CN207243477U - Dephosphorization apparatus - Google Patents
Dephosphorization apparatus Download PDFInfo
- Publication number
- CN207243477U CN207243477U CN201720285336.6U CN201720285336U CN207243477U CN 207243477 U CN207243477 U CN 207243477U CN 201720285336 U CN201720285336 U CN 201720285336U CN 207243477 U CN207243477 U CN 207243477U
- Authority
- CN
- China
- Prior art keywords
- graphite crucible
- sealing cover
- sealing
- telescopic rod
- silicon liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of dephosphorization apparatus, sealing cover can form sealing space with graphite crucible, and vacuum environment can be formed by the vacuum extractor sealing space on sealing cover, be purified easy to industrial silicon；Agitating paddle can carry out silicon liquid under the drive of telescopic rod moving stirring, improve the stirring intensity of silicon liquid, so that the silicon liquid of melting rolling up and down in graphite crucible, the phosphorus in silicon liquid is enabled to evaporate the surface for reaching silicon liquid, phosphorus impurities content in polysilicon is significantly reduced, phosphorus impurities are in below 0.5ppm.In addition, dephosphorization apparatus provided by the utility model is small, and it is light-weight, used suitable for laboratory.
Description
Technical field
It the utility model is related to field polysilicon, more particularly to a kind of dephosphorization apparatus.
Background technology
The development of semiconductor and solar cell industry so that the production of raw material polysilicon becomes hot spot industry, while right
The purity requirement of polysilicon is also higher and higher, and how effectively to remove the impurity in polysilicon becomes the difficulty of China's polysilicon industry
Topic.Phosphorus-containing compound species is various, complicated component, is sufficiently close to chlorosilane system boiling point, how effectively to remove containing phospha
Matter becomes the main problem that polysilicon industry faces.And existing dephosphorization apparatus is difficult often that the content of phosphorus impurities is dropped to symbol
Desired scope is closed, so that the quality of polysilicon reduces, influences generating efficiency.
Utility model content
In view of this, the utility model proposes a kind of dephosphorization apparatus, the dephosphorization apparatus can effectively remove containing phosphorus impurities, carry
The purity of high polysilicon.
What the technical solution of the utility model was realized in：
A kind of dephosphorization apparatus, including：
Two stents, are provided with sealing cover between the stent by shaft；
Elevating mechanism is provided with below the sealing cover, pedestal is provided with above the elevating mechanism, is consolidated on the pedestal
Surely there is graphite crucible, some grooves are provided with the outer wall of the graphite crucible, heating electrode is provided with the groove, it is described
The outside of graphite crucible is provided with muff；
The graphite crucible forms sealing space with the sealing cover；Motor, the electricity are provided with the top of the sealing cover
Motor spindle connects a telescopic rod, and the telescopic rod is stretched into below the sealing cover through the sealing cover, and the telescopic rod is with stirring
Paddle connection is mixed, the agitating paddle bottom is provided with blade；
Vacuum extractor is provided with the sealing cover；
Water cooling plant is provided with the pedestal being in contact with the graphite crucible.
Preferably, the blade is helical blade.
Preferably, the muff includes double layer sleeve barrel and is arranged on the double layer sleeve barrel inner wall and the graphite crucible
The outer wall is filled with heat-barrier material between setting.
Preferably, the telescopic rod, the surface of the agitating paddle and the blade are covered with polytetrafluoroethylene (PTFE).
Preferably, the thermocouple that can extend into the graphite crucible, the thermocouple and institute are provided with the sealing cover
State the temperature indicator connection outside sealing cover.
Preferably, the aqueous cold plate includes upper plate, lower plate and side wall, lower plate, the side described in the upper plate
Wall forms sealing space, and spiral water chute, the cell wall of the spiral water chute and the side wall etc. are provided with the upper plate
Height, the water outlet of the spiral water chute are arranged on the disk body side, and water inlet is arranged on the middle part of the lower plate.
Preferably, heavy connection of pipe is provided with the pedestal, water inlet pipe, the water inlet pipe are provided with the heavy connection of pipe
Connected with the water inlet.
