CN207172731U - A kind of device for vibrating auxiliary hot padding - Google Patents
A kind of device for vibrating auxiliary hot padding Download PDFInfo
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- CN207172731U CN207172731U CN201721173288.8U CN201721173288U CN207172731U CN 207172731 U CN207172731 U CN 207172731U CN 201721173288 U CN201721173288 U CN 201721173288U CN 207172731 U CN207172731 U CN 207172731U
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Abstract
The utility model discloses a kind of device for vibrating auxiliary hot padding, by electric control lever, upper plate, sliding panel, guide rod, temperature control device, lower shoe, support frame, ultrasonic generator, bearing plate, heating plate, vacuum cup one and vacuum cup two form, template is fixed on vacuum cup one, substrate is fixed on vacuum cup two, template and substrate are preheated, precompressed will be carried out after being heated to assigned temperature, ultrasonic activation is applied by ultrasonic oscillator, coordinate to be imprinted after the polymer on substrate is heated to glass transition temperature by temperature control device, cooled and solidified after impressing by temperature control device, and complete to be stripped.The utility model accelerates the speed of forming polymer, reduces the damage to template and substrate, reduces required cost.
Description
Technical field
Nano impression field is the utility model is related to, espespecially a kind of device for vibrating auxiliary hot padding.
Background technology
Nano imprint lithography be by scientist Zhou Yu of Chinese origin in nineteen ninety-five propose, due to its have low cost, can be simultaneously
The advantages that row processing, it has also become the main method of the device such as processing semiconductor devices, optics, self-cleaning glass.At present, it is main
The stamping technique of stream has ultraviolet stamping technology, hot press printing technology and Microcontact printing technology.Wherein, hot press printing technology is compared to purple
Outer stamping technique and Microcontact printing technology has the advantages of high resolution.But the environment required by hot padding is more harsh,
Polymer is warmed to more than glass transition temperature after vacuumizing, pressurization causes the micro-nano structure on mould to be transferred to polymer table
Face, then pressurize for a period of time, are stripped after solidification to be cooled, obtain finished product.
Ultrasonic assistant impressing refers to during ultrasonic activation, can cause the life that rubbed between polymer and template
Heat, the frictional heat at initial stage have very big temperature rise rate, when polymer core point temperature is close to glass transition temperature, polymer
Certain mobility is provided with, the changes in distribution of stress causes the reduction of angle point stress, causes hot speed to decline, rate of heat production is even
Less than the heat that polymer is dissipated to the external world so that angle point temperature reduces, and the stress at center increases, temperature more and more higher, directly
To after reaching glass transition temperature, the polymer conversion at center is viscoelastic state, produces violent viscoelastic heat production, drives angle point region
Temperature rises, and finally polymer is reached on glass transition temperature.
A kind of ultrasonic assistant micro-nano shaped device of the A of Publication No. CN 101863122 patent disclosure, simplifies machine
Tool structure, the process vacuumized is eliminated, improve the efficiency of imprinting moulding.
A kind of viscoelastic heat triggering thermoplastic polymer ultrasonic pressure of the A of Publication No. CN 102336016 patent disclosure
Impression method, first template is preheated, then apply ultrasonic activation so that polymer viscoelastic heat production, forming area softening, then apply
Impressing, is filled with the micro-structural of mould, less to mould damage and improve shaping efficiency.
CN substantially can also occur for a kind of device mentioned by the A of Publication No. CN 101863122 patent
The viscoelastic heat production of polymer mentioned by 102336016 A.The scheme based on ultrasonic wave mentioned by above-mentioned patent improves
The speed of shaping.But before central area reaches viscoelastic state temperature, the loss of corner areas temperature will reduce its impressing
Speed.And in cooling procedure, central area temperature is higher, produces huge thermal stress, template and substrate can be caused necessarily
Damage, and be not easy in cooling procedure cooling, it is necessary to which one section of longer time can just drop to calcining temperature, easily to template
And substrate causes to damage, and it have impact on impressing speed.A kind of Peltier heat of the A of Publication No. CN 1586894 patent disclosure
Micro-nano imprint device is circulated, has used Peltier thermal cycle, shortens heating and the time of refrigeration, improves the effect of impressing
Rate, temperature is accurately controlled, but have ignored the problem of cooling of polymer core region is relatively slow, and relative magnetothermal effect disappears
More energy is consumed, cost is of a relatively high.Gadolinium is a kind of special metal, and temperature raises after it is placed in magnetic environment, when
Then temperature decline, this phenomenon are referred to as " magnetothermal effect " after magnetic field is removed.Gadolinium can add in magnetic field to polymer
Heat, during cooling, by remove magnetic field can gadolinium temperature reduce, coordinate liquid on substrate polymer carry out
Cooling.
