CN109501216A - A kind of device and method of vibration auxiliary hot padding - Google Patents
A kind of device and method of vibration auxiliary hot padding Download PDFInfo
- Publication number
- CN109501216A CN109501216A CN201710824646.5A CN201710824646A CN109501216A CN 109501216 A CN109501216 A CN 109501216A CN 201710824646 A CN201710824646 A CN 201710824646A CN 109501216 A CN109501216 A CN 109501216A
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- China
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- polymer
- plate
- temperature
- vacuum chuck
- template
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- 238000000034 method Methods 0.000 title claims abstract description 20
- 229920000642 polymer Polymers 0.000 claims abstract description 52
- 238000010438 heat treatment Methods 0.000 claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 230000009477 glass transition Effects 0.000 claims abstract description 17
- 230000004913 activation Effects 0.000 claims abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 17
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 16
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 claims description 16
- 239000004020 conductor Substances 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 9
- 238000000465 moulding Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000001354 calcination Methods 0.000 claims description 7
- 230000000694 effects Effects 0.000 claims description 7
- 230000033228 biological regulation Effects 0.000 claims description 6
- 239000002861 polymer material Substances 0.000 claims description 6
- 238000005057 refrigeration Methods 0.000 claims description 5
- 230000008901 benefit Effects 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 238000002604 ultrasonography Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000006116 polymerization reaction Methods 0.000 claims description 2
- 230000000750 progressive effect Effects 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 238000000813 microcontact printing Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000001127 nanoimprint lithography Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000005348 self-cleaning glass Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C51/00—Shaping by thermoforming, i.e. shaping sheets or sheet like preforms after heating, e.g. shaping sheets in matched moulds or by deep-drawing; Apparatus therefor
- B29C51/18—Thermoforming apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C51/00—Shaping by thermoforming, i.e. shaping sheets or sheet like preforms after heating, e.g. shaping sheets in matched moulds or by deep-drawing; Apparatus therefor
- B29C51/26—Component parts, details or accessories; Auxiliary operations
- B29C51/42—Heating or cooling
- B29C51/421—Heating or cooling of preforms, specially adapted for thermoforming
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
The invention discloses a kind of device and methods of vibration auxiliary hot padding, by electric control lever, upper plate, sliding panel, guide rod, temperature control device, lower plate, support frame, ultrasonic generator, bearing plate, heating plate, vacuum chuck one and vacuum chuck two form, template is fixed on vacuum chuck one, substrate is fixed on vacuum chuck two, template and substrate are preheated, precompressed will be carried out after being heated to assigned temperature, apply ultrasonic activation by ultrasonic oscillator, coordinate to imprint after the polymer on substrate is heated to glass transition temperature by temperature control device, it is cooled and solidified after coining by temperature control device, and it completes to demould.The present invention accelerates the rate of forming polymer, reduces the damage to template and substrate, reduces required cost.
Description
Technical field
The present invention relates to nano impression field, espespecially a kind of device and method of vibration auxiliary hot padding.
Background technique
Nano imprint lithography be by scientist Zhou Yu of Chinese origin in nineteen ninety-five propose, due to its have low cost, can be simultaneously
The advantages that row processing, it has also become the main method of the devices such as processing semiconductor devices, optical device, self-cleaning glass.Currently, main
The stamping technique of stream has ultraviolet stamping technology, hot press printing technology and Microcontact printing technology.Wherein, hot press printing technology is compared to purple
Outer stamping technique and Microcontact printing technology have the advantages of high resolution.But environment required by hot padding is more harsh,
Polymer is warmed to glass transition temperature or more after vacuumizing, is pressurizeed so that the micro-nano structure on mold is transferred to polymer table
Face, then pressure maintaining for a period of time, is demoulded after solidification to be cooled, obtains finished product.
