CN207139111U - One kind is based on copped wave speculum and galvanometer laser roughening optical system - Google Patents
One kind is based on copped wave speculum and galvanometer laser roughening optical system Download PDFInfo
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- CN207139111U CN207139111U CN201721140587.1U CN201721140587U CN207139111U CN 207139111 U CN207139111 U CN 207139111U CN 201721140587 U CN201721140587 U CN 201721140587U CN 207139111 U CN207139111 U CN 207139111U
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- 238000007788 roughening Methods 0.000 title claims abstract description 39
- 230000003287 optical effect Effects 0.000 title claims abstract description 21
- 239000013307 optical fiber Substances 0.000 claims abstract description 16
- 230000001360 synchronised effect Effects 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 3
- 239000005350 fused silica glass Substances 0.000 claims description 3
- 229910001095 light aluminium alloy Inorganic materials 0.000 claims description 3
- 230000008901 benefit Effects 0.000 abstract description 5
- 238000003754 machining Methods 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 8
- 230000010355 oscillation Effects 0.000 description 5
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
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- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005097 cold rolling Methods 0.000 description 1
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- 230000002349 favourable effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000005002 finish coating Substances 0.000 description 1
- 230000003752 improving hair Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model discloses one kind based on copped wave speculum and galvanometer laser roughening optical system, including anaberration collimation microscope group, copped wave speculum, the first speculum, the second speculum, the 3rd speculum, the first galvanometer, the second galvanometer, the first f θ mirrors, the 2nd f θ mirrors；Wherein, anaberration collimation microscope group can be replaced anaberration aspherical mirror.Copped wave speculum provided by the utility model and galvanometer laser roughening optical system, pass through copped wave speculum intermittence minute surface tuber function, based on one-dimensional vibration mirror scanning function, with high in machining efficiency, the advantages that applied widely, suitable for pulse optical fiber laser roughening, be particularly suitable for use in high power pulse optical fiber laser orderly laser roughening in plane translation and rotation system.
Description
Technical field：
Pulse optical fiber laser roughening technical field is the utility model is related to, it is more particularly to a kind of to be reflected based on copped wave
Mirror and galvanometer laser roughening optical system.
Background technology：
Laser roughening technology is that a newly-developed gets up to be mainly used in the collection laser technology of cold rolling steel rider texturing, automatic control
Technology processed, precision optical machinery, material science are in the new and high technology of one.
Laser roughening technology is to use high-energy (104~106W/cm2), the pulse laser beam of high repetition frequency is after focusing
Negative defocus be irradiated to roller surface and implement preheating and strengthen, the focus point after focusing incide roller surface formed it is small molten
Pond, while the auxiliary gas for setting pressure and flow is imposed on to small molten bath by side-blown device, make the fused mass in molten bath by finger
Provisioning request is stacked into melt pool edge and forms arc cam as far as possible.
Roll working life can be improved to work roll cooling laser roughening technology, reduces roller consumption, reduces annealing adhesion defect,
Product punching performance can be improved to plate, band, improves finish coatings adhesive force, increases brightness, reduces black-tape phenomenon generation etc..
Existing ripe laser roughening technology mainly has two classes：One kind is the texturing device using CO2 lasers；It is another kind of
It is the texturing equipment using YAG laser.But CO2 lasers, YAG laser itself electro-optic conversion rate are compared with optical fiber laser
It is low, and metal material is relatively low to the laser beam absorption rate of CO2 laser wavelengths, therefore optical fiber laser is with the obvious advantage.
Laser roughening system light path common at present, there is several schemes such as single head formula, multiple-head type, scan-type.Wherein single head
Formula laser roughening, high-frequency impulse is realized even with high frequency chopping speculum, or directly uses high-frequency pulsed lasers device,
Because the rotation of texturing material or translational velocity will not be very high, and the big stability of speed is poor, and working ability is extremely limited；Multiple-head type master
To include beam splitting type and multi-laser is processed, the beam splitting type often having has beam splitter, multifaceted prism etc., and beam splitter easily causes light splitting
Unbalanced, power dissipation is unfavorable for high efficiency laser roughening, and multifaceted prism scheme is applied to continuous wave laser, and energy profit
It is not high with rate, there is significant ASIC limitation on pulsed laser, although multi-station laser scheme is favorably improved laser roughening efficiency,
But single laser roughening efficiency does not improve, it is also difficult to reaches maximization；Scan-type mainly has multifaceted prism scanning and vibration mirror scanning,
Multifaceted prism scanning limitation was previously noted, and vibration mirror scanning generally use list galvanometer scans with 2-D vibration mirror, single vibration mirror scanning
Under conditions of the movement of texturing object, zigzag is presented in scanning track, and scanning alternately longer one section of period proportional is come and gone in galvanometer
On, easily there is overlapping or partly overlapping texturing point, and orderly texturing can not be accomplished, belong to disordered texturing category, two dimension is shaken
Although scarnning mirror can realize disordered texturing and orderly texturing, the first galvanometer from f- θ mirrors farther out, except causing f- θ mirror eyeglasses
Beyond size is bigger, because the lens materials vitreous silica refractive index of 1um magnitude laser generally uses is small, pole is unfavorable for f- θ
Mirror particularly short focus f- θ mirror anaberrations, therefore also it is easily caused texturing point uniformity variation.