The beneficial effects of the utility model are：
The utility model provides a kind of dephosphorization apparatus, and sealing cover can form sealing space with graphite crucible, by close
Vacuum extractor in capping enables sealing space to form vacuum environment, is purified easy to industrial silicon；Agitating paddle can stretched
Silicon liquid is carried out under the drive of contracting bar to move stirring, improves the stirring intensity of silicon liquid so that the silicon liquid of melting is in graphite crucible
Interior rolling up and down so that the phosphorus in silicon liquid can evaporate the surface for reaching silicon liquid, significantly reduce phosphorus impurities content in polysilicon, phosphorus
Impurity is in below 0.5ppm.In addition, dephosphorization apparatus provided by the utility model is small, and it is light-weight, used suitable for laboratory.
Brief description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, drawings in the following description are only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, other attached drawings can also be obtained according to these attached drawings.
Fig. 1 is the structure diagram of the utility model dephosphorization apparatus；
Fig. 2 is the structure diagram of water cooling plant in Fig. 1.
In figure：
1st, pedestal；2nd, graphite crucible；3rd, outer wall；4th, electrode is heated；5th, sealing cover 5；6th, heat-barrier material；7th, motor；8th, stretch
Contracting bar；9th, agitating paddle；10th, blade；11st, vacuum extractor；12nd, water cooling plant；13rd, heavy connection of pipe；14th, upper plate；15th, lower wall
Body；16th, side wall；17th, spiral water chute；18th, water inlet；19th, water outlet；20th, stent；21st, shaft；22nd, elevating mechanism.
Embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work
All other embodiments obtained, shall fall within the protection scope of the present invention.
As shown in Figure 1, a kind of dephosphorization apparatus provided by the utility model, including：
Two stents 20, are provided with sealing cover 5 between stent 20 by shaft 21；
The lower section of sealing cover 5 is provided with elevating mechanism 22, and the top of elevating mechanism 22 is provided with pedestal 1, stone is fixed with pedestal 1
Black crucible 2, is provided with some grooves on the outer wall 3 of graphite crucible 2, is provided with heating electrode 4 in groove, graphite crucible 2 it is outer
Portion is provided with muff；
Graphite crucible 2 forms sealing space with sealing cover 5；The top of sealing cover 5 is provided with motor 7,7 bottom of motor connection one
Telescopic rod 8, telescopic rod 8 stretch into the lower section of sealing cover 5 through sealing cover 5, and telescopic rod 8 is connected with agitating paddle 9, and 9 bottom of agitating paddle is set
It is equipped with blade 10；
Vacuum extractor 11 is provided with sealing cover 5；
Water cooling plant 12 is provided with the pedestal 1 being in contact with graphite crucible 2.
In above-mentioned technical proposal, sealing cover 5 can form sealing space with graphite crucible 2, true by the pumping on sealing cover 5
Empty device 11 enables sealing space to form vacuum environment, is purified easy to industrial silicon；Agitating paddle 9 can be in the band of telescopic rod 8
Silicon liquid is carried out to move stirring under dynamic, improves the stirring intensity of silicon liquid so that the silicon liquid of melting is turned over up and down in graphite crucible 2
Rolling so that the phosphorus in silicon liquid can evaporate the surface for reaching silicon liquid, significantly reduce phosphorus impurities content in polysilicon, and phosphorus impurities exist
Below 0.5ppm.In addition, dephosphorization apparatus provided by the utility model is small, and it is light-weight, used suitable for laboratory.
In the present embodiment, in order to improve stirring intensity, the content of phosphorus impurities in polysilicon is significantly reduced, blade 10 is
Screw blade 10.
In the present embodiment, muff includes double layer sleeve barrel and is filled in double layer sleeve barrel inner wall and 2 outer wall 3 of graphite crucible
Heat-barrier material 6 between setting, the muff of the structure can avoid thermal loss, and the melting rate and phosphorus for accelerating industrial silicon steam
Send out speed.
In the present embodiment, telescopic rod 8, agitating paddle 9 and the surface of blade 10 are covered with polytetrafluoroethylene (PTFE), can avoid
The introducing of other impurities.
In the present embodiment, the thermocouple that can extend into graphite crucible 2, thermocouple and sealing are provided with sealing cover 5
Temperature indicator connection outside lid 5, can monitor the temperature of silicon liquid in real time.
