CN207267402U - Marking device - Google Patents

Abstract

The utility model is suitable for marking equipment technical field, provide a kind of marking device, the marking device is installed on sorting machine, the sorting machine includes workbench, for the marking device to semiconductor devices mark and is installed on workbench and for picking up and transferring semiconductor devices with the rotating-table apparatus of transport semiconductor device, marking device includes mark stent, is fixedly installed on the motor of mark stent, rotating satellite turntable is driven by motor and is installed on workbench and for the mark device to semiconductor devices mark.Mark device has been installed on workbench by sorting machine provided by the utility model, is conducive to the debugging of marking device, and can reduce the size of satellite turntable, improves complete machine speed, and then improve production efficiency.

Description

Marking device

Technical field

The utility model belongs to marking equipment technical field, more particularly to a kind of marking device.

Background technology

Need to test it after the completion of semiconductor devices manufacture, mark, the operation such as classification, at present, in the market is by dividing Select machine to complete above-mentioned operation, the feed device for feeding specifically, on sorting machine is installed, for transporting semiconductor devices Rotating-table apparatus, after semiconductor devices is by feed device feeding, is picked up by rotating-table apparatus and is transported to next station, realize direction Distinguish, rotation commutation, marking device is entered after test and carries out mark operation, satellite is installed on marking device of the prior art Turntable, is installed with the mark device that can launch laser on satellite turntable, mark device to semiconductor devices launch laser into Row mark.Specifically, semiconductor devices is first placed on marking device by rotating-table apparatus, marking device spinning satellite turntable, will Mark device alignment of semiconductor devices carries out mark, and mark completion and then spinning satellite turntable remove mark device, turntable Device again takes the good semiconductor devices of mark away, carries out next step.

This structure that mark device is installed on satellite turntable causes the installation of marking device to become very narrow, after Phase safeguards that debugging is extremely difficult.Meanwhile it is very big also to force satellite turntable to design, and increases the inertia of satellite turntable, reduces Complete machine speed, reduces production efficiency.

Utility model content

The purpose of this utility model is to provide a kind of marking device, it is intended to which solution in the prior art installs mark device Cause marking device debugging difficult on satellite turntable, and increase the inertia of satellite turntable, reduce complete machine speed and drop The technical problem of low production efficiency.

The utility model is realized in this way a kind of marking device, is installed on sorting machine, the sorting machine includes workbench And it is installed on the workbench and is used to pick up and transfer the semiconductor devices to transport the turntable of the semiconductor devices Device, the marking device include mark stent, motor, satellite turntable and mark device, and the mark stent includes support Base and it is connected with the support base and is fixedly installed the supporting table of the motor, is had in the supporting table and pick and place work Position and mark station, the motor include driving with the motor body of supporting table fixed setting and by the motor body The dynamic motor shaft for rotating and being fixedly connected with the satellite turntable, the satellite turntable include what is be fixedly connected with the motor shaft Basal disc, be arranged on the basal disc and circulate through institute successively for carrying the semiconductor devices and being moved with the basal disc State the first maintaining part for picking and placeing station and the mark station and be arranged on the basal disc and be used to carry the semiconductor Device and the second maintaining part moved with the basal disc, second maintaining part are picking and placeing work described in first maintaining part process Pass through the mark station during position, and station is picked and placeed by described when first maintaining part passes through the mark station, institute Mark device is stated to be installed on the workbench and be used in the semiconductor devices with first maintaining part or described second Mark is carried out to the semiconductor devices when maintaining part passes through the mark station, the rotating-table apparatus is in first maintaining part Or second maintaining part pass through described in the semiconductor devices is picked and placeed when picking and placeing station.

Further, it is equipped with the satellite turntable at first maintaining part from first maintaining part to the branch Support platform extends and keeps suction hole for adsorbing the first of semiconductor devices, is equipped with the satellite turntable at the second maintaining part Extend from second maintaining part to the supporting table and second for adsorbing semiconductor devices keeps suction hole, the support Platform is equipped with the mark station to be connected with external pressure source and for keeping suction hole and described second with described first The first station suction hole of suction hole connection is kept, the supporting bable tops are equipped with and described first to the side of the satellite turntable Station suction hole connects and by two negative pressure trough for picking and placeing station extension of the first station suction hole, and described first Keep suction hole and it is described second holding suction hole by the motor driving rotation to it is described pick and place station when, with the negative pressure Groove connects.

Further, the supporting table in it is described pick and place at station connected equipped with one end with external pressure source and the other end with The second station relieving stagnant Qi hole of the negative pressure trough connection.

Further, the negative pressure trough in its bottom it is protruding upward be provided be surrounded on the second station relieving stagnant Qi hole every Beam, the height every beam protrusion are less than the depth of the negative pressure trough.

Further, the negative pressure trough is in arc-shaped so that described first keeps suction hole and described second to keep suction hole During with the satellite turntable rotation, connected all the time with the negative pressure trough.

Further, the Image detection station for being symmetrically disposed on the motor shaft both sides and spare time are additionally provided with the supporting table Station is put, the marking device further includes the image detector close to the Image detection station side positioned at the supporting table, The Image detection station, the idle station, the distance for picking and placeing station and the mark station and the motor shaft Be equal, the line between the Image detection station and the idle station with it is described pick and place station and the mark station it Between line it is vertical, the satellite turntable, which further includes, to be arranged on the basal disc and for fixing the 3rd of the semiconductor devices Maintaining part and it is arranged on the basal disc and for fixing the 4th maintaining part of the semiconductor devices, the 3rd maintaining part The both sides of the motor shaft, first maintaining part, second maintaining part, institute are symmetrically arranged at the 4th maintaining part State the 3rd maintaining part and the 4th maintaining part and the distance of the motor shaft is equal, first maintaining part and described Line between two maintaining parts is vertical with the line between the 3rd maintaining part and the 4th maintaining part, the satellite turntable On be equipped with the 3rd maintaining part and extend from the 3rd maintaining part to the supporting table and be used to adsorb semiconductor devices The 3rd keep suction hole, be equipped with the 4th maintaining part on the satellite turntable from the 4th maintaining part to the supporting table Extension and the 4th holding suction hole for adsorbing semiconductor devices, the described 3rd keeps suction hole and the described 4th to keep air-breathing Negative pressure trough described in Kong Junyu connects.

Further, the supporting table connects and another at the Image detection station equipped with one end with external pressure source Hold the 3rd station suction hole connected with the negative pressure trough.

Further, the supporting table connected at the idle station equipped with one end with external pressure source and the other end with 4th station suction hole of the negative pressure trough connection.

Further, the supporting table includes being fixedly connected on the support base and is fixedly installed the branch of the motor Support group plate and between the supporting substrate and the satellite turntable and the buffer table that is located on the motor shaft, it is described Negative pressure trough is arranged at the buffer table and is equipped with towards the side of the satellite turntable, the buffer table on the buffer table The pilot hole of lower surface, the supporting table further include one end and are fixed on supporting substrate and the other end insertion pilot hole simultaneously And the lead that can be slided in the pilot hole and one end push the supporting substrate and the other end and push the buffering Platform is so that the satellite turntable is close to the resilient snubber of the buffer table.

Further, the marking device further includes the dust suction part being arranged above the mark station, the dust suction part The first air suction opening extended to the mark station direction and one end and described the are equipped with close to one end of the mark station One air suction opening connects and the other end connects with external pressure source and is used for the second air suction opening of air-breathing, hair described in the mark device The laser gone out arrives at the semiconductor devices with to the semiconductor devices mark through first air suction opening.

The utility model has the technical effect that relative to the prior art：Marking device provided by the utility model is by marker Part has been installed on the workbench of sorting machine, and specifically, the semiconductor devices for needing mark is placed on satellite and turned by rotating-table apparatus On disk, then satellite turntable rotation, is directed at mark device by the semiconductor devices, carries out mark operation, can be with after the completion of mark Continue spinning satellite turntable so that semiconductor devices takes the semiconductor devices away close to rotating-table apparatus, then rotating-table apparatus, carries out The next step.Mark device is not arranged on satellite turntable by the utility model, therefore, is conducive to the tune of marking device Examination, and the size of satellite turntable can be reduced, complete machine speed is improved, and then, improve production efficiency.

