CN208000898U - Silicon chip transport system - Google Patents
Silicon chip transport system Download PDFInfo
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- CN208000898U CN208000898U CN201721924664.2U CN201721924664U CN208000898U CN 208000898 U CN208000898 U CN 208000898U CN 201721924664 U CN201721924664 U CN 201721924664U CN 208000898 U CN208000898 U CN 208000898U
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- silicon chip
- gaily decorated
- decorated basket
- carrier rails
- chip carrier
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Abstract
The utility model discloses a kind of silicon chip transport systems, elevating mechanism including gaily decorated basket charging and discharging mechanism, for fixing the gaily decorated basket and the gaily decorated basket being driven to move up and down and silicon chip carrier rails, silicon chip cache mechanism, six axis robot, Suction cup assembly, the quantity of the silicon chip carrier rails is four, the distance of the pedestal of the six axis robot to two silicon chip carrier rails in outside is equal, and the silicon chip cache mechanism on two silicon chip carrier rails in outside can prolong silicon chip carrier rails direction and be moved forward and backward setting.When needing to deliver the silicon chip on the silicon chip carrier rails of outside, leading screw releases the rewinding box on silicon chip cache mechanism, shortens the distance of rewinding box and six axis robot, and when taking piece to complete, rewinding box playback does not hinder the movement of manipulator.To improve whole working efficiency, reduces equipment and take up an area volume, and the automation campaign that silicon slice loading enters graphite boat may be implemented in the utility model, reduce artificial.
Description
Technical field
The present invention relates to silicon chip process technology fields, and in particular to a kind of silicon chip transport system.
Background technology
At present using solar silicon wafers making herbs into wool, etching, the machines such as diffusion to solar silicon wafers in the process of processing, on
Blanking bench generally requires, by manually carrying out, a folded silicon chip to be imported by way of manually or mechanically in the gaily decorated basket, then manually
The gaily decorated basket is transferred on feeding platform, in the gaily decorated basket after treatment process, blanking bench will be transferred into, be then manually transferred to blanking
Guide card machine.
This process typically relies on manually, be easily damaged while causing production capacity low, during manual operation silicon chip and
Silicon chip is polluted.And existing feeding guide card machine and blanking guide card machine are typically sucked type, sucker can be fixed on one
On a six axis robot, six axis robot stroke mode is complicated, and six axis robot range is limited, therefore a six axis robot
The silicon chip on two to three silicon chip carrier rails can be generally delivered simultaneously, it is less efficient.To increase number of tracks, then need
Increase the range of six axis robot, cost increases.
Invention content
It is high and rationally distributed that the technical problem to be solved in the present invention is to provide a kind of mechanization degrees, can improve six axis
The silicon chip transport system of manipulator efficiency.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention is:A kind of silicon chip transport system, including the gaily decorated basket
Charging and discharging mechanism, the elevating mechanism for fixing the gaily decorated basket and the gaily decorated basket being driven to move up and down and silicon chip carrier rails, each silicon chip
One end of carrier rails is stretched into the gaily decorated basket of an elevating mechanism and takes piece, and the other end is provided with silicon chip cache mechanism, and stretches into this
Silicon chip is delivered into silicon chip cache mechanism in silicon chip cache mechanism, is also set up on the outside of the end of silicon chip carrier rails normal thereto
Graphite boat track and graphite boat, also set up on the outside of graphite boat track there are one six axis robot, six axis robot
End is equipped with Suction cup assembly, and the quantity of the silicon chip carrier rails is four, parallel to each other and end part aligning, six shaft mechanical
The distance of the pedestal of hand to two silicon chip carrier rails in outside is equal, to the distance of two silicon chip carrier rails of inside
It is identical, multiple silicon chip slots are provided in silicon chip cache mechanism for placing silicon chip, be arranged on the Suction cup assembly and several
The spacing of sucker, sucker is identical as the spacing of silicon chip slot in silicon chip cache mechanism, and sucker can stretch into silicon chip slot for inhaling
Attached silicon chip, the silicon chip cache mechanism on two silicon chip carrier rails in outside can prolong the back-and-forth motion of silicon chip carrier rails direction
Setting.