Based on the premises, copped wave speculum provided by the utility model and galvanometer laser roughening optical system, by cutting
Wave reflection mirror intermittence minute surface tuber function, based on one-dimensional vibration mirror scanning function, have it is high in machining efficiency, it is applied widely etc. excellent
Point, suitable for pulse optical fiber laser roughening, the high power pulse optical fiber laser that is particularly suitable for use in is in plane translation with turning
Orderly laser roughening in dynamic system.
Utility model content：
A purpose of the present utility model is that solve at least the above, and provides the advantages of at least will be described later.
In order to solve the above problems, the utility model provides a kind of technical scheme：One kind is based on copped wave speculum with shaking
Mirror laser roughening optical system, including：Pulsed optical fibre laser beam, its innovative point are：Also include anaberration collimation microscope group, copped wave
Speculum, copped wave reflection mirror rotation shafts, the first speculum, the second speculum, the first galvanometer, the first galvanometer rotating shaft, the first f- θ mirrors,
3rd speculum, the second galvanometer, the second galvanometer rotating shaft and the 2nd f- θ mirrors；The pulsed optical fibre laser beam is arranged right below one
Individual anaberration collimates microscope group；The lower left of the anaberration collimation microscope group is provided with a copped wave speculum；The anaberration is accurate
The lower right of straight microscope group is provided with first speculum；The copped wave speculum is provided with a copped wave reflection mirror rotation shafts；Institute
The lower left for stating copped wave speculum is provided with second galvanometer；The lower right of the copped wave speculum be provided with one it is the 3rd anti-
Penetrate mirror；The lower left of first speculum is provided with second speculum；The lower right of first speculum is provided with
One the first galvanometer；First galvanometer is provided with a first galvanometer rotating shaft；Under 3rd speculum and the second galvanometer
Side is provided with a 2nd f- θ mirror；The lower section of second speculum and the first galvanometer is provided with a first f- θ mirror；Described second
Galvanometer is provided with a second galvanometer rotating shaft.
Preferably, the anaberration collimation microscope group can be replaced anaberration aspherical mirror.
Preferably, anaberration collimation microscope group, the first speculum, the second speculum, the 3rd speculum, first shaking
Mirror, the second galvanometer, the first f- θ mirrors and the 2nd f- θ mirrors are columned fused silica material；The copped wave speculum is isogonism
The light aluminum alloy material of more fan-shaped column；The copped wave speculum, the first speculum, the second speculum, the 3rd speculum are equal
For 45 ° of angles of reflection, mirror surface is plane；The copped wave speculum is 1：The N frequency multiplication speculums of 1 dutycycle, perpendicular to mirror
There are multiple planes of symmetry on the direction of face；First speculum, the second speculum and the 3rd speculum are identical speculum；Described
One galvanometer and the second galvanometer are identical galvanometer, octagon column, the only plane of symmetry perpendicular to minute surface, first galvanometer
Rotating shaft, the second galvanometer rotating shaft respectively the first galvanometer, the second galvanometer the plane of symmetry on, and be respectively perpendicular to the first galvanometer, second
The normal of galvanometer；The first f- θ mirrors, the 2nd f- θ mirrors are identical parameters f- θ mirrors；The anaberration collimation microscope group central shaft, cut
The copped wave reflection mirror rotation shafts (3) of wave reflection mirror, the first speculum normal, the second speculum normal, the 3rd speculum normal, first
Galvanometer normal, the second galvanometer normal, the first f- θ mirrors central shaft, the 2nd f- θ mirror central shafts are coplanar；The first f- θ mirrors, second
F- θ mirrors focusing focal plane is coplanar, and the translation of texturing part or rotation direction focus on scan line with the first f- θ mirrors, the 2nd f- θ mirrors and hung down
Directly.