Brief description of the drawings

In order to illustrate more clearly of the technical solution of the utility model embodiment, below will to the utility model embodiment or Attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, drawings described below is only Some embodiments of the utility model, for those of ordinary skill in the art, without creative efforts, Other attached drawings can also be obtained according to these attached drawings.

Fig. 1 is the stereogram for the sorting machine that the utility model embodiment provides；

Fig. 2 is the stereogram for the marking device that the utility model embodiment provides；

Fig. 3 is the stereogram for the marking device that the utility model embodiment provides；

Fig. 4 is the sectional view for the marking device that the utility model embodiment provides；

Fig. 5 is the sectional view for the marking device that the utility model embodiment provides；

Fig. 6 is the exploded view for the marking device that the utility model embodiment provides；

Fig. 7 is the stereogram for the buffer table that the utility model embodiment provides；

Fig. 8 is the sectional view for the buffer table that the utility model embodiment provides；

Fig. 9 is the stereogram for the satellite turntable that the utility model embodiment provides；

Figure 10 is the sectional view for the satellite turntable that the utility model embodiment provides.

Embodiment

The embodiment of the utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning Same or similar element is represented to same or similar label eventually or there is same or like element.Below by ginseng The embodiment for examining attached drawing description is exemplary, it is intended to for explaining the utility model, and it is not intended that to the utility model Limitation.

, it is necessary to which explanation, when element, to be referred to as " being fixed on " or " being arranged at " another in the description of the utility model A element, it directly on another element or can be connected on another element.When an element is known as " even It is connected to " another element, it can be directly to another element or be indirectly connected on another element.

It is to be appreciated that term " length ", " width ", " on ", " under ", "front", "rear", "left", "right", " vertical ", The orientation or position relationship of the instruction such as " level ", " top ", " bottom " " interior ", " outer " are to be closed based on orientation shown in the drawings or position System, is for only for ease of and describes the utility model and simplified description, rather than the device or element of instruction or hint meaning are necessary With specific orientation, with specific azimuth configuration and operation, therefore it is not intended that limitation to the utility model.

In addition, term " first ", " second " are only used for description purpose, and it is not intended that instruction or hint relative importance Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can be expressed or Implicitly include one or more this feature.In the description of the utility model, " multiple " are meant that two or two More than, unless otherwise specifically defined.

In the utility model, " connection " can be direct connection or some pipeline parts of midfeather are mutual Connection, can be described as " connecting " as long as having and carrying out gas exchanges, for the ordinary skill in the art, can be according to tool Body situation understands concrete meaning of the above-mentioned term in the utility model.

In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation Example, is further elaborated the utility model.

Fig. 1 to Fig. 2 is referred to, the marking device 300 that the utility model embodiment provides is applied to sorting machine, the sorting machine Including workbench 100 and it is installed on the workbench 100 and for picking up and transfer the semiconductor devices 800 with transport point The rotating-table apparatus 500 of semiconductor devices 800 is stated, the marking device 300 includes mark stent 330, motor 348, satellite turntable 351 and mark device 310, the mark stent 330 include support base 331 and be connected with the support base 331 and The supporting table 332 of the motor 348 is fixedly installed, has in the supporting table 332 and picks and places station 338 and mark station 330, the motor 348 is included with the motor body 349 of the supporting table 332 fixed setting and by the motor body 349 Driving rotation and the motor shaft 350 being fixedly connected with the satellite turntable 351, the satellite turntable 351 include and the motor Basal disc 352 that axis 350 is fixedly connected, be arranged on the basal disc 352 and for carrying the semiconductor devices 800 and with described Basal disc 352 move and circulate through successively first maintaining part 353 for picking and placeing station 338 and the mark station 330 and It is arranged on the basal disc 352 and for carrying the semiconductor devices 800 and with the second maintaining part of the basal disc 352 movement 354, second maintaining part 354 passes through the mark station when picking and placeing station 338 described in first maintaining part 353 process 330, and when first maintaining part 353 is by the mark station 330 station 338, the marker are picked and placeed by described Part 310 is installed on the workbench 100 and is used in the semiconductor devices 800 with first maintaining part 353 or described Second maintaining part 354 to the semiconductor devices 800 during the mark station 330 by carrying out mark, the rotating-table apparatus 500 To the semiconductor devices when picking and placeing station 338 described in passing through in first maintaining part 353 or second maintaining part 354 800 are picked and placeed.