Ultrasonic wave auxiliary coining refers to during ultrasonic activation, can make the life that rubs between polymer and template
Heat, the frictional heat generation at initial stage have very big temperature rise rate, when polymer core point temperature is close to glass transition temperature, polymer
It is provided with certain mobility, the changes in distribution of stress makes the reduction of angle point stress, causes hot rate to decline, rate of heat production is even
Extraneous heat is dissipated to lower than polymer, so that angle point temperature reduces, and the stress at center increases, and temperature is higher and higher, directly
To after reaching glass transition temperature, the polymer conversion at center is viscoelastic state, generates violent viscoelastic heat production, drives angle point region
Temperature rises, and reaches polymer on glass transition temperature.
A kind of ultrasonic wave auxiliary micro-nano molding machine of the patent disclosure of 101863122 A of Publication No. CN, simplifies machine
Tool structure eliminates the process vacuumized, improves the efficiency of imprinting moulding.
A kind of viscoelastic heat of the patent disclosure of 102336016 A of Publication No. CN triggers thermoplastic polymer ultrasonic pressure
Impression method first preheats template, then applies ultrasonic activation, so that polymer viscoelastic heat production, forming area softening, then apply
Coining, is filled in the micro-structure of mold, damages less to mold and improves shaping efficiency.
CN substantially can also occur for a kind of device mentioned by the patent of 101863122 A of Publication No. CN
The viscoelastic heat production of polymer mentioned by 102336016 A.Scheme based on ultrasound mentioned by above-mentioned patent improves
Molding rate.But before central area reaches viscoelastic state temperature, the loss of corner areas temperature will reduce its coining
Rate.And in cooling procedure, central area temperature is higher, generates huge thermal stress, can cause centainly to template and substrate
Damage, and be not easy to cool down in cooling procedure, need one section of longer time that can just drop to calcining temperature, be easy to template
And substrate causes to damage, and affects coining rate.A kind of Peltier heat of the patent disclosure of 1586894 A of Publication No. CN
Micro-nano imprint device is recycled, Peltier thermal cycle has been used, has shortened the time of heating and refrigeration, improved the effect of coining
Rate has been accurately controlled temperature, but has ignored the cooling relatively slow problem in polymer core region, and opposite magnetothermal effect disappears
More energy is consumed, the cost is relatively high.Gadolinium is a kind of special metal, and temperature increases after it is placed in magnetic environment, when
Then temperature decline after magnetic field is removed, this phenomenon are referred to as " magnetothermal effect ".Gadolinium can add polymer in magnetic field
Heat can make the reduction of gadolinium temperature by removing magnetic field, cooperation liquid carries out the polymer on substrate during cooling
It is cooling.
Summary of the invention
Purpose proposes a kind of device and method of vibration auxiliary hot padding according to the present invention, accelerates the speed of forming polymer
Rate reduces the damage to template and substrate, reduces required cost.
Purpose proposes a kind of device of vibration auxiliary hot padding according to the present invention, it is characterised in that: including electric control lever, upper bottom
Plate, sliding panel, guide rod, temperature control device, lower plate, ultrasonic generator, support frame, bearing plate, heating plate, vacuum are inhaled
Disk one and vacuum chuck two, wherein temperature control device is fixed on lower plate, and temperature control device is equipped with vacuum chuck
Two, sliding panel passes through guide rod, and lower end of the guide rod is fixed on lower plate, and upper end is connected with upper plate, and electric control lever is solid by screw
Due on upper plate, electric control lever lower end is connected with sliding panel, and ultrasonic generator is fixed by screws on support frame, ultrasound
Wave generating device lower end is connect by screw with bearing plate, and heating plate is equipped with below bearing plate, and vacuum suction is connected under heating plate
Disk one.
Purpose proposes a kind of device of vibration auxiliary hot padding according to the present invention, it is characterised in that: the temperature regulation
Device, including outlet pipe, water inlet pipe one, lower bottom base, upper bed-plate, water inlet pipe two, metallic conductor, cavity, gadolinium, magnetic field generator,
Wherein, gadolinium is placed in cavity, and upper bed-plate is placed in the groove of lower bottom base, and is connected by screw to, water inlet pipe one and water inlet
Pipe two is connected by hose, and metallic conductor is fixed on upper bed-plate, and temperature control device is fixed on lower plate by screw.
Purpose proposes a kind of device of vibration auxiliary hot padding according to the present invention, it is characterised in that: the ultrasonic wave hair
Generating apparatus, including ultrasonic oscillator and oscillator mounting flange, ultrasonic oscillator be it is ladder-like, oscillator mounting flange is in ultrasound
The vibration nodal point position of wave generating device, and be fixed by screws on support frame.
Purpose proposes a kind of device of vibration auxiliary hot padding according to the present invention, it is characterised in that: the vacuum chuck,
Including vacuum chuck air inlet and vacuum chuck venthole, wherein vacuum chuck one is fixed by screws in heating plate, vacuum
Sucker two is fixed by screws on temperature control device.
The processing method of the device for a kind of vibration auxiliary hot padding that purpose proposes according to the present invention, which is characterized in that should
Method the following steps are included:
(1) vacuum chuck one adsorbs template, and vacuum chuck two adsorbs substrate, template is heated on substrate by heating plate
On the glass transition temperature of polymer, magnetic field generator in opening temperature regulation device carries out substrate by magnetothermal effect
Heating, the temperature for controlling the polymer on substrate are lower than its glass transition temperature；
(2) electric control lever controls sliding panel, and band moving template, which moves down, is adjacent to template and substrate, carries out precompressed, benefit to polymer
Cause polymer material viscoplasticity heat production with the ultrasonic activation of 20kHz or more, accelerates the heating of polymer material to melt, and promote
The discharge of progressive die chamber air, the adhesion strength reduced between polymer and template pass through the metal of temperature control device at the same time
Conductor heats polymer corner point, is rapidly achieved polymer on glass transition temperature；
(3) polymer reach glass transition temperature on after, by electric control lever to template apply force of impression, keep it is temperature-resistant until
Polymer is stamped molding；
(4) after polymer is stamped molding, the heating plate above template stops heating, stops the heating of metallic conductor, closes magnetic
Field generator, the gadolinium in temperature control device generates refrigeration at this time, by liquid cooling from central area outward to the polymerization on substrate
Object cools down, until being cooled to calcining temperature；
(5) after polymer is cooled to calcining temperature, electric control lever is controlled, drives sliding panel to move up and is demoulded, demoulding finishes
Afterwards, template and substrate are taken out.
The present invention accelerates the rate of forming polymer by heating to polymer angle point；It is outside by central area
It is cooling, the damage to template and substrate is reduced, cooling rate is accelerated；By magnetothermal effect heat production and refrigeration, reduce
Required cost.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the device of vibration auxiliary hot padding of the invention；
Fig. 2 is the left view of the device of vibration auxiliary hot padding of the invention；
Fig. 3 is the structural schematic diagram of temperature control device of the invention；
Fig. 4 is the cross-sectional view of temperature control device of the invention；
Fig. 5 is ultrasonic generator structural schematic diagram of the invention；
Fig. 6 is the structural schematic diagram of vacuum chuck of the invention.
Description of symbols: electric control lever -1, upper plate -2, sliding panel -3, guide rod -4, temperature control device -5, lower plate -
6, ultrasonic generator -7, support frame -8, heating plate -9, bearing plate -10, vacuum chuck one -11, vacuum chuck two -12, out
Water pipe -501, water inlet pipe one -502, lower bottom base -503, upper bed-plate -504, water inlet pipe two -505, metallic conductor -506, cavity -
507, gadolinium -508, magnetic field generator -509, oscillator mounting flange -701, ultrasonic oscillator -702, vacuum chuck air inlet -
1101, vacuum chuck venthole -1102.