In the present embodiment, upper plate 14, lower plate 15 and side wall 16, upper plate are included referring to attached drawing 2, aqueous cold plate
14th, lower plate 15, side wall 16 form sealing space, and spiral water chute 17, the groove of spiral water chute 17 are provided with upper plate 14
Wall and side wall 16 are contour, and the water outlet 19 of spiral water chute 17 is arranged on disk body side, and water inlet 18 is arranged on lower plate 15
Middle part；The aqueous cold plate heat dissipation effect of the structure is notable, can reduce the crystal pulling time, increases the longitudinal temperature gradient of crystal,
Average pull rate is reduced, so as to reduce power consumption, the production efficiency of polysilicon is improved, reduces the internal stress of polysilicon.
Wherein, heavy connection of pipe 13 is provided with pedestal 1, water inlet pipe, water inlet pipe and water inlet are provided with heavy connection of pipe 13
18 connections.
The operation principle of dephosphorization apparatus provided by the utility model is as follows：
Industrial silicon is put into graphite crucible 2, elevating mechanism 22 drive graphite crucible 2 move up, until with its top
Sealing cover 5 formed sealing space；Then vacuum extractor 11 is started, the vacuum allowed inside sealing space reaches a fixed number
Value, starts heating electrode 4 and industrial silicon graphite crucible 2 inside is heated, until melting completely, startup motor 7, allows stirring
Paddle 9 rotates, and telescopic rod 8 drives blade 10 to move up and down the silicon liquid inside agitation so that and silicon liquid is rolled, and reaches sufficient heat exchange,
Allow internal volatile impurity to reach the surface of silicon liquid as early as possible, be removed because of evaporation.
After the completion of dephosphorization, 18 water filling of water inlet to aqueous cold plate, cools down the bottom of graphite crucible 2, allows internal silicon
Liquid, directional solidification, after the completion of, cut the high part of top phosphorus content.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on, should be included in the utility model
Protection domain within.
Claims (1)
- A kind of 1. dephosphorization apparatus, it is characterised in that including：Two stents (20), are provided with sealing cover (5) between the stent (20) by shaft (21)；Elevating mechanism (22) is provided with below the sealing cover (5), pedestal (1), institute are provided with above the elevating mechanism (22) State and graphite crucible (2) is fixed with pedestal (1), some grooves are provided with the outer wall (3) of the graphite crucible (2), it is described recessed Heating electrode (4) is provided with groove, the outside of the graphite crucible (2) is provided with muff；The graphite crucible (2) forms sealing space with the sealing cover (5)；Motor is provided with the top of the sealing cover (5) (7), motor (7) bottom connects a telescopic rod (8), and the telescopic rod (8) stretches into the sealing through the sealing cover (5) Cover below (5), the telescopic rod (8) is connected with agitating paddle (9), and agitating paddle (9) bottom is provided with blade (10)；Vacuum extractor (11) is provided with the sealing cover (5)；Water cooling plant (12) is provided with the pedestal (1) being in contact with the graphite crucible (2)；The blade (10) is helical blade；The muff includes double layer sleeve barrel and is arranged on the outer wall of the double layer sleeve barrel inner wall and the graphite crucible (2) (3) heat-barrier material (6) is filled between setting；The telescopic rod (8), the agitating paddle (9) and the surface of the blade (10) are covered with polytetrafluoroethylene (PTFE)；The thermocouple that can extend into the graphite crucible (2), the thermocouple and the sealing are provided with the sealing cover (5) Cover the temperature indicator connection of (5) outside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720285336.6U CN207243477U (en) | 2017-03-22 | 2017-03-22 | Dephosphorization apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720285336.6U CN207243477U (en) | 2017-03-22 | 2017-03-22 | Dephosphorization apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207243477U true CN207243477U (en) | 2018-04-17 |
Family
ID=61874725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720285336.6U Expired - Fee Related CN207243477U (en) | 2017-03-22 | 2017-03-22 | Dephosphorization apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207243477U (en) |
-
2017
- 2017-03-22 CN CN201720285336.6U patent/CN207243477U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180417 Termination date: 20210322 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |