CN207036893U - Digital accelerometer basic capacitance compensation circuit with better fault tolerance - Google Patents

Digital accelerometer basic capacitance compensation circuit with better fault tolerance Download PDF

Info

Publication number
CN207036893U
CN207036893U CN201720864382.1U CN201720864382U CN207036893U CN 207036893 U CN207036893 U CN 207036893U CN 201720864382 U CN201720864382 U CN 201720864382U CN 207036893 U CN207036893 U CN 207036893U
Authority
CN
China
Prior art keywords
node
switch
electric capacity
accelerometer
common mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201720864382.1U
Other languages
Chinese (zh)
Inventor
李荣宽
薛晓东
赵路坦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhisensor Technologies Inc
Original Assignee
Zhisensor Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhisensor Technologies Inc filed Critical Zhisensor Technologies Inc
Priority to CN201720864382.1U priority Critical patent/CN207036893U/en
Application granted granted Critical
Publication of CN207036893U publication Critical patent/CN207036893U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Measurement Of Resistance Or Impedance (AREA)

Abstract

The utility model discloses a better digital accelerometer basis capacitance compensation circuit of fault-tolerance, the circuit includes: the system comprises an accelerometer sensitive structure, a switched capacitor integrator, a basic capacitance compensation array, a carrier signal generating circuit, output common mode detection, digital-to-analog converters D/A1 and D/A2, and adders add1 and add 2; the technical problems that an existing accelerometer basic capacitance compensation circuit is unreasonable in design, basic capacitance is difficult to produce, and arrangement of the basic capacitance and an array of compensation capacitors is consistent are solved, and the technical effects that in comparison with a traditional detection mode, the sensitive structure basic capacitance and a capacitance compensation array can be allowed to be out of order to a certain extent, and the fault tolerance is better are achieved.

Description

A kind of more preferable digital accelerometer basis capacitor compensating circuit of fault-tolerance
Technical field
Accelerometer research field is the utility model is related to, in particular it relates to a kind of more preferable digital acceleration of fault-tolerance Count basic capacitor compensating circuit.
Background technology
Current acceleration meter is widely used in automobile, industrial automation, Aero-Space and other various fields.Compared to pressure Resistance accelerometer, capacitive accelerometer are popular with its low temperature sensitivity.In addition, with analog acceleration meter phase Than there is digital accelerometer the advantage that error correction and compensation are directly carried out without extra ADC cans to be selected as main flow Select.
In the market accelerometer basis capacitor compensating circuit be mainly designed to using capacitance compensation array offset Mode, as shown in Figure 3.But due to production technology, basic electric capacity is difficult production and compensating electric capacity permutation setting one Cause.And the utility model proposes input common-mode feedback method, compared to traditional detection mode, can allow for sensitive structure The basic a certain degree of imbalance of electric capacity and capacitance compensation array, fault-tolerance are more preferable.
In summary, the present application finds above-mentioned technology during the application utility model technical scheme is realized Following technical problem at least be present:
In the prior art, capacitor compensating circuit design in existing accelerometer basis is unreasonable, and MEMS processing technologys are deposited The big deviation the problem of.
Utility model content
The utility model provides a kind of more preferable digital accelerometer basis capacitor compensating circuit of fault-tolerance, solves existing The capacitor compensating circuit design of some accelerometer bases is unreasonable, and MEMS processing technologys have the problem of big deviation, realize Compared to traditional detection mode, sensitive structure basis electric capacity and a certain degree of imbalance of capacitance compensation array are can allow for, is held Mistake superior technique effect.
To be mended in order to solve the above technical problems, this application provides a kind of more preferable digital accelerometer basis electric capacity of fault-tolerance Circuit is repaid, the circuit includes:
Circuit, defeated occurs for accelerometer sensitive structure, switched-capacitor integrator, basic capacitance compensation array, carrier signal Go out common mode detection, digital analog converter D/A1 and D/A2, adder add1 and add2;Wherein, compensated acceleration meter basis electric capacity 1., comprising basic capacitance compensation array module and carrier signal circuit module occurs for module;Accelerometer electric capacity is as switch electricity 2. the module for holding the sampling capacitance of integrator, includes accelerometer sensitive structure module, switched-capacitor integrator module and carrier wave Signal generating circuit module;The output of detection switch capacitance integrator and feed back to switched-capacitor integrator input module 3., Include output common mode detection module, digital analog converter D/A1 and D/A2 module and adder add1 and add2 module.
Further, accelerometer sensitive structure is used for the variable quantity that extraneous acceleration signal is converted to electric capacity;Switch Capacitance integrator is used to integrate the difference signal of input;Carrier signal occurs circuit and is used to produce square-wave signal to accelerometer Sensitive structure electric capacity carries out discharge and recharge;The basic electric capacity of basic capacitance compensation array sensitive structure based on compensated acceleration;It is defeated Go out common mode and detect output common mode amount for detection switch capacitance integrator;D/A1 and D/A2 is used for switched-capacitor integrator Output common mode amount feeds back to the input of switched-capacitor integrator;Add1 and add2 is used for adder and completes the plus and minus calculation of electric charge simultaneously By obtained result feeding switched-capacitor integrator of summing.
Further, wherein, the compensation circuit specifically includes:Module 1., module 2., module 3.;1. module includes:Fortune Put AMP1, switch S1 ..., S6, reference voltage Vref input, accelerometer sensitive structure electric capacity Cs1, Cs2, integrator electric capacity Cf1、Cf2;2. module includes:Compensating electric capacity array Cc1, Cc2, switch S7, S8;3. module includes:Amplifier AMP2, switch S9 ..., S18, feedback capacity Cfb1, Cfb2 and charge adder electric capacity C1, C2, C3.
Further, amplifier AMP1 and switch S1 ..., S6 and electric capacity Cs1, Cs2, Cf2, Cf1 form switching capacity integration Device;Switch S7, S8 and electric capacity Cc1, Cc2 formation base capacitor compensating circuit;Amplifier AMP2 and switch S9 ..., S18 and electric capacity C1, C2, C3, Cfb1, Cfb2 form input Common-mode compensation circuitry.
