CN207300918U - A kind of chip fixing structure in situ of example of transmission electron microscope bar - Google Patents
A kind of chip fixing structure in situ of example of transmission electron microscope bar Download PDFInfo
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- CN207300918U CN207300918U CN201720941633.1U CN201720941633U CN207300918U CN 207300918 U CN207300918 U CN 207300918U CN 201720941633 U CN201720941633 U CN 201720941633U CN 207300918 U CN207300918 U CN 207300918U
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Abstract
The utility model discloses a kind of chip fixing structure in situ of example of transmission electron microscope bar, including hold handle, specimen holder main body, sample club head and vacuum electrical connectors.The front portion of sample club head is formed with the fixing groove of installation chip in situ, and is equipped with the front end of fixing groove and is used for the non magnetic tabletting of fixed chip in situ.Mounting groove is formed with the middle part of sample club head, the conductive pin mounting base that can be rotated is equipped with mounting groove, conductive pin mounting base is equipped with the nonmagnetic conductive pin being connected with vacuum electrical connectors, and the end of nonmagnetic conductive pin is connected with the electrode contact on chip in situ.The tail end of sample club head passes through screw thread and specimen holder main body detachable connection, only need to change various sizes of sample club head when using different types of chip in situ, without replacing whole specimen holder, the time cost and financial cost of experiment are so greatly improved.
Description
Technical field
The utility model belongs to transmission electron microscope in-situ testing technique field, and in particular to a kind of transmission electron microscopy
The chip fixing structure in situ of mirror specimen holder.
Background technology
Transmission electron microscope is the internal microstructure that object is shown using the ultrashort wavelength of electron waves, Neng Gou
On atomic scale to the pattern of material, structure, composition and electronic state study, modern transmission electron microscope have become across
A kind of extremely important research tool in each field of physicism.Significant components of the specimen holder as transmission electron microscope
One of, on the one hand play a part of carrying sample, still further aspect can be saturating in realizations such as sample power incorporated above, electricity, heat, light
Penetrate the in-situ observation of sample.Transmission electron microscope in-situ test is realized in electron microscope to target material certain outer
The specific physics that is occurred under the conditions of boundary, the Real Time Observation of chemical property,
And an important branch is electricity in situ, the original position that transmission sample is realized by means of chip in situ in in-situ test
The experiment in situ such as electrochemistry, In Situ Heating.By purchasing the chip of difference in functionality in experiment, connect by the electrode of specimen holder front end
Chip in situ is fixed on specimen holder front end by head, and at the same time the other end of electrode passes through sample rod rear end vacuum by conducting wire
Electrical connectors are connected with extraneous power supply.
Since the size of specimen holder front end is very small, between the size (about 0.5mm) and electrode of commercial chip electrode
Distance (about 0.2mm) it is also very small, these all considerably increase the fixation difficulty of chip in situ.On the one hand we need by
Chip, which securely fixes to prevent from coming off, falls into the pole shoe of transmission electron microscope, still further aspect we also need to by chip electrode with it is extraneous
Good conducting, and avoid the short circuit between electrode.And the difference of the type and size due to chip in situ is, it is necessary at any time
The distance between size and electrode contact of sample club head chip fixed position are adjusted, use is very inconvenient.
Utility model content
The utility model causes the chip in situ to be difficult primarily directed to electrode volume in chip in situ is small and electrode spacing is small
Fixed problem, and be also required to replace whole example of transmission electron microscope bar during the chip of replacement original position, cause use not side
Just the problem of, use cost is high, and a kind of chip fixing structure in situ of example of transmission electron microscope bar is provided, it can facilitate
Chip in situ is fixedly mounted in ground, while sample club head dismounting and change, use can need not replace whole transmitted electron and show at any time
Micro mirror specimen holder.