Specific embodiment
As shown in Figure 1, 2, a kind of device of vibration auxiliary hot padding includes electric control lever 1, upper plate 2, sliding panel
3, guide rod 4, temperature control device 5, lower plate 6, ultrasonic generator 7, support frame 8, heating plate 9, bearing plate 10, vacuum are inhaled
Disk 1 and vacuum chuck 2 12, wherein temperature control device 5 is fixed on lower plate 6, and temperature control device 5 is equipped with true
Suction disk 2 12, sliding panel 3 pass through guide rod 4, and 4 lower end of guide rod is fixed on lower plate 6, and upper end is connected with upper plate 2, automatically controlled
Bar 1 is fixed on upper plate 2 by screw, and 1 lower end of electric control lever is connected with sliding panel 3, and ultrasonic generator 7 is solid by screw
It is scheduled on support frame 8,7 lower end of ultrasonic generator is connected by screw to bearing plate 10, and heating is equipped with below bearing plate 10
Plate 9 is connected with vacuum chuck 1 under heating plate 9.
As shown in Figure 3,4, a kind of device of vibration auxiliary hot padding, which is characterized in that the temperature regulation
Device includes outlet pipe 501, water inlet pipe 1, lower bottom base 503, upper bed-plate 504, water inlet pipe 2 505, metallic conductor 506, sky
Chamber 507, gadolinium 508, magnetic field generator 509, wherein upper bed-plate 504 is placed in the groove of lower bottom base 503, and is connected by screw
It connects, water inlet pipe 1 is connect with water inlet pipe 2 505 by hose, and gadolinium 508 is placed in cavity 507, and metallic conductor 506 is fixed
On upper bed-plate 504, temperature control device 5 is fixed on lower plate 6 by screw.
As shown in figure 5, a kind of device of vibration auxiliary hot padding, it is characterised in that the ultrasonic wave fills
Setting 7 includes oscillator mounting flange 701 and ultrasonic oscillator 702, and ultrasonic oscillator 702 is ladder-like, oscillator mounting flange
701 in the vibration nodal point position of ultrasonic generator 7, and is fixed by screws on support frame 8.
As shown in fig. 6, a kind of device of vibration auxiliary hot padding, it is characterised in that: the vacuum chuck one
11 and vacuum chuck 2 12, including vacuum chuck air inlet 1101 and vacuum chuck venthole 1102, wherein vacuum chuck 1
It is fixed by screws in heating plate 9, vacuum chuck 2 12 is fixed by screws on temperature control device 5.
Below with reference to Fig. 1-Fig. 6, the present invention will be further described.
Vacuum chuck 1 adsorbs template, and vacuum chuck 2 12 adsorbs the substrate for being coated with polymer, right by heating plate 9
Template is heated, and template is heated on the glass transition temperature of polymer, and the magnetic field in opening temperature regulation device 5 occurs
Device 509, so that gadolinium 508 generates heat, heats the substrate for being coated with polymer, same time control by applying magnetic field to gadolinium 508
The temperature of polymer processed is lower than its glass transition temperature.
Electric control lever 1 controls sliding panel 3 and moves down, and driving the template on vacuum chuck 1 to move down makes template and lining
Bottom is adjacent to, and is carried out precompressed to the polymer on substrate, is started ultrasonic generator 7, is shaken using the ultrasonic wave of 20kHz or more
It is dynamic, the heat production of polymer material viscoplasticity is driven, accelerates the heating of polymer material to melt, and promote the discharge of mould chamber air,
The adhesion strength between polymer and template is reduced, at the same time, by the metallic conductor 506 in temperature control device 5 to polymer
Corner point is heated, and is rapidly achieved polymer on glass transition temperature.
After polymer temperature reaches on glass transition temperature, by the control to electric control lever 1, force of impression is applied to template,
And keep temperature-resistant until polymer is stamped molding.
After polymer is stamped molding, the heating plate 9 above template stops heating, stops the heating of metallic conductor 506, closes
Magnetic field generator 509 is closed, due to magnetothermal effect, 508 temperature of gadolinium is begun to decline, pass through water inlet pipe 2 505 from water inlet pipe 1,
It is passed through liquid into temperature control device 5, the cavity 507 by placing gadolinium 508 freezes, and carries out to polymer core region
Angle point is spread around after refrigeration, and to polymer, remaining region is cooled down, and is flowed out finally by outlet pipe 501, until will gather
It closes object and is cooled to calcining temperature.
After polymer is cooled to calcining temperature, electric control lever 1 is controlled, drives sliding panel 3 to move up along guide rod 4 and is taken off
Mould after demoulding, takes out template and substrate.
Claims (5)
1. a kind of device and method of vibration auxiliary hot padding, it is characterised in that: including electric control lever, upper plate, sliding panel, lead
Bar, temperature control device, lower plate, ultrasonic generator, support frame, bearing plate, heating plate, vacuum chuck one and vacuum are inhaled
Disk two, wherein temperature control device is fixed on lower plate, and temperature control device is equipped with vacuum chuck two, and sliding panel passes through
Guide rod, lower end of the guide rod are fixed on lower plate, and upper end is connected with upper plate, and electric control lever is fixed on upper plate by screw,
Electric control lever lower end is connected with sliding panel, and ultrasonic generator is fixed by screws on support frame, under ultrasonic generator
End is connect by screw with bearing plate, and heating plate is equipped with below bearing plate, is connected with vacuum chuck one under heating plate.
2. a kind of device and method of vibration auxiliary hot padding according to claim 1, it is characterised in that: the temperature
Regulation device, including outlet pipe, water inlet pipe one, lower bottom base, upper bed-plate, water inlet pipe two, metallic conductor, cavity, gadolinium, magnetic field generation
Device, wherein gadolinium is placed in cavity, and upper bed-plate is placed in the groove of lower bottom base, and is connected by screw to, water inlet pipe one with into
Water pipe two is connected by hose, and metallic conductor is fixed on upper bed-plate, and temperature control device is fixed on lower plate by screw.
3. a kind of device and method of vibration auxiliary hot padding according to claim 1, it is characterised in that: the ultrasound
Wave generating device, including ultrasonic oscillator and oscillator mounting flange, ultrasonic oscillator be it is ladder-like, oscillator mounting flange exists
The vibration nodal point position of ultrasonic generator, and be fixed by screws on support frame.
4. a kind of device and method of vibration auxiliary hot padding according to claim 1, it is characterised in that: the vacuum
Sucker, including vacuum chuck air inlet and vacuum chuck venthole, wherein vacuum chuck one is fixed by screws in heating plate
On, vacuum chuck two is fixed by screws on temperature control device.
5. a kind of device and method of vibration auxiliary hot padding described in -4 according to claim 1, which is characterized in that this method packet
Include following steps:
(1) vacuum chuck one adsorbs template, and vacuum chuck two adsorbs substrate, template is heated on substrate by heating plate
On the glass transition temperature of polymer, magnetic field generator in opening temperature regulation device carries out substrate by magnetothermal effect
Heating, the temperature for controlling the polymer on substrate are lower than its glass transition temperature；
(2) electric control lever controls sliding panel, and band moving template, which moves down, is adjacent to template and substrate, carries out precompressed, benefit to polymer
Cause polymer material viscoplasticity heat production with the ultrasonic activation of 20kHz or more, accelerates the heating of polymer material to melt, and promote
The discharge of progressive die chamber air, the adhesion strength reduced between polymer and template pass through the metal of temperature control device at the same time
Conductor heats polymer corner point, is rapidly achieved polymer on glass transition temperature；
(3) polymer reach glass transition temperature on after, by electric control lever to template apply force of impression, keep it is temperature-resistant until
Polymer is stamped molding；
(4) after polymer is stamped molding, the heating plate above template stops heating, stops the heating of metallic conductor, closes magnetic
Field generator, the gadolinium in temperature control device generates refrigeration at this time, by liquid cooling from central area outward to the polymerization on substrate
Object cools down, until being cooled to calcining temperature；
(5) after polymer is cooled to calcining temperature, electric control lever is controlled, drives sliding panel to move up and is demoulded, demoulding finishes
Afterwards, template and substrate are taken out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710824646.5A CN109501216A (en) | 2017-09-14 | 2017-09-14 | A kind of device and method of vibration auxiliary hot padding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710824646.5A CN109501216A (en) | 2017-09-14 | 2017-09-14 | A kind of device and method of vibration auxiliary hot padding |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109501216A true CN109501216A (en) | 2019-03-22 |
Family
ID=65744365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710824646.5A Pending CN109501216A (en) | 2017-09-14 | 2017-09-14 | A kind of device and method of vibration auxiliary hot padding |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109501216A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112895240A (en) * | 2021-02-25 | 2021-06-04 | 浙江德清娃哈哈科技创新中心有限公司 | System and method for rapid forming and demoulding of microstructure |
| CN113276233A (en) * | 2021-05-14 | 2021-08-20 | 永城职业学院 | Efficient wood system furniture processing adhesive pressing device |
| CN114695254A (en) * | 2022-05-31 | 2022-07-01 | 季华实验室 | Integrated circuit preparation method |
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| US20030234470A1 (en) * | 2002-06-20 | 2003-12-25 | Haan Stephen F. | Embossing apparatus, method of use thereof and resulting article |
| CN2762187Y (en) * | 2004-12-30 | 2006-03-01 | 中国科学院电工研究所 | Nano-class pattern impression device |
| CN101863122A (en) * | 2010-05-18 | 2010-10-20 | 浙江大学 | Ultraphonic auxiliary micro-nano embossing forming device |
| CN102866582A (en) * | 2012-09-29 | 2013-01-09 | 兰红波 | Nanometer impression device and nanometer impression method for high-brightness light-emitting diode (LED) graphics |
| CN207172731U (en) * | 2017-09-14 | 2018-04-03 | 长春工业大学 | A kind of device for vibrating auxiliary hot padding |
-
2017
- 2017-09-14 CN CN201710824646.5A patent/CN109501216A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030234470A1 (en) * | 2002-06-20 | 2003-12-25 | Haan Stephen F. | Embossing apparatus, method of use thereof and resulting article |
| CN2762187Y (en) * | 2004-12-30 | 2006-03-01 | 中国科学院电工研究所 | Nano-class pattern impression device |
| CN101863122A (en) * | 2010-05-18 | 2010-10-20 | 浙江大学 | Ultraphonic auxiliary micro-nano embossing forming device |
| CN102866582A (en) * | 2012-09-29 | 2013-01-09 | 兰红波 | Nanometer impression device and nanometer impression method for high-brightness light-emitting diode (LED) graphics |
| CN207172731U (en) * | 2017-09-14 | 2018-04-03 | 长春工业大学 | A kind of device for vibrating auxiliary hot padding |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112895240A (en) * | 2021-02-25 | 2021-06-04 | 浙江德清娃哈哈科技创新中心有限公司 | System and method for rapid forming and demoulding of microstructure |
| CN113276233A (en) * | 2021-05-14 | 2021-08-20 | 永城职业学院 | Efficient wood system furniture processing adhesive pressing device |
| CN114695254A (en) * | 2022-05-31 | 2022-07-01 | 季华实验室 | Integrated circuit preparation method |
| CN114695254B (en) * | 2022-05-31 | 2022-09-02 | 季华实验室 | Integrated circuit preparation method |
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Application publication date: 20190322 |