Further, the detection port Vst of accelerometer sensitive structure module is connected to adder add1 input positive terminal Mouthful, Vsb is connected to adder add2 input negative terminal mouths;The Vctr of circuit connection accelerometer sensitive structure occurs for carrier signal End;Basic capacitance compensation array is connected between the test side Vst and Vsb of accelerometer sensitive structure;Output common mode detection Input the positive-negative output end of connecting valve capacitance integrator;The output of output common mode detection connects a D/A1 and D/A2, D/A1 Output connection adder add1 input negative terminal mouth, D/A2 output connection adder add2 input negative terminal mouth;Adder The positive input port of add1 output connecting valve capacitance integrator, adder add2 output connecting valve capacitance integrator Negative input port.
Further, S1 one end connection reference voltage Vref end is switched, the other end is connected to node C;Switch S2 one end chain It is connected to node C, one end is with being connected to the common mode of circuit or ground;Electric capacity Cs1 is connected between node C and node A, electric capacity Cs2 It is connected between node C and node B, switch S4 is connected between node A and common mode ground, and switch S3 is connected to node B and common mode Between ground;Switch S5 is connected between node A and amplifier AMP1 negative input end, and switch S6 is connected to node B and amplifier AMP1 Between positive input terminal;Integrating capacitor Cf1 is connected between amplifier AMP1 positive input terminal and negative output terminal, and Cf2 is connected to amplifier Between AMP1 negative input end and positive output end.
Further, switch S7 is connected between reference voltage Vref end and node N1;Switch S8 be connected to node N1 with Common mode or ground between;Capacitance compensation array Cc1 is connected between node N1 and node A, and Cc2 is connected to node N1 and node Between B.
Further, switch S11 is connected between node N4 and common mode ground, electric capacity C1 be connected to node N4 and node N2 it Between, electric capacity C2 is connected between node N4 and node N3, and switch S12 is connected to node N4 and amplifier AMP2 negative input end;Open Between the negative input end and node N5 that close S15 connection amplifiers AMP4, switch S16 is connected to node N5 and amplifier AMP2 positive input Between end;Electric capacity C3 is connected to node N5 and amplifier N6 output end;Between switching S17 connecting nodes N3 and node N6, switch S18 is connected between node N2 and node N6;Between switching S13 connecting nodes N2 and node E, switch S14 is connected to node N3 Between node F;Switch S9 is connected between node N6 and node N7, and switch S10 is connected between node N7 and common mode ground;Electricity Hold Cfb1 to be connected between node N7 and A, electric capacity Cfb2 is connected between node N7 and node B.
It is the characteristics of technical scheme in the application:Accelerometer sensitive structure electric capacity is directly as switched-capacitor integrator Sampling capacitance, form first order switched-capacitor integrator;The output voltage of switched capacitor is detected by charge adder, is obtained To its output common mode voltage and feed back to the input of integrator;In the front end of switched capacitor by capacitor array to accelerometer base Plinth electric capacity compensates.
One or more technical schemes that the application provides, have at least the following technical effects or advantages:
The integrated accelerometer basis capacitor compensating circuit of the application, complete to compensate work by two parts circuit, it is first The output of the compensating electric capacity array and sampling first order integrator at the accelerometer both ends connected before this is as the defeated of feed back input Enter common mode feedback unit;Because in the production of reality, the basic electric capacity of accelerometer may change in certain scope, such as Fruit be only compensation is completed by compensating electric capacity array if, may have deviation, and this deviation in practice It is not very big, but if constantly adds up that finally result will be influenceed on integrator yet;Input the utility model Commom-mode feedback module can the dynamic adjustment feedback voltage of volume very well size, ensure the stabilization of common mode input, mend It is more preferable to repay effect.
Brief description of the drawings
Accompanying drawing described herein is used for providing further understanding the utility model embodiment, forms the one of the application Part, the restriction to the utility model embodiment is not formed;
Fig. 1 is accelerometer basis capacitor compensating circuit block diagram;
Fig. 2 is the utility model acceleration basis capacitor compensating circuit connection figure;
Fig. 3 is conventional accelerometers basis capacitor compensating circuit;