Preferably, first galvanometer, the second galvanometer synchronous hunting and synchronous change steering；The copped wave speculum is
Intermittence rotates, and retroreflective regions replace with light-leaking area intermittence, and when the first galvanometer, the second galvanometer are unidirectionally swung, copped wave is anti-
Penetrate mirror to stay cool, show as completely reflective or complete light leak, only change the short of steering in the first galvanometer, the second galvanometer
In time, copped wave speculum occurs retroreflective regions and instantaneously replaced with light-leaking area；First galvanometer, the second galvanometer are put to come and go
It is dynamic, realize simple scanning texturing.
The beneficial effects of the utility model：
(1) copped wave speculum provided by the utility model and galvanometer laser roughening optical system, by between copped wave speculum
Having a rest property minute surface tuber function, based on one-dimensional vibration mirror scanning function, there is the advantages that high in machining efficiency, applied widely, be applied to
Pulse optical fiber laser roughening, the high power pulse optical fiber laser that is particularly suitable for use in is in plane translation with having in rotation system
Sequence laser roughening.
(2) copped wave speculum provided by the utility model and galvanometer laser roughening optical system, all lens surfaces are incident
Spot size is all bigger, in the range of 10mm~30mm, is advantageous to bear the pulse laser of more high-average power, system is stable
Property is good.
(3) copped wave speculum provided by the utility model, when the first galvanometer, the second galvanometer are unidirectionally swung, copped wave reflection
Mirror stays cool, and shows as completely reflective or complete light leak, only changes in the first galvanometer, the second galvanometer and turns in short-term
In, copped wave speculum occurs retroreflective regions and instantaneously replaced with light-leaking area, realizes galvanometer reciprocating swing, but go out optical scanning and be
Simple scanning, single galvanometer Z-type scanning defect is avoided, easily realizes orderly laser roughening, in galvanometer swing angular velocity difference,
Also unordered laser roughening can be realized.
(4) copped wave speculum provided by the utility model is N frequency multiplication copped wave speculums (2≤N≤100), from completely it is reflective
State is to being 1/N cycle the time required to complete light leak state, that is to say, that under copped wave speculum rotational frequency the same terms,
Copped wave speculum N values are bigger, and copped wave speculum is faster from complete reflective state to complete light leak State Transferring, unidirectional sharp to realizing
Light texturing is more favourable.
(5) f- θ mirrors provided by the utility model, suitable for single vibration mirror scanning, f- θ mirrors from a distance from galvanometer closer to eyeglass chi
Very little smaller, anaberration effect is more preferable, is advantageous to improve laser roughening stability, and fiber laser texturing demand spot size is general
In 0.1mm or so, short focus f- θ mirrors provided by the utility model can equally obtain preferable anaberration effect.
(6) copped wave speculum provided by the utility model and galvanometer laser roughening optical system, using vibration mirror scanning, are helped
In raising laser roughening efficiency, while translation or the velocity of rotation of texturing part is greatly reduced, improves the stability of a system, improve hair
Change the uniformity of point.
(7) copped wave speculum provided by the utility model and galvanometer laser roughening optical system, can be swashed by adjusting pulse
Light device dutycycle improves texturing null ellipse degree, can by matching pulse frequency, vibration mirror scanning frequency, texturing part rotation or
Translational velocity adjusts texturing point spacing.
Brief description of the drawings：
For ease of explanation, the utility model is described in detail by following specific implementations and accompanying drawing.
Fig. 1 is the utility model laser roughening optical system eyeglass schematic diagram.
Fig. 2 is that the utility model laser roughening optical system copped wave speculum embodiment is all-trans light state.
Fig. 3 is the full exposure state of the utility model laser roughening optical system copped wave speculum embodiment.