Fig. 1 to Fig. 2 is referred to, mark device 310 has been installed on workbench 100 by marking device provided by the utility model On, specifically, the semiconductor devices 800 for needing mark is placed on satellite turntable 351 by rotating-table apparatus 500, and then satellite turns Disk 351 rotates, which is aligned mark device 310, mark operation is carried out, after the completion of mark, can continue to revolve Turn satellite turntable 351 so that semiconductor devices 800 takes the semiconductor device away close to rotating-table apparatus 500, then rotating-table apparatus 500 Part 800, carries out the next step.Mark device 310 is not arranged on satellite turntable 351 by the utility model, therefore, favorably In the debugging of marking device 300, and the size of satellite turntable 351 can be reduced, improve complete machine speed, and then, improve production Efficiency.

Refer to Fig. 3 to Figure 10, further, on the satellite turntable 351 at first maintaining part 353 be equipped with by First maintaining part 353 extends to the supporting table 332 and first for adsorbing semiconductor devices 800 keeps suction hole 357, it is equipped with the second maintaining part 354 on the satellite turntable 351 from second maintaining part 354 to the supporting table 332 Extension and the second holding suction hole 358 for adsorbing semiconductor devices 800, the supporting table 332 is in the mark station 339 Place, which is equipped with, to be connected with external pressure source and for keeping suction hole 357 and described second to keep suction hole 358 with described first First station suction hole 340 of connection, the supporting table 332 are equipped with and described first towards the side of the satellite turntable 351 Station suction hole 340 connects and by the two lateral negative pressure trough for picking and placeing station 338 and extending of the first station suction hole 340 344, the first holding suction hole 357 and the second holding suction hole 358 drive rotation to be taken to described by the motor 348 When putting station 338, connected with the negative pressure trough 344.

Fig. 3 to Figure 10 is referred to, rotating-table apparatus 500 can treat this from placement semiconductor devices 800 at station 338 is picked and placeed After 800 mark of semiconductor devices, the semiconductor devices 800 is taken at station 338 away from picking and placeing；Specifically, turntable fills first Put 500 semiconductor devices 800 is placed in the first maintaining part 353 picked and placeed at station 338, first keep air-breathing at this time Hole 357 is connected by negative pressure trough 344 with the first station suction hole 340, is protected so as to suck semiconductor devices 800 first Hold in portion 353, and the second maintaining part 354 at this time should be located at mark station 339 and just carry out mark operation, and second protects Hold suction hole 358 just to connect with the first station suction hole 340, so as to which the semiconductor devices 800 of mark process will be in Suck in the second maintaining part 354.Then, rotating-table apparatus 500 places semiconductor devices 800 and marking device 300 After completing mark, motor 348 drives satellite turntable 351 to rotate so that the second maintaining part 354 is rotated to station 338 is picked and placeed, and is turned The good semiconductor subassembly of mark is taken away and places next semiconductor devices 800 by disk device 500, and the first maintaining part 353 rotates Mark operation is carried out to mark station 339, and the first holding 357 and first station suction hole 340 of suction hole is connected to incite somebody to action at this time Semiconductor devices 800 is sucked in the first maintaining part 353.The utility model embodiment is by setting the first station suction hole 340 Semiconductor devices 800 is sucked in the first maintaining part 353 and the second maintaining part 354 with negative pressure trough 344, avoids semiconductor device Part 800 slides during mark operation, so that mark process is more smooth.

Refer to Fig. 4 to Figure 10, further, the supporting table 332 in it is described pick and place be equipped with station 338 one end with it is outer The second station relieving stagnant Qi hole 341 that portion's pneumatic supply connection and the other end are connected with the negative pressure trough 344.Specifically, when first keeps 353 or second maintaining part 354 of portion is rotated to after picking and placeing station 338, when rotating-table apparatus 500 needs to take away semiconductor devices 800, Second station relieving stagnant Qi hole 341 keeps suction hole 358 to blow to positioned at the first holding suction hole 357 or second picked and placeed at station 338 Gas so that the first holding suction hole 357 or second keeps negative pressure in suction hole 358 to switch to positive pressure, reduces to the semiconductor devices 800 suction, so that semiconductor devices 800 is removed.The utility model embodiment is by setting second station to break Stomata 341 carries out vacuum breaker, so that when semiconductor devices 800 needs to be removed, can ensure semiconductor device Part 800 is picked, and position is vacated, and is placed for next semiconductor devices 800, carries out mark operation.

