CN207243478U - Dephosphorization apparatus - Google Patents
Dephosphorization apparatus Download PDFInfo
- Publication number
- CN207243478U CN207243478U CN201720287425.4U CN201720287425U CN207243478U CN 207243478 U CN207243478 U CN 207243478U CN 201720287425 U CN201720287425 U CN 201720287425U CN 207243478 U CN207243478 U CN 207243478U
- Authority
- CN
- China
- Prior art keywords
- graphite crucible
- bell jar
- silicon liquid
- pedestal
- telescopic rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model discloses a kind of dephosphorization apparatus, bell jar can form sealing space with graphite crucible, and vacuum environment can be formed by the vacuum extractor sealing space on bell jar, be purified easy to industrial silicon；Agitating paddle can carry out silicon liquid under the drive of telescopic rod moving stirring, improve the stirring intensity of silicon liquid, so that the silicon liquid of melting rolling up and down in graphite crucible, the phosphorus in silicon liquid is enabled to evaporate the surface for reaching silicon liquid, phosphorus impurities content in polysilicon is significantly reduced, phosphorus impurities are in below 0.5ppm.In addition, dephosphorization apparatus provided by the utility model on a large scale can purify industrial silicon, purification amount is big, suitable for industrial mass production polysilicon.
Description
Technical field
It the utility model is related to field polysilicon, more particularly to a kind of dephosphorization apparatus.
Background technology
The development of semiconductor and solar cell industry so that the production of raw material polysilicon becomes hot spot industry, while right
The purity requirement of polysilicon is also higher and higher, and how effectively to remove the impurity in polysilicon becomes the difficulty of China's polysilicon industry
Topic.Phosphorus-containing compound species is various, complicated component, is sufficiently close to chlorosilane system boiling point, how effectively to remove containing phospha
Matter becomes the main problem that polysilicon industry faces.And existing dephosphorization apparatus is difficult often that the content of phosphorus impurities is dropped to symbol
Desired scope is closed, so that the quality of polysilicon reduces, influences generating efficiency.
Utility model content
In view of this, the utility model proposes a kind of dephosphorization apparatus, the dephosphorization apparatus can effectively remove containing phosphorus impurities, carry
The purity of high polysilicon.
What the technical solution of the utility model was realized in：
A kind of dephosphorization apparatus, including：
Pedestal, fixes graphite crucible on the pedestal, some grooves is provided with the outer wall of the graphite crucible, described recessed
Heating electrode is provided with groove, the outside of the graphite crucible is provided with muff；
Bell jar is provided with the top of the graphite crucible, the graphite crucible forms closed chamber with the bell jar；The clock
Cover top is provided with motor, and the motor bottom connects a telescopic rod, and the telescopic rod stretches into the bell jar through the bell jar
Interior, the telescopic rod is connected with agitating paddle, and the agitating paddle bottom is provided with blade；
Vacuum extractor is provided with the bell jar；
Aqueous cold plate is provided with the pedestal being in contact with the graphite crucible.
Preferably, the blade is helical blade.
Preferably, the muff includes double layer sleeve barrel and is arranged on outside the double layer sleeve barrel inner wall and the graphite crucible
Wall is filled with heat-barrier material between setting.
Preferably, the telescopic rod, the surface of the agitating paddle and the blade are covered with polytetrafluoroethylene (PTFE).
Preferably, be provided with the thermocouple that can extend into the graphite crucible in the bell jar, the thermocouple with it is described
Temperature indicator connection outside bell jar.
Preferably, the aqueous cold plate includes upper plate, lower plate and side wall, the upper plate, the lower plate, the side
Wall forms sealing space, and spiral water chute, the cell wall of the spiral water chute and the side wall etc. are provided with the upper plate
Height, the water outlet of the spiral water chute are arranged on the disk body side, and water inlet is arranged on the middle part of the lower plate.
Preferably, heavy connection of pipe is provided with the pedestal, water inlet pipe, the water inlet pipe are provided with the heavy connection of pipe
Connected with the water inlet.
Preferably, the upper plate is metal disk body.