Further, the gaily decorated basket charging and discharging mechanism includes slide glass gaily decorated basket track and empty gaily decorated basket track, the slide glass gaily decorated basket
Track is located at right over empty gaily decorated basket track, and elevating mechanism is located at the end of gaily decorated basket charging and discharging mechanism, flower is provided in elevating mechanism
Basket fixing device and upper and lower slide rail, gaily decorated basket fixing device can be slided up and down in upper and lower slide rail.
Further, the both sides of the graphite boat track are provided with the use that can move back and forth along vertical graphite boat orbital direction
In the position-limit mechanism of fixed graphite boat.
Further, Suo Xian mechanisms include sliding rail and holder, and holder can slide under lead screw effect along sliding rail, on holder
Several horizontal guide posts are provided with, another end of guide post is fixedly installed on positive stop strip, which is vertically arranged, guide post position
Part between holder and positive stop strip is set with spring, and guide post coordinates with bracket slide.
Further, the silicon chip cache mechanism on the silicon chip carrier rails of two, outside includes upright guide rail and can be
The pedestal slided up and down on upright guide rail, is provided with horizontal slide rail and rewinding box on pedestal, and rewinding box can be in leading screw
It is slided along horizontal slide rail under effect, silicon chip slot is provided in rewinding box for caching silicon chip.
Further, the sucker includes sucker ontology, if being provided with a hollow portion on sucker ontology, hollow portion is from sucker
The front of ontology is through to reverse side, is arranged in each hollow portion there are one suction nozzle, the corner of suction nozzle is connected by hook spring
Sucker ontology, the plane that the adsorption plane of suction nozzle is formed with hook spring swinging track are vertically arranged, the top setting of sucker ontology
There are one main airway, main airway connects several gas nozzles, and gas nozzle is connected to suction nozzle by tracheae, if being provided on the sucker ontology
Dry groove, gas nozzle correspond in the grooves and with groove, and groove is connected to hollow portion, and the upper top surface of the sucker ontology is also
There are two screw holes for setting, for sucker ontology to be fixed on external equipment.
From above-mentioned technical proposal it can be seen that the present invention has the following advantages:The maximum range of six axis robot can be it
To the distance of the two silicon chip carrier rails in inside, when needing to deliver the silicon chip on the silicon chip carrier rails of outside, leading screw is by silicon chip
Rewinding box on cache mechanism is released, and the distance of rewinding box and six axis robot is shortened, and when taking piece to complete, rewinding box playbacks, no
The movement of manipulator is hindered, it is rationally distributed to improve whole working efficiency, it reduces equipment and takes up an area volume, and the present invention can
To realize that silicon slice loading enters the automation campaign of graphite boat, reduce artificial.
Description of the drawings
Fig. 1 is the structural diagram of the present invention;
Fig. 2 is vertical view of the present invention;
Fig. 3 is the structural schematic diagram of elevating mechanism in the present invention;
Fig. 4 is the structural schematic diagram of position-limit mechanism in the present invention;
Fig. 5 is the structural schematic diagram of silicon chip cache mechanism in the present invention;
Fig. 6 is the structural schematic diagram of sucker in the present invention.
Specific implementation mode
It elaborates to the specific implementation mode of the present invention below in conjunction with attached drawing.
As shown in Figure 1, 2, silicon chip transport system of the invention, including gaily decorated basket charging and discharging mechanism 10, for fix the gaily decorated basket and
The elevating mechanism 20 and four silicon chip carrier rails 30, one end of each silicon chip carrier rails 30 that the drive gaily decorated basket moves up and down are stretched
Enter and take piece in the gaily decorated basket of an elevating mechanism 20, the other end is provided with silicon chip cache mechanism 40, and stretches into the silicon chip cache mechanism
Silicon chip is delivered into silicon chip cache mechanism in 40, graphite boat normal thereto is also set up on the outside of the end of silicon chip carrier rails 30
Track 50 and graphite boat 60 are also set up in the outside of graphite boat track 50 there are one six axis robot 70, six axis robot 70
End be equipped with Suction cup assembly 80, the quantity of the silicon chip carrier rails 30 is four, parallel to each other and end part aligning, described six
The distance of the pedestal of axis robot 70 to two silicon chip carrier rails in outside is equal, arrives two silicon chip carrier rails of inside
Distance it is also identical, multiple silicon chip slots are provided in silicon chip cache mechanism 40 for placing silicon chip, are set on the Suction cup assembly
Set with several suckers, the spacing of sucker is identical as the spacing of silicon chip slot in silicon chip cache mechanism, and sucker can stretch into silicon chip
For adsorbing silicon chip in slot, the silicon chip cache mechanism on two silicon chip carrier rails in outside can prolong silicon chip carrier rails side
Mobile setting forwards, backwards.
The gaily decorated basket charging and discharging mechanism includes slide glass gaily decorated basket track 11 and empty gaily decorated basket track 12, the slide glass gaily decorated basket track 11
Right over empty gaily decorated basket track 12, elevating mechanism 20 is located at the end of gaily decorated basket charging and discharging mechanism, and elevating mechanism 20 is as shown in Figure 3
In, gaily decorated basket fixing device 21 and upper and lower slide rail 23, gaily decorated basket fixing device can be slided up and down in upper and lower slide rail, and silicon chip delivers rail
Road stretches into and does not extract a silicon chip in the gaily decorated basket, and gaily decorated basket fixing device declines a slot pitch.The gaily decorated basket of silicon chip is loaded from the slide glass gaily decorated basket
One end feeding of track declines into elevating mechanism, and with gaily decorated basket fixing device, after the silicon chip in the gaily decorated basket extracts,
The gaily decorated basket enters sky gaily decorated basket track 12 and is transported.
It can move back and forth along vertical graphite boat orbital direction as shown in figure 4, the both sides of the graphite boat track 50 are provided with
For fixing the position-limit mechanism 90 of graphite boat.Suo Xian mechanisms include sliding rail 91 and holder 92, and holder 92 is under lead screw effect
It can be slided along sliding rail 91, several horizontal guide posts 93, another end fixed setting limit of guide post 93 are provided on holder 92
On item 95, which is vertically arranged, and part of the guide post 93 between holder and positive stop strip is set with spring 94, and guide post
It is slidably matched with holder 92.When graphite boat loads silicon chip, which is fixed graphite boat.
Silicon chip cache mechanism on the silicon chip carrier rails of two, outside as shown in figure 5, including upright guide rail 41 and
The pedestal 42 that can be slided up and down on upright guide rail 41 is provided with horizontal slide rail 43 and rewinding box 44 on pedestal 42,
Rewinding box 44 can be slided under the effect of leading screw 45 along horizontal slide rail, and silicon chip slot is provided in rewinding box 44 for caching silicon chip.
The maximum range of six axis robot can arrive the distance of the two silicon chip carrier rails in inside for it, outer when needing to deliver
When silicon chip on the silicon chip carrier rails of side, leading screw releases the rewinding box on silicon chip cache mechanism, shortens rewinding box and six axis machines
The distance of tool hand, when taking piece to complete, rewinding box playback does not hinder the movement of manipulator.To improve whole working efficiency, subtract
Few equipment takes up an area volume, and the automation campaign that silicon slice loading enters graphite boat may be implemented in the present invention, reduces artificial.
As shown in fig. 6, sucker includes sucker ontology 6, it is provided with 3 hollow portions 2 on sucker ontology 6, hollow portion 2 is from sucker
The front of ontology 6 is through to reverse side, is arranged in each hollow portion there are one suction nozzle 3, the corner of suction nozzle 3 passes through hook spring 1
The both ends of connecting sucker ontology 6, hook spring 1 are both provided with hook, and four corners of sucker ontology are provided with link, inhale
Corresponding position is also provided with hanging ring structure on disk ontology 6, and the extension of suction nozzle 3 and sucker ontology 6 is respectively set in the both ends of hook spring 1
On ring, each suction nozzle 3 configures four hook springs 1, and hook spring 1 is symmetrical arranged two-by-two, using hook spring 1 by suction nozzle 3 into
Row suspension, under initial installation, the adsorption plane of hook spring 1 and suction nozzle is arranged in parallel with sucker.In adsorption process, inhale
The plane that the adsorption plane of mouth 3 is formed with 1 swinging track of hook spring is vertically arranged.When using the sucker suction silicon chip, work as sucker
When shaking, hook spring can play cushioning effect, the striking momentum of suction nozzle and sucker be reduced, to protect silicon chip.It inhales
There are one main airway 8 (main airway is located at sucker body interior part and is not drawn into), main airway 8 connects for the top setting of disk ontology 6
Several gas nozzles 7, gas nozzle 7 are fixed on sucker ontology 6, and gas nozzle 7 can be connected to the gas-tpe fitting 4 on suction nozzle 3 by tracheae.Sucker
If being additionally provided with 3 grooves 5 on ontology 6, gas nozzle 7 corresponds in the grooves and with groove 5, and groove 5 is connected to hollow portion, recessed
Slot 5 is used to arrange the tracheae of connection gas nozzle and suction nozzle.
Claims (6)
1. a kind of silicon chip transport system, it is characterised in that:Including gaily decorated basket charging and discharging mechanism, for fixing the gaily decorated basket and driving the gaily decorated basket
The gaily decorated basket of an elevating mechanism is stretched into one end of the elevating mechanism and silicon chip carrier rails of lower movement, each silicon chip carrier rails
In take piece, the other end to be provided with silicon chip cache mechanism, and stretch into the silicon chip cache mechanism by silicon chip deliver to silicon chip cache machine
In structure, graphite boat track and graphite boat normal thereto are also set up on the outside of the end of silicon chip carrier rails, in graphite boat track
Outside also set up there are one six axis robot, the end of six axis robot is equipped with Suction cup assembly, the silicon chip carrier rails
Quantity is four, parallel to each other and end part aligning, two silicon chip carrier rails of the pedestal of the six axis robot to outside
Apart from equal, the distance to two silicon chip carrier rails of inside is also identical, and a multiple silicon are provided in silicon chip cache mechanism
Film trap is for placing silicon chip, setting and several suckers on the Suction cup assembly, the spacing of sucker in silicon chip cache mechanism
The spacing of silicon chip slot is identical, and sucker can stretch into silicon chip slot for adsorbing silicon chip, be located at two silicon chip carrier rails in outside
On silicon chip cache mechanism can prolong silicon chip carrier rails direction be moved forward and backward setting.
2. silicon chip transport system according to claim 1, it is characterised in that:The gaily decorated basket charging and discharging mechanism includes slide glass flower
Basket track and empty gaily decorated basket track, the slide glass gaily decorated basket track are located at right over empty gaily decorated basket track, and elevating mechanism is located at the gaily decorated basket or more
Expect the end of mechanism, to be provided with gaily decorated basket fixing device and upper and lower slide rail in elevating mechanism, gaily decorated basket fixing device can be in upper downslide
Rail slides up and down.
3. silicon chip transport system according to claim 1 or 2, it is characterised in that:The both sides of the graphite boat track are set
It is equipped with the position-limit mechanism for fixing graphite boat that can move back and forth along vertical graphite boat orbital direction.
4. silicon chip transport system according to claim 3, it is characterised in that:Suo Xian mechanisms include sliding rail and holder, branch
Frame can slide under lead screw effect along sliding rail, several horizontal guide posts are provided on holder, another end of guide post, which is fixed, to be set
Set on positive stop strip, which is vertically arranged, and part of the guide post between holder and positive stop strip is set with spring, and guide post with
Bracket slide coordinates.
5. silicon chip transport system according to claim 1, it is characterised in that:On the silicon chip carrier rails of two, outside
Silicon chip cache mechanism includes upright guide rail and the pedestal that can be slided up and down on upright guide rail, and water is provided on pedestal
Smooth rail and rewinding box, rewinding box can be slided under leading screw effect along horizontal slide rail, and being provided with silicon chip slot in rewinding box is used for
Cache silicon chip.
6. silicon chip transport system according to claim 1, it is characterised in that:The sucker includes sucker ontology, sucker sheet
If being provided with a hollow portion on body, hollow portion is through to reverse side from the front of sucker ontology, in each hollow portion there are one settings
Suction nozzle, by hook spring connecting sucker ontology, adsorption plane and the hook spring swinging track of suction nozzle are formed for the corner of suction nozzle
Plane be vertically arranged, the setting of the top of sucker ontology is there are one main airway, and main airway connects several gas nozzles, and gas nozzle passes through gas
Pipe is connected to suction nozzle, several grooves are provided on the sucker ontology, and gas nozzle corresponds in the grooves and with groove, groove
It is connected to hollow portion, the upper top surface of the sucker ontology also sets up that there are two screw holes, for sucker ontology to be fixed on external equipment
On.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721924664.2U CN208000898U (en) | 2017-12-29 | 2017-12-29 | Silicon chip transport system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721924664.2U CN208000898U (en) | 2017-12-29 | 2017-12-29 | Silicon chip transport system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208000898U true CN208000898U (en) | 2018-10-23 |
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ID=63836670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721924664.2U Active CN208000898U (en) | 2017-12-29 | 2017-12-29 | Silicon chip transport system |
Country Status (1)
| Country | Link |
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| CN (1) | CN208000898U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107993970A (en) * | 2017-12-29 | 2018-05-04 | 无锡市江松科技有限公司 | Silicon chip transport system |
| CN109742041A (en) * | 2019-01-07 | 2019-05-10 | 成都中电熊猫显示科技有限公司 | The control method and equipment of substrate transmission |
| CN111312638A (en) * | 2019-10-25 | 2020-06-19 | 深圳市拉普拉斯能源技术有限公司 | Automatic feeding and discharging device capable of temporarily storing raw materials |
| CN115285681A (en) * | 2022-07-27 | 2022-11-04 | 上海见远自动化科技有限公司 | Wafer automatic feeding device of loading machine |
-
2017
- 2017-12-29 CN CN201721924664.2U patent/CN208000898U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107993970A (en) * | 2017-12-29 | 2018-05-04 | 无锡市江松科技有限公司 | Silicon chip transport system |
| CN107993970B (en) * | 2017-12-29 | 2024-07-19 | 无锡江松科技股份有限公司 | Silicon wafer conveying system |
| CN109742041A (en) * | 2019-01-07 | 2019-05-10 | 成都中电熊猫显示科技有限公司 | The control method and equipment of substrate transmission |
| CN109742041B (en) * | 2019-01-07 | 2020-11-24 | 成都中电熊猫显示科技有限公司 | Control method and equipment for substrate transfer |
| CN111312638A (en) * | 2019-10-25 | 2020-06-19 | 深圳市拉普拉斯能源技术有限公司 | Automatic feeding and discharging device capable of temporarily storing raw materials |
| CN115285681A (en) * | 2022-07-27 | 2022-11-04 | 上海见远自动化科技有限公司 | Wafer automatic feeding device of loading machine |
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Legal Events
| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No.208 Changjiang East Road, Shuofang, Xinwu District, Wuxi City, Jiangsu Province, 214000 Patentee after: Wuxi Jiangsong Technology Co.,Ltd. Address before: 214028 plot c20-2, phase V, Shuofang industrial concentration zone, Wuxi New Area, Wuxi City, Jiangsu Province Patentee before: WUXI JIANGSONG SCIENCE AND TECHNOLOGY Co.,Ltd. |
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| CP03 | Change of name, title or address |