CN108897153A - Liquid crystal display panel conducting particles Automatic Visual Inspection device - Google Patents
Liquid crystal display panel conducting particles Automatic Visual Inspection device Download PDFInfo
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- CN108897153A CN108897153A CN201810912226.7A CN201810912226A CN108897153A CN 108897153 A CN108897153 A CN 108897153A CN 201810912226 A CN201810912226 A CN 201810912226A CN 108897153 A CN108897153 A CN 108897153A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- Nonlinear Science (AREA)
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- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The present invention relates to a kind of liquid crystal display panel conducting particles Automatic Visual Inspection devices, including Mobile Slide module and the vision-based detection module being fixed in the Mobile Slide module, the vision-based detection module includes the first focusing unit, the second focusing unit and imaging unit.The automatic detection to liquid crystal display panel conducting particles may be implemented in liquid crystal display panel conducting particles Automatic Visual Inspection device of the invention, and detection accuracy is high, and tunable performance is preferable.
Description
Technical field
The present invention relates to the detection technique field of liquid crystal display panel ACF conducting particles more particularly to a kind of liquid crystal display panel are conductive
Particle Automatic Visual Inspection device.
Background technique
With increasingly being promoted for liquid crystal device production requirement and being showing improvement or progress day by day for liquid panel technique, liquid crystal display panel is lacked
The requirement for falling into detection is also higher and higher.When the ACF conducting particles to liquid crystal display panel detects, since such liquid crystal display panel is led
The size of charged particle is smaller, and the process is more complicated, so that the detection of such liquid crystal display panel conducting particles is for detection camera
It is more demanding, it is detected in the prior art often by artificial detection or with the static direction of camera motion panel, thus
It deposits the influence in the detection process due to vibration or other factors more, causes the acquisition of detection camera image is more fuzzy to ask
Topic, is unable to satisfy high-precision testing requirements.
Summary of the invention
The purpose of the present invention is to provide a kind of liquid crystal display panel conducting particles Automatic Visual Inspection devices, improve for liquid crystal
The detection accuracy of panel conducting particles.
To achieve the above object, the present invention provides a kind of liquid crystal display panel conducting particles Automatic Visual Inspection device, including moves
Dynamic slide unit module and the vision-based detection module being fixed in the Mobile Slide module, the vision-based detection module include first pair
Burnt unit, the second focusing unit and imaging unit.
According to an aspect of the present invention, the optical axis phase mutual respect of the optical axis of the imaging unit and first focusing unit
It closes, the optical path of second focusing unit is connected with the optical path of the imaging unit.
According to an aspect of the present invention, first focusing unit includes Focusing mechanism and mutual with the Focusing mechanism
The driving mechanism being fixedly connected；
The Focusing mechanism includes object lens, the microscope below the object lens and described microscopical for installing
Microscope mounting base；
The driving mechanism includes object lens pinboard and the driving assembly that is fixedly connected with the object lens pinboard, the object
Mirror is fixed on the object lens pinboard.
According to an aspect of the present invention, the microscope is differential interference contrast microscope.
According to an aspect of the present invention, including lens barrel, the link block being supported on the lens barrel and positioned at the lens barrel
The image camera that lower section is connect with the lens barrel；
The link block is connected with first focusing unit, and the lens barrel includes be sequentially communicated along the vertical direction
One barrel portion, the second barrel portion and third barrel portion.
According to an aspect of the present invention, in the horizontal direction, second focusing unit and first barrel portion be simultaneously
Column setting；
The first spectroscope, the optical path of second focusing unit and first lens barrel are equipped in first barrel portion
Optical path in part is connected.
According to an aspect of the present invention, the second light splitting is equipped in second barrel portion or the third barrel portion
Mirror.
According to an aspect of the present invention, it is solid that first is equipped between first barrel portion and second barrel portion
Determine connecting plate, the second fixed connecting plate is equipped between second barrel portion and the third barrel portion；
First fixed connecting plate and second fixed connecting plate are fixedly connected in the Mobile Slide module 1.
According to an aspect of the present invention, second focusing unit includes laser Focusing mechanism and focuses with the laser
The adjustment mechanism that mechanism is fixedly connected；
The optical filter that the laser Focusing mechanism includes third spectroscope, is arranged on the third spectroscope reflected light path
And sensitive image sensor；
The adjustment mechanism includes fixed plate, the first pinboard being connected in the fixed plate and is connected to described
The second pinboard on one pinboard, second pinboard are fixed in the Mobile Slide module 1.
According to an aspect of the present invention, first pinboard is equipped with first and adjusts mounting hole and the second adjusting installation
Hole.
According to an aspect of the present invention, the Mobile Slide module includes：
Sliding rail；
Slide unit is supported on the sliding rail, is moved on the sliding rail；
The floor that the slide unit is equipped with mounting plate and is mutually permanently connected with the mounting plate, described second
Focusing unit and the imaging unit are fixed on the mounting plate.
A scheme according to the present invention, may be implemented by the second focusing unit and the first focusing unit to liquid crystal display panel
The auto-focusing of detection zone can guarantee higher focusing precision, then be detected again by imaging unit using liquid crystal display panel
The image in region is analyzed and processed, and testing result is obtained, to guarantee the accuracy of testing result.
A scheme according to the present invention, microscope use differential interference contrast microscope.Due to the ACF on liquid crystal display panel
Conducting particles shows as region raised one by one, and the conductive particle on liquid crystal display panel can be made using differential interference contrast microscope
Son has three-dimensional sense, and feature is more prominent, is conducive to the analysis processing of image, to guarantee the height of final detection result precisely
Property.
A scheme according to the present invention is equipped with the first fixed connecting plate, the second mirror between first lens barrel and the second lens barrel
The second fixed connecting plate is equipped between cylinder and third lens barrel.First fixed connecting plate and the second fixed connecting plate are each attached to movement
On the mounting plate of slide unit module, so as to guarantee the rigidity and stability of vision-based detection module of the present invention, it can examine
During survey, interference of the other factors for vision-based detection module is reduced, guarantees detection accuracy.
A scheme according to the present invention, vision-based detection module are arranged using blocking, and vision-based detection module is divided into the
One focusing unit, the second focusing unit and imaging unit, to be that the first focusing unit, the second focusing unit and imaging unit can
With individually debugging before assembly, adjustability of the invention is greatly improved.
Detailed description of the invention
Fig. 1 is the liquid crystal display panel conducting particles Automatic Visual Inspection dress schematically shown according to an embodiment of the present invention
The configuration diagram set；
Fig. 2 is the configuration diagram for schematically showing vision-based detection module according to an embodiment of the present invention；
Fig. 3 is the testing principle schematically shown using liquid crystal display panel conducting particles Automatic Visual Inspection device of the invention
Figure；
Fig. 4 is the configuration diagram for schematically showing Focusing mechanism according to an embodiment of the present invention；
Fig. 5 is the configuration diagram for schematically showing driving mechanism according to an embodiment of the present invention；
Fig. 6 is the configuration diagram for schematically showing imaging unit according to an embodiment of the present invention；
Fig. 7 is the perspective view for schematically showing the second focusing unit according to an embodiment of the present invention；
Fig. 8 is the structure chart for schematically showing the second focusing unit according to an embodiment of the present invention.
Meaning representated by numbering in the drawing is as follows：
1, Mobile Slide module；2, vision-based detection module；3, the first focusing unit；4, the second focusing unit；5, imaging is single
Member；31, Focusing mechanism；32, driving mechanism；311, object lens；312, microscope；313, microscope mounting base；321, object lens are transferred
Plate；322, driving assembly；51, lens barrel；52, link block；53, image camera；511, the first barrel portion；512, the second lens barrel portion
Point；513, third barrel portion；6, the first spectroscope；7, the second spectroscope；8, the first fixed connecting plate；9, it second is fixedly connected
Plate；41, laser Focusing mechanism；42, adjustment mechanism；411, third spectroscope；412, optical filter box；413, bearing member, image senses
Device；421, fixed plate；422, the first pinboard；423, the second pinboard；422a, first adjust mounting hole；422b, second are adjusted
Mounting hole；11, sliding rail；12, slide unit；121, mounting plate；122, floor.
Specific embodiment
It, below will be to embodiment in order to illustrate more clearly of embodiment of the present invention or technical solution in the prior art
Needed in attached drawing be briefly described.It should be evident that the accompanying drawings in the following description is only of the invention some
Embodiment for those of ordinary skills without creative efforts, can also be according to these
Attached drawing obtains other attached drawings.
When being described for embodiments of the present invention, term " longitudinal direction ", " transverse direction ", "upper", "lower", " preceding ",
" rear ", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", orientation or positional relationship expressed by "outside" are based on phase
Orientation or positional relationship shown in the drawings is closed, is merely for convenience of description of the present invention and simplification of the description, rather than instruction or dark
Show that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore above-mentioned term cannot
It is interpreted as limitation of the present invention.
The present invention is described in detail with reference to the accompanying drawings and detailed description, embodiment cannot go to live in the household of one's in-laws on getting married one by one herein
It states, but therefore embodiments of the present invention are not defined in following implementation.
As shown in Figure 1, liquid crystal display panel conducting particles Automatic Visual Inspection device of the invention includes 1 He of Mobile Slide module
Vision-based detection module 2.Mobile Slide module 1 of the invention includes sliding rail 11 and slide unit 12, and sliding rail 11 is arranged along the x axis, sliding
Platform 12 is set on sliding rail 11, can be moved on sliding rail 11.In the present embodiment, slide unit 12 is equipped with mounting plate 121,
Mounting plate 121 is fixed on along the vertical direction on slide unit 12, and vision-based detection module 2 of the invention is fixed on mounting plate
On 121, so vision-based detection module 2 can be driven to move at liquid crystal display panel to be detected by slide unit 12 and be detected.In order to
Guarantee that there is a situation where vibrations, and detection accuracy to be caused to be deteriorated for vision-based detection module in moving process, is additionally provided with floor on slide unit 12
122, enhance whole rigidity and stability.
Referring to figs. 1 and 2, vision-based detection module 2 of the invention includes the first focusing unit 3, the second focusing unit 4
With imaging unit 5.In the present embodiment, wherein the optical axis of imaging unit 5 and the optical axis of the first focusing unit 3 be overlappingly
Setting, imaging unit 5 are located at the lower section of the first focusing unit 3.Second focusing unit 4 is located at the side of imaging unit 5, in this reality
It applies in mode, the second focusing unit 4 is located at the right side of imaging unit 5, the optical path of the second focusing unit 4 and the light of imaging unit 5
Road is connected.Vision-based detection module 2 of the present invention may be implemented by the second focusing unit 4 and the first focusing unit 3 to liquid crystal surface
The auto-focusing of plate detection zone can guarantee higher focusing precision, then be examined again by imaging unit 5 using liquid crystal display panel
The image for surveying region is analyzed and processed, and testing result is obtained, to guarantee the accuracy of testing result.Below to of the invention
First focusing unit 3, the second focusing unit 4 and imaging unit 5 are described in detail.
In conjunction with shown in Fig. 1-Fig. 5, the first focusing unit 3 of the invention includes Focusing mechanism 31 and driving mechanism 32, focusing
Mechanism 31 is mutually permanently connected with driving mechanism 32, and driving mechanism 32 can drive Focusing mechanism 31, to change Focusing mechanism
31 position.Specifically, in the present embodiment, Focusing mechanism 31 includes object lens 311, microscope 312 and microscope installation
Seat 313.Microscope 312 is mounted in microscope mounting base 313, object lens 311 be arranged microscope 312 above, object lens 311 and show
Micro mirror 312 is used to obtain the image information of liquid crystal display panel.
Driving mechanism 32 of the invention includes object lens pinboard 321 and driving assembly 322.In the present embodiment, object lens
Pinboard 321 is set on object lens 311, and realization object lens 311 are fixedly connected with object lens pinboard 321.Driving assembly 322 is located at
321 downside of object lens pinboard is fixedly connected with object lens pinboard 321, and driving assembly 322 can drive object lens pinboard 321 along perpendicular
Histogram is moved up and down to Z-direction, since object lens 311 are fixed on object lens pinboard 321, so driving assembly 322 can drive
Dynamic Focusing mechanism 31 moves up and down along the vertical direction, it can change between object lens 311 and microscope 312 and liquid crystal display panel away from
From so as to realize auto-focusing.
In the present embodiment, driving assembly 322 uses motor sub-assembly, i.e., drives object lens 311 using motor sub-assembly and show
Micro mirror 312 moves up and down along the vertical direction, realizes auto-focusing, so as to mitigate the entirety weight of the first focusing unit 3 significantly
Amount, and fast response time of focusing.Certainly, design according to the present invention, driving assembly 322 can also be using other modes come real
It is existing, for example, by using motor driven, cylinder driving or hydraulic-driven etc..
In the present embodiment, microscope 312 uses differential interference contrast microscope.Since the ACF on liquid crystal display panel is led
Charged particle shows as region raised one by one, and the conducting particles on liquid crystal display panel can be made using differential interference contrast microscope
With three-dimensional sense, feature is more prominent, is conducive to the analysis processing of image, to guarantee the high accuracy of final detection result.
In conjunction with shown in Fig. 1, Fig. 2, Fig. 3 and Fig. 6, imaging unit 5 of the invention includes lens barrel 51, link block 52 and imaging phase
Machine 53.In the present embodiment, lens barrel 51 includes the first barrel portion 511 being sequentially communicated along the vertical direction, the second lens barrel portion
Divide 512 and third barrel portion 513, i.e., in the present embodiment, the first barrel portion 51, the second barrel portion 52 and third mirror
Being sequentially communicated from top to bottom of canister portion points 53.Link block 52 is fixedly supported upon on the first barrel portion 511, with the first focusing unit
3 are connected, and the first spectroscope 6 is equipped in the first barrel portion 511.Image camera 53 be located at the downside of third barrel portion 513 with
Third barrel portion 513 connects, and in the present embodiment, image camera 53 can be used line-scan digital camera, in third barrel portion 513
Equipped with the second spectroscope 7.Design according to the present invention, the second spectroscope 7 also can be set in the second barrel portion 512.
In the present embodiment, the first fixed connecting plate is equipped between the first barrel portion 511 and the second barrel portion 512
8, the second fixed connecting plate 9 is equipped between the second barrel portion 512 and third barrel portion 513.In the present embodiment, first
Fixed connecting plate 8 and the second fixed connecting plate 9 be it is identical, the first fixed connecting plate 8 and the second fixed connecting plate 9 are each attached to
On the mounting plate 121 of Mobile Slide module 1, so as to guarantee the rigidity and stability of vision-based detection module 2 of the present invention,
Can interference of the other factors for vision-based detection module 2 be reduced, guarantees detection accuracy in the detection process.
In conjunction with shown in Fig. 1, Fig. 2 and Fig. 6, along horizontal direction (X-direction), second focusing unit 4 and the first mirror
Canister portion point 511 is set side by side, and the optical path of the second focusing unit 4 is connected with the optical path of the first barrel portion 511, i.e., the second focusing
The optical path of unit 4 is connected with the optical path of imaging unit 5.
In conjunction with shown in Fig. 1, Fig. 3, Fig. 7 and Fig. 8, in the present embodiment, the second focusing unit 4 includes laser Focusing mechanism
41 and adjustment mechanism 42, laser adjustment mechanism 41 be mutually permanently connected with adjustment mechanism 42.Laser Focusing mechanism 41 includes third
The anti-of third spectroscope 411 is arranged in spectroscope 411, optical filter box 412 and sensitive image sensor 413, optical filter box 5
It penetrates in optical path, sensitive image sensor 413 is for obtaining image information.Adjustment mechanism 42 includes fixed plate 421, the first pinboard
422 and second pinboard 423.Fixed plate 421 is mutually permanently connected with laser Focusing mechanism 41, and the first pinboard 422 is connected to
In fixed plate 421, the second pinboard 423 is connected on the first pinboard 422, and the free end of the second pinboard 423 is fixed on peace
It fills in fixed plate 121.
In the present embodiment, the first pinboard 422 is equipped with first and adjusts the adjusting mounting hole of mounting hole 422a and second
422b.First adjusts the adjustable fixed plate 421 of mounting hole 422a in the position of Z-direction, due to fixed plate 421 and laser pair
Focusing mechanism 41 is mutually permanently connected, and described first adjusts the adjustable laser Focusing mechanism 41 of mounting hole 422a in the position of Z-direction
It sets.Similarly, the second adjusting adjustable laser Focusing mechanism 41 of mounting hole 422b, so can be right in the position of Y direction
Laser Focusing mechanism 41 is that the optical path of the second focusing unit 4 is finely adjusted, advantageously ensure that the optical path of the second focusing unit 4 at
As the connectivity of the optical path of unit 5, be conducive to obtain accurate image.
In conjunction with shown in Fig. 1-8, the operating process of liquid crystal display panel conducting particles vision detection system of the invention is as follows：Slide unit
12 drive vision-based detection modules 2 are moved at liquid crystal display panel to be detected, and the light source transmitting collimated laser beam of the second focusing unit 4 arrives
The reflected beams are generated up to third spectroscope 411, the reflected beams reach generates the reflected beams by micro- again at the first spectroscope 6
Mirror 312 and object lens 311 illuminate the detection zone of liquid crystal display panel, and the light area light beam backtracking of liquid crystal display panel detection zone simultaneously passes through
Third spectroscope 411 reaches at sensitive image sensor 413, obtains liquid crystal display panel detection zone by sensitive image sensor 413
Image information obtains liquid crystal display panel and clearly schemes with the distance between object lens 311, microscope 312 and acquisition liquid crystal display panel detection zone
The compensation of picture is displaced, and is controlled driving mechanism 32 later and is driven the mobile certain uncompensation distance of object lens 311, microscope 312 to obtain liquid
Automatic focusing function is realized in crystal panel detection zone clear image.Then 5 internal light source emitting parallel light beam of imaging unit reaches the
The reflected beams are generated at two spectroscopes 7, the reflected beams reach at the first spectroscope 6, and the refraction generated at the first spectroscope 6 is flat
Row light beam pass through auto-focusing after object lens 311 and microscope 312 illuminate liquid crystal display panel detection zone, final beam backtracking arrives
Panel image is obtained at up to image camera 532, to the detection knot that can be obtained liquid crystal display panel conducting particles after image analysis processing
Fruit, the testing result of the size of available conducting particles, distribution situation and stitching state.
The foregoing is merely a schemes of the invention, are not intended to restrict the invention, for the technology of this field
For personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (11)
1. a kind of liquid crystal display panel conducting particles Automatic Visual Inspection device, including Mobile Slide module (1) and it is fixed on the shifting
Vision-based detection module (2) on dynamic slide unit module (1), which is characterized in that the vision-based detection module (2) includes that the first focusing is single
First (3), the second focusing unit (4) and imaging unit (5).
2. Automatic Visual Inspection device according to claim 1, which is characterized in that the optical axis of the imaging unit (5) with
The optical axis of first focusing unit (3) overlaps, the optical path of second focusing unit (4) and the imaging unit (5)
Optical path be connected.
3. Automatic Visual Inspection device according to claim 1 or 2, which is characterized in that the first focusing unit (3) packet
The driving mechanism (32) for including Focusing mechanism (31) and being mutually permanently connected with the Focusing mechanism (31)；
The Focusing mechanism (31) includes object lens (311), the microscope (312) being located at below the object lens (311) and is used for
The microscope mounting base (313) of the microscope (312) is installed；
The driving mechanism (32) includes object lens pinboard (321) and the driving that is fixedly connected with the object lens pinboard (321)
Component (322), the object lens (311) are fixed on the object lens pinboard (321).
4. Automatic Visual Inspection device according to claim 3, which is characterized in that the microscope (312) is dry for differential
Relate to phase contrast microscope.
5. Automatic Visual Inspection device according to claim 1 or 2, which is characterized in that the imaging unit (5) includes mirror
Cylinder (51), the link block (52) that is supported on the lens barrel (51) and it is located at below the lens barrel (51) with the lens barrel (51) even
The image camera (53) connect；
The link block (52) is connected with first focusing unit (3), and the lens barrel (51) includes along the vertical direction successively
The first barrel portion (511), the second barrel portion (512) and the third barrel portion (513) of connection.
6. Automatic Visual Inspection device according to claim 5, which is characterized in that in the horizontal direction, second focusing
Unit (4) is set side by side with first barrel portion (511)；
In first barrel portion (511) be equipped with the first spectroscope (6), the optical path of second focusing unit (4) with it is described
Optical path in first barrel portion (511) is connected.
7. Automatic Visual Inspection device according to claim 6, which is characterized in that second barrel portion (512) or
The second spectroscope (7) are equipped in the third barrel portion (513).
8. Automatic Visual Inspection device according to claim 5, which is characterized in that first barrel portion (511) with
The first fixed connecting plate (8) are equipped between second barrel portion (512), second barrel portion (512) and described the
The second fixed connecting plate (9) are equipped between trinocular tube part (513)；
First fixed connecting plate (8) and second fixed connecting plate (9) are fixedly connected on the Mobile Slide module (1)
On.
9. the Automatic Visual Inspection device according to claim 2 or 6, which is characterized in that the second focusing unit (4) includes swashing
Light Focusing mechanism (41) and the adjustment mechanism (42) being fixedly connected with the laser Focusing mechanism (41)；
The laser Focusing mechanism (41) includes third spectroscope (411), is arranged in third spectroscope (411) reflected light path
On optical filter box (412) and sensitive image sensor (413)；
The adjustment mechanism (42) includes fixed plate (421), the first pinboard (422) being connected on the fixed plate (421)
And it is connected to the second pinboard (423) on first pinboard (422), second pinboard (423) is fixed on institute
It states on Mobile Slide module (1).
10. Automatic Visual Inspection device according to claim 9, which is characterized in that set on first pinboard (422)
There is the first adjusting mounting hole (422a) and second to adjust mounting hole (422b).
11. Automatic Visual Inspection device according to claim 1, which is characterized in that Mobile Slide module (1) packet
It includes：
Sliding rail (11)；
Slide unit (12) is supported on the sliding rail (11), is moved on the sliding rail (11)；
The rib that the slide unit (12) is equipped with mounting plate (121) and is mutually permanently connected with the mounting plate (121)
Plate (122), second focusing unit (4) and the imaging unit (5) are fixed on the mounting plate (121).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810912226.7A CN108897153A (en) | 2018-08-10 | 2018-08-10 | Liquid crystal display panel conducting particles Automatic Visual Inspection device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810912226.7A CN108897153A (en) | 2018-08-10 | 2018-08-10 | Liquid crystal display panel conducting particles Automatic Visual Inspection device |
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| CN110031467A (en) * | 2019-05-10 | 2019-07-19 | 厦门柯尔自动化设备有限公司 | Conducting particles detects optics module |
| CN112735307A (en) * | 2019-10-28 | 2021-04-30 | 深圳汉和智造有限公司 | Device and method for acquiring indentation image of conductive particle |
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| CN110031467A (en) * | 2019-05-10 | 2019-07-19 | 厦门柯尔自动化设备有限公司 | Conducting particles detects optics module |
| CN112735307A (en) * | 2019-10-28 | 2021-04-30 | 深圳汉和智造有限公司 | Device and method for acquiring indentation image of conductive particle |
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