Embodiment：
As shown in Figure 1, Figure 2 and Figure 3, present embodiment uses following technical scheme：One kind is based on copped wave speculum
With galvanometer laser roughening optical system, including：Pulsed optical fibre laser beam 13, in addition to anaberration collimation microscope group 1, copped wave speculum
2nd, copped wave reflection mirror rotation shafts 3, the first speculum 4, the second speculum 5, the first galvanometer 6, the first galvanometer rotating shaft 7, the first f- θ mirrors 8,
3rd speculum 9, the second galvanometer 10, the second galvanometer rotating shaft 11 and the 2nd f- θ mirrors 12；The pulsed optical fibre laser beam 13 just under
Side is provided with an anaberration and collimates microscope group 1；The lower left of the anaberration collimation microscope group 1 is provided with a copped wave speculum 2；Institute
The lower right for stating anaberration collimation microscope group 1 is provided with first speculum 4；The copped wave speculum 2 is provided with a copped wave
Reflection mirror rotation shafts 3；The lower left of the copped wave speculum 2 is provided with second galvanometer 10；The lower section of the copped wave speculum 2
Right side is provided with the 3rd speculum 9；The lower left of first speculum 4 is provided with second speculum 5；Described first
The lower right of speculum 4 is provided with first galvanometer 6；First galvanometer 6 is provided with a first galvanometer rotating shaft 7；It is described
The lower section of 3rd speculum 9 and the second galvanometer 10 is provided with a 2nd f- θ mirror 12；The galvanometer 6 of second speculum 5 and first
Lower section is provided with a first f- θ mirror 8；Second galvanometer 10 is provided with a second galvanometer rotating shaft 11.
Wherein, the anaberration collimation microscope group 1 can be replaced anaberration aspherical mirror；Anaberration collimation microscope group 1, the
One speculum 4, the second speculum 5, the 3rd speculum 9, the first galvanometer 6, the second galvanometer 10, the first f- θ mirrors 8 and the 2nd f- θ mirrors
12 be columned fused silica material；The copped wave speculum 2 is the light aluminum alloy material of the how fan-shaped column of isogonism；Institute
It is 45 ° of angles of reflection to state copped wave speculum 2, the first speculum 4, the second speculum 5, the 3rd speculum 9, and mirror surface is flat
Face；The copped wave speculum 2 is 1：The N frequency multiplication speculums of 1 dutycycle, there is multiple planes of symmetry on minute surface direction；It is described
First speculum 4, the second speculum 5 and the 3rd speculum 9 are identical speculum；The galvanometer 10 of first galvanometer 6 and second is
Identical galvanometer, only octagon column, the plane of symmetry perpendicular to minute surface, the first galvanometer rotating shaft 7, the second galvanometer rotating shaft
11 respectively the first galvanometer 6, the second galvanometer 10 the plane of symmetry on, and be respectively perpendicular to the first galvanometer 6, the method for the second galvanometer 10
Line；The first f- θ mirrors 8, the 2nd f- θ mirrors 12 are identical parameters f- θ mirrors；Anaberration collimation microscope group 1 central shaft, copped wave are anti-
Penetrate the copped wave reflection mirror rotation shafts (3) of mirror 2, the normal of the first speculum 4, the normal of the second speculum 5, the normal of the 3rd speculum 9, first
The normal of galvanometer 6, the normal of the second galvanometer 10, the central shaft of the first f- θ mirrors 8, the 2nd f- θ 12 central shafts of mirror are coplanar；The first f- θ mirrors
8th, the 2nd f- θ mirrors 12 focusing focal plane is coplanar, and the translation of texturing part or rotation direction are gathered with the first f- θ mirrors 8, the 2nd f- θ mirrors 12
Burnt scan line is vertical；First galvanometer 6, the synchronous hunting of the second galvanometer 10 and synchronous change steering；The copped wave speculum 2 is
Intermittence rotates, and retroreflective regions replace with light-leaking area intermittence, when the first galvanometer 6, the second galvanometer 10 are unidirectionally swung, copped wave
Speculum 2 stays cool, and shows as completely reflective or complete light leak, only changes in the first galvanometer 6, the second galvanometer 10 and turns
To short time in, copped wave speculum 2 occur retroreflective regions instantaneously replace with light-leaking area；First galvanometer 6, the second galvanometer
10 be reciprocating swing, realizes simple scanning texturing.
Use state of the present utility model is：Using Fig. 1 as coordinate reference benchmark, during Fig. 2 is shown, the first galvanometer 6 is being set
Minimum beam deflection Angle Position on, pulsed optical fibre laser beam 13 by anaberration collimation microscope group 1 collimation obtain collimated light beam, cut
Wave reflection mirror 2 is completely reflective, and for the reflected beams successively after the first speculum 4, the reflection of the second speculum 5, light beam incides the
The reflected beams are caused to be got under the focusing of the first f- θ mirrors 8 on texturing part the oblique light path lower left of focus on light beam on one galvanometer 6,
One pulse, one texturing point, now copped wave speculum 2 remains stationary as, while the counter-clockwise swing of the first galvanometer 6, the first f- θ mirrors 8
Focus on light beam under focusing on from left to right scans, and in texturing part under scan line translation or rotating, is swept on texturing part
Describe the unidirectional texturing point of a row.When the counter-clockwise swing of the first galvanometer 6 to setting largest beam deflection angle and i.e. by clockwise oscillation
When, copped wave speculum 2 transforms to complete light leak state from complete reflective state immediately under the high-speed rotation of rotating shaft 3.
In the first galvanometer 6 from setting largest beam deflection angle clockwise oscillation to during setting minimum beam deflection angle, cut
Wave reflection mirror 2 remains stationary as, and laser beam remains stationary as relative to copped wave speculum 2 to exist in complete light leak state, dew irradiating light beam
Under the reflection of 3rd speculum 9, the reflected beams incide the second galvanometer 10, and now it is inclined to be in the minimum beam set for the second galvanometer 10
On angle position, as shown in Figure 3.Collimated light beam by the reflection of the second galvanometer 10 is under the focusing of the 2nd f- θ mirrors 12, oblique light path
Lower right is got on texturing part, one texturing point of a pulse, while the clockwise oscillation of the second galvanometer 10, the 2nd f- θ mirrors 12
Focus on light beam under focusing on scans from right to left, in texturing part under scan line translation or rotating, is swept on texturing part
Describe the unidirectional texturing point of a row.When the clockwise oscillation of the second galvanometer 10 to setting largest beam deflection angle and i.e. by counter-clockwise swing
When, now the first galvanometer 6 also from setting largest beam deflection angle clockwise oscillation to setting minimum beam deflection Angle Position on and
I.e. by counter-clockwise swing, copped wave speculum 2 under the high-speed rotation of rotating shaft 3 immediately from complete light leak state transformation to completely it is reflective
State, light path behavior repeat to previous step, and so circulation realizes that the first galvanometer 6, the second galvanometer 10 are reciprocating swing, but laser
Texturing is simple scanning.
In above process, it is desirable to which the first galvanometer 6 has synchronous swing switching motion with the second galvanometer 10, is shaken according to first
The galvanometer 10 of mirror 6 and second scans the difference with scanning counterclockwise clockwise, there is different embodiments, and foregoing description is only wherein
A kind of embodiment.
The advantages of general principle and principal character of the present utility model and the utility model has been shown and described above, one's own profession
The technical staff of industry is it should be appreciated that the utility model is not restricted to the described embodiments, described in above-described embodiment and specification
Simply illustrate principle of the present utility model, on the premise of the spirit and scope of the utility model is not departed from, the utility model is also
Various changes and modifications are had, these changes and improvements are both fallen within claimed the scope of the utility model, the utility model
Claimed scope is by appended claims and its equivalent thereof.
Claims (4)
1. one kind is based on copped wave speculum and galvanometer laser roughening optical system, including：Pulsed optical fibre laser beam (13), its feature
It is：Also include anaberration collimation microscope group (1), copped wave speculum (2), copped wave reflection mirror rotation shafts (3), the first speculum (4), the
Two-mirror (5), the first galvanometer (6), the first galvanometer rotating shaft (7), the first f- θ mirrors (8), the 3rd speculum (9), the second galvanometer
(10), the second galvanometer rotating shaft (11) and the 2nd f- θ mirrors (12)；
The pulsed optical fibre laser beam (13) is arranged right below an anaberration collimation microscope group (1)；
The lower left of the anaberration collimation microscope group (1) is provided with a copped wave speculum (2)；
The lower right of the anaberration collimation microscope group (1) is provided with first speculum (4)；
The copped wave speculum (2) is provided with a copped wave reflection mirror rotation shafts (3)；
The lower left of the copped wave speculum (2) is provided with second galvanometer (10)；
The lower right of the copped wave speculum (2) is provided with the 3rd speculum (9)；
The lower left of first speculum (4) is provided with second speculum (5)；
The lower right of first speculum (4) is provided with first galvanometer (6)；
First galvanometer (6) is provided with a first galvanometer rotating shaft (7)；
The lower section of 3rd speculum (9) and the second galvanometer (10) is provided with a 2nd f- θ mirror (12)；
The lower section of second speculum (5) and the first galvanometer (6) is provided with a first f- θ mirror (8)；
Second galvanometer (10) is provided with a second galvanometer rotating shaft (11).
