and right motor mount 14 close to lathe bed 27 right flank,
First driving gear 16 is installed on the output shaft of the first adjustable frequency motor 12, first driven gear 19 and the
One driving gear 16 engages and the first driven gear 19 is installed in interior axle 23, and second driving gear 15 is installed on second
On the output shaft of adjustable frequency motor 13, second driven gear 18 is engaged with the second driving gear 15 and the second driven gear
18 are installed on major axis 35, and the major axis 35 is installed in lathe bed 27 by bearing, and the centre wheel 34 is installed on interior axle
On 23, the 3rd adjustable frequency motor 24 and the 4th adjustable frequency motor 28 are fixedly arranged on left motor mount 21, institute
The left motor mount 21 stated be installed in lathe bed 27 and left motor mount 21 close to lathe bed 27 left surface, the described the 3rd
Driving gear 22 is installed on the output shaft of the 3rd adjustable frequency motor 24, the 3rd driven gear 17 and the 3rd driving gear
22 engagement and the 3rd driven gear 17 be installed on outer shaft 9 on, the 4th driving gear 31 is installed on the 4th adjustable frequency motor
On 28 output shaft, the 4th driven gear 29 is engaged with the 4th driving gear 31 and the 4th driven gear 29 is installed in outer
On axis 9,9 both ends of outer shaft are separately mounted in static pressure support 10 and lower static pressure support 26, upper static pressure support
10 and lower static pressure support 26 all be installed on lathe bed 27 in, the ring gear 8 be installed on outer shaft 9 on, the workbench 30 is pacified
On the top surface of lathe bed 27, the lower polishing disk 32 is installed on the top surface of axis 25, and the planetary gear 7 is installed on down
On the top surface of polishing disk 32, the workpiece 33 is installed on the top surface of lower polishing disk 32 and workpiece 33 is located at ring gear 8 and row
Between star-wheel 7, the hydraulic cylinder 11 is installed in lathe bed 27, and upper static pressure support 10 and lower static pressure support 26 all pass through
Pipeline is connected with hydraulic cylinder 11.
In embodiment, the axis of the axis of upper polishing disk 6 and lower polishing disk 32 is on same straight line.
In embodiment, terminal pad 3 uses flange plate structure form.
In embodiment, workbench 30 is made using granite material.
It the above is only the preferred embodiment of the utility model, the scope of protection of the utility model is not limited merely to above-mentioned
Embodiment, all technical solutions belonged under the utility model thinking belong to the scope of protection of the utility model.It should be pointed out that pair
For those skilled in the art, some improvements and modifications under the premise of the utility model principle is not departed from,
It should be regarded as the scope of protection of the utility model.
Claims (4)
- A kind of 1. Ultra-precision Double Polishing Machine for chip processing, it is characterised in that：Including cylinder (1), bulb bearing (2), Terminal pad (3), crossbeam (4), column (5), upper polishing disk (6), planetary gear (7), ring gear (8), outer shaft (9), the support of upper static pressure (10), hydraulic cylinder (11), the first adjustable frequency motor (12), the second adjustable frequency motor (13), right motor mount (14), the second master Moving gear (15), the first driving gear (16), the 3rd driven gear (17), the second driven gear (18), the first driven gear (19), adjustable supports (20), left motor mount (21), the 3rd driving gear (22), interior axle (23), the 3rd adjustable frequency motor (24), axis (25), lower static pressure support (26), lathe bed (27), the 4th adjustable frequency motor (28), the 4th driven gear (29), work Make platform (30), the 4th driving gear (31), lower polishing disk (32), workpiece (33), centre wheel (34) and major axis (35), the gas Cylinder (1) is installed on the top surface of crossbeam (4), and the crossbeam (4) is fixedly mounted on column (5), and the column (5) is fixed On the top surface of lathe bed (27), the terminal pad (3) is installed on by bulb bearing (2) on the piston rod of cylinder (1), The upper polishing disk (6) is installed in terminal pad (3), first adjustable frequency motor (12) and the second adjustable frequency motor (13) it is fixedly arranged on right motor mount (14), the right motor mount (14) is installed in lathe bed (27) and right The right flank of the close lathe bed (27) of motor mount (14), first