Technical solution is used by the utility model solves above-mentioned technical problem：A kind of example of transmission electron microscope bar
Chip fixing structure in situ, including hold handle, specimen holder main body, sample club head and vacuum electrical connectors.Sample club head
Front portion be formed with the fixing groove of installation chip in situ, and be equipped with the front end of fixing groove and be used for the non magnetic of fixed chip in situ
Tabletting.Mounting groove is formed with the middle part of sample club head, the conductive pin mounting base that can be rotated, conductive pin mounting base are equipped with mounting groove
It is equipped with the nonmagnetic conductive pin being connected with vacuum electrical connectors, the end of nonmagnetic conductive pin and the electrode on chip in situ
Contact is connected.The tail end of sample club head passes through screw thread and specimen holder main body detachable connection.
To optimize above-mentioned technical proposal, the utility model further includes following improved technical solution.
Above-mentioned sample club head is connected by screw with specimen holder main body, is equipped with the front end sleeve of specimen holder main body
The thread ending cover of protective effect.
Specimen holder main body and the material of sample club head are titanium alloy or aluminium alloy.
Above-mentioned conductive pin mounting base includes the rotating base being rotatably arranged in mounting groove and rotation head cover.It is non magnetic to lead
Acusector is arranged on rotation head cover, and non magnetic spring is equipped between rotation head cover and rotating base.
The material of above-mentioned non magnetic spring is brass.Pilot hole on one end and rotating base of non magnetic spring matches
Close, the other end is engaged with the pilot hole on press section.
Above-mentioned rotating base is formed with two lug mounting portions.Rotation head cover is formed with the connection being rotatably assorted with rotation axis
Portion, the mounting portion in the front end of connecting portion for installation nonmagnetic conductive pin, is press section in the rear end of connecting portion.Connecting portion in
Between two lug mounting portions, the rotation axis of two lug mounting portions and connecting portion is provided through in mounting groove.
The material of above-mentioned rotating base and rotation head cover is polyethylene, and the material of rotation axis is beryllium copper.
Above-mentioned nonmagnetic conductive pin include be fixed in mounting portion needle tubing, be slidably arranged in needle tubing needle point, with
And it is arranged on the adjustable spring being connected in needle tubing and with needle point.
The inside of above-mentioned mounting portion is formed with mounting hole, and needle tubing is fixed in mounting hole by epoxide-resin glue.Needle tubing and pin
The material of point is hard beryllium copper.The end of needle point is gold-plated round end.The material of adjustable spring is brass.
The limiting plate of limitation rotation head cover rotational angle is equipped with above-mentioned mounting groove.The both ends of limiting plate and specimen holder bar
The both sides of head are fixedly connected.
Above-mentioned vacuum electrical connectors are fixedly connected by screw thread with specimen holder main body, and are equipped with vacuum sealing in junction
O-ring.Vacuum electrical connectors connect sample club head by the anaerobic copper enameled wire or flexible PCB of specimen holder body interior
On nonmagnetic conductive pin.
Compared with prior art, the utility model is removably designed using front end sample head, when using different type
Chip in situ when only need to change various sizes of sample club head, it is so very big without replacing whole specimen holder
The time cost and financial cost that improve experiment.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of the utility model embodiment.
Fig. 2 is structure partial enlarged diagram at A in Fig. 1.
Fig. 3 is the assembling decomposition diagram of Fig. 1.
Embodiment
The embodiment of the utility model is described in further detail below in conjunction with attached drawing.
Fig. 1 to Fig. 3 show the structure diagram of the utility model.
Reference numeral therein is：Hold handle 1, specimen holder main body 2, thread ending cover 21, guide finger 22, sealing ring 23, sample
Product club head 3, fixing groove 31, non magnetic tabletting 32, mounting groove 33, limiting plate 34, vacuum electrical connectors 4, chip 5 in situ, lead
Acusector mounting base 6, rotating base 61, lug mounting portion 61a, rotation head cover 62, connecting portion 62a, mounting portion 62b, press section
62c, rotation axis 63, non magnetic spring 64, nonmagnetic conductive pin 7, needle tubing 71, needle point 72.
As shown in Figure 1, a kind of chip fixing structure in situ of example of transmission electron microscope bar of the utility model, including
Hold handle 1, specimen holder main body 2, sample club head 3 and vacuum electrical connectors 4.
As shown in Figures 2 and 3, the fixing groove 31 of installation chip 5 in situ is formed with the front portion of sample club head 3, and solid
The front end for determining groove 31 is equipped with the non magnetic tabletting 32 for being used for fixed chip 5 in situ.
The material of non magnetic tabletting 32 is brass, after chip 5 in situ is placed into fixing groove 31, is led in 31 front end of fixing groove
Cross TITANIUM ALLOY BOLTS and fix non magnetic tabletting 32, while the position of chip 5 in situ is fixed in non magnetic tabletting 32, solves core in situ
It is difficult fixed problem that piece 5 is small, distance too short-range missile causes chip 5 in situ between electrode.
The middle part of sample club head 3 is formed with the mounting groove 33 of hollow out, and the conductive pin installation that can be rotated is equipped with mounting groove 33
Seat 6, conductive pin mounting base 6 are equipped with the nonmagnetic conductive pin 7 being connected with vacuum electrical connectors 4, the end of nonmagnetic conductive pin 7
Portion is connected with the electrode contact on chip 5 in situ.
The tail end of sample club head 3 passes through screw thread and 2 detachable connection of specimen holder main body.It is removable in the utility model
Unloading formula connection includes sample club head 3 and specimen holder main body 2 by the detachable connection of the internal and external threads progress of itself, also wraps
Include and detachable connection is carried out to specimen holder main body 2 and sample club head 3 by screw or other connectors.
In the preferred embodiment of the utility model, specimen holder main body 2 is connected by screw with sample club head 3, sample
The front end sleeve of bar main body 2 is equipped with the thread ending cover 21 to shield.The utility model uses this detachable connection, can be with
Facilitate the replacement of sample club head 3, whole transmitted electron is needed replacing when solving in the prior art using different scale chips
The problem of microscope example bar.
Specimen holder main body 2 and the material of sample club head 3 are titanium alloy or aluminium alloy.The material of thread ending cover 21 is poly- second
Alkene or polytetrafluoroethylene (PTFE), when transmission electron microscope fixes specimen holder, thread ending cover 21 can play buffer protection function.
In addition, original can be used as with good fixation supporting role when sample club head 3 is used to carry chip 5 in situ
The fixed pedestal of position chip 5, realizes that chip 5 in situ and sample above are shifted between different devices.
Guide finger 22, the guide-localization for example of transmission electron microscope bar are equipped with specimen holder main body 2.In sample
Sealing ring 23 is also arranged with bar main body 2, to ensure the vacuum insulating inside and outside transmission electron microscope.
Conductive pin mounting base 6 includes the rotating base 61 being rotatably arranged in mounting groove 33 and rotation head cover 62.It is non magnetic
Conductive pin 7 is arranged on rotation head cover 62, and non magnetic spring 64 is equipped between rotation head cover 62 and rotating base 61.
The material of non magnetic spring 64 is brass, and one end and the pilot hole on rotating base 61 of non magnetic spring 64 match
Close, the other end is engaged with the pilot hole on the 62c of press section.
Rotating base 61 is formed with two lug mounting portion 61a.Rotation head cover 62 is formed with the company being rotatably assorted with rotation axis 63
Socket part 62a, the mounting portion 62b in the front end of connecting portion 62a for installation nonmagnetic conductive pin 7, be in the rear end of connecting portion 62a by
Splenium 62c.Connecting portion 62a is provided through two lug mounting portions between two lug mounting portion 61a in mounting groove 33
The rotation axis 63 of 61a and connecting portion 62a.
Rotating base 61 and rotation head cover 62 can be rotated rotating around rotation axis 63.Since non magnetic spring 64 is positioned at rotation
Between base 61 and rotation head cover 62, moderate elastic force can be applied to rotation head cover 62, can compress nonmagnetic conductive pin 7
Electrode on chip 5 in situ, keeps good electrical contact, and the press section 62c of head cover 62 can be rotated by pressing, and pushes up rotation
Lid 62 rotates, and lifts nonmagnetic conductive pin 7.
The material of rotating base 61 and rotation head cover 62 is polyethylene, and the material of rotation axis 63 is beryllium copper, both can guarantee that strong
Degree, and will not be magnetized.
The pressure of nonmagnetic conductive pin 7 is excessive in order to prevent, and limitation rotation 62 angle of rotation of head cover is equipped with mounting groove 33
The limiting plate 34 of degree.The both ends of limiting plate 34 are fixedly connected with the both sides of sample club head 3, and limiting plate 34 is located at rotation axis 63
Front.Rotation head cover 62 around rotation axis 63 rotates when, can be limited be subject to limiting plate 34, prevent rotation angle it is too big.
Nonmagnetic conductive pin 7 includes the needle tubing 71 being fixed in mounting portion 62b, the needle point being slidably arranged in needle tubing 71
72 and it is arranged on the adjustable spring being connected in needle tubing 71 and with needle point 72.
Mounting hole is formed with inside the mounting portion 62b of rotation head cover 62, needle tubing 71 is fixed on installation by epoxide-resin glue
In hole.Needle point 72 can be elastic in needle tubing 71, and the end of needle point 72 is gold-plated round end, improves electric conductivity.Needle tubing 71
Material with needle point 72 is hard beryllium copper, and the material of adjustable spring is brass.
In the present embodiment, rotate head cover 62 on 7 quantity of nonmagnetic conductive pin be 4, the quantity of nonmagnetic conductive pin 7 and
Spacing is corresponding with the quantity and spacing of 5 top electrode of chip in situ.The quantity of nonmagnetic conductive pin 7 is not limited to 4, its quantity
It can be adjusted according to the needs of chip 5 in situ.
Vacuum electrical connectors 4 are fixedly connected by screw thread with specimen holder main body 2, and O-shaped equipped with vacuum sealing in junction
Circle.Vacuum electrical connectors 4 connect sample club head 3 by the anaerobic copper enameled wire inside specimen holder main body 2 or flexible PCB
On nonmagnetic conductive pin 7.
Disclosed above is only the specific embodiment of utility model, and those of ordinary skill in the art can be from the utility model
All deformations that disclosure is directly exported or associated, are considered as the scope of protection of the utility model.
Claims (9)
1. a kind of chip fixing structure in situ of example of transmission electron microscope bar, including hold handle (1), specimen holder main body (2),
Sample club head (3) and vacuum electrical connectors (4), it is characterized in that：It is in situ that the front portion of the sample club head (3) is formed with installation
The fixing groove (31) of chip (5), and be equipped with the front end of fixing groove (31) and be used for the non magnetic tabletting of fixed in situ chip (5)
(32)；Mounting groove (33) is formed with the middle part of the sample club head (3), the conduction that can be rotated is equipped with the mounting groove (33)
Pin mounting base (6), the conductive pin mounting base (6) are equipped with the nonmagnetic conductive pin being connected with vacuum electrical connectors (4)
(7), the end of the nonmagnetic conductive pin (7) is connected with the electrode contact on chip (5) in situ；The sample club head
(3) tail end passes through screw thread and specimen holder main body (2) detachable connection.
2. a kind of chip fixing structure in situ of example of transmission electron microscope bar according to claim 1, it is characterized in that：
The sample club head (3) is connected by screw with specimen holder main body (2), is equipped with the front end sleeve of specimen holder main body (2)
The thread ending cover (21) to shield.
3. a kind of chip fixing structure in situ of example of transmission electron microscope bar according to claim 2, it is characterized in that：
The conductive pin mounting base (6) includes the rotating base (61) being rotatably arranged in mounting groove (33) and rotation head cover (62)；
The nonmagnetic conductive pin (7) is arranged on the rotation head cover (62), in rotation head cover (62) and rotating base (61)
Between be equipped with non magnetic spring (64).
4. a kind of chip fixing structure in situ of example of transmission electron microscope bar according to claim 3, it is characterized in that：
One end of the non magnetic spring (64) is engaged with the pilot hole on rotating base (61), on the other end and press section (62c)
Pilot hole be engaged.
5. a kind of chip fixing structure in situ of example of transmission electron microscope bar according to claim 3, it is characterized in that：
The rotating base (61) is formed with two lug mounting portions (61a)；The rotation head cover (62) is formed with to be turned with rotation axis (63)
The dynamic connecting portion (62a) coordinated, the mounting portion (62b) in the front end of connecting portion (62a) for installation nonmagnetic conductive pin (7),
The rear end of connecting portion (62a) is press section (62c)；The connecting portion (62a) is located between two lug mounting portions (61a),
The rotation axis (63) of two lug mounting portions (61a) and connecting portion (62a) is provided through in the mounting groove (33).
6. a kind of chip fixing structure in situ of example of transmission electron microscope bar according to claim 5, it is characterized in that：
The nonmagnetic conductive pin (7) include be fixed in mounting portion (62b) needle tubing (71), be slidably arranged in needle tubing (71)
Needle point (72) and it is arranged on the adjustable spring being connected in needle tubing (71) and with needle point (72).
7. a kind of chip fixing structure in situ of example of transmission electron microscope bar according to claim 6, it is characterized in that：
The inside of the mounting portion (62b) is formed with mounting hole, and the needle tubing (71) is fixed on the installation by epoxide-resin glue
In hole.
8. a kind of chip fixing structure in situ of example of transmission electron microscope bar according to claim 3, it is characterized in that：
The limiting plate (34) of limitation rotation head cover (62) rotational angle is equipped with the mounting groove (33)；The two of the limiting plate (34)
End is fixedly connected with the both sides of sample club head (3).
9. a kind of chip fixing structure in situ of example of transmission electron microscope bar according to claim 1, it is characterized in that：
The vacuum electrical connectors (4) are fixedly connected by screw thread with specimen holder main body (2), and are equipped with vacuum sealing O in junction
Type circle；The vacuum electrical connectors (4) connect sample by the internal anaerobic copper enameled wire of specimen holder main body (2) or flexible PCB
Nonmagnetic conductive pin (7) on product club head (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720941633.1U CN207300918U (en) | 2017-07-31 | 2017-07-31 | A kind of chip fixing structure in situ of example of transmission electron microscope bar |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720941633.1U CN207300918U (en) | 2017-07-31 | 2017-07-31 | A kind of chip fixing structure in situ of example of transmission electron microscope bar |
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| CN207300918U true CN207300918U (en) | 2018-05-01 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107315020A (en) * | 2017-07-31 | 2017-11-03 | 中国科学院宁波材料技术与工程研究所 | A kind of chip fixing structure in situ of example of transmission electron microscope bar |
| CN109856168A (en) * | 2019-02-02 | 2019-06-07 | 安徽泽攸科技有限公司 | One kind being used for electron microscope double shaft tilting original position specimen holder |
| CN110161063A (en) * | 2019-05-31 | 2019-08-23 | 南京大学 | A kind of scanning transmission electron beam-induced amperometry system and method |
| CN110346390A (en) * | 2019-06-26 | 2019-10-18 | 北京科技大学 | The device and method of high flux film preparation and Characterization for Microstructure in situ |
-
2017
- 2017-07-31 CN CN201720941633.1U patent/CN207300918U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107315020A (en) * | 2017-07-31 | 2017-11-03 | 中国科学院宁波材料技术与工程研究所 | A kind of chip fixing structure in situ of example of transmission electron microscope bar |
| CN107315020B (en) * | 2017-07-31 | 2023-08-04 | 中国科学院宁波材料技术与工程研究所 | In-situ chip fixing structure of transmission electron microscope sample rod |
| CN109856168A (en) * | 2019-02-02 | 2019-06-07 | 安徽泽攸科技有限公司 | One kind being used for electron microscope double shaft tilting original position specimen holder |
| CN110161063A (en) * | 2019-05-31 | 2019-08-23 | 南京大学 | A kind of scanning transmission electron beam-induced amperometry system and method |
| CN110161063B (en) * | 2019-05-31 | 2020-06-30 | 南京大学 | Scanning transmission electron beam induced current analysis system and method |
| CN110346390A (en) * | 2019-06-26 | 2019-10-18 | 北京科技大学 | The device and method of high flux film preparation and Characterization for Microstructure in situ |
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