Fig. 4 is the timing diagram of Non-Overlapping Clock requirements;
Fig. 5 is the application example schematic diagram of this paper utility model circuits.
Embodiment
The utility model provides a kind of more preferable digital accelerometer basis capacitor compensating circuit of fault-tolerance, solves existing The capacitor compensating circuit design of some accelerometer bases is unreasonable, and MEMS processing technologys have the problem of big deviation, realize Compared to traditional detection mode, sensitive structure basis electric capacity and a certain degree of imbalance of capacitance compensation array are can allow for, is held Mistake superior technique effect.
In order to be more clearly understood that above-mentioned purpose of the present utility model, feature and advantage, below in conjunction with the accompanying drawings and tool The utility model is further described in detail body embodiment.It should be noted that in the case where not conflicting mutually, Feature in embodiments herein and embodiment can be mutually combined.
Many details are elaborated in the following description in order to fully understand the utility model, still, this practicality It is new to be implemented using other different from the other modes in the range of being described herein, therefore, protection of the present utility model Scope is not limited by following public specific embodiment.
System block diagram such as Fig. 1 of accelerometer basis of the present utility model electric capacity input Common-mode compensation circuitry.Circuit in figure Module have the sensitive structure of accelerometer【Accelerometer sensitive structure】, accelerometer electric capacity as sampling capacitance switch electricity Hold integrator【Switched-capacitor integrator】, basic electric capacity in compensated acceleration meter electric capacity【Basic capacitance compensation array】, will Reference voltage is converted into square-wave signal【Circuit occurs for carrier signal】, detection switch capacitance integrator output common mode voltage 【Output common mode detects】, digital analog converter【D/A1】With【D/A2】, adder【add1】With【add2】.The circuit of its modules Design such as Fig. 2, can be divided into three modules:The module of basic electric capacity based on compensated acceleration is 1.;Accelerometer electric capacity conduct The module of the sampling capacitance of switched-capacitor integrator is 2.;The output of detection switch capacitance integrator simultaneously feeds back to switching capacity integration The module of device input is 3..Wherein include amplifier【AMP1】【AMP2】, switch【S1】…【S18】, reference voltage【Vref】, accelerate Degree meter sensitive structure electric capacity【Cs1】【Cs2】, integrator electric capacity【Cf1】【Cf2】, compensating electric capacity array【Cc1】【Cc2】, and instead Feed holds【Cfb1】【Cfb2】With the electric capacity of charge adder【C1】【C2】【C3】.
【Accelerometer sensitive structure】For extraneous acceleration signal to be converted to the variable quantity of electric capacity,【Switching capacity accumulates Divide device】For being integrated to the difference signal of input,【Circuit occurs for carrier signal】It is quick to accelerometer for producing square-wave signal Feel structure capacitive and carry out discharge and recharge,【Basic capacitance compensation array】The basic electric capacity of sensitive structure based on compensated acceleration,【It is defeated Go out common mode detection】For the output common mode amount of detection switch capacitance integrator,【D/A1】With【D/A2】For switching capacity to be accumulated The output common mode amount of device is divided to feed back to the input of switched-capacitor integrator,【add1】With【add2】Electric charge is completed for adder Plus and minus calculation and the result feeding switched-capacitor integrator for obtaining summation.
Amplifier【AMP1】With switch【S1】…【S6】, electric capacity【Cs1】【Cs2】【Cf2】【Cf1】Form switching capacity integration Device;Switch【S7】【S8】With electric capacity【Cc1】【Cc2】Formation base capacitor compensating circuit;Amplifier【AMP2】With switch【S9】… 【S18】, electric capacity【C1】【C2】【C3】【Cfb1】【Cfb2】Form input Common-mode compensation circuitry.
【Accelerometer sensitive structure】The detection port of module【Vst】It is linked to adder【add1】Input positive terminal mouth, 【Vsb】It is connected to adder【add2】Input negative terminal mouth.【Circuit occurs for carrier signal】Connect【Accelerometer sensitive structure】's 【Vctr】End,【Basic capacitance compensation array】It is connected to【Accelerometer sensitive structure】Test side【Vst】With【Vsb】.【Output Common mode detects】Input connecting valve capacitance integrator positive-negative output end.【Output common mode detects】Module output connection one 【D/A1】With【D/A2】,【D/A1】Output connection adder【add1】Input negative terminal mouth,【D/A2】Output connection addition Device【add2】Input negative terminal mouth.Adder【add1】Output connecting valve capacitance integrator positive input port, adder 【add2】Output connecting valve capacitance integrator negative input port.
In circuit connection diagram, circuit module 1. in, switch【S1】One end connects reference voltage【Vref】, other end connection To node【C】.Switch【S2】One end is linked to node【C】, one end is with being connected to the common mode of circuit or ground.Electric capacity【Cs1】Even It is connected on node【C】With node【A】Between, electric capacity【Cs2】It is connected to node【C】With node【B】Between, switch【S4】It is connected to section Point【A】Between common mode ground, switch【S3】It is connected to node【B】Between common mode ground.Switch【S5】It is connected to node【A】With fortune Put【AMP1】Negative input end between, switch【S6】It is connected to node【B】With amplifier【AMP1】Between positive input terminal.Integrating capacitor 【Cf1】It is connected to amplifier【AMP1】Positive input terminal and negative output terminal between,【Cf2】It is connected to amplifier【AMP1】Negative input end Between positive output end.
Circuit module 2. in, switch【S7】It is connected to reference voltage【Vref】With node【N1】Between.Switch【S8】Connection In node【N1】With common mode or between ground.Capacitance compensation array【Cc1】It is connected to node【N1】With node【A】Between, 【Cc2】It is connected to node【N1】With node【B】Between.
Circuit module 3. in, switch【S11】It is connected to node【N4】Between common mode ground, electric capacity【C1】It is connected to node 【N4】With node【N2】Between, electric capacity【C2】It is connected to node【N4】With node【N3】Between, switch【S12】It is connected to node 【N4】And amplifier【AMP2】Negative input end.Switch【S15】Connect amplifier【AMP4】Negative input end and node【N5】Between, open Close【S16】It is connected to node【N5】With amplifier【AMP2】Positive input terminal between.Electric capacity【C3】It is connected to node【N5】With amplifier 【N6】Output end.Switch【S17】Connecting node【N3】With node【N6】Between, switch【S18】It is connected to node【N2】With section Point【N6】Between.Switch【S13】Connecting node【N2】With node【E】Between, switch【S14】It is connected to node【N3】With node 【F】Between.Switch【S9】It is connected to node【N6】With node【N7】Between, switch【S10】It is connected to node【N7】With common mode Between.Electric capacity【Cfb1】It is connected to node【N7】With【A】Between, electric capacity【Cfb2】It is connected to node【N7】With node【B】Between.
Fig. 5 is to use an application example of the present utility model, and the system is three rank electric charge Sigma Delta accelerometers electricity Hold detection circuit.Integrated in the circuit in the utility model by switching capacity of the accelerometer sensitive structure as sampling capacitance First order integrator of the device as Sigma Delta modulators.Second and third grade of integrator integrates for traditional switching capacity Device, whole circuit use the preceding Sigma Delta modulator circuit forms to summation form, such as module 1..Integrated in the first order Device front end be the basic capacitor compensating circuit module being made up of capacitor array 2., 3. module is that modulator is output to first order product Divide the feedback circuit of device, control the feedback factor of first order integrator, be 4. input common mode feedback circuit mould of the present utility model Block.The clock control sequential that the system uses is as shown in Figure 4.The circuit can realize low-power consumption accelerometer capacitance detecting work( Energy.
Technical scheme in above-mentioned the embodiment of the present application, at least has the following technical effect that or advantage:
The integrated accelerometer basis capacitor compensating circuit of the application, complete to compensate work by two parts circuit, it is first The output of the compensating electric capacity array and sampling first order integrator at the accelerometer both ends connected before this is as the defeated of feed back input Enter common mode feedback unit;Because in the production of reality, the basic electric capacity of accelerometer may change in certain scope, such as Fruit be only compensation is completed by compensating electric capacity array if, may have deviation, and this deviation in practice It is not very big, but if constantly adds up that finally result will be influenceed on integrator yet;Input the utility model Commom-mode feedback module can the dynamic adjustment feedback voltage of volume very well size, ensure the stabilization of common mode input, mend It is more preferable to repay effect.
Although having been described for preferred embodiment of the present utility model, those skilled in the art once know substantially Creative concept, then other change and modification can be made to these embodiments.So appended claims are intended to be construed to wrap Include preferred embodiment and fall into having altered and changing for the scope of the utility model.
Obviously, those skilled in the art can carry out various changes and modification without departing from this practicality to the utility model New spirit and scope.So, if these modifications and variations of the present utility model belong to the utility model claims and Within the scope of its equivalent technologies, then the utility model is also intended to comprising including these changes and modification.

Claims (3)

  1. A kind of 1. more preferable digital accelerometer basis capacitor compensating circuit of fault-tolerance, it is characterised in that the compensation circuit bag Include:
    Circuit, output occur for accelerometer sensitive structure, switched-capacitor integrator, basic capacitance compensation array, carrier signal altogether Mould detection module, digital analog converter D/A1 and D/A2, adder add1 and add2;Wherein, the detection of accelerometer sensitive structure Port Vst is connected to adder add1 input positive terminal mouth, and detection port Vsb is connected to adder add2 input negative terminal mouths;Carry The Vctr ends of ripple signal generating circuit and accelerometer sensitive structure connect, and it is quick that basic capacitance compensation array is connected to accelerometer Feel the test side Vst and Vsb of structure;The positive-negative output end of the input connecting valve capacitance integrator of output common mode detection module, Output common mode detection module output connection D/A1 and D/A2, D/A1 output connection adder add1 input negative terminal mouth, D/A2 Output connection adder add2 input negative terminal mouth;The positive input terminal of adder add1 output connecting valve capacitance integrator Mouthful, the negative input port of adder add2 output connecting valve capacitance integrator.
  2. 2. the more preferable digital accelerometer basis capacitor compensating circuit of fault-tolerance according to claim 1, it is characterised in that Accelerometer sensitive structure is used for the variable quantity that extraneous acceleration signal is converted to electric capacity;Switched-capacitor integrator is used for defeated The difference signal integration entered;Carrier signal occurs circuit and accelerometer sensitive structure electric capacity is filled for producing square-wave signal Electric discharge;The basic electric capacity of basic capacitance compensation array sensitive structure based on compensated acceleration;Output common mode is detected for detecting The output common mode amount of switched-capacitor integrator;D/A1 and D/A2 is used to feed back to open the output common mode amount of switched-capacitor integrator Close the input of capacitance integrator;Add1 and add2 is used for the result that adder completes the plus and minus calculation of electric charge and obtains summation and sent Enter switched-capacitor integrator.
  3. 3. the more preferable digital accelerometer basis capacitor compensating circuit of fault-tolerance according to claim 1, it is characterised in that Wherein, the compensation circuit specifically includes:Module 1., module 2., module 3.;1. module includes:Amplifier AMP1, switch S1 ..., S6, reference voltage Vref input, accelerometer sensitive structure electric capacity Cs1, Cs2, integrator electric capacity Cf1, Cf2;2. module is wrapped Include:Compensating electric capacity array Cc1, Cc2, switch S7, S8;3. module includes:Amplifier AMP2, switch S9 ..., S18, feedback capacity Cfb1, Cfb2 and charge adder electric capacity C1, C2, C3;S1 one end connection reference voltage Vref end is switched, the other end is connected to section Point C;Switch S2 one end is linked to node C, and one end is with being connected to the common mode of circuit or ground;Electric capacity Cs1 is connected to node C and section Between point A, electric capacity Cs2 is connected between node C and node B, and switch S4 is connected between node A and common mode ground, and switch S3 connects It is connected between node B and common mode ground;Switch S5 is connected between node A and amplifier AMP1 negative input end, and switch S6 is connected to Between node B and amplifier AMP1 positive input terminals;Integrating capacitor Cf1 be connected to amplifier AMP1 positive input terminal and negative output terminal it Between, Cf2 is connected between amplifier AMP1 negative input end and positive output end;Switch S7 is connected to reference voltage Vref end and node Between N1;S8 is switched with being connected to node N1 and common mode or between ground;Capacitance compensation array Cc1 is connected to node N1 and node Between A, Cc2 is connected between node N1 and node B;Switch S11 is connected between node N4 and common mode ground, and electric capacity C1 is connected to Between node N4 and node N2, electric capacity C2 is connected between node N4 and node N3, and switch S12 is connected to node N4 and amplifier AMP2 negative input end;Between the negative input end and node N5 that switch S15 connection amplifiers AMP4, switch S16 is connected to node N5 Between amplifier AMP2 positive input terminal;Electric capacity C3 is connected to node N5 and amplifier N6 output end;Switch S17 connecting nodes N3 Between node N6, switch S18 is connected between node N2 and node N6;Between switching S13 connecting nodes N2 and node E, open S14 is closed to be connected between node N3 and node F;Switch S9 is connected between node N6 and node N7, and switch S10 is connected to node Between N7 and common mode ground;Electric capacity Cfb1 is connected between node N7 and A, and electric capacity Cfb2 is connected between node N7 and node B.
CN201720864382.1U 2017-07-17 2017-07-17 Digital accelerometer basic capacitance compensation circuit with better fault tolerance Withdrawn - After Issue CN207036893U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720864382.1U CN207036893U (en) 2017-07-17 2017-07-17 Digital accelerometer basic capacitance compensation circuit with better fault tolerance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720864382.1U CN207036893U (en) 2017-07-17 2017-07-17 Digital accelerometer basic capacitance compensation circuit with better fault tolerance

Publications (1)

Publication Number Publication Date
CN207036893U true CN207036893U (en) 2018-02-23

Family

ID=61464562

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720864382.1U Withdrawn - After Issue CN207036893U (en) 2017-07-17 2017-07-17 Digital accelerometer basic capacitance compensation circuit with better fault tolerance

Country Status (1)

Country Link
CN (1) CN207036893U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107290566A (en) * 2017-07-17 2017-10-24 四川知微传感技术有限公司 Basic capacitance compensation circuit for digital accelerometer
CN116380135A (en) * 2023-06-06 2023-07-04 成都市晶蓉微电子有限公司 Charge transfer balance type capacitor-to-voltage conversion circuit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107290566A (en) * 2017-07-17 2017-10-24 四川知微传感技术有限公司 Basic capacitance compensation circuit for digital accelerometer
CN107290566B (en) * 2017-07-17 2023-06-23 四川知微传感技术有限公司 Basic capacitance compensation circuit for digital accelerometer
CN116380135A (en) * 2023-06-06 2023-07-04 成都市晶蓉微电子有限公司 Charge transfer balance type capacitor-to-voltage conversion circuit
CN116380135B (en) * 2023-06-06 2023-08-11 成都市晶蓉微电子有限公司 Charge transfer balance type capacitor-to-voltage conversion circuit

Similar Documents

Publication Publication Date Title
CN207036893U (en) Digital accelerometer basic capacitance compensation circuit with better fault tolerance
CN206440771U (en) Detect the device, electronic equipment and the device for detecting pressure of electric capacity
CN107290566A (en) Basic capacitance compensation circuit for digital accelerometer
US9310409B2 (en) Capacitance-to-voltage interface circuits
CN108124474A (en) Detect the device, electronic equipment and the device for detecting pressure of capacitance
CN1322062A (en) Sigma delta type analog-to-digital converter
CN102297688A (en) Full-differential capacitance reading circuit for crosswise sampling secondary charge summation
CN206876724U (en) Charge modulator accelerometer capacitance detection device
CN104049109A (en) Servo reading circuit of MEMS acceleration sensor
CN107192850A (en) Accelerometer capacitance detection circuit
CN109756097A (en) A kind of sensor power supply system of adaptive charge pump and the two-way switching of source of stable pressure
CN107192851A (en) Charge modulator accelerometer capacitance detection system
CN106921383B (en) Low-power consumption low-noise MEMS accelerometer interface circuit
CN107091652B (en) Impedance-to-digital converter, impedance-to-digital conversion device and method
IE904484A1 (en) Arrangement for processing sensor signals
US9552893B2 (en) Sample-and-hold circuit and capacitive sensing device that includes the sample-and-hold circuit
US5557187A (en) Switched capacitor network
CN106787867A (en) A kind of rate gyroscope power supply
CN103281081B (en) A kind of electric capacity-digital conversion circuit based on sigma-delta modulator
CN206620104U (en) The common-mode voltage regulation circuit of opamp input terminal in switched-capacitor circuit
CN206990625U (en) Accelerometer capacitance detection circuit with low power consumption
CN203233395U (en) Port multiplexing interface circuit for capacitance-type sensor
CN201270035Y (en) Two types of four-quadrant analog multiplier
CN104197922B (en) Gyroscope two-phase sampling front-end amplifier and gyroscope signal sampling control method
CN209497450U (en) A kind of high-precision difference capacitor MEMS interface circuit and MEMS device

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20180223

Effective date of abandoning: 20230623

AV01 Patent right actively abandoned

Granted publication date: 20180223

Effective date of abandoning: 20230623

AV01 Patent right actively abandoned
AV01 Patent right actively abandoned