2. one kind according to claim 1 is based on copped wave speculum and galvanometer laser roughening optical system, it is characterised in that：
The anaberration collimation microscope group (1) can be replaced anaberration aspherical mirror.
3. one kind according to claim 1 is based on copped wave speculum and galvanometer laser roughening optical system, it is characterised in that：
Anaberration collimation microscope group (1), the first speculum (4), the second speculum (5), the 3rd speculum (9), the first galvanometer (6),
Second galvanometer (10), the first f- θ mirrors (8) and the 2nd f- θ mirrors (12) are columned fused silica material；
The copped wave speculum (2) is the light aluminum alloy material of the how fan-shaped column of isogonism；
The copped wave speculum (2), the first speculum (4), the second speculum (5), the 3rd speculum (9) are 45 ° of angles of reflection,
Mirror surface is plane；
The copped wave speculum (2) is 1：The N frequency multiplication speculums of 1 dutycycle, there is multiple planes of symmetry on minute surface direction；
First speculum (4), the second speculum (5) and the 3rd speculum (9) are identical speculum；
First galvanometer (6) and the second galvanometer (10) are identical galvanometer, octagon column, only a pair perpendicular to minute surface
Title face, the first galvanometer rotating shaft (7), the second galvanometer rotating shaft (11) respectively the first galvanometer (6), the second galvanometer (10) it is symmetrical
On face, and it is respectively perpendicular to the first galvanometer (6), the normal of the second galvanometer (10)；
The first f- θ mirrors (8), the 2nd f- θ mirrors (12) are identical parameters f- θ mirrors；
Described anaberration collimation microscope group (1) central shaft, the copped wave reflection mirror rotation shafts (3) of copped wave speculum (2), the first speculum
(4) normal, the second speculum (5) normal, the 3rd speculum (9) normal, the first galvanometer (6) normal, the second galvanometer (10) normal,
First f- θ mirrors (8) central shaft, the 2nd f- θ mirrors (12) central shaft are coplanar；
The first f- θ mirrors (8), the 2nd f- θ mirrors (12) focusing focal plane are coplanar, the translation of texturing part or rotation direction and first
F- θ mirrors (8), the 2nd f- θ mirrors (12) focusing scan line are vertical.
4. one kind according to claim 1 is based on copped wave speculum and galvanometer laser roughening optical system, it is characterised in that：
First galvanometer (6), the second galvanometer (10) synchronous hunting and synchronous change turn to；
The copped wave speculum (2) rotates to be intermittent, and retroreflective regions replace with light-leaking area intermittence, the first galvanometer (6),
When second galvanometer (10) is unidirectionally swung, copped wave speculum (2) stays cool, and shows as completely reflective or complete light leak, only
Have and change in the first galvanometer (6), the second galvanometer (10) in the short time turned to, retroreflective regions and leakage occur for copped wave speculum (2)
Light region instantaneously replaces；
First galvanometer (6), the second galvanometer (10) are reciprocating swing, realize simple scanning texturing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721140587.1U CN207139111U (en) | 2017-09-07 | 2017-09-07 | One kind is based on copped wave speculum and galvanometer laser roughening optical system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721140587.1U CN207139111U (en) | 2017-09-07 | 2017-09-07 | One kind is based on copped wave speculum and galvanometer laser roughening optical system |
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| Publication Number | Publication Date |
|---|---|
| CN207139111U true CN207139111U (en) | 2018-03-27 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111896934A (en) * | 2020-07-29 | 2020-11-06 | 西安知微传感技术有限公司 | MEMS laser radar receiving system and method |
-
2017
- 2017-09-07 CN CN201721140587.1U patent/CN207139111U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111896934A (en) * | 2020-07-29 | 2020-11-06 | 西安知微传感技术有限公司 | MEMS laser radar receiving system and method |
| CN111896934B (en) * | 2020-07-29 | 2023-04-18 | 西安知微传感技术有限公司 | MEMS laser radar receiving system and method |
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Address after: No. 8 Dongbao Road, Songjiang District, Shanghai, 2016 Patentee after: Jiaqiang (Shanghai) Intelligent Technology Co.,Ltd. Country or region after: China Address before: 201615 room 304-1, building 5, 1158 Zhongxin Road, Songjiang District, Shanghai Patentee before: SHANGHAI EMPOWER AUTOMATION TECHNOLOGY Co.,Ltd. Country or region before: China |