Fig. 4 to Figure 10 is referred to, further, the negative pressure trough 344 is surrounded on institute in protruding upward be provided with its bottom That states second station relieving stagnant Qi hole 341 is less than the depth of the negative pressure trough 344 every beam 345, the height raised every beam 345.Base In this structure, when blowing in second station relieving stagnant Qi hole 341, it can obstruct air-flow every beam 345 and be inhaled along negative pressure trough 344 to the first station 340 direction of stomata is circulated, and is turned so that the semiconductor devices 800 in mark station 339 still can be sucked in satellite On disk 351, effectively avoid in the progress vacuum breaker of second station relieving stagnant Qi hole 341, the semiconductor device in mark station 339 Part 800 drops from satellite turntable 351.

Fig. 4 to Figure 10 is referred to, further, the negative pressure trough 344 is in arc-shaped so that described first keeps suction hole 357 and the second holding suction hole 358 when being rotated with the satellite turntable 351, connected all the time with the negative pressure trough 344.Can To understand ground, for the utility model embodiment during satellite turntable 351 is rotating, first keeps suction hole 357 and second to protect Hold suction hole 358 all the time with negative pressure trough 344 to be connected, so avoid, during satellite turntable 351 is rotating, partly lead Body device 800 drops from satellite turntable 351.

Fig. 4 to Figure 10 is referred to, further, is additionally provided with the supporting table 332 and is symmetrically disposed on the motor shaft 350 The Image detection station 346 and idle station 347 of both sides, the marking device 300 further include close positioned at the supporting table 332 The image detector 320 of 346 side of Image detection station, the Image detection station 346, the idle station 347, institute State and pick and place the distance of station 338 and the mark station 339 and the motor shaft 350 and be equal, the Image detection station Line and the line picked and placeed between station 338 and the mark station 339 between 346 and the idle station 347 hang down Directly, the satellite turntable 351, which further includes, is arranged on the basal disc 352 and for fixing the 3rd of the semiconductor devices 800 Maintaining part 355 and it is arranged on the basal disc 352 and for fixing the 4th maintaining part 356 of the semiconductor devices 800, institute State the 3rd maintaining part 355 and the 4th maintaining part 356 is symmetrically arranged at the both sides of the motor shaft 350, described first protects Hold portion 353, second maintaining part 354, the 3rd maintaining part 355 and the 4th maintaining part 356 and the motor shaft 350 distance is equal, and the line between first maintaining part 353 and second maintaining part 354 is kept with the described 3rd Line between portion 355 and the 4th maintaining part 356 is vertical, on the satellite turntable 351 at the 3rd maintaining part 355 The 3rd holding suction equipped with extending from the 3rd maintaining part 355 to the supporting table 332 and for adsorbing semiconductor devices 800 Stomata 359, is equipped with the 4th maintaining part 356 on the satellite turntable 351 from the 4th maintaining part 356 to the supporting table 332 extensions and suction hole 360 is kept for adsorbing the 4th of semiconductor devices 800 the, the described 3rd keeps suction hole 359 and described 4th holding suction hole 360 is connected with the negative pressure trough 344.

Refer to Fig. 2 to Figure 10, in the present embodiment, the semiconductor device good to mark by adding Image detection station 346 Part 800 carries out Image detection, to confirm whether mark is qualified, is in addition additionally arranged an idle station 347 at the same time, as spare, For example, when needing air exercise to be denoted as industry increase process, operation can be carried out in idle station 347.Specifically, based on above-mentioned knot Structure, satellite turntable 351 should often rotate a quarter circle, just slightly stop, so that each station completes corresponding operation.

Fig. 4 to Figure 10 is referred to, further, the supporting table 332 is equipped with one end at the Image detection station 346 Connected with external pressure source and 3rd station suction hole 342 that the other end is connected with the negative pressure trough 344.The supporting table 332 It is equipped with that one end is connected with external pressure source and the other end is connected with the negative pressure trough 344 the 4th at the idle station 347 Station suction hole 343.Based on this structure, it can make it that the pressure in negative pressure trough 344 is more uniform, and increase each holding To the pretightening force of semiconductor devices 800 when portion is located at Image detection station 346 and idle station 347, further avoid Semiconductor devices 800 drops.

Refer to Fig. 4 to Figure 10, further, the supporting table 332 include be fixedly connected on the support base 331 and Be fixedly installed the motor 348 supporting substrate 333 and positioned at the supporting substrate 333 and the satellite turntable 351 it Between and the buffer table 334 that is located on the motor shaft 350, the negative pressure trough 344 be arranged at the buffer table 334 towards described The side of satellite turntable 351, the buffer table 334 are equipped with the pilot hole 335 through 334 upper and lower surface of buffer table, institute State supporting table 332 and further include one end and be fixed on the supporting substrate 333 and the other end and be inserted into the pilot hole 335 and can be in The lead 336 and one end slided in the pilot hole 335 pushes the supporting substrate 333 and the other end and pushes the buffering Platform 334 is so that the satellite turntable 351 is close to the resilient snubber 337 of the buffer table 334.It is to be appreciated that in motor 348 During driving satellite turntable 351 rotating, buffer table 334 should not rotate, and satellite turntable 351 should be in buffer table Rotation is slided on 334, and the effect of resilient snubber 337 is mainly so that buffer table 334 is close to satellite turntable 351 so that it is negative Indent 344 consistently forms a relatively closed space with satellite turntable 351, in this way, air-breathing effectively could be kept first Hole 357 and second keeps forming negative pressure in suction hole 358, and semiconductor devices 800 is sucked on satellite turntable 351.

Fig. 4 is referred to, further, the marking device 300 further includes the suction for being arranged at the top of mark station 339 Dirt part 361.The dust suction part 361 is equipped with what is extended to 339 direction of mark station close to one end of the mark station 339 First air suction opening 362 and one end are connected with first air suction opening 362 and the other end is connected with external pressure source and for inhaling Second air suction opening 363 of gas, the laser sent described in the mark device 310 arrive at described through first air suction opening 362 Semiconductor devices 800 is with to 800 mark of semiconductor devices.It is to be appreciated that during mark, more powder can be produced Dirt, influences the environment in the quality and workshop of mark, and therefore, the utility model embodiment is by setting dust suction part 361 to carry High mark quality, cleaning shop environment.

The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this All any modification, equivalent and improvement made within the spirit and principle of utility model etc., should be included in the utility model Protection domain within.

Claims (10)

1. a kind of marking device, sorting machine is installed on, the sorting machine includes workbench and be installed on the workbench being used in combination In picking up and decentralization semiconductor devices is to transport the rotating-table apparatus of the semiconductor devices, it is characterised in that the marking device Including mark stent, motor, satellite turntable and mark device, the mark stent include support base and with the support Base connects and is fixedly installed the supporting table of the motor, has in the supporting table and picks and places station and mark station, institute State motor include with the supporting table fixed setting motor body and by the motor body drive rotation and defended with described The motor shaft that star turntable is fixedly connected, basal disc that the satellite turntable includes being fixedly connected with the motor shaft, be arranged at it is described Station and institute are picked and placeed described in being circulated through successively on basal disc and for carrying the semiconductor devices and moving with the basal disc State the first maintaining part of mark station and be arranged on the basal disc and be used to carry the semiconductor devices and with the base Second maintaining part of disk movement, second maintaining part are beaten when picking and placeing station described in first maintaining part process by described Station is marked, and station, the mark device installation are picked and placeed by described when first maintaining part passes through the mark station In the workbench and it is used in the semiconductor devices with described in first maintaining part or second maintaining part process Mark is carried out during mark station to the semiconductor devices, the rotating-table apparatus is kept in first maintaining part or described second The semiconductor devices is picked and placeed when picking and placeing station described in portion's process.