The content of the invention
A kind of device for vibrating auxiliary hot padding is proposed according to the utility model purpose, accelerates the speed of forming polymer
Rate, the damage to template and substrate is reduced, reduces required cost.
A kind of device for vibrating auxiliary hot padding is proposed according to the utility model purpose, it is characterised in that：Including electric control lever,
It is upper plate, sliding panel, guide rod, temperature control device, lower shoe, ultrasonic generator, support frame, bearing plate, heating plate, true
Suction disk one and vacuum cup two, wherein, temperature control device is fixed on lower shoe, and temperature control device is inhaled provided with vacuum
Disk two, sliding panel pass through guide rod, and lower end of the guide rod is fixed on lower shoe, and upper end is connected with upper plate, and electric control lever passes through screw
It is fixed on upper plate, electric control lever lower end is connected with sliding panel, and ultrasonic generator is fixed by screws on support frame, surpasses
Sound wave generating device lower end is connected by screw with bearing plate, is provided with heating plate below bearing plate, vacuum is connected with heating plate
Sucker one.
A kind of device for vibrating auxiliary hot padding is proposed according to the utility model purpose, it is characterised in that：Described temperature
Regulation device, including outlet pipe, water inlet pipe one, lower bottom base, upper bed-plate, water inlet pipe two, metallic conductor, cavity, gadolinium, magnetic field generation
Device, wherein, gadolinium is placed in cavity, and upper bed-plate is placed in the groove of lower bottom base, and is connected by screw, and water inlet pipe one is with entering
Water pipe two is connected by flexible pipe, and metallic conductor is fixed on upper bed-plate, and temperature control device is fixed on lower shoe by screw.
A kind of device for vibrating auxiliary hot padding is proposed according to the utility model purpose, it is characterised in that：Described ultrasound
Wave generating device, including ultrasonic oscillator and oscillator mounting flange, ultrasonic oscillator are stepped, and oscillator mounting flange exists
The vibration nodal point position of ultrasonic generator, and be fixed by screws on support frame.
A kind of device for vibrating auxiliary hot padding is proposed according to the utility model purpose, it is characterised in that：Described vacuum
Sucker, including vacuum cup air admission hole and vacuum cup venthole, wherein, vacuum cup one is fixed by screws in heating plate
On, vacuum cup two is fixed by screws on temperature control device.
The utility model accelerates the speed of forming polymer by being heated to polymer angle point；By central area
Outwards cooling, reduces the damage to template and substrate, accelerates the speed of cooling；Pass through magnetothermal effect heat production and refrigeration, drop
Low required cost.
Brief description of the drawings
Fig. 1 is the structural representation of the device of vibration auxiliary hot padding of the present utility model；
Fig. 2 is the left view of the device of vibration auxiliary hot padding of the present utility model；
Fig. 3 is the structural representation of temperature control device of the present utility model；
Fig. 4 is the sectional view of temperature control device of the present utility model；
Fig. 5 is ultrasonic generator structural representation of the present utility model；
Fig. 6 is the structural representation of vacuum cup of the present utility model.
Description of reference numerals：Electric control lever -1, upper plate -2, sliding panel -3, guide rod -4, temperature control device -5, lower shoe -
6, ultrasonic generator -7, support frame -8, heating plate -9, bearing plate -10, vacuum cup one -11, vacuum cup two -12, go out
Water pipe -501, water inlet pipe one -502, lower bottom base -503, upper bed-plate -504, water inlet pipe two -505, metallic conductor -506, cavity -
507, gadolinium -508, magnetic field generator -509, oscillator mounting flange -701, ultrasonic oscillator -702, vacuum cup air admission hole -
1101, vacuum cup venthole -1102.
Embodiment
As shown in Figure 1, 2, a kind of device of described vibration auxiliary hot padding includes electric control lever 1, upper plate 2, sliding panel
3rd, guide rod 4, temperature control device 5, lower shoe 6, ultrasonic generator 7, support frame 8, heating plate 9, bearing plate 10, vacuum are inhaled
Disk 1 and vacuum cup 2 12, wherein, temperature control device 5 is fixed on lower shoe 6, and temperature control device 5 is provided with true
Suction disk 2 12, sliding panel 3 pass through guide rod 4, and the lower end of guide rod 4 is fixed on lower shoe 6, and upper end is connected with upper plate 2, automatically controlled
Bar 1 is fixed on upper plate 2 by screw, and the lower end of electric control lever 1 is connected with sliding panel 3, and ultrasonic generator 7 is consolidated by screw
It is scheduled on support frame 8, the lower end of ultrasonic generator 7 is connected by screw with bearing plate 10, and the lower section of bearing plate 10 is provided with heating
Plate 9, vacuum cup 1 is connected with heating plate 9.
As shown in Figure 3,4, a kind of device of described vibration auxiliary hot padding, it is characterised in that described temperature adjusting
Device includes outlet pipe 501, water inlet pipe 1, lower bottom base 503, upper bed-plate 504, water inlet pipe 2 505, metallic conductor 506, sky
Chamber 507, gadolinium 508, magnetic field generator 509, wherein, upper bed-plate 504 is placed in the groove of lower bottom base 503, and connected by screw
Connect, water inlet pipe 1 is connected with water inlet pipe 2 505 by flexible pipe, and gadolinium 508 is placed in cavity 507, and metallic conductor 506 is fixed
On upper bed-plate 504, temperature control device 5 is fixed on lower shoe 6 by screw.
As shown in figure 5, the device of described a kind of vibration auxiliary hot padding, it is characterised in that described ultrasonic wave fills
Putting 7 includes oscillator mounting flange 701 and ultrasonic oscillator 702, and ultrasonic oscillator 702 is stepped, oscillator mounting flange
701 in the vibration nodal point position of ultrasonic generator 7, and is fixed by screws on support frame 8.
A kind of as shown in fig. 6, device of described vibration auxiliary hot padding, it is characterised in that：Described vacuum cup one
11 and vacuum cup 2 12, including vacuum cup air admission hole 1101 and vacuum cup venthole 1102, wherein, vacuum cup 1
It is fixed by screws in heating plate 9, vacuum cup 2 12 is fixed by screws on temperature control device 5.
The utility model is described further with reference to Fig. 1-Fig. 6：Vacuum cup 1 adsorbs template, and vacuum is inhaled
Disk 2 12 adsorbs the substrate for scribbling polymer, and template is heated by heating plate 9, template is heated to the glass of polymer
Change on temperature, the magnetic field generator 509 in opening temperature regulation device 5, by applying magnetic field to gadolinium 508 so that gadolinium 508 produces
Heat amount, the substrate for scribbling polymer is heated, while control the temperature of polymer to be less than its glass transition temperature.
Electric control lever 1 controls sliding panel 3 to move down, and driving the template on vacuum cup 1 to move down makes template and lining
Bottom is adjacent to, and is carried out precompressed to the polymer on substrate, is started ultrasonic generator 7, shaken using more than 20kHz ultrasonic wave
It is dynamic, polymeric material viscoplasticity heat production is driven, accelerates the heating of polymeric material to melt, and promote the discharge of mould chamber air,
The adhesion between polymer and template is reduced, at the same time, by the metallic conductor 506 in temperature control device 5 to polymer
Corner point is heated, and polymer is rapidly achieved on glass transition temperature.
After polymer temperature reaches on glass transition temperature, by the control to electric control lever 1, force of impression is applied to template,
And keeping temperature is constant until polymer is stamped shaping.
After polymer is stamped shaping, the heating plate 9 above template stops heating, stops the heating of metallic conductor 506, closes
Magnetic field generator 509 is closed, due to magnetothermal effect, the temperature of gadolinium 508 is begun to decline, from water inlet pipe 1 by water inlet pipe 2 505,
Liquid is passed through into temperature control device 5, is freezed by the cavity 507 for placing gadolinium 508, polymer core region is carried out
The backward surrounding angle point that freezes spreads, and to polymer, remaining region cools down, and is flowed out finally by outlet pipe 501, until will be poly-
Compound is cooled to calcining temperature.
After polymer is cooled to calcining temperature, electric control lever 1 is controlled, drives sliding panel 3 to be moved up along guide rod 4 and is taken off
Mould, after demoulding, take out template and substrate.
Claims (4)
- A kind of 1. device for vibrating auxiliary hot padding, it is characterised in that：Including electric control lever, upper plate, sliding panel, guide rod, temperature Regulation device, lower shoe, ultrasonic generator, support frame, bearing plate, heating plate, vacuum cup one and vacuum cup two, its In, temperature control device is fixed on lower shoe, and temperature control device is provided with vacuum cup two, and sliding panel passes through guide rod, led Bar lower end is fixed on lower shoe, and upper end is connected with upper plate, and electric control lever is fixed on upper plate by screw, under electric control lever End is connected with sliding panel, and ultrasonic generator is fixed by screws on support frame, and ultrasonic generator lower end passes through spiral shell Nail is connected with bearing plate, is provided with heating plate below bearing plate, vacuum cup one is connected with heating plate.
- A kind of 2. device for vibrating auxiliary hot padding according to claim 1, it is characterised in that：Described temperature adjusting dress Put, including outlet pipe, water inlet pipe one, lower bottom base, upper bed-plate, water inlet pipe two, metallic conductor, cavity, gadolinium, magnetic field generator, its In, gadolinium is placed in cavity, and upper bed-plate is placed in the groove of lower bottom base, and is connected by screw, water inlet pipe one and water inlet pipe Two are connected by flexible pipe, and metallic conductor is fixed on upper bed-plate, and temperature control device is fixed on lower shoe by screw.
- A kind of 3. device for vibrating auxiliary hot padding according to claim 1, it is characterised in that：Described ultrasonic wave occurs Device, including ultrasonic oscillator and oscillator mounting flange, ultrasonic oscillator are stepped, and oscillator mounting flange is in ultrasonic wave The vibration nodal point position of generating means, and be fixed by screws on support frame.
- A kind of 4. device for vibrating auxiliary hot padding according to claim 1, it is characterised in that：Described vacuum cup, Including vacuum cup air admission hole and vacuum cup venthole, wherein, vacuum cup one is fixed by screws in heating plate, vacuum Sucker two is fixed by screws on temperature control device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721173288.8U CN207172731U (en) | 2017-09-14 | 2017-09-14 | A kind of device for vibrating auxiliary hot padding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721173288.8U CN207172731U (en) | 2017-09-14 | 2017-09-14 | A kind of device for vibrating auxiliary hot padding |
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| Publication Number | Publication Date |
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| CN207172731U true CN207172731U (en) | 2018-04-03 |
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| CN201721173288.8U Active CN207172731U (en) | 2017-09-14 | 2017-09-14 | A kind of device for vibrating auxiliary hot padding |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108819275A (en) * | 2018-08-03 | 2018-11-16 | 集美大学 | Fall into light film-compound hot stamping device of smooth surface crystal silicon cell and processing method |
| CN109501216A (en) * | 2017-09-14 | 2019-03-22 | 长春工业大学 | A kind of device and method of vibration auxiliary hot padding |
| CN109669324A (en) * | 2019-01-13 | 2019-04-23 | 鲁东大学 | A kind of device and its application method for implementing soft lithography in spherical substrate |
| CN116330828A (en) * | 2023-05-16 | 2023-06-27 | 山东万腾彩印包装有限公司 | Paper support surface printing device and method |
-
2017
- 2017-09-14 CN CN201721173288.8U patent/CN207172731U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109501216A (en) * | 2017-09-14 | 2019-03-22 | 长春工业大学 | A kind of device and method of vibration auxiliary hot padding |
| CN108819275A (en) * | 2018-08-03 | 2018-11-16 | 集美大学 | Fall into light film-compound hot stamping device of smooth surface crystal silicon cell and processing method |
| CN109669324A (en) * | 2019-01-13 | 2019-04-23 | 鲁东大学 | A kind of device and its application method for implementing soft lithography in spherical substrate |
| CN109669324B (en) * | 2019-01-13 | 2021-12-24 | 鲁东大学 | Device for implementing soft lithography technology on spherical substrate and use method thereof |
| CN116330828A (en) * | 2023-05-16 | 2023-06-27 | 山东万腾彩印包装有限公司 | Paper support surface printing device and method |
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