The beneficial effects of the utility model are：
The utility model provides a kind of dephosphorization apparatus, and bell jar can form sealing space with graphite crucible, by bell jar
Vacuum extractor enable sealing space to form vacuum environment, easy to industrial silicon purify；Agitating paddle can be in telescopic rod
Silicon liquid is carried out under drive to move stirring, improves the stirring intensity of silicon liquid so that the silicon liquid of melting is upper and lower in graphite crucible
Rolling so that the phosphorus in silicon liquid can evaporate the surface for reaching silicon liquid, significantly reduce phosphorus impurities content in polysilicon, and phosphorus impurities exist
Below 0.5ppm.In addition, dephosphorization apparatus provided by the utility model on a large scale can purify industrial silicon, purification amount is big,
Suitable for industrial mass production polysilicon.
Brief description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, drawings in the following description are only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, other attached drawings can also be obtained according to these attached drawings.
Fig. 1 is the structure diagram of the utility model dephosphorization apparatus；
Fig. 2 is the structure diagram of aqueous cold plate in Fig. 1.
In figure：
1st, pedestal；2nd, graphite crucible；3rd, outer wall；4th, electrode is heated；5th, bell jar；6th, heat-barrier material；7th, motor；8th, stretch
Bar；9th, agitating paddle；10th, blade；11st, vacuum extractor；12nd, aqueous cold plate；13rd, heavy connection of pipe；14th, upper plate；15th, lower plate；
16th, side wall；17th, spiral water chute；18th, water inlet；19th, water outlet.
Embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work
All other embodiments obtained, shall fall within the protection scope of the present invention.
As shown in Figure 1, a kind of dephosphorization apparatus provided by the utility model, including：
Pedestal 1, fixes graphite crucible 2 on pedestal 1, some grooves is provided with the outer wall 3 of graphite crucible 2, are set in groove
Heating electrode 4 is equipped with, the outside of graphite crucible 2 is provided with muff；
The top of graphite crucible 2 is provided with bell jar 5, and graphite crucible 2 forms closed chamber with bell jar 5；The top of bell jar 5 is provided with
Motor 7,7 bottom of motor connect a telescopic rod 8, and telescopic rod 8 is stretched into bell jar 5 through bell jar 5, and telescopic rod 8 connects with agitating paddle 9
Connect, 9 bottom of agitating paddle is provided with blade 10；
Vacuum extractor 11 is provided with bell jar 5；
Aqueous cold plate 12 is provided with the pedestal 1 being in contact with graphite crucible 2.
In above-mentioned technical proposal, bell jar 5 can form sealing space with graphite crucible 2, pass through the vacuum means on bell jar 5
Putting 11 enables sealing space to form vacuum environment, is purified easy to industrial silicon；Agitating paddle 9 can be under the drive of telescopic rod 8
Silicon liquid is carried out to move stirring, improves the stirring intensity of silicon liquid so that the rolling up and down in graphite crucible 2 of the silicon liquid of melting,
Enable the phosphorus in silicon liquid to evaporate the surface for reaching silicon liquid, significantly reduce phosphorus impurities content in polysilicon, phosphorus impurities exist
Below 0.5ppm.In addition, dephosphorization apparatus provided by the utility model on a large scale can purify industrial silicon, purification amount is big,
Suitable for industrial mass production polysilicon.
In the present embodiment, in order to improve stirring intensity, the content of phosphorus impurities in polysilicon is significantly reduced, blade 10 is
Helical blade.
In the present embodiment, muff includes double layer sleeve barrel and is filled in double layer sleeve barrel inner wall and 2 outer wall 3 of graphite crucible
Heat-barrier material 6 between setting, the muff of the structure can avoid thermal loss, and the melting rate and phosphorus for accelerating industrial silicon steam
Send out speed.
In the present embodiment, telescopic rod 8, agitating paddle 9 and the surface of blade 10 are covered with polytetrafluoroethylene (PTFE), can avoid
The introducing of other impurities.
In the present embodiment, be provided with the thermocouple that can extend into graphite crucible 2 in bell jar 5, thermocouple with outside bell jar 5
Temperature indicator connection, the temperature of silicon liquid can be monitored in real time.