2. marking device as claimed in claim 1, it is characterised in that set on the satellite turntable at first maintaining part Have and extend from first maintaining part to the supporting table and keep suction hole for adsorbing the first of semiconductor devices, it is described to defend It is equipped with and extends from second maintaining part to the supporting table and for adsorbing semiconductor device at the second maintaining part on star turntable The second of part keeps suction hole, and the supporting table is equipped with the mark station to be connected and be used for and institute with external pressure source The first station suction hole that the first holding suction hole is connected with the described second holding suction hole is stated, the supporting bable tops are defended to described The side of star turntable be equipped with connect with the first station suction hole and by the first station suction hole two it is lateral described in take The negative pressure trough of station extension is put, described first keeps suction hole and described second to keep suction hole to be rotated extremely by motor driving It is described when picking and placeing station, connected with the negative pressure trough.

3. marking device as claimed in claim 2, it is characterised in that the supporting table is equipped with one in described pick and place at station The second station relieving stagnant Qi hole that end is connected with external pressure source and the other end is connected with the negative pressure trough.

4. marking device as claimed in claim 3, it is characterised in that the negative pressure trough is provided with ring in its bottom is protruding upward Be around in the second station relieving stagnant Qi hole is less than the depth of the negative pressure trough every beam, the height every beam protrusion.

5. marking device as claimed in claim 2, it is characterised in that the negative pressure trough is in arc-shaped so that described first keeps When suction hole and the second holding suction hole are with the satellite turntable rotation, connected all the time with the negative pressure trough.

6. marking device as claimed in claim 2, it is characterised in that be additionally provided with the supporting table and be symmetrically disposed on the electricity The Image detection station and idle station of arbor both sides, the marking device are further included positioned at the supporting table close to the image The image detector of detection station side, the Image detection station, the idle station, described pick and place station and described beat Mark station and the motor shaft distance be equal, the line between the Image detection station and the idle station with it is described The line picked and placeed between station and the mark station is vertical, and the satellite turntable, which further includes, to be arranged on the basal disc and be used for Fix the 3rd maintaining part of the semiconductor devices and be arranged on the basal disc and be used to fix the semiconductor devices 4th maintaining part, the 3rd maintaining part and the 4th maintaining part are symmetrically arranged at the both sides of the motor shaft, and described One maintaining part, second maintaining part, the 3rd maintaining part and the 4th maintaining part and the distance of the motor shaft are equal It is equal, line and the 3rd maintaining part and the 4th maintaining part between first maintaining part and second maintaining part Between line it is vertical, be equipped with the satellite turntable at the 3rd maintaining part from the 3rd maintaining part to the support Platform extends and for adsorbing semiconductor devices the 3rd keeps suction hole, be equipped with the 4th maintaining part on the satellite turntable by 4th maintaining part extends to the supporting table and keeps suction hole for adsorbing the 4th of semiconductor devices the, and the described 3rd protects Hold suction hole and the 4th holding suction hole is connected with the negative pressure trough.

7. marking device as claimed in claim 6, it is characterised in that the supporting table is equipped with the Image detection station The 3rd station suction hole that one end is connected with external pressure source and the other end is connected with the negative pressure trough.

8. marking device as claimed in claim 6, it is characterised in that the supporting table is equipped with one end at the idle station Connected with external pressure source and the 4th station suction hole that the other end is connected with the negative pressure trough.

9. marking device as claimed in claim 2, it is characterised in that the supporting table includes being fixedly connected on the support bottom Seat and it is fixedly installed the supporting substrate of the motor and between the supporting substrate and the satellite turntable and ring set Buffer table on the motor shaft, the negative pressure trough is arranged at the buffer table towards the side of the satellite turntable, described Buffer table is equipped with the pilot hole through the buffer table upper and lower surface, and the supporting table further includes one end and is fixed on the support Substrate and the other end insertion pilot hole and the lead that can be slided in the pilot hole and one end push described Supporting substrate and the other end push the buffer table so that the satellite turntable is close to the resilient snubber of the buffer table.

10. marking device as claimed in claim 2, it is characterised in that the marking device, which further includes, is arranged at the mark Dust suction part above station, the dust suction part are equipped with what is extended to the mark station direction close to one end of the mark station First air suction opening and one end are connected with first air suction opening and the other end is connected with external pressure source and for the of air-breathing Two air suction openings, the laser that the mark device is sent arrive at the semiconductor devices with to described through first air suction opening Semiconductor devices mark.