CN207020101U - Check assembly and macro -graph system - Google Patents
Check assembly and macro -graph system Download PDFInfo
- Publication number
- CN207020101U CN207020101U CN201720378276.2U CN201720378276U CN207020101U CN 207020101 U CN207020101 U CN 207020101U CN 201720378276 U CN201720378276 U CN 201720378276U CN 207020101 U CN207020101 U CN 207020101U
- Authority
- CN
- China
- Prior art keywords
- macro
- location observation
- inspection assembly
- observation imaging
- graph system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The utility model provides a kind of inspection assembly, and it includes automatic indicating mechanism and location observation imaging mechanism, it is characterised in that what the automatic indicating mechanism was integrated with the location observation imaging mechanism.Automatic indicating mechanism and location observation imaging mechanism by mounting base or can be directly connected and are integrally formed.The utility model additionally provides a kind of macro -graph system, including operating platform, base supporting mechanism, and above-mentioned inspection assembly, wherein, the inspection assembly is installed on the operating platform or base supporting mechanism.
Description
Technical field
The utility model, which is usually related to, to be checked assembly, is assembled in particular for the inspection of (FPD) glass substrate
Part, and the macro -graph system including the inspection assembly.The utility model further relates to examine using the inspection assembly and macroscopic view
The method for looking into systems inspection (FPD) glass substrate.
Background technology
Currently, with the development of technology and the demand in market, the requirement to flat panel display substrates pixel and aperture opening ratio more comes
It is higher.Therefore, flat panel display substrates wiring develops towards miniaturization direction, and flat panel display substrates array is sent out towards cellularised direction
Exhibition, thus exacerbate inspection flat panel display substrates defect and carry out the difficulty of positioning measurement.
In macro -graph system common in the market, automatic indicator and location observation imaging device are generally
Liang Ge mechanisms, wherein automatic indicator are arranged on the supporting mechanism of glass substrate, and location observation imaging device is then installed on
On the operating platform that operating personnel are observed, as shown in Figure 1., will be certainly when operating personnel determine glass substrate existing defects
Dynamic instruction device is moved to defective locations, records the coordinate position of defect.Then instruction device is returned into zero-bit again, then
Location observation imaging device is moved to the coordinate position of record again, focuses and extracts defect image.Filled because location observation is imaged
Put installation on the operational platform, any movement of operating personnel is likely to influence the definition of picture.Automatic indicator moves
Vibration also has an impact to picture clarity caused by dynamic.Moreover, location observation imaging mechanism moves in automatic indicator
Shi Wufa works, and only when instruction device is recording coordinate and returning to origin, location observation imaging mechanism could be according to record
Coordinate reach specified location, then extract defect picture.But it is such inspection efficiency it is not high.
Therefore, there is an urgent need to a kind of improved device or system, imaging definition can be improved and improve inspection efficiency.
The content of the invention
Therefore, the utility model then provides a kind of inspection assembly and macro -graph system and corresponding reviewing party
Method, wherein automatic indicating mechanism and location observation imaging mechanism can work respectively, mutually it is independent of each other；The movement of operating personnel into
As device does not influence, and operate also as easy as possible.Thus it is effectively improved instruction, location observation imaging efficiency, and into
As when do not moved by instruction device caused by vibration effect, imaging it is apparent.
According to first aspect of the present utility model, there is provided one kind checks assembly, and it includes automatic indicating mechanism and determined
Position observation imaging mechanism, wherein what the automatic indicating mechanism was integrated with the location observation imaging mechanism.In some implementations
In scheme, automatic indicating mechanism and location observation imaging mechanism are formed by connecting by mounting base and are integrated.In other implementations
In scheme, automatic indicating mechanism and location observation imaging mechanism can also be directly connected and be integrally formed.
The inspection assembly further includes displacement mechanism, for driving the inspection assembly of integral type to be moved
It is dynamic.
Exemplarily, the displacement mechanism can include X-axis guide rail and Y-axis guide rail and each self-corresponding motor, from
And for driving the inspection assembly of integral type to be moved respectively along X-axis and Y-axis.
According to second aspect of the present utility model, there is provided a kind of macro -graph system, including operating platform, substrate supporting
Mechanism and inspection assembly as described herein, wherein, the inspection assembly is mountable to the operating platform or substrate supporting
In mechanism.
In macro -graph system, operating platform can be designed as what is isolated with base supporting mechanism, especially in vibrations
It is isolation.
Therefore, in preferred embodiments, the inspection assembly can be only installed on the base supporting mechanism.
It is further preferred that check that assembly is arranged on base supporting mechanism as follows：So that automatic indicating mechanism relative to
Location observation imaging mechanism is arranged on the opposite side of the observation position of operating platform.
Inspection assembly as described herein and macro -graph system are mainly used to check glass substrate, are particularly used for checking
Various defects present on glass substrate.Herein, glass substrate is preferably FPD glass substrate.
According to the third aspect of the present utility model, additionally provide use according to inspection assembly as described herein or according to
The method that macroscopical detecting system as described herein checks glass substrate, particularly FPD glass substrate, comprises the following steps：
It is mobile to check assembly, the position of existing defects on glass substrate is determined and indicated using automatic indicating mechanism；
Adjusted and checked based on the alternate position spike between automatic indicating mechanism and location observation imaging mechanism in the case of optionally
The position of assembly so that defective locations determined by the alignment of location observation imaging mechanism；
The defective locations are observed and are imaged using location observation imaging mechanism.
In the case of without departing from spirit and scope of the present utility model, those skilled in the art obviously can be to this practicality
It is new that various modification can be adapted and adjustment.It should be pointed out that the utility model scope of the claimed should be with appended claims
Book is defined, but is not exposed to the limitation of any reference used in appended claims.
Brief description of the drawings
Hereinafter, various embodiments of the present utility model will be described with reference to the drawings, wherein：
Fig. 1 schematically illustrates existing macro -graph system, wherein automatic indicator and location observation imaging device
For Liang Ge mechanisms, and automatic indicator is arranged on the supporting mechanism of glass substrate, and location observation imaging device is then installed
In on the operating platform that operating personnel are observed；
Fig. 2 schematically illustrates the schematic diagram according to inspection assembly of the present utility model, automatic in the inspection assembly
What indicating mechanism and location observation imaging mechanism were integrated；With
Fig. 3 schematically illustrate automatic indicating mechanism and location observation imaging mechanism by mounting base be formed by connecting for
One.
Embodiment
Automatic indicating mechanism and location observation imaging mechanism are carried out unitary design by inventor of the present utility model first,
I.e. both actually become " point position observation module ".Thus, it is possible to automatic indicating mechanism and location observation mechanism are synchronously moved
Move same position, such as the coordinate position of defect.
Herein, automatic indicating mechanism can include several parts to realize self-indicating function, but they
It is referred to as " automatic indicating mechanism " as organic whole.Similarly, location observation imaging mechanism can include several parts with reality
The different functions such as now positioning, observation, imaging, but he is referred to as " location observation imaging mechanism " as organic whole.In a word, exist
In the utility model, automatic indicating mechanism and location observation imaging mechanism are integrated into a component, can be used as an entirety
Moved, and can be operated respectively to realize its function.
Fig. 2 shows the schematic diagram according to inspection assembly of the present utility model, is incorporated simultaneously in assembly is checked
Automatic indicating mechanism and location observation imaging mechanism.For illustrative purposes, glass substrate (such as TFT-LCD is also show in Fig. 2
Glass substrate), it is convenient to be illustrated with the relative position and working method of glass substrate when working the inspection assembly.
As shown in Fig. 2 checking that assembly also has displacement mechanism in addition, play a part of the mobile inspection assembly.Make
For example, the inspection assembly in Fig. 2 has two Y-axis guide rails 1 and an X-axis guide rail 4, connects into half frame shape.X-axis guide rail and
Y-axis guide rail has respective X-axis motor 6 and Y-axis motor 5 respectively.Automatic indicating mechanism and location observation imager
It is configured as one end that integrated component 3 is shown schematically in Y-axis guide rail.Driving of the integrated component 3 in motor
Under can be moved independently of one another along Y-axis 1 and X-axis 4, therefore any position of whole glass substrate 2 can be covered, and record each point
The coordinate of position.Two Y-axis are equipped with 1 Y-axis motor 5 and are driven by it, it is possible thereby to ensure the synchronism of both sides Y-axis.
It is to be understood that can also be in current displacement mechanism (i.e. two Y-axis guide rails 1 and an X-axis guide rail), to the Y of every side
Axis rail is equipped with independent motor, thus, it is possible to increase operation power.Certainly, may be used also in this paper inspection assembly
With using the displacement mechanism of other forms in this area.
Fig. 3 is Fig. 2 partial enlarged drawing, illustrated therein is a kind of embodiment for checking assembly or integrated component 3,
Wherein automatic indicating mechanism 10 and location observation imaging mechanism (including image camera and camera lens 8 and positioning measuring device 9)
By being fixed on bottom plate 13 to connect as one.Now, the substrate position and location observation that automatic indicating mechanism 10 indicates
Relativeness is also fixed between imaging mechanism, the particularly substrate position of alignment lenses, that is to say, that is existed between them
Fixed alternate position spike, and the alternate position spike is for the area of whole glass substrate and very small.Certainly, conjunction is passed through
Reason designs position or the angle of automatic indicating mechanism and location observation imaging mechanism, can be by position that camera lens is aligned and instruction
Position adjustments indicated by mechanism are consistent, that is, the alternate position spike between them is zero, or in the absence of alternate position spike.As tool
The example of body, fixed bottom plate 13 include vertically disposed transverse slat and riser, both of which perpendicular to substrate detection faces, wherein, it is perpendicular
Plate extends out from transverse slat, spatially more convenient to connect automatic indicating mechanism 10 and location observation imaging mechanism (8 Hes simultaneously
9) and fixed, and thus will not also be influenced each other between automatic indicating mechanism and location observation imaging mechanism.For side
From convenient to operate personnel are carried out from the position of operating platform to substrate, transverse slat is connected to X-axis guide rail, and automatic indicating mechanism 10 exists
The front side of location observation imaging mechanism (8 and 9) is arranged on the riser of bottom plate 13.In the integrated model 3, also on base 13
It is mounted with the part such as distance adjustment cylinder 7, focal length fine setting servomotor 11, base plate rail 12.These parts with referring to automatically
Show that mechanism 10 and location observation imaging mechanism (8 and 9) are fixed on base 13 together.The relative position of each part is to determine
's.In other embodiments, automatic indicating mechanism 10 and location observation imaging mechanism (8 and 9) and optional miscellaneous part can
By according to specific shape or in the form of, be directly linked together, or be connected and fixed to together by the part of other forms.
For exemplary purposes, automatic indicating mechanism 10 can include generating laser and speculum.
Corresponding to automatic indicating mechanism and location observation imaging mechanism, integrated component (corresponding, macro -graph system)
In the presence of two kinds of mode of operations, i.e. automatic indicating mode and location observation imaging pattern.In automatic mode, in integrated component 3
Automatic indicating mechanism 10 be in unlatching/working condition.Automatic indicating mechanism 10 now moves to come really respectively along X-axis and Y-axis
Determine defective locations.As described above, automatic indicating mechanism and location observation imaging mechanism there may be limited and fixation
Alternate position spike.In ideal conditions, by adjusting the setting of each mechanism, the alternate position spike can be adjusted to zero.Therefore, it is determined that
After defective locations, at most only need to move integrated component 3 into the alternate position spike of the fixation, you can so that location observation imaging mechanism
Defective locations determined by alignment.It is directly switch to location observation imaging pattern, location observation imaging mechanism is started working.So
Afterwards by distance adjustment the rough focusing of cylinder 7 away from, through focal length fine setting servomotor 11 finely tune to image clearly.In whole process,
Camera and camera lens will not be by vibration effects caused by the movement of indicating mechanism 10.Therefore imaging picture is clear.
As described above, figure 1 illustrates the general setting of macro -graph system common in the market, its
In designate operating platform, base supporting mechanism, automatic indicating mechanism and location observation imaging mechanism.It should be appreciated that
Be that macro -graph system can also include lighting source, control system, baseplate conveying mechanism, substrate be fixed or fixed mechanism and/
Or substrate position governor motion, etc..And the inspection assembly according to Fig. 2 or Fig. 3 can be conveniently incorporated into such as Fig. 1 institutes
In the macro -graph system shown.It is known figure 1 illustrates macro -graph system in, shown automatic instruction and location observation
Imaging is divided into Liang Ge mechanisms, and wherein automatic indicator is arranged on the supporting mechanism of glass substrate, location observation imaging dress
Put, be installed on the operating platform that operating personnel are observed.Therefore, automatic indicator and location observation imaging device point
Do not need to be equipped with respective displacement system, i.e. at least two sets of displacement systems (including corresponding control system), that is, will be at least
Imaging mechanism could be moved to defective locations and be taken pictures by movement twice.Do not only result in the complexity of inspection method so, if
Standby also more complicated, the operating procedure of operating personnel is also comparatively laborious.According in inspection assembly of the present utility model, tie simultaneously
Automatic indicating mechanism and location observation imaging mechanism have been closed, has thus only needed a set of Bit andits control system (referring for example to described in Fig. 2
X-axis guide rail and Y-axis guide rail).That is, according to the utility model, it is only necessary to which disposably the mobile integrated component 3, which arrives, lacks
Sunken position can be imaged and be analyzed.It is more convenient that the integrated device can be mounted directly or with reference to be originally used for from
Displacement system in dynamic indicating mechanism or location observation imaging mechanism.That is, inspection assembly of the present utility model can be with
It is conveniently mounted on operating platform or on base supporting mechanism.Thus, at least one set of Bit andits control system is just eliminated, letter
The mechanism of whole check device/system is changed.
In preferable macro -graph system of the present utility model, operating platform and the design of glass substrate supporting mechanism are preferred
For separation, especially it is isolation in vibrations, or referred to as shock insulation.Therefore, in more preferred embodiment, this
The inspection assembly of utility model can be installed only on base supporting mechanism.Thus, shaken caused by the movement of operating personnel
It is dynamic to be not transferred on glass substrate supporting mechanism, observation imaging is not interfered with, imaging becomes apparent from.
In preferable macro -graph system, automatic indicating mechanism is preferably fixed to the front side of location observation imaging mechanism,
It is oppositely arranged with the observation position of operating platform, does not thus influence the sight that operating personnel carry out observation positioning instruction.In basis
Preferable macro -graph system of the present utility model, instruction, positioning, observation and imaging device can by displacement mechanism (such as
Along X, Y-axis and move), any position of arrival glass substrate (such as FPD glass substrate).Imaging device adjusts focal length
When, the device such as instruction positions, observation need not return to origin, but only that in most one automatic indicating mechanism of adjustment and determining
Observation imager is directly switched to after alternate position spike between position observation imaging mechanism, even in the position operation having arrived at
Structure/pattern, therefore, increase considerably imaging efficiency.
According to inspection assembly of the present utility model and macro -graph system and corresponding inspection method, it can be ensured that into
As the definition of picture, imaging efficiency is high, improves the instruction of FPD glass substrate defect, observation, imaging efficiency, and shortening refers to
Show, imaging time；Improve production efficiency.
Certainly, the feature of different embodiments described here can be combined with each other, and be entered with what formation was not described above
The embodiment of one step.
Reference numerals list
1 Y-axis；
2 TFT-LCD glass substrates；
3 integrated components；
4 X-axis；
5 Y-axis motors；
6 X-axis motors
7 distance adjustment cylinders；
8 image cameras and camera lens；
9 positioning measuring devices；
10 instruction devices；
11 focal lengths finely tune servomotor；
12 guide rails；
13 bottom plates (including transverse slat and riser)
Claims (10)
1. checking assembly, it includes automatic indicating mechanism and location observation imaging mechanism, it is characterised in that the automatic instruction
What mechanism was integrated with the location observation imaging mechanism.
2. inspection assembly according to claim 1, the automatic indicating mechanism and the location observation imaging mechanism are borrowed
Help mounting base or be directly connected and be integrally formed.
3. inspection assembly according to claim 1 or 2, it also includes displacement mechanism, for driving described in integral type
Check that assembly moves.
4. inspection assembly according to claim 3, wherein, institute's displacement mechanism include X-axis guide rail and Y-axis guide rail and
Each self-corresponding motor, for driving the inspection assembly of integral type to be moved respectively along X-axis and Y-axis.
5. macro -graph system, including
- operating platform,
- base supporting mechanism, and
- inspection the assembly according to any one of claim 1-4,
Wherein, the inspection assembly is installed on the operating platform or base supporting mechanism.
6. macro -graph system according to claim 5, it is characterised in that
The operating platform is designed as what is isolated with the base supporting mechanism.
7. macro -graph system according to claim 6, it is characterised in that
Wherein, the inspection assembly is installed on the base supporting mechanism.
8. macro -graph system according to claim 7, wherein, the inspection assembly is arranged on the substrate branch as follows
Hold in mechanism so that automatic indicating mechanism is arranged on the phase of the observation position of operating platform relative to location observation imaging mechanism
Offside.
9. the macro -graph system according to any one of claim 5-8, wherein substrate are glass substrate.
10. macro -graph system according to claim 9, wherein substrate are FPD glass substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720105046 | 2017-01-26 | ||
| CN2017201050469 | 2017-01-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207020101U true CN207020101U (en) | 2018-02-16 |
Family
ID=61460206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720378276.2U Active CN207020101U (en) | 2017-01-26 | 2017-04-11 | Check assembly and macro -graph system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207020101U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107064171A (en) * | 2017-01-26 | 2017-08-18 | 江苏东旭亿泰智能装备有限公司 | Check the inspection method of assembly, macro -graph system and correlation |
-
2017
- 2017-04-11 CN CN201720378276.2U patent/CN207020101U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107064171A (en) * | 2017-01-26 | 2017-08-18 | 江苏东旭亿泰智能装备有限公司 | Check the inspection method of assembly, macro -graph system and correlation |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103688217B (en) | Optical unit with shake correcting function | |
| CN103098578A (en) | Component mounting device and component mounting method | |
| CN101216681A (en) | Machine vision dynamic calibration system and method | |
| CN108469663B (en) | Assembling process and alignment device for lens assembly and chip assembly | |
| CN104898310A (en) | Substrate laminating apparatus, substrate laminating method, and stereoscopic display device | |
| US7692770B2 (en) | Proximity type exposure apparatus | |
| CN103529048A (en) | Base plate inspection device | |
| CN207020101U (en) | Check assembly and macro -graph system | |
| CN208588527U (en) | Lens testing system | |
| KR101859423B1 (en) | Aligning unit for dual camera module and aligning method using the same | |
| CN101285985B (en) | Lens barrel | |
| EP0809926B1 (en) | Component placement machine | |
| CN105845594A (en) | Method of inspecting printed circuit board for semiconductor package | |
| CN107064171A (en) | Check the inspection method of assembly, macro -graph system and correlation | |
| CN108897153A (en) | Liquid crystal display panel conducting particles Automatic Visual Inspection device | |
| US8243262B2 (en) | Method and system for supporting a moving optical component on a sloped portion | |
| KR101612326B1 (en) | Camera module test apparatus and camera module test method using the same | |
| JP2008218539A (en) | Method of mounting camera for recognizing substrate in electronic component mounting device | |
| JP5943525B2 (en) | Mounting / inspection data creation device and mounting / inspection data creation method | |
| KR101942467B1 (en) | Test apparatus for actuator module for dual camera | |
| JP2009094648A (en) | Optical axis adjustment apparatus of compound-eye type camera | |
| KR101415942B1 (en) | Camera module inspection and focus adjusting device | |
| CN111717749B (en) | Elevator with a movable elevator car | |
| KR101470423B1 (en) | Testing apparatus for lens | |
| CN105222767A (en) | The laser gyro that view-based access control model detects is from dynamic circuit connector light assembly system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 223800, Suhu Economic Development Zone, Jiangsu Province Patentee after: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Patentee after: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Address before: No. 223800, Suhu Economic Development Zone, Jiangsu Province Patentee before: JIANGSU DONGXU YITAI INTELLIGENT EQUIPMENT Co.,Ltd. Patentee before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210114 Address after: No. 223800, Suhu Economic Development Zone, Jiangsu Province Patentee after: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Address before: No. 223800, Suhu Economic Development Zone, Jiangsu Province Patentee before: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Patentee before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |
|
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Sichuan Gaoyu Intelligent Equipment Technology Co.,Ltd. Assignor: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Contract record no.: X2022110000007 Denomination of utility model: Check the assembly and macro inspection system Granted publication date: 20180216 License type: Common License Record date: 20220308 |