CN207205563U - A kind of big stroke micro-nano technology device - Google Patents
A kind of big stroke micro-nano technology device Download PDFInfo
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- CN207205563U CN207205563U CN201721044084.4U CN201721044084U CN207205563U CN 207205563 U CN207205563 U CN 207205563U CN 201721044084 U CN201721044084 U CN 201721044084U CN 207205563 U CN207205563 U CN 207205563U
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- speculum
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- cover glass
- mirror
- microlens
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Abstract
A kind of big stroke micro-nano technology device, it is related to electronics technical field of processing equipment；Pumping is connected with femtosecond laser oscillator, the side of femtosecond laser oscillator is provided with the first speculum by optical gate, the second speculum is provided with below first speculum, the side of second speculum is provided with the 3rd speculum, the side of 3rd speculum is disposed with the first lens, the second lens and tilting mirror, the side of tilting mirror is disposed with the 3rd lens, the 4th lens and dielectric mirror, microlens are provided with above dielectric mirror, cover glass is provided with microlens, photoresist is provided with cover glass, cover glass is arranged in three-dimensional mobile platform；The 4th speculum is provided with below described dielectric mirror, the side of the 4th speculum is disposed with the 5th lens and ccd scanner.The utility model processes structure one-shot forming, avoids mask plate alignment error and the extension of production cycle that multiexposure, multiple exposure is brought without mask plate.
Description
Technical field
It the utility model is related to electronics technical field of processing equipment, and in particular to a kind of big stroke micro-nano technology device.
Background technology
With the fast development and technological progress of FPD, microelectronic component and laser hologram industry, to laser micro/nano
The performance of processing unit (plant) proposes higher requirement.
With the continuous development of LASER Light Source technology, Laser Processing manufacturing technology progressively penetrate into high and new technology field,
The practical and industrialized development of high and new technology is promoted, and this proposes higher want to laser processing technology in turn
Ask, among these, how to improve machining accuracy is primary problems faced.
Traditional photoetching technique needs making mask plate, particularly structure more complicated, generally requires more mask plates, and
Mask plate is more, it is meant that exposure frequency is more, while mask plate is required for precise alignment when also bringing each exposure
Difficulty, this makes production complexity and error all greatly increase, extends the production cycle.
Utility model content
The defects of the purpose of this utility model is to be directed to prior art and deficiency, there is provided a kind of simple in construction, design is closed
Reason, big stroke micro-nano technology device easy to use.
To achieve the above object, the technical solution adopted in the utility model is：It include pumping, femtosecond laser oscillator,
It is optical gate, the first speculum, the second speculum, the 3rd speculum, the first lens, the second lens, tilting mirror, the 3rd lens, the 4th saturating
Mirror, dielectric mirror, microlens, cover glass, photoresist, three-dimensional mobile platform, the 4th speculum, the 5th lens, CCD scannings
Instrument；Described pumping is connected with femtosecond laser oscillator, and the side of femtosecond laser oscillator is provided with the first reflection by optical gate
Mirror, the second speculum is provided with below the first speculum, and the side of the second speculum is provided with the 3rd speculum, the 3rd reflection
The side of mirror is disposed with the first lens, the second lens and tilting mirror, and the side of tilting mirror is disposed with the 3rd lens, the 4th saturating
Mirror and dielectric mirror, microlens are provided with above dielectric mirror, cover glass is provided with microlens, is set on cover glass
There is photoresist, cover glass is arranged in three-dimensional mobile platform；It is provided with the 4th speculum below described dielectric mirror, the 4th
The side of speculum is disposed with the 5th lens and ccd scanner.
Preferably, described three-dimensional mobile platform include upper piezoelectric ceramics, load sample platform, push electroceramics, micro-cantilever,
Sliding block, mobile platform；Load sample platform is provided with below described upper piezoelectric ceramics, lower piezoelectric is provided with below load sample platform
Ceramics, push and sliding block is provided with below electroceramics, sliding block is driven by motor, and two mobile platforms are provided with below sliding block；
Described cover glass is arranged on load sample platform, and micro-cantilever is connected with cover glass.
Preferably, it is provided with attenuator between described femtosecond laser oscillator and optical gate.
Preferably, described optical gate, tilting mirror, three-dimensional mobile platform and ccd scanner are connected with computer circuitry.
Preferably, it is provided with illuminating lamp above described microlens.
Operation principle of the present utility model is：Femtosecond laser is down to after being projected by femtosecond laser oscillator through attenuator power
Desired value, optical gate is in suitable time break-make laser beam, and after three speculums, laser beam is entered by one without burnt telescope
The wealthy beam of row, two-dimensional scan is realized by reflection laser light beam by computer control tilting mirror.After two identical lens, laser light
Beam is reflected into the microlens with high-NA and is focused triggers double photoelectric absorption photo polymerizations in the photoresist.
The cover glass for being loaded with photoresist is placed on load sample platform, by lower piezoelectric ceramic driving load sample platform be X Y-direction motion, coordinate
The two dimensional motion of the horizontal direction of tilting mirror control, motor driven sliding block produce Z-direction motion, and motor makes two mobile platforms in X, Y
To grand movement, so as to realize three-dimensional motion of the laser photoelectricity relative to photoresist.
After said structure, had the beneficial effect that caused by the utility model：A kind of big stroke described in the utility model
Micro-nano technology device, without mask plate, process structure one-shot forming, avoid mask plate alignment error that multiexposure, multiple exposure brings and
The extension of production cycle, the utility model have the advantages that simple in construction, setting is reasonable, low manufacture cost.
Brief description of the drawings
Fig. 1 is structure chart of the present utility model；
Fig. 2 is the structure chart of the utility model three-dimensional mobile platform.
Description of reference numerals：
Pumping 1, femtosecond laser oscillator 2, optical gate 3, the first speculum 4, the second speculum 5, the 3rd speculum 6, first
Lens 7, the second lens 8, tilting mirror 9, the 3rd lens 10, the 4th lens 11, dielectric mirror 12, microlens 13, cover glass 14, light
Photoresist 15, three-dimensional mobile platform 16, the 4th speculum 17, the 5th lens 18, ccd scanner 19, piezoelectric ceramics 20, load sample platform
21st, electroceramics 22, micro-cantilever 23, sliding block 24, mobile platform 25, attenuator 26, computer 27, illuminating lamp 28 are pushed.
Embodiment
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, drawings in the following description are only
It is some embodiments of the utility model, for those of ordinary skill in the art, before creative labor is not paid
Put, other accompanying drawings can also be obtained according to these accompanying drawings.
Referring to such as Fig. 1 --- shown in Fig. 2, present embodiment adopts the following technical scheme that：It includes pumping 1, femtosecond
Laser oscillator 2, optical gate 3, the first speculum 4, the second speculum 5, the 3rd speculum 6, the first lens 7, the second lens 8, turn
Mirror 9, the 3rd lens 10, the 4th lens 11, dielectric mirror 12, microlens 13, cover glass 14, photoresist 15, three-dimensional movement are flat
Platform 16, the 4th speculum 17, the 5th lens 18, ccd scanner 19；Described pumping 1 is connected with femtosecond laser oscillator 2, is flown
Second, the side of laser oscillator 2 was provided with the first speculum 4 by optical gate 3, and the lower section of the first speculum 4 is provided with the second reflection
Mirror 5, the side of the second speculum 5 are provided with the 3rd speculum 6, the side of the 3rd speculum 6 be disposed with the first lens 7,
Second lens 8 and tilting mirror 9, the side of tilting mirror 9 are disposed with the 3rd lens 10, the 4th lens 11 and dielectric mirror 12, and electricity is situated between
The top of matter mirror 12 is provided with microlens 13, and cover glass 14 is provided with microlens 13, photoetching is provided with cover glass 14
Glue 15, cover glass 14 are arranged in three-dimensional mobile platform 16；The lower section of described dielectric mirror 12 is provided with the 4th speculum 17,
The side of 4th speculum 17 is disposed with the 5th lens 18 and ccd scanner 19.
Preferably, described three-dimensional mobile platform 16 includes upper piezoelectric ceramics 20, load sample platform 21, pushes electroceramics
22nd, micro-cantilever 23, sliding block 24, mobile platform 25；The lower section of described upper piezoelectric ceramics 20 is provided with load sample platform 21, and load sample is put down
The lower section of platform 21, which is provided with, pushes electroceramics 22, and the lower section for pushing electroceramics 22 is provided with sliding block 24, and sliding block 24 is driven by motor,
The lower section of sliding block 24 is provided with two mobile platforms 25；Described cover glass 14 is arranged on load sample platform 21, micro-cantilever 23 with
Cover glass 14 connects.
Preferably, it is provided with attenuator 26 between described femtosecond laser oscillator 2 and optical gate 3.
Preferably, described optical gate 3, tilting mirror 9, three-dimensional mobile platform 16 and ccd scanner 19 and the circuit of computer 27
Connection.
Preferably, the top of described microlens 13 is provided with illuminating lamp 28.
The operation principle of present embodiment is：Femtosecond laser projected by femtosecond laser oscillator 2 after through attenuator work(
Rate is down to desired value, and optical gate is in suitable time break-make laser beam, and after three speculums, laser beam is hoped by one without Jiao
Remote mirror carries out wealthy beam, and two-dimensional scan is realized by reflection laser light beam by computer control tilting mirror.After two identical lens,
Laser beam is reflected into the microlens with high-NA and is focused triggers double photoelectric absorption light in the photoresist
Cause polymerization.The cover glass for being loaded with photoresist is placed on load sample platform 21, drives load sample platform 21 to do X Y sides by pushing electroceramics 22
To motion, coordinate the two dimensional motion of the horizontal direction of tilting mirror control, motor driven sliding block 24 produces Z-direction motion, and motor makes two
Individual mobile platform 25 is in X, Y-direction grand movement, so as to realize three-dimensional motion of the laser photoelectricity relative to photoresist.
After said structure, had the beneficial effect that caused by present embodiment：One described in present embodiment
The big stroke micro-nano technology device of kind, without mask plate, structure one-shot forming is processed, avoids the mask plate pair that multiexposure, multiple exposure is brought
Neat error and the extension of production cycle, present embodiment have the advantages that simple in construction, setting is reasonable, low manufacture cost.
The advantages of general principle and principal character of the present utility model and the utility model has been shown and described above.This
The technical staff of industry is retouched in above-described embodiment and specification it should be appreciated that the utility model is not restricted to the described embodiments
That states simply illustrates principle of the present utility model, on the premise of the spirit and scope of the utility model is not departed from, the utility model
Various changes and modifications are also had, these changes and improvements are both fallen within claimed the scope of the utility model.This practicality is new
Scope is claimed by appended claims and its equivalent thereof in type.
Claims (5)
- A kind of 1. big stroke micro-nano technology device, it is characterised in that：It includes pumping, femtosecond laser oscillator, optical gate, first anti- Penetrate mirror, the second speculum, the 3rd speculum, the first lens, the second lens, tilting mirror, the 3rd lens, the 4th lens, dielectric mirror, Microlens, cover glass, photoresist, three-dimensional mobile platform, the 4th speculum, the 5th lens, ccd scanner；Described pumping It is connected with femtosecond laser oscillator, the side of femtosecond laser oscillator is provided with the first speculum, the first speculum by optical gate Lower section be provided with the second speculum, the side of the second speculum is provided with the 3rd speculum, and the side of the 3rd speculum is successively The first lens, the second lens and tilting mirror are provided with, the side of tilting mirror is disposed with the 3rd lens, the 4th lens and dielectric Mirror, microlens are provided with above dielectric mirror, cover glass is provided with microlens, photoresist is provided with cover glass, Cover glass is arranged in three-dimensional mobile platform；The 4th speculum is provided with below described dielectric mirror, the 4th speculum Side is disposed with the 5th lens and ccd scanner.
- A kind of 2. big stroke micro-nano technology device according to claim 1, it is characterised in that：Described three-dimensional mobile platform Comprising upper piezoelectric ceramics, load sample platform, push electroceramics, micro-cantilever, sliding block, mobile platform；Under described upper piezoelectric ceramics Side is provided with load sample platform, is provided with below load sample platform and pushes electroceramics, pushed and sliding block is provided with below electroceramics, sliding Block is driven by motor, and two mobile platforms are provided with below sliding block；Described cover glass is arranged on load sample platform, micro-cantilever It is connected with cover glass.
- A kind of 3. big stroke micro-nano technology device according to claim 1, it is characterised in that：Described femtosecond laser vibration Attenuator is provided between device and optical gate.
- A kind of 4. big stroke micro-nano technology device according to claim 1, it is characterised in that：Described optical gate, tilting mirror, three Dimension mobile platform and ccd scanner are connected with computer circuitry.
- A kind of 5. big stroke micro-nano technology device according to claim 1, it is characterised in that：Described microlens it is upper Side is provided with illuminating lamp.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721044084.4U CN207205563U (en) | 2017-08-21 | 2017-08-21 | A kind of big stroke micro-nano technology device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721044084.4U CN207205563U (en) | 2017-08-21 | 2017-08-21 | A kind of big stroke micro-nano technology device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207205563U true CN207205563U (en) | 2018-04-10 |
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ID=61815642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721044084.4U Expired - Fee Related CN207205563U (en) | 2017-08-21 | 2017-08-21 | A kind of big stroke micro-nano technology device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207205563U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113909696A (en) * | 2021-08-24 | 2022-01-11 | 清华大学 | Mirror surface processing device |
-
2017
- 2017-08-21 CN CN201721044084.4U patent/CN207205563U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113909696A (en) * | 2021-08-24 | 2022-01-11 | 清华大学 | Mirror surface processing device |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180410 Termination date: 20190821 |