driving gear (16) are installed on the first adjustable frequency motor (12) on output shaft, first driven gear (19) is engaged with the first driving gear (16) and the first driven gear (19) In interior axle (23), second driving gear (15) is installed on the output shaft of the second adjustable frequency motor (13), institute The second driven gear (18) stated is engaged with the second driving gear (15) and the second driven gear (18) is installed on major axis (35), The major axis (35) is installed in lathe bed (27) by bearing, and the centre wheel (34) is installed in interior axle (23), described The 3rd adjustable frequency motor (24) and the 4th adjustable frequency motor (28) be fixedly arranged on left motor mount (21), it is described Left motor mount (21) be installed in lathe bed (27) and left motor mount (21) close to lathe bed (27) left surface, it is described 3rd driving gear (22) is installed on the output shaft of the 3rd adjustable frequency motor (24), the 3rd driven gear (17) and the Three driving gears (22) engage and the 3rd driven gear (17) is installed on outer shaft (9), the 4th driving gear (31) peace On the output shaft of the 4th adjustable frequency motor (28), the 4th driven gear (29) is engaged with the 4th driving gear (31) And the 4th driven gear (29) be installed on outer shaft (9) on, the outer shaft (9) both ends be separately mounted to static pressure support (10) and On lower static pressure support (26), upper static pressure support (10) and lower static pressure support (26) are all installed in lathe bed (27), described Ring gear (8) be installed on outer shaft (9) on, the workbench (30) be installed on lathe bed (27) top surface on, the lower throwing CD (32) is installed on the top surface of axis (25), and the planetary gear (7) is installed on the top surface of lower polishing disk (32), described Workpiece (33) be installed on lower polishing disk (32) top surface on and workpiece (33) be located between ring gear (8) and planetary gear (7), institute The hydraulic cylinder (11) stated is installed in lathe bed (27), and upper static pressure support (10) and lower static pressure support (26) all pass through pipeline It is connected with hydraulic cylinder (11).
- A kind of 2. Ultra-precision Double Polishing Machine for chip processing according to claim 1, it is characterised in that：Described The axis of upper polishing disk (6) and the axis of lower polishing disk (32) are on same straight line.
- A kind of 3. Ultra-precision Double Polishing Machine for chip processing according to claim 1, it is characterised in that：Described Terminal pad (3) uses flange plate structure form.
- A kind of 4. Ultra-precision Double Polishing Machine for chip processing according to claim 1, it is characterised in that：Described Workbench (30) is made using granite material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721377287.5U CN207344353U (en) | 2017-10-24 | 2017-10-24 | A kind of Ultra-precision Double Polishing Machine for chip processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721377287.5U CN207344353U (en) | 2017-10-24 | 2017-10-24 | A kind of Ultra-precision Double Polishing Machine for chip processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207344353U true CN207344353U (en) | 2018-05-11 |
Family
ID=62355651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721377287.5U Active CN207344353U (en) | 2017-10-24 | 2017-10-24 | A kind of Ultra-precision Double Polishing Machine for chip processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207344353U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109079618A (en) * | 2018-09-19 | 2018-12-25 | 广州市镭迪机电制造技术有限公司 | It is a kind of for polishing the polishing machine and application method of step cutting pattern mirror surface |
| CN111805400A (en) * | 2020-07-17 | 2020-10-23 | 中国科学院微电子研究所 | Polishing device |
| CN115194590A (en) * | 2022-09-15 | 2022-10-18 | 浙江恒基永昕新材料股份有限公司 | Burr cleaning equipment at edge of flat automobile part |
-
2017
- 2017-10-24 CN CN201721377287.5U patent/CN207344353U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109079618A (en) * | 2018-09-19 | 2018-12-25 | 广州市镭迪机电制造技术有限公司 | It is a kind of for polishing the polishing machine and application method of step cutting pattern mirror surface |
| CN111805400A (en) * | 2020-07-17 | 2020-10-23 | 中国科学院微电子研究所 | Polishing device |
| CN115194590A (en) * | 2022-09-15 | 2022-10-18 | 浙江恒基永昕新材料股份有限公司 | Burr cleaning equipment at edge of flat automobile part |
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