In the present embodiment, aqueous cold plate 12 includes upper plate 14, lower plate 15 and side wall 16, upper plate 14, lower plate
15th, side wall 16 forms sealing space, and spiral water chute 17, cell wall and the side wall 16 of spiral water chute 17 are provided with upper plate 14
Contour, the water outlet 19 of spiral water chute 17 is arranged on disk body side, and water inlet 18 is arranged on the middle part of lower plate 15, tool
Body is referring to attached drawing 2；12 heat dissipation effect of aqueous cold plate of the structure is notable, can reduce the crystal pulling time, increase the longitudinal temperature of crystal
Gradient, reduces average pull rate, so as to reduce power consumption, improves the production efficiency of polysilicon, reduce the internal stress of polysilicon.
Wherein, heavy connection of pipe 13 is provided with pedestal 1, water inlet pipe, water inlet pipe and water inlet are provided with heavy connection of pipe 13
18 connections.
Wherein, upper plate 14 is metal disk body, it is possible to increase the heat dissipation effect of aqueous cold plate 12.
The operation principle of dephosphorization apparatus provided by the utility model is as follows：
Industrial silicon is put into graphite crucible 2, and is sealed by carry out bell jar 5；Then start vacuum extractor 11, allow sealing
The vacuum of interior volume reaches certain numerical value, starts heating electrode 4 and the industrial silicon inside graphite crucible 2 is heated, directly
Melt to complete, start motor 7, allow agitating paddle 9 to rotate, telescopic rod 8 drives blade 10 to move up and down the silicon liquid inside agitation, makes
Silicon liquid rolling is obtained, reaches sufficient heat exchange, allows internal volatile impurity to reach the surface of silicon liquid as early as possible, be removed because of evaporation.
After the completion of dephosphorization, 18 water filling of water inlet to aqueous cold plate 12, cools down the bottom of graphite crucible 2, allows inside
Silicon liquid directional solidification, after the completion of, cut the high part of top phosphorus content.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on, should be included in the utility model
Protection domain within.
Claims (1)
- A kind of 1. dephosphorization apparatus, it is characterised in that including：Pedestal (1), fixes graphite crucible (2) on the pedestal (1), is provided with the outer wall (3) of the graphite crucible (2) some Groove, heating electrode (4) is provided with the groove, the outside of the graphite crucible (2) is provided with muff；Bell jar (5) is provided with the top of the graphite crucible (2), the graphite crucible (2) forms with the bell jar (5) and seals Room；Motor (7) is provided with the top of the bell jar (5), motor (7) bottom connects a telescopic rod (8), the telescopic rod (8) Stretched into through the bell jar (5) in the bell jar (5), the telescopic rod (8) is connected with agitating paddle (9), agitating paddle (9) bottom Portion is provided with blade (10)；Vacuum extractor (11) is provided with the bell jar (5)；Aqueous cold plate (12) is provided with the pedestal (1) being in contact with the graphite crucible (2)；The aqueous cold plate (12) includes upper plate (14), lower plate (15) and side wall (16), the upper plate (14), the lower wall Body (15), the side wall (16) form sealing space, and spiral water chute (17) is provided with the upper plate (14), described spiral The cell wall of water flow grooves (17) and the side wall (16) are contour, and the water outlet (19) of the spiral water chute (17) is arranged on the disk Body side, water inlet (18) are arranged on the middle part of the lower plate (15)；Heavy connection of pipe (13) is provided with the pedestal (1), water inlet pipe, the water inlet pipe are provided with the heavy connection of pipe (13) Connected with the water inlet (18)；The upper plate (14) is metal disk body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720287425.4U CN207243478U (en) | 2017-03-22 | 2017-03-22 | Dephosphorization apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720287425.4U CN207243478U (en) | 2017-03-22 | 2017-03-22 | Dephosphorization apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207243478U true CN207243478U (en) | 2018-04-17 |
Family
ID=61874671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720287425.4U Expired - Fee Related CN207243478U (en) | 2017-03-22 | 2017-03-22 | Dephosphorization apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207243478U (en) |
-
2017
- 2017-03-22 CN CN201720287425.4U patent/CN207243478U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180417 Termination date: 20210322 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |